201233905 六、發明說明： 【發明所屬之技術領域】 本發明係有關於連結對真空室（chamber)等對排氣對 象設備進行減壓排氣之複數個真空排氣裝置之連結構造， 以及具備此連結構造之真空排氣系統。 本發明係依據2010年11月17日於日本申請之特願 2010-257142號主張優先權，並在此引用該内容。 【先前技術】 為使真空室等排氣對象設備減壓排氣所使用之真空 排氣裝置（真空幫浦（pump))，一般係實行因應用途而 氣體流通性地串聯複數個不同之真空排氣裝置而達成目的 之性能。例如，使排氣對象設備排氣至動作壓力並維持該 壓力之主幫浦係採用設備增壓幫浦（mechanical b〇〇st pump)，使真空系統自大氣壓排氣至主幫浦可動作之壓力 的粗略幫浦（rough pump)，係採用油旋轉幫浦或乾式（dry ) 幫浦。藉由組合使用此等真空幫浦，而構築達成目的性能 之真空排氣系統。真空幫浦之組合係不限定於此且多樣 化，亦有組合三台以上真空幫浦之情形。 如此之組合複數個真空幫浦之情形，通常係在將各個 真二幫浦a又置於適當位置之情形下藉由連結配管等連接。 例如般而言係為使各個真空幫浦固定於預定之框架 (frame)(攻置台）’藉由配管連接主幫浦之排氣口 略幫浦的吸氣n接方法。 例如’於下述非專利文獻1中，係揭示有以配管連接 323686 3 201233905 上幫浦之排氣口與下幫浦之吸氣口之真空排氣系統。再 者’下述非專利文獻2中’係揭示於框架上及框架内設置 真空幫浦’且以配管連接上下之真空幫浦之排氣口與吸氣 口的真空排氣系統。 再者，藉由如上述之方法所連接之真空幫浦，係大多 採用劃分於單一之外殼内形成之空間，並使其為複數個幫 浦室而成為多段構造之多段魯式（Roots )真空幫浦。一般 而言’在多段魯式真空幫浦中，各段之幫浦室係以串聯方 式連結（例如，參照下述專利文獻1)。 (先行技術文獻） (專利文獻） 專利文獻1 :日本國特開2002-364569號公報 (非專利文獻） 非專利文獻1 : 「EDWARDS真空製品綜合型錄201233905 VI. [Technical Field] The present invention relates to a connection structure for connecting a plurality of vacuum exhausting devices that decompress and decompress an exhaust target device such as a vacuum chamber, and the like. A vacuum exhaust system with a connected structure. The present invention claims priority from Japanese Patent Application No. 2010-257142, filed on Jan. [Prior Art] A vacuum exhaust device (vacuum pump) used to decompress and decompress a gas-exhausting device such as a vacuum chamber is generally used to circulate a plurality of different vacuum rows in a gas flow depending on the application. The performance of the gas device to achieve the purpose. For example, the main pumping system that exhausts the exhaust target device to the operating pressure and maintains the pressure uses a mechanical b〇〇st pump to vent the vacuum system from atmospheric pressure to the main pump. The rough pump of pressure uses an oil rotary pump or a dry pump. By using these vacuum pumps in combination, a vacuum exhaust system that achieves the desired performance is constructed. The combination of the vacuum pumps is not limited to this and is diverse, and there are cases where three or more vacuum pumps are combined. In the case where a plurality of vacuum pumps are combined as described above, it is usually connected by a connecting pipe or the like in a case where the respective true two pumps a are placed in an appropriate position. For example, in general, the vacuum pump is fixed to a predetermined frame (papping table). The pipe is connected to the exhaust port of the main pump by a pipe. For example, in the following Non-Patent Document 1, a vacuum exhaust system in which a suction port of a pump on a 323686 3 201233905 and an intake port of a lower pump are connected by piping is disclosed. Further, the following Non-Patent Document 2 discloses a vacuum evacuation system in which a vacuum pump is provided on a frame and in a frame, and an exhaust port and an intake port of the upper and lower vacuum pumps are connected by a pipe. Furthermore, the vacuum pump connected by the above method is mostly a multi-section Roots vacuum which is divided into a space formed in a single casing and made into a plurality of pump chambers to form a multi-stage structure. Pump. In general, in a multi-stage Lu-type vacuum pump, the pump chambers of the respective stages are connected in series (for example, refer to Patent Document 1 below). (Prior Art Document) (Patent Document) Patent Document 1: Japanese Laid-Open Patent Publication No. 2002-364569 (Non-Patent Document) Non-Patent Document 1: "EDWARDS Vacuum Product Catalogue"
Revision3」，EDWARDS股份有限公司，P54 非專利文獻2 :「真空技術與次世代概念之愛發科 (ULVAC，INC.):油旋轉幫浦排氣裝置YM-VD/YM-VS系 列（1580L/min〜20000L/min)」，[online]，ULVAC 股份 有限公司，[2010年4月16日搜尋]，網址<URL : http://www.ulvac.co.jp/products/compo/F020006.html> 【發明内容】 (發明欲解決之課題） 然而，於如上述之以往的真空排氣系統中，各個真空 幫浦係除了排氣口以及吸氣口之連接規格等一部份規格 4 323686 201233905 外，一般而言為各自個別地設計製造。進行如此之真空幫 浦的設置之情形，係有如以下列舉之要求。 (1) 為了使壓力損失抑制為最低限度，連接真空幫 浦彼此之配管係連接為較短、較粗且不彎曲。 (2) 為了有效地使用有限之設置空間（space)，係 儘可能使供設置真空排氣系統用之設置面積縮小。 (3) 使用儘可能單純化且具耐久性之框架。 然而，主要因成本之問題，而難以同時滿足此等之要 求。例如，若考慮到成本，為了使框架對應各種形狀之真 空幫浦，必須設為具有充裕之尺寸。結果，造成配管變長， 壓力損失變大。再者，即便可將真空幫浦設計為小型，仍 因設置面積依存於框架而變大等，而無法有效地使用有限 之設置空間。 本發明係考慮上述之情事而開發者，其目的係為提供 一種可抑制因配管造成之壓力損失，且可實現節省空間及 低成本之真空排氣裝置。 (解決課題之手段） 為了達成上述目的，本技術係提供以下手段。 本發明之一態樣之真空排氣裝置之連結構造係為複 數個真空排氣裝置之連結構造，前述真空排氣裝置係分別 具有：形成至少一個幫浦室之外殼（casing );以及設置 於前述外殼，且連通至前述幫浦室之吸氣口以及排氣口。 為了使前述複數個真空排氣裝置中之第一真空排氣 裝置的前述幫浦室與前述第二真空排氣裝置的前述幫浦室 5 323686 201233905 連通，前述第一真空排氣裝置的前述外殼與前述第二真空 排氣裝置的前述外殼係直接連接。 前述外殼亦可包含：形成於前述外殼第一側之具有端 面之吸氣部；以及形成於與前述外殼第一側不同之第二侧 之具有端面之排氣部。於該情形下，前述吸氣口亦可朝前 述吸氣部開口，前述排氣部亦可朝前述排氣部開口。並且， 亦可藉由使前述第一真空排氣裝置的前述排氣部之前述端 面與前述第二真空排氣裝置的前述吸氣部之前述端面抵 接，使前述第一真空排氣裝置的前述排氣部之前述排氣口 與前述第二真空排氣裝置的前述吸氣部之前述吸氣口連 接。 前述複數個真空排氣裝置中之至少一個之前述幫浦 室，亦可於前述外殼内區分為複數個。於該情形下，前述 複數個幫浦室中之至少二個幫浦室彼此係以串聯方式連 結，前述至少二個幫浦室中之最前段之幫浦室可與前述吸 氣口連通，而最後段之幫浦室亦可與前述排氣口連通。 或者，前述複數個真空排氣裝置中至少一個之真空排 氣裝置的前述幫浦室，係於前述外殼内被劃分為複數個幫 浦室，而前述吸氣口及排氣口兩方係可各自與前述複數個 幫浦室個別地連通。 本發明之一態樣之真空排氣系統係為具備經連結之 複數個真空排氣裝置之真空排氣系統，前述複數個真空排 氣裝置分別具有：形成至少一個幫浦室之外殼；以及設置 於前述外殼且連通至前述幫浦室之吸氣口與排氣口。 6 323686 201233905 為了使前述複數個真空排氣裝置中之第一真空排氣 裝置的前述幫浦室與前述第二真空排氡裝ϊ的前述幫浦室 連通前述帛真空排氣裝置的前述外殼係與前述第二真 空排氣裝置的前述外殼係直接連接。 刖述真二排氣系統亦可具備連接單元、以及至少設置 =引述連接單it之冷卻機構。前述連接單元係設置於前述 t數個真空排氣震置的各外殼之外部，並使前述複數個真 工排氣裝置中之比連接於真空排氣之對象設備之最前段的 真空排，裝置更後段之真线氣裝置中之〆個所設置之前 述幫浦至，與則述複數個真空排氣裝置中最後段之真空排 氣裝置的前述幫浦室連通。 ★ f述連接單元亦可包含底座單S (base unit) 以及配 管月，J述底座單元係具有連通至前述最後段之真空排氣裝 =的前述減口之魏祕彳H連接至前述最後段之真 ，排氣裝置的前述外殼。前述配管具有使前述排氣側路 控二與比$前段之真空排氣裝置更後段之真空排氣裝置中 之個的刖述吸氣口連通之路徑，且連接於前述底座單元。 前述冷卻機構亦可設置於前述底座單元以及前述配 管中之至少一方。 月1J述複數個真空排氣裝置亦可以堆疊方式來設置。再 者，前述底座單元亦可設置於前述複數個真空排氣裝置中 屬於最下部之前述最後段之真空排氣裝置之下部。 月’J述複數個真空排氣裝置中之至少一個真空排氣裝 置亦可具有形成於前述外殼内之間隔壁，俾於此至少一個 7 323686 201233905 之真空排氣裝置的前述外殼内劃分複數個間隔壁。再者， 前述冷卻機構亦可復設置於前述間隔壁。 前述真空排氣系統復可具備連接單元、以及至少設置 於前述連接單元之冷卻機構。前述連接單元係設置於前述 複數個真空排氣裝置之各外殼的外部，並使前述第一真空 排氣裝置的前述幫浦室與前述第二真空排氣裝置的前述幫 浦室連通。 (發明之功效） 依據本發明之態樣，由於無須設置用以連結真空排氣 裝置之外殼彼此之配管，且連接之幫浦室之間的距離變 短，因此可抑制壓力損失。 再者，由於真空排氣裝置之外殼彼此連接，因此由複 數個真空排氣裝置所構成之系統整體之剛性會提升，並且 可使由真空排氣裝置所發出之熱分散。 【實施方式】 (第一實施形態） 以下參照圖式詳細說明採用本發明第一實施形態之 真空排氣裝置的連結構造之真空排氣系統10A。如第1圖 所示，本實施形態之真空排氣系統10A係為連結二個真空 排氣裝置ΙΑ、1B之系統。此真空排氣系統10A係藉由二 個真空排氣裝置ΙΑ、1B將自連接於無圖示之真空室等排 氣對象設備之真空排氣裝置1A的吸氣口 31A所吸得之氣 體壓縮，並自真空排氣裝置1B的排氣口 41B (參照第5 圖）排氣之系統。 8 323686 201233905 構成真空排氣系統10A之真空排氣裝置ία、IB，係 具有大致同一外形之外殼作為構成要素。再者，對於真空 排氣裝置1B，於符號E (參照第5圖）所示之平面，係可 直接重疊於真空排氣裝置1A來設置。 再者，藉由使真空排氣裝置1A重疊朝上下方向（縱方 向）堆積於真空排氣裝置1B之方式來重疊設置，即可不透 過配管使上側之真空排氣裝置1A的排氣口 41A(參照第5 圖）與下側之真空排氣裝置1B的吸氣口 31B直接連接。 以下，係詳細說明有關真空排氣裝置1A、1B。真空 排氣裝置1A與真空排氣裝置1B為大致同一之構成，因此 係說明有關真空排氣裝置1B。 如第2至4圖所示，真空排氣装置1B係為具有由上 侧外殼25Ba與下侧外殼25Bb所構成之外殼25B、二支旋 轉軸81、81 (參照第6圖）、分別收容於由外殼25B所構 成之二個幫浦室21B、22B之繭型轉子（r〇t〇r) 82a、82b、 以及驅動旋轉軸81、81之馬達8之魯式真空幫浦。 轉子8 2 a、8 2 b係分別由一對之轉子所構成，二個轉子 係分別於旋轉轴81上排列，且收容於各幫浦室21B、22B。 -對之轉子係藉由設置於純子的旋轉軸81、81之轴端之 驅動齒輪（gear) 85來互相朝相反方向同步旋轉。 外殼25B係劃分二個幫浦金 ㈣席至21B、22B ’並且形成真 空排氣裝置1B之外型。再去 &騎’旋轉軸81、81係由轴承 (bearing) 83、84 所支標。 幫浦室21B與幫浦室22b 係透過連揍配管29於構成 323686 9 201233905 真空排氣裝置1B之外殼25B的内部直接連通❶幫浦室21B 係與形成於外殻25B的上部之吸氣口 31B連通。幫浦室 22B係與形成於外殼25B的下部之排氣口 41B連通。 接著，說明有關構成真空排氣裝置1B之外殼25B。 外殼25B係為如後述之上下二等分割之構造，於上部（一 側）形成具有吸氣口 31B之吸氣部3，於下部（另一側） 形成具有排氣口 41B之排氣部4。再者，於外殼25B之上 部形成有四個台座部5，於下部形成有四個腳部6。 外殼25B具有依存於幫浦室21B、22B形狀之橢圓圓 筒形狀。吸氣部3、排氣部4、台座部5以及腳部6與前述 外殼25B係為一體成形。具體而言，此等係以藉由鑄造來 一體成形為佳。 真空排氣裝置1B係設置為與外殼25之長邊方向（旋 轉軸81之軸方向）形成水平。並且，於以下之說明中，將 包含二支旋轉軸81之平面係稱為水平中心面（於第4圖符 號D所示）。 外殼25B係二等分割為上侧外殼25Ba與下側外殼 25Bb。上侧外殼25Bb與下侧外殼25Bl)係構成為藉由螺栓 /螺帽等固接構件來固接，藉由組合上下外殼25Ba、25Bb， 即可保持馬達8側之軸承箱（bearingcase) 86以及馬達相 反側軸承箱87。再者，藉由組合上下外殼25Ba、25Bb， 即可使包含馬達相反側軸承84以及撈油板88之空間89 密閉。並且’於本實施形態中，分割面係與前述水平中心 面D大略一致。 10 323686 201233905 吸氣部3係以朝上方突出之方式與外殼25B (上側外 殼25Ba) —體成形於外殼25B之上部。吸氣部3具有與前 述水平中心面D平行之端面3a。此端面3a係形成於外殼 25B之長邊方向具有長邊之概略長方形狀。 再者，於吸氣部3係設置有吸氣口 31B。吸氣口 31B 係於端面3a開口，並連通至幫浦室21B。此外，於吸氣部 3之端面3a的略為内側，沿著端面3a之外形形成有溝36。 於溝36嵌入有Ο環（ring) 53 (密封構件）。 