TW201436949A - 研磨加工方法 - Google Patents
研磨加工方法 Download PDFInfo
- Publication number
- TW201436949A TW201436949A TW103100529A TW103100529A TW201436949A TW 201436949 A TW201436949 A TW 201436949A TW 103100529 A TW103100529 A TW 103100529A TW 103100529 A TW103100529 A TW 103100529A TW 201436949 A TW201436949 A TW 201436949A
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece block
- grindstone
- workpiece
- elastic deformation
- grinding
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/07—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a stationary work-table
- B24B7/075—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a stationary work-table using a reciprocating grinding head mounted on a movable carriage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013015148A JP6023598B2 (ja) | 2013-01-30 | 2013-01-30 | 研削加工方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201436949A true TW201436949A (zh) | 2014-10-01 |
Family
ID=51261888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103100529A TW201436949A (zh) | 2013-01-30 | 2014-01-07 | 研磨加工方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6023598B2 (ja) |
KR (1) | KR20150111906A (ja) |
CN (1) | CN104853880A (ja) |
TW (1) | TW201436949A (ja) |
WO (1) | WO2014119163A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112201606A (zh) * | 2020-10-12 | 2021-01-08 | 华海清科股份有限公司 | 具有柔性连轴器的晶圆对中机构、传输装置及减薄设备 |
TWI761776B (zh) * | 2019-03-22 | 2022-04-21 | 日商住友重機械精科技股份有限公司 | 研磨裝置的控制裝置、程式及研磨方法 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106078511A (zh) * | 2016-07-26 | 2016-11-09 | 佛山职业技术学院 | 磨削机床在线测量系统 |
CN106078510B (zh) * | 2016-07-26 | 2019-01-18 | 佛山职业技术学院 | 一种具有在线测量功能的磨削机床 |
CN106078515B (zh) * | 2016-07-26 | 2018-08-03 | 佛山职业技术学院 | 一种集检测、磨削功能于一体的恒力磨削系统 |
CN109202721B (zh) * | 2017-07-03 | 2021-12-03 | 株式会社安川电机 | 研磨工艺的控制方法、研磨装置和机器人研磨系统 |
JP7135288B2 (ja) * | 2017-10-20 | 2022-09-13 | 株式会社ジェイテクト | 研削盤及び研削方法 |
JP2019155488A (ja) * | 2018-03-07 | 2019-09-19 | 株式会社東京精密 | 研削盤 |
JP6973237B2 (ja) * | 2018-03-29 | 2021-11-24 | 日本電気硝子株式会社 | 板ガラスの製造方法 |
WO2024171883A1 (ja) * | 2023-02-17 | 2024-08-22 | 東京エレクトロン株式会社 | 研削方法及び研削装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06270061A (ja) * | 1993-03-24 | 1994-09-27 | Shin Meiwa Ind Co Ltd | 研削ロボットの研削基準面位置検出装置 |
JPH06270060A (ja) * | 1993-03-24 | 1994-09-27 | Shin Meiwa Ind Co Ltd | 研削ロボットの研削基準面位置検出装置 |
JP4338458B2 (ja) * | 2003-06-30 | 2009-10-07 | コマツ工機株式会社 | 研削加工装置及び研削加工方法 |
JP4839720B2 (ja) * | 2005-08-04 | 2011-12-21 | トヨタ自動車株式会社 | 精密加工装置 |
JP2009214217A (ja) * | 2008-03-10 | 2009-09-24 | Jtekt Corp | 砥石先端位置補正方法及び装置 |
CN102275131B (zh) * | 2011-06-28 | 2013-03-20 | 上海三一精机有限公司 | 检测磨床加工状态的监控方法及监控系统 |
-
2013
- 2013-01-30 JP JP2013015148A patent/JP6023598B2/ja not_active Expired - Fee Related
- 2013-12-18 WO PCT/JP2013/083883 patent/WO2014119163A1/ja active Application Filing
- 2013-12-18 KR KR1020157015521A patent/KR20150111906A/ko not_active Application Discontinuation
- 2013-12-18 CN CN201380064490.5A patent/CN104853880A/zh active Pending
-
2014
- 2014-01-07 TW TW103100529A patent/TW201436949A/zh unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI761776B (zh) * | 2019-03-22 | 2022-04-21 | 日商住友重機械精科技股份有限公司 | 研磨裝置的控制裝置、程式及研磨方法 |
CN112201606A (zh) * | 2020-10-12 | 2021-01-08 | 华海清科股份有限公司 | 具有柔性连轴器的晶圆对中机构、传输装置及减薄设备 |
CN112201606B (zh) * | 2020-10-12 | 2023-08-25 | 华海清科股份有限公司 | 具有柔性连轴器的晶圆对中机构、传输装置及减薄设备 |
Also Published As
Publication number | Publication date |
---|---|
KR20150111906A (ko) | 2015-10-06 |
JP2014144513A (ja) | 2014-08-14 |
CN104853880A (zh) | 2015-08-19 |
JP6023598B2 (ja) | 2016-11-09 |
WO2014119163A1 (ja) | 2014-08-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW201436949A (zh) | 研磨加工方法 | |
JP5941236B1 (ja) | 高精度球体寸法測定装置および球体研磨装置 | |
JP5891010B2 (ja) | 薄板状ワークの研削方法及び両頭平面研削盤 | |
CN109968127B (zh) | 研磨装置 | |
CN106378668B (zh) | 一种五轴双端面磨床的控制方法 | |
KR20150032827A (ko) | 연삭 가공 장치 및 그 제어 방법 | |
KR101503186B1 (ko) | 연삭 가공반 및 연삭 가공 방법 | |
JP2020069600A (ja) | 工作機械 | |
KR101503616B1 (ko) | 연삭 가공반 및 연삭 가공 방법 | |
JP4387706B2 (ja) | 研削加工装置及び研削加工方法 | |
CN108290269B (zh) | 晶圆的研磨方法及研磨装置 | |
JP5692420B2 (ja) | 金属製環状部材の研削加工方法および装置 | |
JP5851803B2 (ja) | 薄板状ワークの研削方法及び両頭平面研削盤 | |
JP7172636B2 (ja) | 工作機械のメンテナンス支援装置および工作機械システム | |
JP2002001655A (ja) | ワークの研削装置および研削方法 | |
JP5679171B2 (ja) | ダイシング装置及びダイシング方法 | |
JP2019104082A (ja) | Nc研削装置及びワークの研削方法 | |
JP4338458B2 (ja) | 研削加工装置及び研削加工方法 | |
JP2014104552A (ja) | 研削加工方法および研削加工装置 | |
JP2003205459A (ja) | 研磨加工装置及び方法 | |
JP2014226767A (ja) | ウェーハ面取り装置及びウェーハ面取り方法 | |
JP2003236748A (ja) | 研削装置 | |
JP2024001562A (ja) | 研磨方法および研磨装置 | |
JP2020114614A (ja) | 表面粗さ推定装置および工作機械システム | |
JPH01289661A (ja) | 研削方法および研削装置 |