TW200946918A - Probe card transfer apparatus - Google Patents

Probe card transfer apparatus Download PDF

Info

Publication number
TW200946918A
TW200946918A TW098104975A TW98104975A TW200946918A TW 200946918 A TW200946918 A TW 200946918A TW 098104975 A TW098104975 A TW 098104975A TW 98104975 A TW98104975 A TW 98104975A TW 200946918 A TW200946918 A TW 200946918A
Authority
TW
Taiwan
Prior art keywords
probe card
moving
links
take
chuck
Prior art date
Application number
TW098104975A
Other languages
English (en)
Chinese (zh)
Inventor
Morihiro Saito
Original Assignee
Kyodo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyodo Co Ltd filed Critical Kyodo Co Ltd
Publication of TW200946918A publication Critical patent/TW200946918A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW098104975A 2008-02-25 2009-02-17 Probe card transfer apparatus TW200946918A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008042667A JP4514236B2 (ja) 2008-02-25 2008-02-25 プローブカード移載装置

Publications (1)

Publication Number Publication Date
TW200946918A true TW200946918A (en) 2009-11-16

Family

ID=41143550

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098104975A TW200946918A (en) 2008-02-25 2009-02-17 Probe card transfer apparatus

Country Status (3)

Country Link
JP (1) JP4514236B2 (ja)
KR (1) KR101029060B1 (ja)
TW (1) TW200946918A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI810987B (zh) * 2022-06-24 2023-08-01 漢民測試系統股份有限公司 探針卡載具、搬運台車以及倉儲系統

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5510963B2 (ja) * 2010-10-07 2014-06-04 株式会社協同 プローブカード移載装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0470747U (ja) * 1990-10-30 1992-06-23
EP0811167B1 (en) * 1995-02-23 2001-09-05 Aesop Inc. Manipulator for automatic test equipment test head
JP2005265658A (ja) * 2004-03-19 2005-09-29 Tokyo Electron Ltd 複数種のテスタに対応可能なプローブ装置
JP2007165715A (ja) * 2005-12-15 2007-06-28 Tokyo Electron Ltd プローブカードの装着方法及びこの方法に用いられるプローブカード移載補助装置
JP2008016676A (ja) * 2006-07-06 2008-01-24 Micronics Japan Co Ltd プローブカード自動交換機構及び検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI810987B (zh) * 2022-06-24 2023-08-01 漢民測試系統股份有限公司 探針卡載具、搬運台車以及倉儲系統

Also Published As

Publication number Publication date
KR101029060B1 (ko) 2011-04-15
JP4514236B2 (ja) 2010-07-28
JP2009200390A (ja) 2009-09-03
KR20090091652A (ko) 2009-08-28

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