TW201233905A - Connection structure of evacuation apparatus and evacuation system - Google Patents

Connection structure of evacuation apparatus and evacuation system Download PDF

Info

Publication number
TW201233905A
TW201233905A TW100141986A TW100141986A TW201233905A TW 201233905 A TW201233905 A TW 201233905A TW 100141986 A TW100141986 A TW 100141986A TW 100141986 A TW100141986 A TW 100141986A TW 201233905 A TW201233905 A TW 201233905A
Authority
TW
Taiwan
Prior art keywords
vacuum
exhaust
vacuum exhaust
outer casing
port
Prior art date
Application number
TW100141986A
Other languages
English (en)
Chinese (zh)
Inventor
Toshio Suzuki
Kouji Shibayama
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW201233905A publication Critical patent/TW201233905A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW100141986A 2010-11-17 2011-11-17 Connection structure of evacuation apparatus and evacuation system TW201233905A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010257142A JP2014029114A (ja) 2010-11-17 2010-11-17 真空排気装置の連結構造及び真空排気装置

Publications (1)

Publication Number Publication Date
TW201233905A true TW201233905A (en) 2012-08-16

Family

ID=46083728

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100141986A TW201233905A (en) 2010-11-17 2011-11-17 Connection structure of evacuation apparatus and evacuation system

Country Status (3)

Country Link
JP (1) JP2014029114A (ja)
TW (1) TW201233905A (ja)
WO (1) WO2012066780A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014001668A (ja) * 2012-06-18 2014-01-09 Toshiba Corp ルーツポンプ
CN103629113B (zh) * 2013-07-19 2016-01-20 浙江飞越机电有限公司 油箱侧置式双级旋片真空泵

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01113183U (ja) * 1988-05-25 1989-07-31
JPH03145594A (ja) * 1989-10-30 1991-06-20 Anlet Co Ltd 多段型ルーツ式真空ポンプの冷却装置
DE4233142A1 (de) * 1992-10-02 1994-04-07 Leybold Ag Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
JP2004100594A (ja) * 2002-09-10 2004-04-02 Toyota Industries Corp 真空ポンプ装置

Also Published As

Publication number Publication date
JP2014029114A (ja) 2014-02-13
WO2012066780A1 (ja) 2012-05-24

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