排氣部4係以朝下方突出之方式與外殼25B (下側外 殼25Bb) —體成形於外殼25B之下部，並與吸氣部3相 同地，具有與水平中心面D平行之端面4a。於排氣部4 設置有排氣口 41B。排氣口 41B係於端面4a開口，並連通 至幫浦室22B。 吸氣部3之端面3a與排氣部4之端面4a於俯視時係 為大致相同形狀。 台座部5係為外殼25B (上側外殼25Ba)之上部，且 為於俯視時設置於最外部4個位置之突起狀之台座。台座 部5係具有朝真空排氣裝置1B之上方向突出之突起狀之 形狀。四個台座部5係分別於其上端形成有面51 (以下稱 為端面51)。四個端面51係於同一面上形成。 此外，台座部5的端面51與前述吸氣部3的端面3a 係形成於同一面上。然而，台座部5係與吸氣部3獨立設 置。亦即，台座5的端面51與吸氣部3的端面3a係隔著 間隔而形成。 11 323686 201233905 腳部6係為外殼25B (下側外殼25Bb)之下部，且為 於俯視時設置於最外部四個位置之突起狀之腳。腳部6具 有朝真空排氣裝置1B下方向突出之突起狀之形狀。再者， 腳部6於俯視時之位置係與前述台座部5大致相同。四個 腳部6之各下端形成有面61 (以下稱為端面61 )。四個端 面61形成於同一面上。 再者，腳部6的端面61與排氣部4的端面4a係形成 於同一面上。然而，腳部6係與排氣部4獨立設置。亦即， 腳部6的端面61與排氣部4之端面4a係隔著間隔而形成。 再者，台座部5與腳部6係形成為以側面為開口面之 中空狀，並於各個端面51、61形成有固接孔54。 再者，如第2、3圖所示，於台座部5設置有突起部 52 (定位機構）。對應於此，在腳部6形成有定位孔62 (定 位機構）。 並且，如第5圖所示，真空排氣裝置1A係除了幫浦 室21A、22A之設置以外，為與真空排氣裝置1B大致相 同之構成。有關於本實施形態之氣體的流動方向，幫浦室 21A、22A的旋轉轴方向之排序與幫浦室21B、22B的旋轉 轴方向之排序係為相反。 如第5圖所示，真空排氣系統10A係為於真空排氣裝 置1B上方直接重疊真空排氣裝置1A之系統。此時，係重 疊為使真空排氣裝置1B的吸氣部3之端面3a與真空排氣 裝置1A的排氣部4之端面4a抵接。再者，真空排氣裝置 1A的排氣口 41A與真空排氣裝置1B的吸氣口 31B於俯視 12 323686 201233905 時係形成在大致相同位置。 依據上述實施形態，真空排氣裝置ΙΑ、1B於符號E (參照第5圖）所示之平面係可配置為於上下方向直接重 疊，並可於真空排氣裝置1B之正上方載置真空排氣裝置 1A，俾使真空排氣裝置1A的排氣口 4之端面4a重疊接觸 於真空排氣裝置1B的吸氣部3之端面3a。藉此，可使真 空排氣裝置1A的排氣口 41A與真空排氣裝置1B的吸氣 口 31B氣體流通性地連通。 亦即，自真空排氣裝置1A的吸氣口 31A流入之氣體 係藉由幫浦室21A以及22A壓縮，且從排氣口 41A排氣。 接著，氣體係透過真空排氣裝置1B的吸氣口 31B並藉由 幫浦室21B以及22B壓縮，且從排氣口 41B排氣。於壓縮 時，氣體被封閉於外殼25與轉子82間之空間，藉由轉子 82之旋轉而排出至排氣侧。 藉此，由於無須設置用以連結真空排氣裝置ΙΑ、1B 彼此之配管，且連結之幫浦室間的距離會變短，因而可抑 制壓力損失。 由於構成真空排氣裝置ΙΑ、1B之外殼25A、25B彼 此連接，因此由複數個真空排氣裝置所構成之系統整體之 剛性會提升，並且可使自真空排氣裝置ΙΑ、1B所發出之 熱分散。 再者，於外殼25中，藉由組合上下外殼25a、25b而 成為保持軸承箱86、87且形成馬達相反側空間89 (作為 外蓋之功能）之構成。藉此，可削減零件個數，同時因藉 13 323686 201233905 由外殼25整體保持軸承箱86、87，而可抑制於排氣運轉 時真空排氣裝置ΙΑ、1B之變形。 再者，台座部5的端面51與腳部6的端面61係因形 成於俯視時大致相同之位置，藉由使真空排氣裝置1A與 真空排氣裝置1B配置在上下方向，即可使台座部5的端 面51與腳部6的端面61接觸重疊。於此狀態下，藉由螺 栓/螺帽等固接構件91來固接台座部5與腳部6，即可使 真空排氣裝置1A與真空排氣裝置1B確實地固定。 藉由在形成於吸氣部3的端面3a之溝36設置Ο環53 等密封構件，即可提升吸氣部3與排氣部4連接時之氣密 狀態。 並且，此溝36可並非於吸氣部3側，亦可設置於排 氣部4側（此時為真空排氣裝置1A之外殼25A之排氣部 側）。 連結真空排氣裝置ΙΑ、1B時，藉由嵌合台座部5的 突起部52與腳部6的定位孔62，即可容易地進行定位。 突起部52以及定位孔62係以設置於所有腳部6以及台座 部5為佳，惟至少設置於二個位置即可。 並且，劃分於外殼25内部之幫浦室個數係可為一個， 亦可為三個以上，可因應規格而自由設定。 再者，真空排氣裝置並不僅限定於如上述之魯式型真 空幫浦，若為於外殼具備吸氣口與排氣口而可做成相同構 造之真空幫浦，則不論何種真空幫浦皆可採用。 再者，於本實施形態中，台座部5與腳部6雖係設置 14 323686 201233905 有4個，惟不限於此，若為台座部5可確實地支撐腳部6 則可為任意之構成。 此外，若可台座部5確實地支撐腳部6，則台座部5 的端面51與吸氣部3的端面3a亦可不隔開而形成，使之 一體成形。同樣地，有關於腳部6的端面61與排氣部4 的端面4a，亦可使之一體成形。 (第二實施形態） 接著，有關本發明的第二實施形態之真空排氣系統 10B，係參照圖式詳細說明。如第7圖所示，真空排氣系 統10B係為藉由三個真空排氣裝置1C、ID、1E將自連接 於無圖示之真空室等排氣對象設備之吸氣口 11吸氣之氣 體壓縮，並由總排氣口 12排氣之系統。 如第7圖、第8圖所示，構成真空排氣系統10B之真 空排氣裝置1C、ID、1E係可直接重疊配置。具體而言， 構成真空排氣裝置1C、ID、1E之外殼彼此係可直接連接。 如第8圖所示，三個真空排氣裝置1C至1E之中，最 前段之真空排氣裝置1C(主真空排氣裝置）係為於外殼内 具有單一幫浦室21C之設備增壓幫浦。真空排氣裝置1C 係與無圖示之真空室等排氣對象設備連接。 比最前段更後段之真空排氣裝置ID、1E係為多段魯 式真空幫浦，分別具備複數個幫浦室。再者，真空排氣裝 置ID、1E對於複數個幫浦室係具備有複數個吸氣口以及 排氣口。亦即，構成本實施形態之真空排氣裝置ID ( 1E) 之複數個幫浦室並非以串聯方式連接該所有幫浦室。 15 323686 201233905 換言之，複數個幫浦室令至少二個幫浦室並未與形成 於相同外殼内之其他幫浦室連接。再者，此等幫浦室分別 個別地具有吸氣口以及排氣σ之兩者。 真空排氣裝置1D之幫浦室21D並未與相同真空排氣 裝置1D之其他幫浦室22D、23D連接，係透過直接連通 至幫浦室21D之排氣口 41D，來與最後段之真空排氣裝置 1E之幫浦室21E連接。 再者，真空排氣裝置丨〇與真空排氣裝置1D係未使用 配管等而於符號J1所示之平面直接連結。同樣地，真空排 氣裝置1D與真空排氣裝置ιέ係未使用配管等而於符號K 所示之平面直接連結。 再者，真空排氣系統1〇Β係具備輔助真空排氣裝置i 彼此之連接之連接單元7 (分歧管’ manifold)。連接單元 7係分割為底座單元（排氣側路徑形成構件）72、配管構 件73、以及閥（valve)單元74 (閥集合體）。此等辨由 與真空排氣裝置1C至1E組合，而完成連接構成真空排氣 裝置1C至1E的複數個幫浦室之連接配管，以發揮作 空排氣系統10B之功能。 ^ 於真空排氣裝置1D之上部係形成有連接真空排氣f 置1C的幫浦室21(：與真空排氣裝置id的幫浦室21]〇、 吸氣口 31D(參照第8圖），同時亦形成有連接配管構件乃 與真空排氣裝置1D的幫浦室MD、23D之吸氣D 32d 33D (參照第9圖）。吸氣口 32D、33D為使其一端朝真 空排氣裝置1D之側面開口，而具有彎曲為直角之形狀 32368i 201233905 配管構件73係連結至朝真空排氣裝置ID之上部侧 之吸氣口 32D、33D。 圖 第12圖係為由上方觀看真空排氣裝置1这 第13圖係為由下方觀看第12圖所示之真空挪氣| 之斜視圖。真空排氣裝置1E之外殼係與上迷相 置 上下分割構造’具備有上侧外殼25Ea與下側外红少成為 卜戏25Eh 3lH> 於上侧外殼25Ea設置有吸氣部1〇3 (參照第12圖 ° 下侧外殼25Eb設置有排氣部1〇4。於吸氡部’於 103a係除了嵌入有〇環53外’亦塗覆有無圖示=端面 料（gasket)。密封墊料係為用以遮斷相鄰吸氣〇 费封墊 32B、 33E彼此之連通之密封（seal)構件。 於此真空排氣系統10B之製造時，於吸氣1 面103a塗覆例如膏（paste)狀之密封墊料後，Υ〇3的端 此外殼25Ε的端面l〇3a與真空排氣裝置^由抵接 部的端面，而連接此等端面。就密封墊料之材科又的排氣 使用矽（silicone)系、氟系等耐腐蝕性之橡膠，s，係 於此等。 准係不限 印可 可能 藉由使用如塗覆式密封墊料之簡易的密封 係減低成本，且可於狹窄之吸氣部1〇3内確保具件， 寬廣之開口面積的吸氣〇 31E、32E、^ ^、 健 。如此使用簡易 之密封構件，即便在相鄰之吸氣σ彼此發生氣n属 (leak)，該洩漏程度若為相對於排氣速度充分小之洩漏 速度則不具問題》 於以上說明之密封墊科係以塗覆於吸氣部1〇3的端面 17 323686 201233905 103a之例加以說明’惟當然亦可塗覆於排氣部1〇4的端面 104a。 例如於端面103a以及104a的平面度較高之情形，若 氣體之漏氣速度充分小’則不需要此塗覆式密封墊料。 底座單元72係配置成連結至真空排氣裝置1E之底面 亦即連結至其下部，且與構成真空排氣裝置1E之幫浦室、 配管構件73以及閥單元74連接。於底座單元72係連接有 真二排氣裝置1C之幫浦至與配管構件73，同時形成連接 真空排氣裝置1E的幫浦室與閥單元74之排氣路徑77(參 照第9圖）。真空排氣裝置1E、配管構件73以及閥單元 74係連接於底座單元72之上表面’且形成底座單元72支 撐真空排氣系統10B整體之構造。 排氣側路徑77具有連結於配管構件73的配管路徑78 之二個路徑77a、77b，及連接與真空排氣裝置1E的幫浦 室24E連通之排氣口 43E及閥單元74之路徑77c之三個 路徑。 配管構件73係為配管形狀之構件，於該内部形成有 連接真空排氣裝置1E的排氣口與真空排氣裝置⑴的吸氣 口之配管路徑78。配管路徑78係對應於與真空排氣裝置 1D的吸氣口 32D、33D (參照第8圖）對應之二個路^， 藉由沿長邊方向之分割面被二等分割。 第10圖係為由底座單元72之上方觀看之剖面圖。第 U圖係為第㈣所示之L_L線之剖面圖。於底座單元？！ 的區塊725之上表面形麵連接於真空錢裝置的外 323686 18 201233905 殼之幫浦連接部721、連結於配管構件73之配管連接部 ⑶、以及連接於閥單元74之閥單元連接部⑺。於此等 幫浦連接部72卜配管連接部722、閥單元連接部m之周 圍各自形叙周狀溝，係分別嵌人有G環等之密封構件 721d、722d、723d。 於幫浦連接部721係以排財式形成有三個連通口 72U、72ib、721C。此等三個連通口 72u、72ib、72ΐβ 係 分別與真空排氣裝置1E的排氣口 41e、42e、43e連通。 於配管連接部722形成有二個連通口 722a、722b，此等連 通口 722a、722b係連通至配管構件73的配管路徑％。再 者，閥單元連接部723係以排列方式形成有三個連通口 723a、723b、723c。 連通口 721a、722a、723a皆與排氣侧路徑77中之路 徑77a連通。連通口 721b、722b、咖皆與排氣側路徑中 之路徑77b連通。連通口 721c、723c皆與排氣側路徑中之 路徑77c連通。此等之構成若參照帛9圖則易於理解。 閥單元74具有作為真空排氣系統1〇B整體排氣口之 總排氣口 12。如第11圖之剖面圖所示，在閥單元％設置 有複數個閥79 (止_)。藉此，可從作為構成真空排氣 裝置1E之幫浦室、且為與排氣口々IE、42E、43E直接連 接之幫浦室21E、22E、24E中之任意的幫浦室個別地排氣。 藉由設置閥單元74,防止因幫浦所造成之過壓縮，而 可抑制因馬達8所造成之動力傳達之損失。 複數個閥79係可為球狀，亦可為可將壓力調整為個 323686 19 201233905 別之值的調整閥。各閥79為可調整為個別的壓力之調整閥 之情形時，可適當設定該壓力，且可擴大由使用者（user) 所使用之壓力範圍。 如此’底座單元72以及閥單元74係設置於最後段的 真空排氣裝置1E之下部、亦即真空排氣系統10B之最下 部。藉此’可使真空排氣系統10B之重心儘可能配置於下 方’而可提高由上下積層所成之多段之真空排氣系統10B 之設置穩定性。 接著，係參照第8圖說明有關構成本實施形態之各真 空排氣裝置之複數個幫浦室之構成，以及幫浦室之連接順 序。 位於最上段之真空排氣裝置1C係為具有一個幫浦室 2ic之設備增壓幫浦，幫浦室21C係具有吸氣口 11以及 排氣口 41C。 真空排氣裝置1D具有三個幫浦室21D、22D、23D。 三個幫浦室21D、22D、23D分別具備上述之三個吸氣口 31D、32D、33D 以及三個排氣口 41D、42D、43D。 真空排氣裝置1石具備四個幫浦室21E、22E、23E、 24E ’並具備三個吸氣口 31E、32E、33E以及三個排氣口 41E、42E、43E。真空排氣裝置1E的四個幫浦室中之二個 幫浦室23E、24E係透過連接配管29於構成真空排氣裝置 1E之外殼内部直接連接。 連接單元7係與底座單元72以及配管構件73共同作 用，並構成為與真空排氣裝置1E的排氣口 41E及真空排 20 323686 201233905 氣裝置ID的吸氣口 32D連接。同樣地’連接單元7係 成為與真空排氣農f 1E的排氣口 42E及真空排氣裝置、 的吸氣口 33D連接。 ^ 再者，連接單元7係構成為與真空排氣裝置 氣口 43E及閥單元74連接。 钾 接著，係參照第8圖說明實際氣體之流動。 首先’自吸氣口 11流入真空排氣裝置lc之氣體係藉 由幫浦室21D壓縮，並自排氣口 41C排氣。接著，氣體係 流入真空排氣裝置1〇之幫浦室21D並被壓縮。接著，氣 體係=入至與幫浦室21D直接連接之真空排氣裝置以的 幫满室21E。自幫浦室21E排氣之氣體係流人至形成於底 座單元72之排氣侧路徑77之路徑77a。將以上之氣體的 流動係以第8圖的箭號F1表示。 机入底座單元72之氣體係經由配管構件73而流入真 空排氣置1D的幫浦室22D。於第9圖中，係顯示氣體 自底座單元72經由配管構件73回流至真空排氣裝置⑴ 之其他幫浦室的流程（箭號FA)。 流入幫，室22D之氣體係如第8圖之箭號F2所示， 於抵達底座單元72之純被壓縮。接著，於第8圖的箭號 F3所不之路徑被壓縮之氣體最後被引導至闕單a 74，並 自總排氣口 12排氣。 再者，藉由操作設於閥單元74之複數個閥79，亦可 自真空排氣I置1E的幫浦室21E或22E排氣。 依據上述之實施形態係構成為，藉由將連結之複數個 323686 21 201233905 真空排氣裝置中之配置於一端側之真空排氣裝置ID的吸 氣口 32D、33D、與設置於另一端侧之真空排氣裝置ιΕ的 排氣口 41E、42E予以連接，而使自設置於另一端側之真 空排氣裝置1E排氣之氣體流入至設置於一端側之真空排 氣裝置1D。 藉此，於連接具有複數個幫浦室之複數個真空排氣裝 置並進行氣體壓縮時’係因幫浦室之配置自由度提高，故 除了第一實施形態之效果之外，亦可構築更有效率之真空 排氣系統。 再者，藉由將閥單元直接連接於底座單元72,則因變 得易於自任意的幫浦室排氣，故不需要繁雜之配管連接， 且可同時達成裝置之最佳化與小型化。 (第三實施形態） 第14圖係為顯示本發明第三實施形態之真空排氣系 統之剖面圖。第15圖係為顯示該真空排氣系統的連接單元 之一部份之侧面圖，且為在與各真空排氣裝置的轉子的旋 轉軸垂直之方向觀看之圖。本實施形態之真空排氣裝置 10C與例如上述之第二實施形態之真空排氣系統1〇B之不 同點係為’真空排氣系統l〇C具備冷卻機構。 冷卻機構係例如為供冷煤流通之冷卻管15。冷卻管 15係設置於真空排氣系統l〇C之各外殼25C、25D、25E 的複數個部位、馬達8的馬達箱（m〇t〇r housing) 8a、以 及第15圖所示之配管構件173。設置於外殼25C、25D、 25E之冷卻管15係設置為插通至例如軸承附近以及間隔壁 22 323686 201233905 Μ等。間隔壁16具有於真空排氣裝置id ( 1E)於一個外 殼25D ( 25E)内劃分複數個幫浦室21D至23D ( 21E至 23E)之功能。藉由如此之冷卻機構，可有效率地冷卻真 空排氣系統10C。 尤其，藉由將冷卻管15設置於間隔壁16，即可使不 易冷卻之外殼内部冷卻。 如第15圖所示，於配管構件173之侧面係連接有保 持冷卻管15之一部份之保持箱（b〇x) 173a。冷卻管]^ 係於此保持箱173a内形成為迴轉（turn)一次之u字形狀。 然而，冷卻管15係不限於U字型形狀，可變更該形狀與 長度之設計。 ' 並且，如上述設置於複數個部位之冷卻管15係可構 成為以分別具有各一個入口以及出口之一支管連接、亦即 單一系統之流路。或者，冷卻管15係以複數系統之流路所 構成’即以複數個管所構成。 (第四實施形態） 第16圖係為用以說明本發明的第四實施形態之圖， 且為顯示真空排氣系統一部份構造之剖面圖。此為於上述 第二實施形態之底座單元72附加冷卻機構之底座單元 172 〇 此冷卻機構係除了冷卻管15以外，亦具有分別設置 於排氣侧路徑177a、177b、177c之冷卻翼片（fin) U5。 冷卻翼片115係以一體成形方式形成在例如此底座單元 172的區塊（block)。