TW200947800A - Directional coupler circuit board, directional coupler, and plasma producing apparatus - Google Patents

Abstract

A directional coupler circuit comprises first and second transmission paths whose distal ends project into a waveguide and whose root ends are interconnected at a connection point X. At least one of the first and second transmission paths has amplitude attenuating means therein. Therefore, the amplitudes at the connection point X of the microwaves propagated through the first and second transmission paths are substantially equal to each other. The difference between the sum L1+L2 of the distance L1 between the distal ends of the first and second transmission paths and the path length L2 of the first transmission path and the path length L3 of the second transmission path is (2n-1)λ/2 (where n is an integer and λ is the wavelength of the microwaves). The difference between the sum L1+L3 of the distance L1 and the path length L3 and the path length L2 is not (2n-1)λ/2.

Description

200947800 6. TECHNOLOGICAL FIELD The present invention relates to a directional bond circuit substrate used in a microwave circuit, a directional bond using the directional bond circuit substrate, and a directional bond device Plasma generating device. [Prior Art] Conventionally, the object to be treated is irradiated with plasma for the removal of surface organic contaminants, surface modification, etching, film formation or film removal. A plasma generating apparatus like this can generate a rotation at normal temperature and normal pressure, and uses microwaves to generate plasma. In the plasma generating device described above, the microwave generating device appropriately detects the power of the microwave to be generated, and returns the detection result to the microwave generating device, so that the output of the microwave power can be stabilized. In the case of ❹m wave power, it is necessary to take some of the microwave power from the microwave generating skirt and guided into the waveguide, and take it out from the waveguide, and generally use a directional bonder as the device for taking out. From the viewpoint of assembling a human plasma generating device, it is necessary to arrange a small directional coupler, such as a small-sized social device realized by Japanese Patent Laid-Open Publication No. 6-1 3271G. In the directional finder that is not in the patent document, the printed substrate having the microstrip transmission line is placed on the waveguide, and the two connected to the microstrip are connected. The probe protrudes from the oil guiding technology. The microwave flowing in the three-wave tube will be taken out by the two probes, and will be sent out to the microstrip transmission line on the substrate, and then the part of the microwave which is _-fc-^-S2-^ " in the waveguide will be taken out. power. The plasma generating device as described above is from the microwave generating device and is

2014-10266^PF 3 200947800 In the incident microwave guided by the waveguide, and the reflected microwave reflected back to the waveguide without participating in the generation of plasma, only one of the microwaves (for example: incident microwave) will be directionally combined. The device is taken out and the microwave power is detected. Therefore, in the directional coupler shown in the above patent document, the amplitudes of the two sets of microwaves taken out from the guide wave are adjusted by the two probes according to the protruding length of the two probes in the guide wave camp. And according to the amplitude adjustment, it is possible to extract only one of the microwaves. However, the above-described accuracy of the microwave amplitude adjustment is extremely high, and according to the change in the length of the probe shown in the above patent document, there arises a problem that the accuracy of the amplitude adjustment cannot be completely satisfied. In view of the above, it is an object of the present invention to provide a small directional bonding circuit substrate and a directional bond thereof, and a plasma generating device for enabling Accurately extract the microwave transmitted by the waveguide. The invention provides a directional bonding circuit substrate, comprising: a substrate; a first transmission path disposed on the substrate, having [end and second ends; a first transmission path, disposed on the substrate, having a third And a fourth end connected to the two ends; the first conductor includes a first bottom end and a first front end, and a bottom end is connected to the fourth end of the first transmission path, the first front end dog is out The second conductor includes a second t-end and/or a 1st end 1 and the second bottom end is connected to the "second transmission path of the younger one" 'the first front end along the Caesar Kind, preparation +, B, micro, the direction of transmission of the skin, separated from the first front end by a predetermined distance, and protruding in the guided space; and amplitude attenuation device,

2014-10266-PF 200947800 for attenuating microwaves, configured to be at least one of the first transmission path for connecting the second end and the fourth end to make the first transmission path and The amplitude of the microwaves transmitted by the second transmission path is the same, and the distance between the first front end and the second front end is u, and the first transmission path including the length of the first conductor is included. The path length is L2, the sum of the two is L1+L2, and the length difference between u+L2 and the second transmission path including the first length and the path length U is equal to (2n-l)"2 (n is an integer and is also the wavelength of the microwave), and the sum of the distance u and the governor length L3 is L1+L3, which is different from the length of the path length L2, and is not equal to (2η-1) Λ /2. According to this, the microwave amplitudes transmitted by the respective first and second transmission paths are identical at the connection point of the first and second transmission paths. Further, when two sets of mutually opposite microwaves are transmitted in the guided wave space, the microwave amplitude of the square at the connection point of the first and second transfer paths becomes "0". Therefore, it is indeed possible to extract only another microwave. The above described objects, features, and advantages of the invention will be apparent from the description and appended claims appended claims [Embodiment] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In addition, in the following figures, (four) or similar elements are denoted by the same or similar symbols, and the related description is omitted. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial side elevational view showing the overall structure of a plasma generating apparatus having a directional bonder in accordance with an embodiment of the present invention. In this embodiment,

2014-10266-PF 5 200947800 The plasma generating device PU is a plasma-treated workpiece and uses microwaves, and the second is used to generate electricity for irradiation to generate plasma at normal temperature and pressure. In this embodiment, as shown in the figure, the first guide turbidity Pu u #丁之 plasma generating device pu, including the brother, etc., the skin officer u, the second waveguide tube 12, 筮-播, 决捉番9n Two waveguides 13, microwave generating device 20, plasma generating unit 3, moon-type short circuit 40, cycle 3| 50, virtual load 6 〇, detail adjustment (StUb tuner) 70, directionality, ··= σ Is 10 and detector 8 6.

