200946918 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種探針卡轉接裝置，特別是有關於 一種用來在一手持型式探針卡攜行枱與一探針卡容器間移 轉探針卡的探針卡轉接裝置。 【先前技術】 φ 近年來’隨著晶圓外徑的增加，用以檢測晶圓之電路 及功能的探針卡在尺寸及重量上均變大。晶圓的外徑變成 爲約480公釐’其重量變成爲約25公斤，而其價格則增 加至超過2仟5佰萬日圓。有許多種的晶圓被提出，而其 有必要針對每一種晶圓來更換探針卡。保護探針卡的尖端 末稍是很重要的。 在過去’探針卡是要以手攜帶至探針卡轉接裝置，因 此會有大的重量施加至操作員身上，造成操作員相當的不 © 舒服’且會有探針卡的探針針體受到損傷的風險。 【發明內容】 本發明要解決的問題： 本發明的目的是要得到一種免除上述風險的探針卡轉 接裝置。 本發明的其他目的是要得到一種探針卡轉接裝置，其 包含有一探針卡取出裝置’用以將一探針卡自一探針卡攜 行裝置內取出’以及一移動裝置，用以將該探針卡取出裝 -5- 200946918 置移動至一探針卡接收位置上，該探針卡取出裝置具有多 個沿著周邊分隔設置的夾頭元件，用以夾固該探針卡，以 及一夾頭元件移動裝置，用以將該等夾頭元件沿著徑向方 向同時移動。 再者，本發明的目的是要得到一種探針卡轉接裝置， 其中該夾頭元件移動裝置包含有多個下方連桿，用以分別 - 固持住該等夾頭元件、一下方側基板，具有多個沿著徑向 延伸的溝槽，以供分別以滑動的方式導引該等下方連桿、 _ 多個上方連桿，分別經由中間連桿樞轉地連接至該等下方 連桿、一上方側基板，固定連接至該等上方連桿上、以及 一液壓移動裝置’用以將該上方側基板相對於該下方側基 板移動。 本發明的再另一目的是要得到一種探針卡轉接裝置，200946918 VI. Description of the Invention: [Technical Field] The present invention relates to a probe card adapter device, and more particularly to a device for carrying a type of probe card carrying station and a probe card container Transfer the probe card adapter of the probe card. [Prior Art] φ In recent years, as the outer diameter of the wafer has increased, the probe card for detecting the circuit and function of the wafer has become large in size and weight. The outer diameter of the wafer becomes about 480 mm, and its weight becomes about 25 kg, and its price increases to more than 25,000 yen. There are many types of wafers that are being proposed, and it is necessary to replace the probe cards for each type of wafer. It is important to protect the tip of the probe card. In the past, the probe card was to be carried by hand to the probe card adapter, so that a large weight was applied to the operator, causing the operator to be quite uncomfortable and having a probe card probe. The body is at risk of injury. SUMMARY OF THE INVENTION Problems to be Solved by the Invention: An object of the present invention is to obtain a probe card transfer device that eliminates the above risks. Another object of the present invention is to provide a probe card adapter device including a probe card take-up device 'for removing a probe card from a probe card carrying device' and a mobile device for Moving the probe card removal device -5, 2009, 469, 18 to a probe card receiving position, the probe card removal device having a plurality of collet elements disposed along the periphery to clamp the probe card, And a collet element moving device for simultaneously moving the collet elements in a radial direction. Furthermore, an object of the present invention is to provide a probe card adapter device, wherein the chuck member moving device includes a plurality of lower links for respectively holding the chuck members and a lower substrate. Having a plurality of radially extending grooves for slidably guiding the lower links, _ a plurality of upper links, respectively, pivotally connected to the lower links via the intermediate links, An upper side substrate fixedly coupled to the upper links and a hydraulic moving device 'for moving the upper side substrate relative to the lower side substrate. Still another object of the present invention is to obtain a probe card adapter device,