冷卻管15係配置於該等排氣側路 23 323686 201233905 徑177a、177b、177c之下部，且設置成插通至底座單元 172之區塊。 真空排氣系統係因於排氣側壓縮氣體，與吸氣側相比 排氣側變得較高溫。藉由將冷卻機構設置於真空排氣系統 的排氣侧之底座單元’可有致率地冷卻因氣體壓縮所產生 之執。 本實施形態係设置冷卻翼片115作為冷卻機構，惟此 亦可不設置。 本技術係不限定於上述說明之實施形態，亦可實現其 他各種實施形態。 ' 外殼25之外形狀不僅限定為橢圓圓筒形狀，尤其若 為小排氣量之真空幫浦’則亦可做成為不依存於幫浦 狀之形狀、例如方塊狀。 室形 於上述之實施形態中，複數個真空排氣裝置係配置成 在縱方向堆積，惟亦可在橫方向堆積，或可在縱方向及橫 方向之兩方向配置。 上述實施形態之真空排氣系統係具備二個或三個真 空排氡裝置，惟亦可具備在縱方向及/或橫方向排列連接 之四個以上之真空排氣裝置。 如上所述，設置二個以上或四個以上真空排氣農置之 形態係套用上述第二（或第三、四）實施形態之情形時， 為了使該等四個以上之真空排氣裝置中相鄰接之二個真处 排氣裝置的外殼互相連接，亦可連接如配管構件73之具有 外部配管功能之配管構件。或者，為了使該等四個以上之 323686 24 201233905 排氣裝置中未鄰接之二個真空排氣裝置的外殼互相連接， 亦可連接如配管構件73之具有外部配管功能之配管構件。 於真空排氣系統具備四個以上之真空排氣裝置之情 形時，亦可設置複數個例如配管構件73之具有外部配管功 能之配管構件。 第16圖所示之冷卻機構可如例如第8或14圖所示， 設置於最前段之真空排氣裝置1C與該下一段之真空排氣 裝置1D之間。 於第16圖所示之冷卻機構設置之冷卻翼片亦可形成 於上述之間隔壁16。 【圖式簡單說明】 第1圖係為由上方觀看本發明第一實施形態之真空排 氣系統之斜視圖。 第2圖係為由上方觀看第一實施形態之真空排氣裝置 之斜視圖。 第3圖係為由下方觀看第一真空排氣裝置之斜視圖。 第4圖係為沿著第2圖之C-C線之真空排氣裝置之剖 面圖。 第5圖係為沿著第1圖之A-A線之真空排氣系統之剖 面圖。 第6圖係為沿著第1圖之B-B線之真空排氣系統之剖 面圖。 第7圖係為由上方觀看本發明第二實施形態之真空排 氣糸統之斜視圖。 25 323686 201233905 第8圖係為沿著第7圖之G_G之真空排氣系統之剖面 第9圖係為由第7圖之向觀看之真空排氣系統之 第10圖係為由底座單元之上方觀看之剖面圖。 第11圖係為帛10圖所示之L-L線之剖面圖。 第12圖係為由上方觀看真空排氣裝置之斜視圖。 第13圖係為由下方觀看第12圖所示之真空排氣裝置 之斜視圖。 第14圖係為顯示本發明第三實施形態之真空排氣系 統之剖面圖。 ' 第15圖係為顯示構成該真空排氣系統的連接單元的 一部份之配管構件之侧面圖。 第16圖係為設置於本發明第四實施形態之真空排氣 系統之冷卻裝置之說明圖。 【主要元件符號說明】 认、出、1(：、11)、正真空排氣裝置 3、103 吸氣部 3a、4a、51、61、 103a、l〇4a 4、1〇4 排氣部 6 腳部 7 連接單元 8 馬達 8a 馬達箱 323686 26 201233905 10A、10B、10C 真空排氣系統 11、31A、31B、31D、32D、33D、31E、32E、33E 吸氣口 12 總排氣口 15 冷卻管 16 間隔壁 21A、21B、21C 、21D、21E、22A、22B、22D、22E、23D、 23E、24E 幫浦室 25、25A、25B、25Ba、25Bb、25C、25E、25Ea、25Eb 外殼 29 連接配管 36 溝 41B、41C、41D、41E、42D、42E、43D、43E 排氣口 52 突起部 53 0環 54 固接孔 62 定位孔 72 > 172 底座單元 73 、 173 配管構件 74 閥單元 77a、77b、77c 路徑 78 配管路徑 79 閥 81 旋轉轴 82、82a、82b 轉子 83、84 軸承 27 323686 201233905 85 驅動齒輪 86 軸承箱 87 馬達相反側軸承箱 88 撈油板 89 空間 91 固接構件 115 冷卻翼片 173a 保持箱 177a、177b、177c 排氣側路徑 721 幫浦連接部 721a、721b、721c、 722a、722b、723a、723b、723c 連通口 722 配管連接部 721d、722d、723d 密封構件 723 閥單元連接部 725 區塊 FI、F2、F3、F4 箭號 28 323686Revision 3", EDWARDS Co., Ltd., P54 Non-Patent Document 2: "Vacuum Technology and Next Generation Concepts of Love Hair (ULVAC, INC.): Oil Rotary Pump Exhaust YM-VD/YM-VS Series (1580L/ Min~20000L/min)",[online], ULVAC Co., Ltd., [Search on April 16, 2010], Website <URL : http://www. Ulvac. Co. Jp/products/compo/F020006. Html> SUMMARY OF THE INVENTION (Problems to be Solved by the Invention) However, In the conventional vacuum exhaust system as described above, Each vacuum pump system has a part of specifications such as the exhaust port and the connection specifications of the suction port. 4 323686 201233905 Generally, they are individually designed and manufactured. In the case of setting up such a vacuum pump, There are requirements as listed below. (1) In order to minimize pressure loss, The connection between the vacuum pumps and the piping system is short, Thicker and not bent. (2) In order to effectively use a limited space, As far as possible, the installation area for the vacuum exhaust system is reduced. (3) Use a frame that is as simplistic and durable as possible. however, Mainly due to cost issues, It is difficult to meet these requirements at the same time. E.g, If the cost is taken into account, In order to make the frame correspond to the various shapes of the empty pump, Must be set to have ample size. result, Causes the piping to become longer, The pressure loss becomes large. Furthermore, Even if the vacuum pump can be designed to be small, Still larger because the installation area depends on the frame, etc. It is not possible to use a limited set space efficiently. The present invention is developed in consideration of the above circumstances, Its purpose is to provide a way to suppress pressure loss caused by piping. It also realizes a space-saving and low-cost vacuum exhaust device. (means to solve the problem) In order to achieve the above objectives, This technology provides the following means. The connection structure of the vacuum exhaust device of one aspect of the present invention is a connection structure of a plurality of vacuum exhaust devices. The aforementioned vacuum exhausting devices have respectively: Forming a casing of at least one pump room; And disposed on the aforementioned outer casing, And connected to the suction port and the exhaust port of the aforementioned pump room. In order to communicate the aforementioned pump chamber of the first vacuum exhaust device of the plurality of vacuum exhaust devices with the aforementioned pump chamber 5 323686 201233905 of the second vacuum exhaust device, The outer casing of the first vacuum exhausting device is directly connected to the outer casing of the second vacuum exhausting device. The aforementioned outer casing may also include: An air suction portion having an end surface formed on a first side of the outer casing; And an exhaust portion having an end surface formed on a second side different from the first side of the outer casing. In this case, The suction port may also open toward the suction portion. The exhaust portion may also open toward the exhaust portion. and, The end surface of the exhaust portion of the first vacuum exhausting device may be brought into contact with the end surface of the air suction portion of the second vacuum exhausting device, The exhaust port of the exhaust portion of the first vacuum exhausting device is connected to the intake port of the intake portion of the second vacuum exhausting device. The aforementioned pump chamber of at least one of the plurality of vacuum exhausting devices, It can also be divided into a plurality of pieces in the aforementioned casing. In this case, At least two of the plurality of pump chambers are connected in series with each other, The foremost chamber of the at least two pump chambers may be in communication with the suction port. The last stage of the pump room can also be connected to the aforementioned exhaust port. or, The aforementioned pump chamber of the vacuum exhausting device of at least one of the plurality of vacuum exhausting devices, It is divided into a plurality of pump rooms in the aforementioned casing. Further, each of the intake port and the exhaust port may be individually connected to the plurality of pump chambers. A vacuum exhaust system according to one aspect of the present invention is a vacuum exhaust system having a plurality of connected vacuum exhaust devices. The plurality of vacuum exhausting devices have the following: Forming an outer casing of at least one pump room; And an intake port and an exhaust port disposed in the foregoing outer casing and connected to the aforementioned pump room. 6 323 686 201233905, in order to communicate the aforementioned pump chamber of the first vacuum exhausting device of the plurality of vacuum exhausting devices with the pump chamber of the second vacuum draining device, the aforementioned outer casing of the first vacuum exhausting device It is directly connected to the aforementioned outer casing of the second vacuum exhausting device. The description of the true two exhaust system can also have a connection unit, And at least set = the cooling mechanism that quotes the connection unit it. The connecting unit is disposed outside the outer casings of the t-th vacuum exhausting device, And connecting the ratio of the plurality of the conventional exhaust devices to the vacuum row of the foremost stage of the vacuum exhausting target device, The device is set in the rear of the real line gas device. It is in communication with the aforementioned pump chamber of the vacuum venting device of the last stage of the plurality of vacuum venting devices. ★ f The connection unit can also include the base unit S and the piping month. The base unit of the base unit has a vacuum venting device connected to the last stage of the vacuum venting device. The aforementioned outer casing of the exhaust device. The piping has a path for communicating the exhaust side control 2 to an air intake port of the vacuum exhaust unit of the rear stage of the vacuum exhaust unit of the preceding stage. And connected to the aforementioned base unit. The cooling mechanism may be provided in at least one of the base unit and the piping. A plurality of vacuum exhaust devices can also be arranged in a stacking manner. Again, The base unit may also be disposed under the vacuum exhaust unit of the last stage of the lowermost portion of the plurality of vacuum exhaust devices. At least one of the plurality of vacuum exhausting devices of the month may also have a partition wall formed in the outer casing. A plurality of partition walls are partitioned into the aforementioned outer casing of the vacuum exhaust unit of at least one of the 7 323 686 201233905. Furthermore, The cooling mechanism may be provided in the partition wall. The foregoing vacuum exhaust system can be provided with a connection unit, And a cooling mechanism disposed at least in the aforementioned connecting unit. The connecting unit is disposed outside the outer casings of the plurality of vacuum exhausting devices, The aforementioned pump chamber of the first vacuum exhausting device is communicated with the aforementioned pumping chamber of the aforementioned second vacuum exhausting device. (Effect of the invention) According to the aspect of the invention, Since it is not necessary to provide piping for connecting the outer casings of the vacuum exhausting device, And the distance between the connected pump rooms becomes shorter, Therefore, the pressure loss can be suppressed. Furthermore, Since the outer casings of the vacuum exhaust devices are connected to each other, Therefore, the rigidity of the system composed of a plurality of vacuum exhaust devices is increased. And the heat generated by the vacuum exhaust device can be dispersed. [Embodiment] (First Embodiment) A vacuum exhaust system 10A having a connection structure of a vacuum exhausting apparatus according to a first embodiment of the present invention will be described in detail below with reference to the drawings. As shown in Figure 1, The vacuum exhaust system 10A of the present embodiment is configured to connect two vacuum exhaust devices, 1B system. The vacuum exhaust system 10A is composed of two vacuum exhaust devices. 1B compresses the gas sucked from the suction port 31A of the vacuum exhaust device 1A connected to the exhaust gas device such as a vacuum chamber (not shown). The system is exhausted from the exhaust port 41B (see Fig. 5) of the vacuum exhaust unit 1B. 8 323686 201233905 Vacuum exhaust unit constituting vacuum exhaust system 10A IB, A casing having substantially the same outer shape is used as a constituent element. Furthermore, For the vacuum exhaust unit 1B, In the plane shown by symbol E (see Figure 5), It can be set directly over the vacuum exhaust unit 1A. Furthermore, The vacuum exhaust device 1A is superposed on the vacuum exhaust device 1B in a vertical direction (vertical direction), and is superposed. The exhaust port 41A (see Fig. 5) of the upper vacuum exhausting device 1A can be directly connected to the intake port 31B of the lower vacuum exhausting device 1B without passing through the piping. the following, Describes in detail about the vacuum exhaust unit 1A, 1B. The vacuum exhaust device 1A and the vacuum exhaust device 1B have substantially the same configuration. Therefore, the vacuum exhaust device 1B will be described. As shown in Figures 2 to 4, The vacuum exhausting device 1B has a casing 25B composed of an upper casing 25Ba and a lower casing 25Bb, Two rotating shafts 81, 81 (refer to Figure 6), They are respectively housed in two pump chambers 21B composed of the outer casing 25B, 22B's 转子 rotor (r〇t〇r) 82a, 82b, And driving the rotating shaft 81, 81 motor 8 Lulu vacuum pump. Rotor 8 2 a, 8 2 b is composed of a pair of rotors, The two rotor systems are arranged on the rotating shaft 81, respectively. And housed in each of the pump rooms 21B, 22B. - the rotor is connected to the rotating shaft 81 of the pure child, The drive gears (gear) 85 of the shaft end of 81 are rotated in opposite directions to each other. The outer casing 25B divides two pump gold (four) seats to 21B, 22B' and form a vacuum exhaust device 1B. Go again & Riding the 'rotation axis 81, The 81 series is bearing (bearing) 83, 84 standards. The pump room 21B and the pump room 22b are directly connected to the inside of the casing 25B constituting the 323686 9 201233905 vacuum exhaust unit 1B through the flail pipe 29 and the suction port formed in the upper portion of the casing 25B. 31B is connected. The pump chamber 22B communicates with an exhaust port 41B formed at a lower portion of the outer casing 25B. then, The outer casing 25B constituting the vacuum exhausting device 1B will be described. The outer casing 25B is configured to be divided into upper and lower divisions as will be described later. Forming an intake portion 3 having an intake port 31B on the upper portion (one side), An exhaust portion 4 having an exhaust port 41B is formed on the lower portion (the other side). Furthermore, Four pedestal portions 5 are formed on the upper portion of the outer casing 25B. Four feet 6 are formed in the lower portion. The outer casing 25B has a dependency on the pump room 21B, 22B shape elliptical cylinder shape. Inhalation unit 3, Exhaust part 4, The pedestal portion 5 and the leg portion 6 are integrally formed with the outer casing 25B. in particular, These are preferably formed by integral casting. The vacuum exhausting device 1B is disposed to be horizontal with the longitudinal direction of the outer casing 25 (the axial direction of the rotating shaft 81). and, In the following description, The plane system including the two rotating shafts 81 is referred to as a horizontal center plane (shown by symbol D in Fig. 4). The outer casing 25B is divided into the upper outer casing 25Ba and the lower outer casing 25Bb in two. The upper outer casing 25Bb and the lower outer casing 25B1) are configured to be fixed by a fastening member such as a bolt/nut. By combining the upper and lower casings 25Ba, 25Bb, The bearing case 86 on the side of the motor 8 and the motor-side bearing housing 87 can be held. Furthermore, By combining the upper and lower casings 25Ba, 25Bb, The space 89 including the motor opposite side bearing 84 and the oil recovery plate 88 can be sealed. And in the present embodiment, The split plane is substantially identical to the aforementioned horizontal center plane D. 10 323686 201233905 The suction portion 3 is integrally formed with the outer casing 25B (the upper outer casing 25Ba) so as to protrude upward from the upper portion of the outer casing 25B. The suction portion 3 has an end surface 3a parallel to the horizontal center plane D. The end surface 3a is formed in a substantially rectangular shape having a long side in the longitudinal direction of the outer casing 25B. Furthermore, An intake port 31B is provided in the intake unit 3. The suction port 31B is open at the end face 3a. And connected to the pump room 21B. In addition, On the inner side of the end face 3a of the suction portion 3, A groove 36 is formed along the outer surface of the end surface 3a. A ring 