- the second and third waveguides u, 12, 13, for example, made of a non-non-magnetic metal such as aluminum, which is a long tube having a rectangular cross section, and directs the microwave generated by the microwave generating device 20 to the plasma generating unit. 3〇, ❹ is passed along the longer direction. The first, second and third waveguides are connected to each other by a flange and the microwave generating device 2 is provided. It is disposed above the first waveguide g 11 . Further, the detail adjuster 7 is disposed in the second waveguide 12, and the plasma generating unit 3 is disposed in the third waveguide w. Furthermore, as shown in FIG. 1, the circulator 5 〇 and the directional coupler 1 〇 are interposed between the first waveguide 1 and the second waveguide 12, and one end of the third waveguide 13 is slid. The type of short circuiters 4 are connected. The first waveguide 11, the second waveguide 12, and the third waveguide 13, each of which uses a top plate of the metal plate and a lower panel and two side panels to form a square column. Among the two ends. Further, it is not limited to the above-described flat plate forming method, and a rectangular waveguide or a non-divided waveguide which is formed by a processing method such as extrusion molding and bending of a sheet material can also be used. Further, it is not limited to the waveguide of the cross-section of the shape, and for example, a waveguide of an elliptical cross section may be used. Nor is it limited to non-magnetic metals. 2"〇14-l〇266-PF 6 200947800 can be composed of various materials capable of guiding waves. The microwave generating device 20 includes a device body 21 and a microwave transmitting antenna 22, and the device body 21 has a microwave generating source of a magnetron for generating a microwave such as 2.45 GHz, and the microwave transmitting antenna 22 discharges the microwave generated by the device body 21 to The inside of the first waveguide 11 is inside. In the plasma generating apparatus of the present embodiment, the microwave generating means 2 is applied to a microwave generating apparatus capable of continuously changing the microwave energy, such as 1 to 3000 W, and outputting it. In the microwave generating apparatus 20, the microwave transmitting antenna 22 is protruded from the apparatus main body 21 and is fixedly disposed in the first waveguide η. Specifically, the device body 21 is disposed on the upper panel hu of the first waveguide η, and the microwave transmitting antenna 22 is fixed to the guided wave inside the first waveguide 11 by penetrating through the through hole u of the upper panel uu. Space is 11 inches. By means of this composition, the microwave emitted by the microwave transmitting antenna 22 is guided into the first, first and second waveguides 11, 12, 13 and transmitted to the plasma generating unit 30 = _ plasma generation The unit 30 includes eight plasma generating nozzles 31 which are arranged in a row in the left and right directions and protrude from the lower panel 13A of the third waveguide 13. The workpiece to be processed or the like produced by the plasma of the plasma generating unit 30 has a delivery direction, and the maximum dimension in the width direction perpendicular to the delivery direction substantially coincides with the width of the plasma generating unit 3, that is, The arrangement width of the eight plasma generating nozzles 31 in the left-right direction. In this way, when the workpiece to be processed is delivered, it is possible to simultaneously perform plasma treatment on the entire surface of the workpiece (the opposite side of the lower panel 1). Next, the arrangement interval of the eight plasma generating nozzles 31 preferably corresponds to the wavelength λ of the microwave to be transmitted. For example, 2014-10266-pf 7 200947800 preferably aligns the plasma generating nozzle 31' with a wavelength of 1/2, 1/4 of the wavelength I, using a microwave of 2.45 GHz, and a rectangular waveguide 11, The cross-sectional area of 12 and 13 is 2.84 inches xl. In the case of 38 inches, since the plasma is 23 inches, the plasma generating nozzle 31 can be 115 mm (ι/2), or 5 7. Arrange the spacing of 5 mm (1 / 4 乂).

The plasma generating nozzle 31 includes a conductor 32 which passes through the lower panel 13A of the third waveguide 13 and protrudes in a fixed length in the waveguide space 13A. Through the conductor 32, the plasma generating nozzle 31 receives the microwave transmitted to the inside of the third waveguide 13, and utilizes microwave energy (microwave power) to enable the plasma to be generated. The sliding type short circuiter 40 is connected to the side of the third waveguide 13 in order to change the reflection position of the microwave to adjust the standing wave pattern, and is used to generate the conductor 32 of the nozzle 31 for each plasma, and The third waveguide is optimized with the combined state of the internally transmitted microwaves. Further, in the case where the standing wave is not used, a dummy load having a function of absorbing electric waves is provided instead of the sliding type short-circuiter 40. The J-month-type short-circuiting device 40 is a frame-shaped structure of the same rectangular cross section of the right spot-channel, Shira/, and Baixing second waveguide 13, and the inside of the sliding type initial circuit 1^40 is provided. A cylindrical reflective block 42. The optimization of the standing wave pattern depends on the movement of the reflective block 42. For the microwaves transmitted to the plasma generating unit 3Q, the reflections that are returned without consuming any power in the unit 30, (4)

Is 50, for example, a built-in magnetic column, a guided, and so on... anti-B ^ type two-turn circulator, is used to guide the reflected microwaves described above to the microwave generating device 20 . Due to the configuration of such a benefit, it prevents microwave generation.