其中該用以移動探針卡取出裝置的移動裝置包含有一滾珠 螺桿’可由一伺服馬達加以轉動、一連接裝置、以及一驅 動構件’螺接於該滾珠螺桿，以供經由該連接裝置來驅動 Q 該探針卡取出裝置。 本發明的再另一目的是要得到一種探針卡轉接裝置， 其中該等下方連桿之每一者均是以可沿著上下方向相對於 該下方連桿移動的方式將該等夾頭元件之每一者加以固持 住’因此在該探針卡被該等夾頭元件夾固住時，不會有上 下方向上的動作作用於該探針卡上。 本發明的這些及其他觀點及目的，可藉由考量下面的 說明及所附圖式而更清楚得知及明瞭。但是，應瞭解到， -6- 200946918 下面的說明雖然是解說本發明的較佳實施例，僅係供舉例 說明’而非限制之用。在不脫離本發明的精神下，在本發 明的範疇內仍有許多的變化及修改是可行的，而本發明則 應包含所有的這些修改。 【實施方式】 第1圖顯示出一種探針卡轉接裝置3，用以接收來自 〇 攜帶內設有一探針卡1之探針盒的探針卡攜行裝置2的探 針卡1，並將該探針卡1轉接至一晶圓檢測裝置上。 第2圖詳細地顯示出該探針卡轉接裝置3內的一探針 卡取出裝置4。參考編號5代表多個或五個沿周邊分隔設 置的夾頭元件，用以夾固該探針卡1的外側周邊，而參考 編號6代表夾頭元件移動裝置，可供以滑動方式沿著徑向 方向同時移動該等夾頭元件5。 該夾頭元件移動裝置6是一種多關節機構，包含有五 © 根長形的水平下方連桿7，用以分別固持住該等夾頭元件 5、一下方側圓形基板8，具有多個或五個徑向延伸的溝 槽，可供分別以滑動方式沿著徑向方向導引該等下方連桿 7、中間連桿9，其每一者的一側末端是樞轉地連接至每 —下方連桿7的外側末端上、一 L形上方連桿10’其每 一者的一側末端是連接至每一中間連桿9的外側末端上' 以及一上方側圓形基板11’用以固持該等L形上方連桿 1 0的水平部位。 該等夾頭元件5的每一者均是經由一軸承18而連接 200946918 至垂直延伸穿過該等水平下方連桿7每一者的軸19的每 一者的下方末端上。一可供支撐於該水平下方連桿7的上 方表面上的突緣20，是固定至每一軸19的上方末端上， 因此夾頭元件5可相對於該水平下方連桿7沿垂直方向移 動一段距離α。 因此，當夾頭元件5與探針卡1的外側周邊表面接觸 時，夾頭元件5是可相對於該探針卡1沿著垂直方向移動 ’因此當探針卡1被夾頭元件5夾固住時，在垂直方向上 q 並沒有外力作用於探針卡1上。 液壓裝置12，例如空氣缸，裝設於移動裝置6的上 方側基板1 1的中心部位處，以供沿著垂直方向將上方側 基板11相對於下方側基板8移動。當該探針卡取出裝置 4經由移動裝置13的操作而降低至該探針卡攜行裝置2 內的探針卡接收位置上時，該等夾頭元件5是位在於該探 針卡攜行裝置2內的一固定枱上。在探針卡1被夾頭元件 5加以夾固住的情形下，上方側基板1 1會因液壓裝置12 Q 的作動而相對於下方側基板8下降。因此之故，中間連桿 9的方向會自傾斜狀態變化成水平狀態，因此水平下方連 桿7會與夾頭元件5 —起沿著下方側基板8上的溝槽朝向 下方側基板8的中心部位移動，因之而使夾頭元件5將探 針卡1固持住。 藉由液壓裝置12的進一步作動可將上方側板11進一 步降低，因之而使中間連桿9再次自水平狀態成爲傾斜。 在此狀態下，探針卡取出裝置4可在固持著探針卡1 -8- 200946918 的情形下由移動裝置13加以升高至一探針卡接收位置上 。該移動裝置13包含有一垂直的滾珠螺桿15，可由一伺 服馬達14加以轉動、一移動構件16，螺接於該滾珠螺桿 15上、以及一連接裝置17，沿著水平方向延伸而連接於 該移動構件16與該探針卡取出裝置4之間。該連接裝置 17的作動是由一裝設於該連接裝置17上的電磁制動器21 加以控制。探針卡1的方向可藉由將探針卡取出裝置4相 〇 對於移動裝置13加以轉動而改變之。 雖然本發明是特別針對其較佳實施例加以顯示及說明 ’但熟知此技藝之人士當可理解，其中在形式及細節上仍 可有多種的變化而不會脫離下文所附申請專利範圍所界定 的本發明精神及範疇。 【圖式簡單說明】 第1圖是根據本發明之探針卡轉接裝置的前視圖。 第2圖是根據本發明的探針卡取出裝置的放大前視圖 【主要元件符號說明】 1 :探針卡 2 :探針卡攜行裝置 3 :探針卡轉接裝置 4:探針卡取出裝置 5 :夾頭元件 -9- 200946918 6:夾頭元件移動裝置 7 :下方連桿 8 :下方側基板 9 :中間連桿 10 :上方連桿 1 1 :上方側基板 1 2 :液壓裝置 13 :移動裝置 1 4 :伺服馬達 15 :滾珠螺桿 1 6 :移動構件 1 7 :連接裝置 1 8 :軸承 19 :軸 20 :突緣 2 1 :電磁制動器The moving device for moving the probe card take-up device includes a ball screw 'rotatable by a servo motor, a connecting device, and a driving member' screwed to the ball screw for driving the Q through the connecting device The probe card takes out the device. Still another object of the present invention is to provide a probe card adapter device wherein each of the lower links is movable in a manner that is movable relative to the lower link in an up and down direction Each of the components is held in place. Therefore, when the probe card is clamped by the chuck members, no action in the up and down direction acts on the probe card. These and other objects and objects of the present invention will become more apparent from the description and appended claims. However, it is to be understood that the following description of the preferred embodiments of the invention is intended to be illustrative and not restrictive. Many variations and modifications are possible without departing from the spirit and scope of the invention, and the invention is intended to cover all such modifications. [Embodiment] FIG. 1 shows a probe card adapter device 3 for receiving a probe card 1 from a probe card carrying device 2 carrying a probe card having a probe card 1 therein, and The probe card 1 is transferred to a wafer inspection device. Fig. 2 shows in detail a probe card take-out device 4 in the probe card adapter unit 3. Reference numeral 5 represents a plurality of or five collet elements disposed along the periphery to clamp the outer periphery of the probe card 1, and reference numeral 6 represents a collet element moving device for sliding along the path The chuck elements 5 are simultaneously moved in the direction. The chuck element moving device 6 is a multi-joint mechanism, and includes a horizontal lower link 7 having a length of five roots for holding the chuck members 5 and a lower circular substrate 8 respectively. Or five radially extending grooves for guiding the lower links 7 and the intermediate links 9 in a sliding manner in a sliding manner, one end of each of which is pivotally connected to each - an L-shaped upper link 10' on the outer end of the lower link 