53 (sealing member) is embedded in the groove 36. The exhaust portion 4 is integrally formed with the outer casing 25B (lower outer casing 25Bb) at a lower portion of the outer casing 25B so as to protrude downward. And the same as the suction unit 3, There is an end face 4a parallel to the horizontal center plane D. An exhaust port 41B is provided in the exhaust unit 4. The exhaust port 41B is open at the end face 4a. And connected to the pump room 22B. The end surface 3a of the intake portion 3 and the end surface 4a of the exhaust portion 4 have substantially the same shape in plan view. The pedestal portion 5 is an upper portion of the outer casing 25B (upper outer casing 25Ba). Moreover, it is a protrusion-shaped pedestal which is provided in the outermost four positions in a plan view. The pedestal portion 5 has a shape that protrudes toward the upper direction of the vacuum exhausting device 1B. The four pedestal portions 5 are respectively formed with a surface 51 (hereinafter referred to as an end surface 51) at the upper end thereof. The four end faces 51 are formed on the same surface. In addition, The end surface 51 of the pedestal portion 5 is formed on the same surface as the end surface 3a of the air intake portion 3. however, The pedestal portion 5 is provided separately from the intake portion 3. that is, The end surface 51 of the pedestal 5 is formed at an interval from the end surface 3a of the intake portion 3. 11 323686 201233905 The foot 6 is the lower part of the outer casing 25B (lower outer casing 25Bb), Further, it is a protruding leg that is disposed at the outermost four positions in a plan view. The leg portion 6 has a protruding shape that protrudes in the downward direction of the vacuum exhausting device 1B. Furthermore, The position of the leg portion 6 in plan view is substantially the same as that of the pedestal portion 5. A surface 61 (hereinafter referred to as an end surface 61) is formed at each lower end of each of the four leg portions 6. The four end faces 61 are formed on the same face. Furthermore, The end surface 61 of the leg portion 6 is formed on the same surface as the end surface 4a of the exhaust portion 4. however, The leg portion 6 is provided separately from the exhaust portion 4. that is, The end surface 61 of the leg portion 6 is formed at an interval from the end surface 4a of the exhaust portion 4. Furthermore, The pedestal portion 5 and the leg portion 6 are formed in a hollow shape with the side surface as an open surface. And on each end face 51, 61 is formed with a fixing hole 54. Furthermore, As the second 3, A projection 52 (positioning mechanism) is provided in the pedestal portion 5. Corresponding to this, A positioning hole 62 (positioning mechanism) is formed in the leg portion 6. and, As shown in Figure 5, The vacuum exhaust unit 1A is in addition to the pump chamber 21A, In addition to the setting of 22A, It is substantially the same as the vacuum exhaust unit 1B. Regarding the flow direction of the gas in the present embodiment, Pump room 21A, Sorting of the direction of the rotation axis of 22A with the pump chamber 21B, The order of the rotation axis direction of 22B is reversed. As shown in Figure 5, The vacuum exhaust system 10A is a system in which the vacuum exhausting device 1A is directly superposed above the vacuum exhausting device 1B. at this time, The overlap is such that the end surface 3a of the intake portion 3 of the vacuum exhaust device 1B abuts against the end surface 4a of the exhaust portion 4 of the vacuum exhaust device 1A. Furthermore, The exhaust port 41A of the vacuum exhaust unit 1A and the intake port 31B of the vacuum exhaust unit 1B are formed at substantially the same position in a plan view of 12 323686 201233905. According to the above embodiment, Vacuum exhaust unit The plane of 1B shown in symbol E (refer to Fig. 5) can be configured to overlap directly in the up and down direction. A vacuum exhaust device 1A can be placed directly above the vacuum exhaust device 1B. The end surface 4a of the exhaust port 4 of the vacuum exhausting device 1A is brought into contact with the end surface 3a of the intake portion 3 of the vacuum exhausting device 1B. With this, The exhaust port 41A of the vacuum exhaust unit 1A can be in fluid communication with the intake port 31B of the vacuum exhaust unit 1B. that is, The gas flowing in from the suction port 31A of the vacuum exhaust unit 1A is compressed by the pump chambers 21A and 22A. And exhausted from the exhaust port 41A. then, The gas system passes through the suction port 31B of the vacuum exhaust unit 1B and is compressed by the pump chambers 21B and 22B. And exhausted from the exhaust port 41B. When compressing, The gas is enclosed in a space between the outer casing 25 and the rotor 82. It is discharged to the exhaust side by the rotation of the rotor 82. With this, Since there is no need to provide a vacuum exhaust device, 1B are piped to each other, And the distance between the connected pump rooms will be shorter. Therefore, the pressure loss can be suppressed. Since it constitutes a vacuum exhaust device, 1B shell 25A, 25B, this connection, Therefore, the rigidity of the system composed of a plurality of vacuum exhaust devices is increased. And can be made from the vacuum exhaust device, The heat emitted by 1B is dispersed. Furthermore, In the outer casing 25, By combining the upper and lower outer casings 25a, 25b becomes the holding bearing housing 86, 87 and a structure in which the opposite side space 89 of the motor (function of the outer cover) is formed. With this, Can reduce the number of parts, At the same time, the bearing housing 86 is integrally held by the outer casing 25 by borrowing 13 323686 201233905, 87, It can suppress the vacuum exhaust device during exhaust operation, 1B deformation. Furthermore, The end surface 51 of the pedestal portion 5 and the end surface 61 of the leg portion 6 are formed at substantially the same position in a plan view. By arranging the vacuum exhaust device 1A and the vacuum exhaust device 1B in the up and down direction, The end surface 51 of the pedestal portion 5 can be brought into contact with the end surface 61 of the leg portion 6 to overlap. In this state, The pedestal portion 5 and the leg portion 6 are fixed by a fixing member 91 such as a bolt/nut. The vacuum exhaust unit 1A and the vacuum exhaust unit 1B can be surely fixed. A sealing member such as an annulus ring 53 is provided in the groove 36 formed in the end surface 3a of the suction portion 3, The airtight state when the suction unit 3 is connected to the exhaust unit 4 can be improved. and, This groove 36 may not be on the side of the suction portion 3, It may be provided on the side of the exhaust unit 4 (in this case, on the side of the exhaust portion of the outer casing 25A of the vacuum exhaust unit 1A). Connect the vacuum exhaust unitΙΑ, At 1B, By the projection 52 of the fitting pedestal 5 and the positioning hole 62 of the leg 6, It is easy to position. Preferably, the protrusion 52 and the positioning hole 62 are provided in all of the leg portion 6 and the pedestal portion 5, Only at least two locations can be set. and, The number of the pump chambers divided into the inside of the outer casing 25 may be one. Can also be more than three, It can be set freely according to the specifications. Furthermore, The vacuum exhaust device is not limited to the Lu type vacuum pump as described above. If the outer casing is provided with an intake port and an exhaust port, the vacuum pump can be made of