2014-10266-PF 8 200947800 The device 20 is overheated due to reflection of microwaves. The virtual load 60 is a water-cooled (also air-cooled) electromagnetic absorber that converts thermal energy to absorb the aforementioned reflected microwaves. In the virtual load 6〇, a cooling water circulation port through which cooling water flows is provided, and heat generated by reflecting and reflecting the heat is exchanged, and heat is exchanged by the cooling water. The stub tuner 70 includes three detail adjuster units 70A to 70C' which are continuously disposed at a fixed interval on the upper surface of the second waveguide tube 12U for adjusting the second waveguide 12 and the electric The slurry produces the impedance of the mouth 31. The three detail adjuster units 70A to 70C have the same structure, and each includes a tube section 71 that protrudes in the waveguide space 12A of the second waveguide 12. The tube segments π of each of the three detail adjuster units 70A to 7〇c are adjustable in the pilot wave space 120. For example, after monitoring the power of the microwave power source, the maximum power consumption point of the conductor 32 (which produces the minimum reflected microwave point) is determined to determine the protruding length of the tube segments. ❹ In addition, this impedance adjustment method needs to be operated simultaneously with the sliding type short-circuiting device 4 if necessary. Next, the directional bonder ι associated with this embodiment will be described. In this embodiment, 'the directional coupler 1' is disposed between the circulator 5 〇 and the second waveguide 12 as shown in the figure, 'transmitting through the first, second and third waveguides η, 12, 13. Transfer the microwave generating device 2〇 to the plasma generating unit:. A portion of the incident microwave power is extracted. Fig. 2 is a perspective view showing the structure of the directional coupler 1G of the embodiment of the present invention. In this embodiment, the directional bond 1 〇 includes a directional bond

2014-10266-PF 9 200947800 The waveguide 80 and the directional combination circuit board 81. Directional combination Wave tube (4), which is the same as the first, second and third waveguides u, 12, u, is composed of non-non-magnetic metal such as Ming, and is a long tube with a rectangular cross section.

The microwave guided by the microwave generating device 20 is guided to the electropolymer generating unit I for long U-direction transmission. Step-by-step, for the microwave that is transmitted to the electrical equipment to generate an early 3 〇, for the reflected microwave that is returned to the side of the microwave generating device 2 without the power generation, the reference directional coupler is used. The waveguide 80 is transmitted. As shown in Figure 2, the directional combination (4) waveguides... a combination of holes 84Α, 84Β (the first and second joint holes 84Α, 84Β, each in a one-to-one, mouth way ' Corresponding to the directional social circuit base... 2 probes 83Α, 83Β (the 'the second conductor, 『: ^ will insert the corresponding probes_, _ each. The directional junction substrate 81 passes through the coupling hole 84Α, 84Β, such that the directional bond 1 probe _, _ protrudes from the directional bond (4) the waveguide 1 as shown in Fig. 2, the directional bond wire 82 has a predetermined path. The microstrip _ substrate 81 includes microstrip transmission The twirling wheel line 82 is connected to the above two photographic 83A, 83B for inputting the microwave and the reflected microwave of the portion transmitted by the directional coupler with the waveguide portion.

83B, transmitted to the microstrip transmission line 82, the pin 83A. In the following description, the bonding hole 84A of the inlet-fubo tube 80, and the direction and direction of the combination of the direction and the combination of the circuit board 81 2014- 10266-PF 10 200947800 Microstrip transmission line 82. Fig. 3 shows a waveguide microstrip transmission line 82 for the rigid directional combiner with a coupling hole 84 of the tube 8 。.眭 眭 电路 电路 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭 眭The "between the other ends" is also separated by the above-mentioned distance L1, and the upper hole "A," protrudes two: the waveguide 8 for the sex combiner. The knot is broadcasted in the guided wave space inside the waveguide 80 for the directional bond. These stalks and S Μ円 之 、 , MB, and the directional connector are transmitted inside the waveguide 80 and the microstrip transmission line 82. The microwaves and the reflected microwaves are respectively transmitted to the n-type towel & m 86, which is connected to the connection point X of the micro-transmission line 82 (the connection point of the second end and the fourth end, Alternatively, the connection qt of the first bottom end and the second strip transmission line 82 can detect the microwave power through the micro-reverse point X. The microstrip transmission line 82 includes a first transmission path and a second transmission path. A transmission path (first guiding path) from the front end P1 of the probe 83A to the connection point X, and a second transmission path (second conductor path) from the front end P3 of the probe 83B to the connection point X. The second transmission path of the chain has respective attenuators 85A, 85B for attenuating the amplitude. The attenuators 8W are mutually independent sigh attenuation amounts, which are used in the piano according to the set attenuation amount. The amplitudes of the human-transmitted microwaves and the reflected microwaves transmitted on the first and second transmission paths are respectively attenuated. Further, the microstrip transmission line 82

