TW200947543A - Dicing tape and die attach adhesive with patterned backing - Google Patents
Dicing tape and die attach adhesive with patterned backing Download PDFInfo
- Publication number
- TW200947543A TW200947543A TW098107450A TW98107450A TW200947543A TW 200947543 A TW200947543 A TW 200947543A TW 098107450 A TW098107450 A TW 098107450A TW 98107450 A TW98107450 A TW 98107450A TW 200947543 A TW200947543 A TW 200947543A
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- TW
- Taiwan
- Prior art keywords
- adhesive
- tape
- backing
- acrylate
- wafer
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
- C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
- C09J133/08—Homopolymers or copolymers of acrylic acid esters
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
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- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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- C—CHEMISTRY; METALLURGY
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- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/287—Adhesive compositions including epoxy group or epoxy polymer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2852—Adhesive compositions
- Y10T428/2878—Adhesive compositions including addition polymer from unsaturated monomer
- Y10T428/2891—Adhesive compositions including addition polymer from unsaturated monomer including addition polymer from alpha-beta unsaturated carboxylic acid [e.g., acrylic acid, methacrylic acid, etc.] Or derivative thereof
Landscapes
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Adhesive Tapes (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3479108P | 2008-03-07 | 2008-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200947543A true TW200947543A (en) | 2009-11-16 |
Family
ID=40834530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098107450A TW200947543A (en) | 2008-03-07 | 2009-03-06 | Dicing tape and die attach adhesive with patterned backing |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7858499B2 (enExample) |
| EP (1) | EP2257608A1 (enExample) |
| JP (1) | JP2011513995A (enExample) |
| KR (1) | KR20100122110A (enExample) |
| CN (1) | CN102015943A (enExample) |
| TW (1) | TW200947543A (enExample) |
| WO (1) | WO2009114345A1 (enExample) |
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| JP2010062269A (ja) * | 2008-09-02 | 2010-03-18 | Three M Innovative Properties Co | ウェーハ積層体の製造方法、ウェーハ積層体製造装置、ウェーハ積層体、支持層剥離方法、及びウェーハの製造方法 |
| JP2011018669A (ja) * | 2009-07-07 | 2011-01-27 | Nitto Denko Corp | 半導体ウェハダイシング用粘着シート及び該粘着シートを用いる半導体ウェハのダイシング方法 |
| US8987632B2 (en) * | 2009-10-09 | 2015-03-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Modification of surface energy via direct laser ablative surface patterning |
| US9911683B2 (en) * | 2010-04-19 | 2018-03-06 | Nitto Denko Corporation | Film for back surface of flip-chip semiconductor |
| JP5583080B2 (ja) * | 2010-07-07 | 2014-09-03 | 古河電気工業株式会社 | ウエハ加工用テープおよびそれを用いた半導体加工方法 |
| US8501590B2 (en) | 2011-07-05 | 2013-08-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and methods for dicing interposer assembly |
| US8580683B2 (en) | 2011-09-27 | 2013-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and methods for molding die on wafer interposers |
| CN102690611B (zh) * | 2011-12-27 | 2015-06-24 | 3M中国有限公司 | 胶带组合物以及由其制备的胶带 |