the same structure. No matter what kind of vacuum pump can be used. Furthermore, In this embodiment, Although the pedestal 5 and the foot 6 are provided, there are 4 323686 201233905, But not limited to this, If the pedestal portion 5 can reliably support the leg portion 6, it can be configured arbitrarily. In addition, If the pedestal portion 5 reliably supports the foot portion 6, The end surface 51 of the pedestal portion 5 and the end surface 3a of the air intake portion 3 may be formed without being separated. Make it one piece. Similarly, Regarding the end surface 61 of the leg portion 6 and the end surface 4a of the exhaust portion 4, It is also possible to shape one body. (Second embodiment) Next, A vacuum exhaust system 10B according to a second embodiment of the present invention, It is described in detail with reference to the drawings. As shown in Figure 7, The vacuum exhaust system 10B is constituted by three vacuum exhaust devices 1C, ID, 1E compresses the gas that is inhaled from the suction port 11 of the exhaust equipment connected to a vacuum chamber such as a vacuum chamber. And the system is exhausted by the total exhaust port 12. As shown in Figure 7, As shown in Figure 8, The vacuum exhaust device 1C constituting the vacuum exhaust system 10B, ID, The 1E system can be directly overlapped. in particular, Forming a vacuum exhaust device 1C, ID, The outer casings of 1E can be directly connected to each other. As shown in Figure 8, Among the three vacuum exhaust devices 1C to 1E, The vacuum evacuation device 1C (main vacuum exhaust device) of the foremost stage is a device booster pump having a single pump chamber 21C in the outer casing. The vacuum exhaust unit 1C is connected to an exhaust target device such as a vacuum chamber (not shown). The vacuum exhaust unit ID, which is later than the front section, 1E is a multi-stage Lu vacuum pump. There are a number of pump rooms. Furthermore, Vacuum venting device ID, 1E has a plurality of suction ports and exhaust ports for a plurality of pumping chambers. that is, The plurality of pump chambers constituting the vacuum exhaust device ID (1E) of the present embodiment are not connected to all of the pump chambers in series. 15 323686 201233905 In other words, A number of pump rooms have prevented at least two pump rooms from being connected to other pump rooms formed in the same enclosure. Furthermore, These pump chambers individually have both an intake port and an exhaust σ. The pump chamber 21D of the vacuum exhaust unit 1D is not connected to the other pump chamber 22D of the same vacuum exhaust unit 1D, 23D connection, Through the direct connection to the exhaust port 41D of the pump room 21D, It is connected to the pump chamber 21E of the last stage vacuum exhaust unit 1E. Furthermore, The vacuum exhaust unit 丨〇 and the vacuum exhaust unit 1D are directly connected to each other on a plane indicated by symbol J1 without using a pipe or the like. Similarly, The vacuum exhausting device 1D and the vacuum exhausting device are directly connected to the plane indicated by the symbol K without using a pipe or the like. Furthermore, The vacuum exhaust system 1 is provided with a connection unit 7 (a manifold) that assists the connection of the vacuum exhaust devices i to each other. The connecting unit 7 is divided into a base unit (exhaust side path forming member) 72, Piping member 73, And a valve unit 74 (valve assembly). These discriminating are combined with the vacuum exhausting devices 1C to 1E, And the connection pipes connecting the plurality of pump chambers constituting the vacuum exhausting devices 1C to 1E are completed, To function as the exhaust system 10B. ^ On the upper part of the vacuum exhaust device 1D, a pump chamber 21 is connected to the vacuum exhaust gas 1C (: The pump room with the vacuum exhaust id 21]〇, Suction port 31D (refer to Figure 8), At the same time, a pumping chamber MD, which is connected to the piping member and the vacuum exhausting device 1D, is also formed. 23D inhalation D 32d 33D (refer to Figure 9). Suction port 32D, The 33D has its one end open to the side of the vacuum exhaust unit 1D, And having a shape bent at a right angle 32368i 201233905 The piping member 73 is coupled to the suction port 32D toward the upper side of the vacuum exhauster ID, 33D. Fig. 12 is a perspective view of the vacuum exhaust unit 1 viewed from above, and Fig. 13 is a perspective view of the vacuum exhaust gas shown in Fig. 12 viewed from below. The outer casing of the vacuum exhausting device 1E is in opposition to the upper part. The upper and lower divided structures are provided with the upper outer casing 25Ea and the lower side of the outer red, which becomes the play 25Eh 3lH> The upper casing 25Ea is provided with an intake unit 1〇3 (see Fig. 12) The lower casing 25Eb is provided with an exhaust unit 1〇4. In the suction section ', except for the cymbal ring 53 embedded in the 103a', it is also coated with a non-illustrated = gasket. The gasket material is used to block the adjacent suction damper seal 32B, 33E Sealing members that are in communication with each other. When the vacuum exhaust system 10B is manufactured, After applying a paste-like sealing material to the suction side 103a, The end of the crucible 3 is the end face l〇3a of the outer casing 25Ε and the end face of the vacuum exhausting device And connect these end faces. In the case of the gasket material, the exhaust is made of silicone. Corrosion-resistant rubber such as fluorine s, This is the same. It is possible to reduce the cost by using a simple sealing system such as a coated gasket. And the parts can be secured in the narrow suction section 1〇3. A wide open area of the suction 〇 31E, 32E, ^ ^, Jian. So using a simple sealing member, Even if the adjacent inhalation σ generates a gas, it is a lean, If the degree of leakage is a leak rate that is sufficiently small with respect to the exhaust speed, the gasket is described as an example of the end face 17 323686 201233905 103a applied to the suction unit 1〇3. It may also be applied to the end surface 104a of the exhaust portion 1〇4. For example, when the flatness of the end faces 103a and 104a is high, This coated gasket is not required if the gas leak rate is sufficiently small. The base unit 72 is configured to be coupled to the bottom surface of the vacuum exhaust device 1E, that is, to the lower portion thereof. And with the pump chamber constituting the vacuum exhaust device 1E, The piping member 73 and the valve unit 74 are connected. The base unit 72 is connected to the pump-to-pipe member 73 of the true two exhaust device 1C. At the same time, an exhaust passage 77 connecting the pump chamber of the vacuum exhaust unit 1E and the valve unit 74 is formed (refer to Fig. 9). Vacuum exhaust unit 1E, The piping member 73 and the valve unit 74 are connected to the upper surface ' of the base unit 72 and form a configuration in which the base unit 72 supports the entire vacuum exhaust system 10B. The exhaust side path 77 has two paths 77a connected to the pipe path 78 of the pipe member 73, 77b, And three paths connecting the exhaust port 43E communicating with the pump chamber 24E of the vacuum exhaust unit 1E and the path 77c of the valve unit 74. The piping member 73 is a member in the shape of a pipe. A piping path 78 connecting the exhaust port of the vacuum exhausting device 1E and the intake port of the vacuum exhausting device (1) is formed inside. The piping path 78 corresponds to the suction port 32D of the vacuum exhaust device 1D, 33D (refer to Figure 8) corresponds to the two roads ^, The split surface is divided into two equal parts by the longitudinal direction. FIG. 10 is a cross-sectional view as seen from above the base unit 72. Figure U is a cross-sectional view of the L_L line shown in (4). On the base unit? ! The upper surface of the block 725 is connected to the outside of the vacuum money device. 