2014-10266-PF 200947800 The predetermined distance L2 of the first transmission path and the predetermined distance L3 of the second transmission path are used to form the shape of the microstrip transmission line 82. For example, three chip resistors can be used to form the attenuator 85b 85B. As shown in Fig. 3, the attenuator 85A is composed of three chip resistors, (1) R13, and the attenuation ^ 85β is composed of three wafers: and R21, R22, and R23 are connected by π-type. . The attenuator cores, 5Β each change the resistance of the resistors RU, R12, ri3, R2m Φ ❹ to achieve the desired amount of attenuation. In addition, the necessary conditions related to the attenuation of the attenuator will be described below. (4) The directional bonder uses the incident microwave transmitted by the guided wave f 8 ,, and the person transmitted to the microstrip transmission line 82 by the probe 83A emits the microwave and the incident microwave selects the first route from the front end η of the probe 83 ( The first: b) begins, and reaches the connection point 经由 via the position P2. Therefore, the length of the first route is L2. In addition, for the person who transmits the microwave through the probe (4) to the transmission line 82, in the case where the front end of the probe m is used as the reference, the incident microwave will select the second route from the rigid end of the probe m. Pi starts to transmit in the directional coupler with the waveguide 8 ,, the probe 83 Β the front end ρ3 (the second front end), and the length of the route through the front end ρ3 'n route is L1+L3. On the other hand, in the anti-microwave transmitted in the yoke of the directional connector for the waveguide 8, for the reflection 2 transmitted to the microstrip line via the probe 83B, the reflected microwave will select the third route from The front end of the probe 83B starts to 'reach the connection point X. Therefore, the route length of the third route

2〇l4-l〇266'PF 12 200947800 is the reflection microwave of the um through the probe 83A to the micro (four) transmission line ^, with the front end P3 of the probe 83B as the reference, the reflected microwave will select the fourth The route is transmitted from the directional connector in the waveguide 80 from the front end p3 of the probe 83β, and reaches the front end π of the probe, and reaches the connection point 经由 via the front end P1 and the position P2. In this case, the route length of this fourth route is lHL2.

Next, the necessary conditions between the above-described distances u, L2, and L3 and the necessary conditions between the attenuation amounts of the attenuators 85A and 85B will be described. In the directional coupler 10 of this embodiment, the power of the reflected microwaves transmitted by the directional coupler waveguide 80 is not detected. In order to detect the power of the incident microwave, the above-mentioned distances L1, L2, and L3 are not detected. And the attenuation amount of the attenuators 85A, 85β is required to be full; i the following conditions. Further, the wavelengths of the incident microwaves and the reflected microwaves transmitted through the waveguide 80 for the directional coupler are both again. First, as described above, the third route and the fourth route described above are routes in which the reflected microwaves reach the connection point 微 of the microstrip transmission line 82. The third route has a route length of L3' and the fourth route has a route length of L1+u. In this case, the difference in the length of the route between the third route and the fourth route is (2η 1)λ/2, and if the amplitudes of the reflected microwaves respectively transmitted on the third route and the fourth route are equal to each other, respectively The reflected microwaves will cancel each other without the reflected microwaves being output from the connection point. In other words, the reflected microwaves must meet the following two requirements. (1) The third route with the length of the route L3 and the fourth route with the length of the route, the difference in the length of the dispute between the two is (2η_1)λ /2 (n is an integer). That is, the reflected microwave system transmitted on each of the third route and the fourth route is the reverse phase of 2014-102 66-PF 13 200947800. (2) The amplitudes of the reflected microwaves respectively transmitted on the third route and the fourth route are equal. The condition (2) described above can be satisfied by individually adjusting the attenuation amounts of the attenuators 85A, 8^. Next, as described above, the first route and the second route described above are routes where the incident microwave reaches the connection point 微 of the microstrip transmission line 82. The route of the first route 〇 is L2' and the route length of the second route is L1+L3. Therefore, if the difference between the route length of the first route and the first route does not satisfy at least (2η 1)λ/2, then the respective transmitted human microwaves will not cancel each other, and the incident microwave is taken out from the connection point X. . In other words, the reflected microwaves must meet the following requirements. (8) The route length is L2 H line and the second route with material length L1+L3, the difference between the two routes is not (2n-iu/2 (n is the whole parameter)

For example, when the route length A is the first route of L2 and the route length is L1+L3, the difference between the lengths of the two is ηΛ (η is an integer), then the above-mentioned flute can be satisfied. Politics Jiang Zhidi (3) conditions. In this case, the first transmission of the first route on the first route is the same phase, and the phase combiner uses the waveguide 8G to 偻^ λ u the directionality of the incident microwave transmitted from the connection point X. The amplitude of the incident microwave is large, and the junction of the directional connector 84) is 84A. In one embodiment, the waveguide for the distance directional coupler between 84B is λ /4. In the bonding hole 82 of the microstrip transmission line 80, the distance