| US8940618B2 (en) * | 2012-03-13 | 2015-01-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and device for cutting semiconductor wafers |
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| US9056438B2 (en) | 2012-05-02 | 2015-06-16 | 3M Innovative Properties Company | Curable composition, articles comprising the curable composition, and method of making the same |
| JP2015525430A (ja) | 2012-05-18 | 2015-09-03 | スリーエム イノベイティブ プロパティズ カンパニー | オーバーコートされたナノワイヤ透明導電コーティングのコロナによるパターニング |
| US9278374B2 (en) | 2012-06-08 | 2016-03-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Modified surface having low adhesion properties to mitigate insect residue adhesion |
| US8962389B2 (en) | 2013-05-30 | 2015-02-24 | Freescale Semiconductor, Inc. | Microelectronic packages including patterned die attach material and methods for the fabrication thereof |
| TWI575779B (zh) * | 2014-03-31 | 2017-03-21 | 精材科技股份有限公司 | 晶片封裝體及其製造方法 |
| WO2015175517A1 (en) * | 2014-05-12 | 2015-11-19 | Skyworks Solutions, Inc. | Devices and methods for processing singulated radio-frequency units |
| US11069734B2 (en) | 2014-12-11 | 2021-07-20 | Invensas Corporation | Image sensor device |
| CN108028292B (zh) | 2015-03-06 | 2020-11-17 | 亮锐控股有限公司 | 使用切割带将陶瓷磷光板附着在发光器件(led)管芯上的方法、形成切割带的方法以及切割带 |
| JP6454580B2 (ja) * | 2015-03-30 | 2019-01-16 | デクセリアルズ株式会社 | 熱硬化性接着シート、及び半導体装置の製造方法 |
| US9741620B2 (en) * | 2015-06-24 | 2017-08-22 | Invensas Corporation | Structures and methods for reliable packages |
| WO2017018459A1 (ja) * | 2015-07-29 | 2017-02-02 | 日立化成株式会社 | 接着剤組成物、硬化物、半導体装置及びその製造方法 |
| TWI889995B (zh) * | 2016-01-15 | 2025-07-11 | 荷蘭商庫力克及索發荷蘭公司 | 放置超小或超薄之離散組件 |
| DE102016203413A1 (de) * | 2016-03-02 | 2017-09-07 | Tesa Se | Erhöhung der Abzugskraft durch selektive Plasmavorbehandlung |
| US10204893B2 (en) | 2016-05-19 | 2019-02-12 | Invensas Bonding Technologies, Inc. | Stacked dies and methods for forming bonded structures |
| US10269756B2 (en) | 2017-04-21 | 2019-04-23 | Invensas Bonding Technologies, Inc. | Die processing |
| US10879212B2 (en) | 2017-05-11 | 2020-12-29 | Invensas Bonding Technologies, Inc. | Processed stacked dies |
| US10217720B2 (en) | 2017-06-15 | 2019-02-26 | Invensas Corporation | Multi-chip modules formed using wafer-level processing of a reconstitute wafer |
| US10727219B2 (en) * | 2018-02-15 | 2020-07-28 | Invensas Bonding Technologies, Inc. | Techniques for processing devices |
| US11276676B2 (en) | 2018-05-15 | 2022-03-15 | Invensas Bonding Technologies, Inc. | Stacked devices and methods of fabrication |
| WO2020010136A1 (en) | 2018-07-06 | 2020-01-09 | Invensas Bonding Technologies, Inc. | Molded direct bonded and interconnected stack |
| WO2020010265A1 (en) | 2018-07-06 | 2020-01-09 | Invensas Bonding Technologies, Inc. | Microelectronic assemblies |
| JP7189705B2 (ja) * | 2018-09-03 | 2022-12-14 | 株式会社ディスコ | テープ貼着方法及びテープ拡張方法 |
| US11256029B2 (en) | 2018-10-15 | 2022-02-22 | Lightmatter, Inc. | Photonics packaging method and device |
| WO2020150159A1 (en) | 2019-01-14 | 2020-07-23 | Invensas Bonding Technologies, Inc. | Bonded structures |
| US10884313B2 (en) | 2019-01-15 | 2021-01-05 | Lightmatter, Inc. | High-efficiency multi-slot waveguide nano-opto-electromechanical phase modulator |
| US11296053B2 (en) | 2019-06-26 | 2022-04-05 | Invensas Bonding Technologies, Inc. | Direct bonded stack structures for increased reliability and improved yield in microelectronics |