323686 18 201233905 The pump connection portion 721 of the shell a pipe connection portion (3) connected to the pipe member 73, And a valve unit connection (7) connected to the valve unit 74. The pump connecting portion 72 is connected to the pipe connecting portion 722, The circumference of the valve unit connecting portion m each describes a circumferential groove, Separately, a sealing member 721d having a G ring or the like is embedded, 722d, 723d. In the pump connection unit 721, three communication ports 72U are formed in a row-discharging manner. 72ib, 721C. These three communication ports 72u, 72ib, 72ΐβ system is respectively connected to the exhaust port 41e of the vacuum exhaust device 1E, 42e, 43e connected. Two communication ports 722a are formed in the pipe connecting portion 722, 722b, These ports 722a, 722b is a pipe path % that communicates with the pipe member 73. Again, The valve unit connecting portion 723 is formed with three communication ports 723a in an array, 723b, 723c. Communication port 721a, 722a, The 723a is in communication with the path 77a in the exhaust side path 77. Communication port 721b, 722b, The coffee is in communication with the path 77b in the exhaust side path. Communication port 721c, Both 723c are in communication with the path 77c in the exhaust side path. The composition of these is easy to understand with reference to the 帛9 diagram. The valve unit 74 has a total exhaust port 12 as an exhaust port of the vacuum exhaust system 1〇B. As shown in the sectional view of Figure 11, A plurality of valves 79 (stop _) are provided in the valve unit %. With this, It can be used as a pump room that constitutes the vacuum exhaust unit 1E, And for the exhaust port 々IE, 42E, 43E directly connected to the pump room 21E, 22E, Any of the 24E pump chambers are individually vented. By providing the valve unit 74, Prevent over-compression caused by the pump, The loss of power transmission caused by the motor 8 can be suppressed. A plurality of valves 79 can be spherical. It can also be a regulating valve that can adjust the pressure to a value of 323686 19 201233905. When each valve 79 is a regulating valve that can be adjusted to an individual pressure, This pressure can be set appropriately, It also expands the range of pressures used by the user. Thus, the base unit 72 and the valve unit 74 are disposed below the vacuum exhaust unit 1E of the last stage, That is, the lowermost portion of the vacuum exhaust system 10B. Thereby, the center of gravity of the vacuum exhaust system 10B can be placed as far as possible, and the installation stability of the plurality of vacuum exhaust systems 10B formed by the upper and lower layers can be improved. then, The configuration of a plurality of pump chambers constituting each of the vacuum exhausting devices of the present embodiment will be described with reference to Fig. 8. And the connection sequence of the pump room. The vacuum exhaust unit 1C located at the uppermost stage is a supercharged pump with a pump room 2ic. The pump room 21C has an intake port 11 and an exhaust port 41C. The vacuum exhaust device 1D has three pump chambers 21D, 22D, 23D. Three pump rooms 21D, 22D, 23D has the above three suction ports 31D, 32D, 33D and three exhaust ports 41D, 42D, 43D. The vacuum exhaust unit 1 stone has four pump rooms 21E, 22E, 23E, 24E ’ has three suction ports 31E, 32E, 33E and three exhaust ports 41E, 42E, 43E. Two of the four pump chambers of the vacuum exhaust unit 1E, the pump chamber 23E, The 24E is directly connected to the inside of the casing constituting the vacuum exhausting device 1E through the connecting pipe 29. The connecting unit 7 functions in conjunction with the base unit 72 and the piping member 73. It is configured to be connected to the exhaust port 41E of the vacuum exhaust unit 1E and the intake port 32D of the vacuum line 20 323686 201233905 gas unit ID. Similarly, the connection unit 7 is connected to the exhaust port 42E and the vacuum exhaust device of the vacuum exhauster f 1E. The suction port is 33D connected. ^ Again, The connecting unit 7 is configured to be connected to the vacuum exhaust port 43E and the valve unit 74. Potassium, The flow of the actual gas will be described with reference to Fig. 8. First, the gas system that flows into the vacuum exhaust unit lc from the suction port 11 is compressed by the pump chamber 21D. It is exhausted from the exhaust port 41C. then, The gas system flows into the pump chamber 21D of the vacuum exhaust unit 1 and is compressed. then, Gas system = into the full chamber 21E of the vacuum exhaust unit directly connected to the pump chamber 21D. The gas system from the pumping chamber 21E exhausts to the path 77a formed on the exhaust side path 77 of the base unit 72. The flow of the above gas is indicated by an arrow F1 in Fig. 8. The gas system that has been driven into the base unit 72 flows into the pump chamber 22D of the vacuum exhaust unit 1D via the piping member 73. In Figure 9, The flow of the gas from the base unit 72 to the other pump chambers of the vacuum exhaust unit (1) via the piping member 73 (arrow FA) is displayed. Flow into the gang, The gas system of chamber 22D is as shown by arrow F2 in Fig. 8. The purity of the base unit 72 is compressed. then, The gas compressed by the arrow F3 in Fig. 8 is finally guided to the sheet a 74. And exhaust from the total exhaust port 12. Furthermore, By operating a plurality of valves 79 provided in the valve unit 74, It is also possible to exhaust the pump chamber 21E or 22E from the vacuum exhaust I to 1E. According to the above embodiment, the configuration is By a plurality of 323686 21 201233905 vacuum exhaust devices, the suction port 32D of the vacuum exhaust device ID disposed on one end side, 33D, The exhaust port 41E of the vacuum exhaust unit ι provided on the other end side, 42E is connected, On the other hand, the gas exhausted from the vacuum exhaust device 1E provided on the other end side flows into the vacuum exhausting device 1D provided on the one end side. With this, When a plurality of vacuum exhausting devices having a plurality of pumping chambers are connected and gas compression is performed, the degree of freedom in the arrangement of the pumping chamber is increased. Therefore, in addition to the effects of the first embodiment, It is also possible to construct a more efficient vacuum exhaust system. Furthermore, By connecting the valve unit directly to the base unit 72, Because it becomes easier to vent from any pump room, Therefore, no complicated piping connection is required. And the device can be optimized and miniaturized at the same time. (Third Embodiment) Fig. 14 is a cross-sectional view showing a vacuum exhaust system according to a third embodiment of the present invention. Figure 15 is a side view showing a part of the connecting unit of the vacuum exhaust system, And it is a view seen in the direction perpendicular to the rotation axis of the rotor of each vacuum exhaust apparatus. The vacuum exhausting device 10C of the present embodiment differs from the vacuum exhausting system 1B of the second embodiment described above in that the vacuum exhausting system 100C has a