2014-10266-PF 14 200947800 The difference between the first transmission path of L2 and the second transmission distance of distance L3 is "4. In this case, the third route with the route length L3 and the length of the route are said to be In the fourth route, the difference in the length of the route between the two becomes /2, and therefore, the reflected microwaves respectively transmitted on the third route and the fourth route become inverted. On the other hand, for the first route with the route length L2 and the second route with the route length L1+L3, the route length of the two routes

And so, therefore, the incident microwaves transmitted on the first route and the second route are in phase. The detector 86' detects the output incident microwave power through the connection point of the microstrip transmission line 82, and outputs the detection result to the device main body 21 of the microwave generating device. The main unit 21 controls the microwave generating source based on the result of the measurement to make the microwave output generated by the microwave source i stable. Next, a description will be given of the specific structure of the directional bonding circuit substrate 81. 4 is a schematic plan view showing the directional bonding circuit substrate 81 in the directional bonding circuit substrate 81 of FIG. 4, and is operated at the connection point X of the microstrip transmission line 2, and the drawing path of the side (first) The transmission path L) is connected to the probe 83A, and the other end of the extraction path (second transmission path) is connected to the probe 83B. Specifically, the microstrip transmission line 82 includes first, second, and third microstrip transmission lines 82A, and oorw π _ 82B 82C (first, second, and third patterns). The first microstrip transmission line 82a of the first =k path has a transmission line pattern extending along the left-right direction in the figure, and includes a first end MAI on the left side of the substrate 81 and a second end on the opposite side of the substrate 81. end. The first end 82ai is connected to the bottom end of the probe 83A (the first bottom end of the second conductor).

Zhifu 14-10266-PF 15 200947800 Neck-like 'second transmission path / has a transmission extending in the left and right direction of the figure::: The third end 82B1 of the right side of the transmission line tie 81 is included with The substrate is located at a fourth end connected to the bottom surface of the probe 83β. Third end)). The bottom end of the derivative (the second bottom of the second conductor: the third microstrip transmission line of the two transmission paths, has a transmission line pattern extending along the direction of the figure (first direction), and includes

1 is a fifth end 82C1 of the upper side and a sixth end opposite thereto. The fifth knowledge 8 2C1 is connected to the detector.

The second end and the fourth end of the first, second, and third microstrip transmission lines 82A, 82B, and 82C are connected to the connection point ( on the (four) board 81. The first microstrip transmission line 82 is taken through the material 83 and transmitted to the connection point X. The second microstrip transmission line 82A receives the microwave via the probe 83 and transmits it to the connection point X. The microwaves respectively transmitted by the first and second microstrip transmission lines 82A, 82β are synthesized at the connection point X. The synthesized microwave is transmitted to the second microstrip transmission line 82C' and finally output by the detector 86. The attenuators 85 Α, 85 Β are interposed between the first and second microstrip transmission lines 82 Α, 82 Β between the transmission line segments established on the respective paths such that the microwaves transmitted on the respective paths attenuate only the preset attenuation amount. The attenuator 85 is formed by connecting three chip resistors R11, R12, and R13 in a π-shape, and the attenuator 85 is composed of three chip resistors R21, R22, and R23 connected in a π-shape. The ground line 87 is disposed beside the microstrip transmission lines 82A and 82B. Therefore, the chip resistors R12, R13, R22, and R23 of the attenuators 85A and 85B are grounded via the ground line 87. 2014-10266-PF 16 200947800 As described above, the attenuators 85A and 85B have the effect of attenuating the amplitude of the microwave power transmitted from the probes "A, 83B", and have the following effects. As shown in FIG. 4, the impedance characteristics of the transmission path are changeable on the connection point of the first, second, and third microstrip transmission lines 82A, 82B, and 82C. In this regard, the first and second The microstrip transmission lines m and 82B are different from the extension direction of the third microstrip transmission line 82C, which is also a main cause.

Therefore, a part of the microwaves transmitted from the probes 83A, on the first and second microstrip transmission lines 82A, 82B, will be reflected on the connection point, and then on the first and second microstrip transmission lines 82. Transfer on 82β, using the return probes 83Α, 83Β. In addition, a part of the microwaves of the returning probes 83Α and (4) are reflected by the first and second microstrip transmission lines 82Α1 and the second end 82Β1 for transmission to the first end of 82 Α, 82 至 to Connection point ❹ X end. At this time, it is assumed that the microwaves originally transmitted on the first and second microstrip transmission lines 82Α, 82Β, after the above-mentioned reflections are repeated, in the case where the attenuators 85Α, 8 are redundant, plus the reflection by the above The generated reflected waves make it difficult to correctly detect the microwaves obtained by the probes 83, 83. On the other hand, in this embodiment, after the first and second microstrip transmission lines 82 A 82B each have an attenuator "A, mb", the attenuators 85A, 85B can attenuate the reflected waves from the reflection. Therefore, when the detector 86 detects the microwave power output at the connection point, it can suppress the influence of the reflected wave as described above. The above is a description of the embodiments of the present invention, but it is not intended to limit the present invention. For example, reference may be made to the embodiments described below.