7, one end of each of which is connected to the outer end of each intermediate link 9' and an upper circular substrate 11' To hold the horizontal portion of the L-shaped upper link 10. Each of the collet elements 5 is connected via a bearing 18 to a lower end of each of the shafts 19 extending vertically through each of the horizontal lower links 7 via a spring. A flange 20 supported on the upper surface of the horizontal lower link 7 is fixed to the upper end of each of the shafts 19, so that the chuck member 5 is vertically movable relative to the horizontal lower link 7 Distance α. Therefore, when the collet element 5 is in contact with the outer peripheral surface of the probe card 1, the collet element 5 is movable in the vertical direction with respect to the probe card 1 so that when the probe card 1 is clamped by the collet element 5 When it is stuck, no external force acts on the probe card 1 in the vertical direction. The hydraulic device 12, for example, an air cylinder, is installed at a central portion of the upper substrate 11 of the moving device 6 to move the upper substrate 11 relative to the lower substrate 8 in the vertical direction. When the probe card take-up device 4 is lowered to the probe card receiving position in the probe card carrying device 2 via the operation of the moving device 13, the chuck members 5 are located in the probe card. A fixed table in the device 2. When the probe card 1 is clamped by the chuck member 5, the upper substrate 11 is lowered with respect to the lower substrate 8 by the operation of the hydraulic device 12Q. Therefore, the direction of the intermediate link 9 changes from the inclined state to the horizontal state, so that the horizontal lower link 7 and the chuck member 5 together with the groove on the lower side substrate 8 face the center of the lower side substrate 8. The part moves, so that the chuck element 5 holds the probe card 1 in place. The upper side plate 11 can be further lowered by the further action of the hydraulic device 12, whereby the intermediate link 9 is again tilted from the horizontal state. In this state, the probe card take-up device 4 can be raised by the mobile device 13 to a probe card receiving position while holding the probe card 1-8-200946918. The moving device 13 includes a vertical ball screw 15 which is rotatable by a servo motor 14, a moving member 16, screwed to the ball screw 15, and a connecting device 17, extending in the horizontal direction to be connected to the movement. The member 16 is interposed between the probe card removal device 4. The operation of the connecting device 17 is controlled by an electromagnetic brake 21 mounted on the connecting device 17. The direction of the probe card 1 can be changed by rotating the probe card take-up device 4 to the mobile device 13. While the present invention has been shown and described with respect to the preferred embodiments of the present invention, it is understood that The spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view of a probe card adapter according to the present invention. Figure 2 is an enlarged front view of the probe card take-out device according to the present invention. [Main component symbol description] 1 : Probe card 2: Probe card carrying device 3: Probe card adapter device 4: Probe card removal Device 5: Chuck element-9- 200946918 6: Chuck element moving device 7: Lower link 8: Lower side substrate 9: Intermediate link 10: Upper link 1 1 : Upper side substrate 1 2 : Hydraulic device 13: Mobile device 1 4 : Servo motor 15 : Ball screw 1 6 : Moving member 1 7 : Connecting device 1 8 : Bearing 19 : Shaft 20 : Flange 2 1 : Electromagnetic brake