TW201436949A - 研磨加工方法 - Google Patents

研磨加工方法 Download PDF

Info

Publication number
TW201436949A
TW201436949A TW103100529A TW103100529A TW201436949A TW 201436949 A TW201436949 A TW 201436949A TW 103100529 A TW103100529 A TW 103100529A TW 103100529 A TW103100529 A TW 103100529A TW 201436949 A TW201436949 A TW 201436949A
Authority
TW
Taiwan
Prior art keywords
workpiece block
grindstone
workpiece
elastic deformation
grinding
Prior art date
Application number
TW103100529A
Other languages
English (en)
Chinese (zh)
Inventor
Tetsuo Shakushi
Original Assignee
Komatsu Ntc Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ntc Ltd filed Critical Komatsu Ntc Ltd
Publication of TW201436949A publication Critical patent/TW201436949A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/07—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a stationary work-table
    • B24B7/075—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a stationary work-table using a reciprocating grinding head mounted on a movable carriage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
TW103100529A 2013-01-30 2014-01-07 研磨加工方法 TW201436949A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013015148A JP6023598B2 (ja) 2013-01-30 2013-01-30 研削加工方法

Publications (1)

Publication Number Publication Date
TW201436949A true TW201436949A (zh) 2014-10-01

Family

ID=51261888

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103100529A TW201436949A (zh) 2013-01-30 2014-01-07 研磨加工方法

Country Status (5)

Country Link
JP (1) JP6023598B2 (ja)
KR (1) KR20150111906A (ja)
CN (1) CN104853880A (ja)
TW (1) TW201436949A (ja)
WO (1) WO2014119163A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112201606A (zh) * 2020-10-12 2021-01-08 华海清科股份有限公司 具有柔性连轴器的晶圆对中机构、传输装置及减薄设备
TWI761776B (zh) * 2019-03-22 2022-04-21 日商住友重機械精科技股份有限公司 研磨裝置的控制裝置、程式及研磨方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106078511A (zh) * 2016-07-26 2016-11-09 佛山职业技术学院 磨削机床在线测量系统
CN106078510B (zh) * 2016-07-26 2019-01-18 佛山职业技术学院 一种具有在线测量功能的磨削机床
CN106078515B (zh) * 2016-07-26 2018-08-03 佛山职业技术学院 一种集检测、磨削功能于一体的恒力磨削系统
CN109202721B (zh) * 2017-07-03 2021-12-03 株式会社安川电机 研磨工艺的控制方法、研磨装置和机器人研磨系统
JP7135288B2 (ja) * 2017-10-20 2022-09-13 株式会社ジェイテクト 研削盤及び研削方法
JP2019155488A (ja) * 2018-03-07 2019-09-19 株式会社東京精密 研削盤
JP6973237B2 (ja) * 2018-03-29 2021-11-24 日本電気硝子株式会社 板ガラスの製造方法
WO2024171883A1 (ja) * 2023-02-17 2024-08-22 東京エレクトロン株式会社 研削方法及び研削装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06270061A (ja) * 1993-03-24 1994-09-27 Shin Meiwa Ind Co Ltd 研削ロボットの研削基準面位置検出装置
JPH06270060A (ja) * 1993-03-24 1994-09-27 Shin Meiwa Ind Co Ltd 研削ロボットの研削基準面位置検出装置
JP4338458B2 (ja) * 2003-06-30 2009-10-07 コマツ工機株式会社 研削加工装置及び研削加工方法
JP4839720B2 (ja) * 2005-08-04 2011-12-21 トヨタ自動車株式会社 精密加工装置
JP2009214217A (ja) * 2008-03-10 2009-09-24 Jtekt Corp 砥石先端位置補正方法及び装置
CN102275131B (zh) * 2011-06-28 2013-03-20 上海三一精机有限公司 检测磨床加工状态的监控方法及监控系统

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI761776B (zh) * 2019-03-22 2022-04-21 日商住友重機械精科技股份有限公司 研磨裝置的控制裝置、程式及研磨方法
CN112201606A (zh) * 2020-10-12 2021-01-08 华海清科股份有限公司 具有柔性连轴器的晶圆对中机构、传输装置及减薄设备
CN112201606B (zh) * 2020-10-12 2023-08-25 华海清科股份有限公司 具有柔性连轴器的晶圆对中机构、传输装置及减薄设备

Also Published As

Publication number Publication date
KR20150111906A (ko) 2015-10-06
JP2014144513A (ja) 2014-08-14
CN104853880A (zh) 2015-08-19
JP6023598B2 (ja) 2016-11-09
WO2014119163A1 (ja) 2014-08-07

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