2014-10266-PF 17 200947800 The directional combination of the circuit board of the embodiment is described. The first transmission path and the second transmission path each have:: 85A, 85B, but may also be ΜJ Μ, let the first One of the transmission path and the second path has an attenuator. Further, in the above-described embodiments, the following features are mainly included in the present invention. The invention provides a directional bonding circuit substrate comprising: a substrate, a first value translation path, a transmission path, and is disposed on the substrate, and the end and the second end; the first value, the hundredth a first-transmission path disposed on the substrate, and the second end of the right and the second end, the first end, and the first end, "one: the first conductor, including the first-bottom end, the first material The first body connected to the first transmission path includes a terminal protruding in the guided wave space of the microwave transmission; a second guiding end portion and a second front end, wherein the second bottom end is connected to the third end of the transmission path, The second front end is transmitted along the microwave;: ― is separated from the first front end by a predetermined distance, and protrudes from the second direction; the amplitude mitigation device is used to attenuate the microwave, and is configured to be "2nd, vibrating and the first At least one of the two transmission paths is disposed at a connection point of the four ends of the first transmission path, so that the microwaves transmitted by the first end and the first end are respectively excited between the second front end of the melon, and the characteristics thereof The path length of the first front end and the transmission path is L2, and the sum of the two = body length The first-contained second conductor has a length U+L2' LHL2 and a packet length difference, and is equal to a length between the second transmission paths of the main U, and the distance L1; ^η_Ό_λ/2 U is an integer and λ is the wave of the microwave. The way! The sum of the long U is L1+L3, and the path

2014-10266-PF 18 200947800 The length difference of length L2 is not equal to (2η1) Λ /2. According to this configuration, the amplitudes of the microwaves transmitted on the first and second transmission paths are identical at the connection points of the first and second transmission paths. Further, when two sets of mutually opposite microwaves are transmitted in the guided wave space towel, the microwave amplitude of #中-square becomes zero at the connection point of the first-and second transfer paths. Therefore, it is indeed possible to take only another microwave. In the foregoing composition mode, the first front end and the second front end are the most

Preferably, the first probe and the second probe are arranged at a front end, and the first probe and the second probe are disposed in a direction perpendicular to the direction in which the microwave is transmitted. According to this composition method, the arrangement and position of the first front end and the second front end can be easily determined. In the foregoing composition, it is preferable to further include a circuit pattern disposed on a surface of the substrate, wherein the circuit pattern includes a first pattern, a second pattern, a connection point, and a third pattern, wherein the first pattern constitutes the a first transfer path, the second pattern constituting the second transfer path, the connection point being connected to the second end and the fourth end corresponding to the second pattern and the second pattern, the second pattern being The connection point begins to extend toward the detection end of the microwave power, and wherein the amplitude attenuating means are each disposed in the first and second patterns. According to this composition mode, the impedance characteristics of the transmission path are changeable at the connection points to which the first, second and third patterns are connected, even if the microwaves transmitted by the first and second patterns are reflected at the connection point In this case, the reflected wave generated at the connection point can also be attenuated by the amplitude attenuating means provided in each of the first and second patterns. Therefore, the microwave originally outputted from the connection point can be accurately extracted. 2014-10266-PF 19 200947800 includes a fifth end and a sixth end, = a dedicated path, disposed on the substrate, on the substrate, the first pass = a predetermined first direction extending 'where, the direction and the The first direction is different, and the second path extends along the third direction by one or two "boards, (four) two transmissions - and the second direction is different" two directions and the second direction or the side of the first substrate , the middle, the third, the fifth and the fifth end are located at the predetermined °" the first, fourth and sixth ends are connected to the substrate < the position, and the first and second In the transmission path, the 5 mitigation devices are respectively arranged on the connection point of the second and sixth ends of the first, second and third transmission paths according to the first or second trajectory The anti-corrosion of the microwave is because the amplitude attenuation device attenuates the reflected wave, so that only the microwave that should be output can be taken out. In this case, it is preferable to further include a grounding wire, which is disposed on the substrate and used as a ground potential. Wherein the amplitude attenuating device utilizes the first green light path and the ground line 'And the second transmission path and the grounding device' respectively form a T-shaped connection of the three wafer resistors to form an attenuation 依据. According to this composition mode, the amplitude mitigation device can be simply formed on the substrate. In another aspect, the present invention provides a directional bonder comprising: a guide: a relay for transmitting microwaves; a conductor path having a first front end and a _ bottom end 'second conductor path' having a second front end and a second a bottom end of the first bottom end of the first bottom end; and an amplitude attenuating device disposed at least one of the first and second conductor paths for the first bottom end and the second bottom end -1〇266-Pf 200947800 The connection point of the second bottom end is such that the amplitudes of the microwaves transmitted in the first and second conductor paths are identical, and the first front end protrudes from the guide in the waveguide In the wave space, the second front end is spaced apart from the first front end by a predetermined distance along the direction of the microwave, and protrudes from the guided wave space, and the distance between the first front end and the second front end is L1. Long path of a conductor path L2, the sum of the two is L1+L2, the length difference between LHL2 and the second conductor path with path length u is equal to Un-U and /2, (η_ is an integer and λ is the wavelength of the microwave) The sum of the distance L1 and the path length L3 is L1+L3, which is different from the length of the path length l2, and is not equal to (2η-1)λ /2. According to this composition mode, the first and second transmission paths The microwave amplitudes transmitted on the respective ones are identical at the connection points of the first and second conductor paths. Therefore, when two sets of mutually subtracted microwaves are transmitted along the longer direction of the I-wave tube, the first and second conductors are At the connection point of the path, the microwave amplitude of one of the paths does become 0. Therefore, it is possible to surely remove only one of the microwaves. In the above-described composition, it is preferable to further include a substrate to support at least the first and The first and second bottom ends of the second conductor path and the amplitude attenuating means. In addition, the first front end and the second front end are preferably composed of a first probe and a second probe front end, and the first probe and the second probe are disposed in a direction perpendicular to the microwave transmission direction. And the first and second probes protrude from the waveguide, and the first bonding hole and the second bonding hole are formed on the side of the waveguide. According to this composition, the configuration and position of the first front end and the second front end can be easily determined from 2014-10266-PF 21 200947800. In this case, it is preferable to further include a circuit pattern disposed on a surface of the substrate, wherein the circuit pattern includes a first pattern, a second pattern, a connection point, and a third pattern, the first pattern at least constituting the a portion of the first conductor path, the second pattern forming at least a portion of the second transmission path, the connection point and the first bottom end corresponding to the first pattern and the second pattern and the first The bottom ends are connected to each other, and the third pattern extends from the connection point toward the detection end of the micro-φ wave power, and wherein the amplitude attenuation devices are respectively disposed in the first and second patterns. In another aspect, the present invention provides a plasma generating apparatus comprising: a microwave generating device for generating a microwave; a battery generating unit receiving the microwave generated by the microwave generating device and generating a plasma by using the energy of the microwave; The directional junction combiner is disposed in a waveguide path between the microwave generating device and the plasma generating unit for obtaining power of a part of the microwave transmitted in the waveguide; and detecting a detector that detects the power obtained by the direction of the ''& combiner and outputs the result of (4) to the microwave generating device, wherein the microwave generating device controls the detection result according to the detector The microwave output produced by itself. In the above plasma generating apparatus, when two sets of mutually opposite incident microwaves and reflected microwaves are transmitted along the longer direction of the waveguide, the reflected microwave amplitude is surely changed at the connection point of the first and second conductor paths. Fortunately, it is indeed possible to operate only the incident microwave. Since the power of the detected incident chopping wave can be detected without being reflected by the reflected microwave, the rotation of the microwave can be controlled according to the detection result to achieve the purpose of stable rotation.

