TW200947800A - Directional coupler circuit board, directional coupler, and plasma producing apparatus - Google Patents

Directional coupler circuit board, directional coupler, and plasma producing apparatus Download PDF

Info

Publication number
TW200947800A
TW200947800A TW98101334A TW98101334A TW200947800A TW 200947800 A TW200947800 A TW 200947800A TW 98101334 A TW98101334 A TW 98101334A TW 98101334 A TW98101334 A TW 98101334A TW 200947800 A TW200947800 A TW 200947800A
Authority
TW
Taiwan
Prior art keywords
microwave
path
pattern
substrate
waveguide
Prior art date
Application number
TW98101334A
Other languages
English (en)
Chinese (zh)
Inventor
Hidetaka Matsuuchi
Shigeru Masuda
Ryuichi Iwasaki
Original Assignee
Noritsu Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noritsu Koki Co Ltd filed Critical Noritsu Koki Co Ltd
Publication of TW200947800A publication Critical patent/TW200947800A/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32311—Circuits specially adapted for controlling the microwave discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
    • H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
TW98101334A 2008-01-15 2009-01-15 Directional coupler circuit board, directional coupler, and plasma producing apparatus TW200947800A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008005453 2008-01-15

Publications (1)

Publication Number Publication Date
TW200947800A true TW200947800A (en) 2009-11-16

Family

ID=40885327

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98101334A TW200947800A (en) 2008-01-15 2009-01-15 Directional coupler circuit board, directional coupler, and plasma producing apparatus

Country Status (3)

Country Link
JP (1) JPWO2009090938A1 (ja)
TW (1) TW200947800A (ja)
WO (1) WO2009090938A1 (ja)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2566020A (en) * 1945-01-04 1951-08-28 Willard H Fenn High-frequency detecting device
FR2108858B1 (ja) * 1970-10-13 1973-11-23 Thomson Csf
JPS5588405A (en) * 1978-12-26 1980-07-04 Tdk Corp Directional coupler
DE3715318A1 (de) * 1987-05-08 1988-11-24 Licentia Gmbh Hohlleiter-auskoppelelement
JP2986166B2 (ja) * 1989-01-30 1999-12-06 株式会社ダイヘン マイクロ波回路のインピーダンス自動調整装置及びインピーダンス自動調整方法
JPH06132710A (ja) * 1992-10-15 1994-05-13 Micro Denshi Kk 方向性結合器
JP3107757B2 (ja) * 1996-10-22 2000-11-13 株式会社ニッシン マイクロ波回路の自動チューニング方法
JP2005184751A (ja) * 2003-12-24 2005-07-07 Nec Tokin Corp 方向性結合器

Also Published As

Publication number Publication date
WO2009090938A1 (ja) 2009-07-23
JPWO2009090938A1 (ja) 2011-05-26

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