cooling mechanism. The cooling mechanism is, for example, a cooling pipe 15 through which cold coal is circulated. The cooling pipe 15 is disposed in each of the outer casings 25C of the vacuum exhaust system 10C, 25D, Multiple parts of 25E, Motor box of motor 8 (m〇t〇r housing) 8a, And the piping member 173 shown in Fig. 15. Set in the outer casing 25C, 25D, The cooling duct 15 of 25E is arranged to be inserted, for example, near the bearing and the partition wall 22 323686 201233905 Μ or the like. The partition wall 16 has a function of dividing a plurality of pump chambers 21D to 23D (21E to 23E) in a casing 25D (25E) by a vacuum exhaust unit id (1E). With such a cooling mechanism, The vacuum exhaust system 10C can be efficiently cooled. especially, By placing the cooling tube 15 on the partition wall 16, The inside of the housing that is not easily cooled can be cooled. As shown in Figure 15, A holding box (b〇x) 173a for holding a part of the cooling pipe 15 is connected to the side of the piping member 173. The cooling pipe is formed in a U shape in which the inside of the holding case 173a is turned once. however, The cooling pipe 15 is not limited to a U-shaped shape. The shape and length can be changed. ' And, The cooling pipe 15 disposed at a plurality of locations as described above may be configured to have a branch connection with one inlet and one outlet, respectively. That is, the flow of a single system. or, The cooling pipe 15 is constructed by a flow path of a plurality of systems, i.e., a plurality of pipes. (Fourth embodiment) FIG. 16 is a view for explaining a fourth embodiment of the present invention. And is a cross-sectional view showing a part of the construction of the vacuum exhaust system. This is the base unit 172 to which the cooling mechanism is attached to the base unit 72 of the second embodiment. The cooling mechanism is other than the cooling pipe 15, Also provided are respectively disposed on the exhaust side path 177a, 177b, Cooling fin (fin) U5 of 177c. The cooling fins 115 are formed in a unitary form, for example, in a block of the base unit 172. The cooling pipe 15 is disposed on the exhaust side roads 23 323686 201233905 diameter 177a, 177b, Below the 177c, And is arranged to be inserted into the block of the base unit 172. The vacuum exhaust system is due to the compressed gas on the exhaust side. The exhaust side becomes higher temperature than the suction side. The base unit ' which is provided on the exhaust side of the vacuum exhaust system by the cooling mechanism can steadily cool the execution due to gas compression. In this embodiment, the cooling fins 115 are provided as a cooling mechanism. However, this can also be left unset. The present technology is not limited to the embodiment described above. Other embodiments are also possible. The shape outside the outer casing 25 is not limited to an elliptical cylinder shape. In particular, if it is a vacuum pump with a small displacement, it can be made into a shape that does not depend on the pump. For example, a square shape. The chamber is in the above embodiment, A plurality of vacuum exhaust devices are arranged to be stacked in the longitudinal direction. But it can also be stacked in the horizontal direction. Or it can be arranged in both the longitudinal direction and the horizontal direction. The vacuum exhaust system of the above embodiment has two or three vacuum draining devices. However, it is also possible to provide four or more vacuum exhausting devices that are connected in the longitudinal direction and/or the lateral direction. As mentioned above, Set more than two or more vacuum exhaust farms to apply the above second (or third, 4) When the situation of the implementation form, In order to interconnect the outer casings of the two adjacent exhaust devices of the four or more vacuum exhausting devices, It is also possible to connect a piping member such as the piping member 73 having an external piping function. or, In order to interconnect the outer casings of the two vacuum venting devices of the four or more 323686 24 201233905 exhaust devices, It is also possible to connect a piping member such as the piping member 73 having an external piping function. When the vacuum exhaust system has more than four vacuum exhaust devices, A plurality of piping members having an external piping function such as the piping member 73 may be provided. The cooling mechanism shown in Fig. 16 can be as shown, for example, in Fig. 8 or Fig. 14, It is disposed between the vacuum exhaust unit 1C of the foremost stage and the vacuum exhaust unit 1D of the next stage. Cooling fins provided in the cooling mechanism shown in Fig. 16 may also be formed on the partition wall 16 described above. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view of a vacuum exhaust system according to a first embodiment of the present invention as seen from above. Fig. 2 is a perspective view showing the vacuum exhausting apparatus of the first embodiment viewed from above. Figure 3 is a perspective view of the first vacuum exhaust device viewed from below. Fig. 4 is a cross-sectional view showing the vacuum exhausting apparatus taken along line C-C of Fig. 2; Fig. 5 is a cross-sectional view of the vacuum exhaust system taken along line A-A of Fig. 1. Fig. 6 is a cross-sectional view of the vacuum exhaust system taken along line B-B of Fig. 1. Fig. 7 is a perspective view showing the vacuum exhaust system of the second embodiment of the present invention viewed from above. 25 323686 201233905 Fig. 8 is a cross section of the vacuum exhaust system along G_G of Fig. 7. Fig. 9 is a view of the vacuum exhaust system viewed from Fig. 7 as the top of the base unit View the profile. Figure 11 is a cross-sectional view of the L-L line shown in Figure 10. Figure 12 is a perspective view of the vacuum exhaust device viewed from above. Fig. 13 is a perspective view showing the vacuum exhausting device shown in Fig. 12 viewed from below. Figure 14 is a cross-sectional view showing a vacuum exhaust system according to a third embodiment of the present invention. Fig. 15 is a side view showing a piping member constituting a part of the connecting unit of the vacuum exhaust system. Fig. 16 is an explanatory view showing a cooling device provided in a vacuum exhaust system according to a fourth embodiment of the present invention. [Main component symbol description] Out, 1(: , 11), Positive vacuum exhaust device 103 suction unit 3a, 4a, 51. 61. 103a, L〇4a 4, 1〇4 Exhaust part 6 Feet 7 Connection unit 8 Motor 8a Motor box 323686 26 201233905 10A, 10B, 10C vacuum exhaust system 11, 31A, 31B, 31D, 32D, 33D, 31E, 32E, 33E Suction port 12 Total exhaust port 15 Cooling tube 16 Partition wall 21A, 21B, 21C, 21D, 21E, 22A, 22B, 22D, 22E, 23D, 23E, 24E pump room 25, 25A, 25B, 25Ba, 25Bb, 25C, 25E, 25Ea, 25Eb housing 29 connecting piping 36 groove 41B, 41C, 41D, 41E, 42D, 42E, 43D, 43E Exhaust port 52 Projection 53 0 ring 54 Fixing hole 62 Positioning hole 72 > 172 base unit 73, 173 Piping Member 74 Valve Unit 77a, 77b, 77c path 78 piping path 79 valve 81 rotating shaft 82, 82a, 82b rotor 83, 84 Bearings 27 323686 201233905 85 Drive gears 86 Bearing housings 87 Motors on the opposite side of the bearing housing 88 Oil pan 89 Space 91 Fastening members 115 Cooling fins 173a Holding box 177a, 177b, 177c exhaust side path 721 pump connection 721a, 721b, 721c, 722a, 722b, 723a, 723b, 723c communication port 722 piping connection part 721d, 722d, 723d Sealing member 723 Valve unit connection 725 Block FI, F2 F3, F4 arrow 28 323686