2014-10266-PF 22 200947800 According to the above description, the small directional combined circuit substrate provided by the present invention and the directional coupler thereof are capable of accurately extracting the waveguide The microwaves that are delivered. The directional combination of the circuit board and the directional coupler of the present invention is applied to a processing device and a film forming device for a semiconductor substrate such as a semiconductor wafer, and is processed for a display panel. A device, a sterilization treatment device for medical equipment, and the like, a protein decomposition device, and the like. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention to those skilled in the art, and various changes and modifications may be made without departing from the spirit and scope of the invention. The person defined in (4) Dividend (4) is subject to the definition. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial side elevational view showing the entire structure of an electropolymer generating apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing a sister of a directional coupler according to an embodiment of the present invention. Fig. 3 is a view showing a waveguide for a directional bonder and a directional joint circuit substrate. ^ Fig. 4 is a schematic plan view showing a directional bonding circuit substrate. [Description of main component symbols] pu~ plasma generation device 11~first waveguide; 111 perforation; 10~ directional bond; 11ϋ, 12U~ upper panel 12~second waveguide;

2014-10266-PF 23 200947800 13B~lower panel; 21~device body; 30~plasma generating unit; 32~conductor; 42~reflecting block; 60~virtual load; 13~third waveguide; 20~microwave generation Device; 22~ microwave transmitting antenna; 31~ plasma generating nozzle; 40~ sliding short circuiter; 50~ circulator; 70~ stub tuner; 71~ pipe segment;

70A, 70B, 700 detail adjuster unit; 80~ directional coupler waveguide; 81~ directional combined circuit board; 82, 82A, 82B, 82C~ microstrip transmission line; 83A, 83B~ probe; 84A, 84B ~ combined hole; 85A, 85B ~ attenuator; 86 ~ detector 8 7 ~ ground line;

Rll, R12, R13, R21, R22, R23~ chip resistance; and PI, P3~ front end. 2014-10266-PF 24

Claims (1)