| US12080672B2 (en) | 2019-09-26 | 2024-09-03 | Adeia Semiconductor Bonding Technologies Inc. | Direct gang bonding methods including directly bonding first element to second element to form bonded structure without adhesive |
| KR102786304B1 (ko) * | 2019-10-29 | 2025-03-26 | 삼성전자 주식회사 | 접착 부재를 포함하는 전자 장치 |
| US11742314B2 (en) | 2020-03-31 | 2023-08-29 | Adeia Semiconductor Bonding Technologies Inc. | Reliable hybrid bonded apparatus |
| US11631647B2 (en) | 2020-06-30 | 2023-04-18 | Adeia Semiconductor Bonding Technologies Inc. | Integrated device packages with integrated device die and dummy element |
| US11728273B2 (en) | 2020-09-04 | 2023-08-15 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structure with interconnect structure |
| US11764177B2 (en) | 2020-09-04 | 2023-09-19 | Adeia Semiconductor Bonding Technologies Inc. | Bonded structure with interconnect structure |
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| US5139804A (en) | 1987-05-14 | 1992-08-18 | Plicon, Inc. | Patterned adherent film structures and process for making |
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| US5049085A (en) * | 1989-12-22 | 1991-09-17 | Minnesota Mining And Manufacturing Company | Anisotropically conductive polymeric matrix |
| DE4230784A1 (de) * | 1992-09-15 | 1994-03-17 | Beiersdorf Ag | Durch Strahlung partiell entklebendes Selbstklebeband (Dicing Tape) |
| JP3483161B2 (ja) | 1994-08-11 | 2004-01-06 | リンテック株式会社 | 粘接着テープおよびその使用方法 |
| JP3521099B2 (ja) | 1994-11-29 | 2004-04-19 | リンテック株式会社 | ダイシング用リングフレームへの接着剤の付着防止用粘着シートおよび該粘着シートを備えたウェハ加工用シート |
| TW505942B (en) | 2000-06-29 | 2002-10-11 | Matsushita Electric Industrial Co Ltd | Method and apparatus for forming pattern onto panel substrate |
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| JP2006104246A (ja) | 2004-10-01 | 2006-04-20 | Sumitomo Chemical Co Ltd | 粘着用積層体 |
| JP4799205B2 (ja) | 2006-02-16 | 2011-10-26 | 日東電工株式会社 | 活性面貼付ダイシング用粘着テープ又はシートおよび被加工物の切断片のピックアップ方法 |
| JP4970863B2 (ja) | 2006-07-13 | 2012-07-11 | 日東電工株式会社 | 被加工物の加工方法 |
| WO2008039130A1 (en) * | 2006-09-29 | 2008-04-03 | Ge Healthcare Bio-Sciences Ab | Method and device for small scale reactions |
| KR20100014539A (ko) * | 2007-03-16 | 2010-02-10 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 다이싱 및 다이 부착 접착제 |
-
2009
- 2009-03-04 EP EP09719469A patent/EP2257608A1/en not_active Withdrawn
- 2009-03-04 CN CN2009801157248A patent/CN102015943A/zh active Pending
- 2009-03-04 JP JP2010549837A patent/JP2011513995A/ja not_active Withdrawn
- 2009-03-04 KR KR1020107021970A patent/KR20100122110A/ko not_active Withdrawn
- 2009-03-04 WO PCT/US2009/035948 patent/WO2009114345A1/en not_active Ceased
- 2009-03-06 TW TW098107450A patent/TW200947543A/zh unknown
- 2009-03-06 US US12/399,054 patent/US7858499B2/en not_active Expired - Fee Related
-
2010
- 2010-11-15 US US12/946,185 patent/US8008783B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20100122110A (ko) | 2010-11-19 |
| JP2011513995A (ja) | 2011-04-28 |
| US20090227089A1 (en) | 2009-09-10 |
| US20110064948A1 (en) | 2011-03-17 |
| US8008783B2 (en) | 2011-08-30 |
| WO2009114345A1 (en) | 2009-09-17 |
| CN102015943A (zh) | 2011-04-13 |
| US7858499B2 (en) | 2010-12-28 |
| EP2257608A1 (en) | 2010-12-08 |
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