200947800 VII. Patent application scope: 1 * A direction 杻 substrate; a first transmission path, 1^, combined circuit substrate, comprising: disposed on the substrate, having a first end and a first end; a 迗 path disposed on the substrate , having a third end and a fourth end connected to the second end; The first conductor, the package # 笛 ^ ^ includes a first bottom end and a first front end, the first connection is connected to the guided space of the first transmission path and the second transmission; the dog is included in the microwave conductor The second bottom end and the second front end are connected to the second end of the second transmission path ▲ 底 底 连 , , , , , , , , , , 沿着 沿着 沿着 沿着 沿着 沿着 沿着 沿着 沿着 沿着 沿着- the heart is separated by a predetermined distance 'and protrudes in the waveguide booth, and the amplitude attenuating means 'is attenuated for the microwave, and is disposed at least in the first transmission path and the second transmission path" for a connection point between the second end and the fourth end, such that the microwave amplitude of each of the [transfer and the second transmission path is transmitted, wherein the distance between the first front end and the second front end is L1, the path length of the first transmission path including the length of the first conductor is L2, the sum of the two is U+L2, L1+L2 and the second transmission path including the length of the second conductor and having a path length L3 The difference between the lengths is equal to (211-1) and /2 (11 is an integer and 1 is the wavelength of the microwave), With the path length from L1 and L3 is the sum L1 + L3, the length of the path length difference 2014-1Q266-PF 25 200947800 L2 of the 'system is not equal to (2η_ι) λ / 2. 2. The directional bonding circuit substrate according to claim 1, wherein the first front end and the second front end are composed of a first probe and a front end of the second probe, the first probe The needle and the second probe are disposed in an extending direction perpendicular to the microwave transmission direction. 3. The directional combination of the circuit substrate as described in the scope of the patent application, further comprising: a circuit pattern disposed on a surface of the substrate, wherein the circuit pattern comprises a first pattern, a second pattern, a connection point, and a a second pattern, the first pattern constituting the first transport path, the second pattern constituting the second transport path, the connection point and the second end and the fourth corresponding to the first pattern and the second pattern The end phase is connected, and the third pattern starts from the connection point and extends toward the detecting end of the microwave power, and the amplitude attenuating devices are respectively disposed in the first and second patterns. 4. The directional bonding circuit 基板 substrate according to claim 2 or 2, further comprising: a third transmission path disposed on the substrate, comprising a fifth end and a sixth end, along the predetermined Extending in a direction, wherein the first transport path extends along the second direction, the second direction is different from the first direction, and the second transport path extends along the third direction on the substrate The first direction is different from the second direction or the first and second directions, the first, second, and fifth ends are located on the side of the substrate, and the second, fifth, and sixth ends are connected to the a predetermined position on the substrate, 2014-10266-PF 26 200947800, and the amplitude attenuating device are respectively disposed in the first and the third pass: 方向5, as described in claim 4, the directional combination circuit substrate, The method includes: a grounding wire disposed on the substrate for use as a ground potential, The amplitude attenuating device uses the first transmission path and the ground line ', and uses the second transmission path and the ground line to form a π-shaped connection ′ for each of the three wafer resistors to constitute an attenuator. 6. A directional coupler comprising: a waveguide for transmitting microwaves; a first conductor path having a first front end and a first bottom end; the second bottom second conductor path having a second front end and a bottom end, the end is connected to the first bottom end; and the vibration 1 mitigation device is configured to reduce the microwave, and is disposed at least in the first and second conductor paths for the first bottom a connection point between the end and the second bottom end, such that the amplitudes of the microwaves transmitted in the first and second conductor paths are identical, wherein the first front end protrudes from the guided wave space in the waveguide; The second front end is spaced apart from the first front end by a predetermined distance along the direction of the microwave transmission, and protrudes from the guided wave space. The distance between the first front end and the second front end is L1, and the first conductive path is The length of the road control is L2, the sum of the two is L1+L2, LI + L2 and the path length 2014-10266-PF 27 200947800 are the length difference between the second conductor paths of L3, which is equal to (2nd) several/2 (π is an integer and 1 is the wavelength of the microwave), and the distance L1 and the Diameter Length L3 is the sum of L1 + L3, the path length difference between the length L2, the system is not equal to (h-i) λ / 2. 7. The directional bonder of claim 6, further comprising: the substrate 'supporting at least the first and second bottom ends of the first and second conductor paths, and the amplitude attenuating means. 8. The directional coupler of claim 7, wherein the first front end and the second front end are formed by a front end of the first probe and the second probe. The second probe is disposed in an extending direction perpendicular to the microwave transmitting direction, and protrudes the first and second probes in the waveguide tube to form a first _ coupling hole and a side of the waveguide Two combined holes. The directional bonder of claim 7 or 8, further comprising: a circuit pattern disposed on a surface of the substrate, wherein the circuit pattern includes a first pattern, a second pattern, and a connection point And the third pattern 'the first pattern constituting at least one portion of the first conductor path, the second pattern forming at least one portion of the second transmission path, the connection point corresponding to the first pattern and the first The first-bottom end of the second pattern is connected to the first-bottom end, and the second pattern of the cage-4 stupid_L, the item starts from the connection point, extends toward the detecting end of the microwave power, and attenuates the vibrating field The device is respectively configured in the first and the first sample: a plasma generating device, comprising: a microwave generating device for generating microwaves; a plasma generating unit receiving the microwave generating device And the directional bonder according to any one of claims 6 to 9, wherein the waveguide is disposed in the microwave Generating device and the electricity Pulp production In the guided wave path between the cells, the power of the microwaves transmitted to the waveguide is obtained; and the power obtained by the device is detected, and the detector is detected by the directional combined detection result. To the microwave generating device, the detector is characterized in that the microwave generating device controls the microwave output generated by itself according to the detection result. 2014-10266-PF 29