TWI810987B - Carrier of probe card, transportation cart and stocker system - Google Patents

Abstract

A carrier of probe card includes a substrate, a plurality of first supporting elements, a plurality of first fixing elements, a first protective cover and at least one elastic element. The first supporting elements are arranged on the substrate to support a first probe card, so that there is a first distance between the first probe card and the substrate. The first fixing elements are arranged on the substrate for fixing the first probe card. The first protective cover is used to cover a plurality of probes on the first probe card. The elastic element is arranged on the substrate and connected with the first protective cover to push the first protective cover against the first probe card. The above-mentioned carrier of probe card can protect the probes of the probe card and facilitate mechanically assisted handling. A transportation cart and a stocker system of probe card using the above-mentioned carrier of probe card are are also disclosed.

Description

Probe card carrier, handling trolley and storage system

The invention relates to a carrier, a transport trolley and a storage system, in particular to a probe card carrier, a transport trolley and a storage system.

Semiconductor components need to be tested during the manufacturing process or after production to confirm whether the circuit characteristics of the semiconductor components are normal. During the test process, multiple probes on the probe card are in contact with the conductive contacts of the semiconductor device under test, and a prober is used to read the electronic signal of the semiconductor device to determine whether the semiconductor device is normal. In order to test different semiconductor components or adjust the probe card, the probe card needs to be disassembled from the testing machine and transported to a storage space or other suitable working place.

In the process of handling, in order to prevent the probes on the probe card from being damaged by collision, an existing method is to manually cover the probes with a protective cover (such as a transparent plastic cover) and then stick the protective cover with adhesive tape, and directly Manually carry the probe card. However, as the density of semiconductor components becomes higher and higher, the weight of the probe card also increases, which increases the difficulty of manual handling and easily damages the probes.

Another method is to place the probe card in an outer box composed of an upper cover and a lower cover before carrying it. Although this method has a better protection effect on the probe card, the operation method of opening the outer box to take out the probe card not only reduces the operation efficiency, but also is not easy to use machinery to assist the operation.

In view of this, how to effectively protect the probe card during the handling of the probe card and facilitate the operation with machinery is a goal that requires great efforts.

The present invention provides a probe card carrier, which is used to carry a probe card, and the first protective cover is pressed against the probe card by the elastic force of the elastic member and covers the probes to protect the probes. Manpower to paste the protective cover. In addition, the probe card is fixed on the substrate of the probe card carrier by the supporting part and the fixing part. Therefore, the probe card can be taken out by unlocking the fixing part with mechanical assistance, thereby improving the operation efficiency. The present invention also provides a probe card transport trolley and a probe card storage system including the above probe card carrier.

A probe card carrier according to an embodiment of the present invention includes a base plate, a plurality of first supporting elements, a plurality of first fixing elements, a first protective cover and at least one elastic element. A plurality of first support members are arranged on the substrate to support a first probe card, so that there is a first distance between the first probe card and the substrate. A plurality of first fixing elements are arranged on the base plate for fixing the first probe card. The first protective cover is used for covering a plurality of probes on the first probe card. The elastic member is disposed on the substrate and connected with the first protective cover to push the first protective cover against the first probe card.

The probe card transfer trolley according to another embodiment of the present invention includes a trolley body, a probe card carrier and a carrier fixing member. The trolley body has a bearing position. The probe card carrier is detachably arranged at the carrying position of the trolley body. The probe card carrier includes a substrate, a plurality of first supporting elements, a plurality of first fixing elements, a first protective cover and at least one elastic element. A plurality of first support members are arranged on the substrate to support a first probe card, so that there is a first distance between the first probe card and the substrate. A plurality of first fixing elements are arranged on the base plate for fixing the first probe card. The first protective cover is used for covering a plurality of probes on the first probe card. The elastic member is disposed on the substrate and connected with the first protective cover to push the first protective cover against the first probe card. The carrier fixing part is arranged on the trolley body to fix the probe card carrier at the carrying position.

A probe card storage system according to another embodiment of the present invention includes a plurality of racks, at least one probe card carrier and a transport device. The racks include multiple storage locations and an access location. The probe card carrier includes a substrate, a plurality of first supporting elements, a plurality of first fixing elements, a first protective cover and at least one elastic element. A plurality of first support members are arranged on the substrate to support a first probe card, so that there is a first distance between the first probe card and the substrate. A plurality of first fixing elements are arranged on the base plate for fixing the first probe card. The first protective cover is used for covering a plurality of probes on the first probe card. The elastic member is disposed on the substrate and connected with the first protective cover to push the first protective cover against the first probe card. The transport device is used for transporting the probe card carrier between the storage position and the access position.

The following is a detailed description of the specific embodiments with the attached drawings, and it will be easier to understand the purpose, technical content, characteristics and effects of the present invention.

10, 10a: Probe card carrier

11: Substrate

111: hollow area

12a: first support

12b: Second support

13a: the first fixing member

13b: Second fixing piece

131: Guide surface

14: The first protective cover

141: Buffer

15: Elastic parts

151: ball joint

16, 16a: limit piece

17: positioning hole

18:Second protective cover

19a, 19b: the third fixing piece

191: Movable parts

191a: Groove

192: Sleeve

193: sphere

194: elastic element

20: The first probe card

20a: Second probe card

21: Probe

30: trolley body

301:Roller

302: Grip

303: positioning parts

31: Vehicle Fixing Parts

40: Probe card storage system

401, 402: bracket

403: Handling device

4031: Fork type handling arm

4032: protruding parts

404: positioning parts

FIG. 1 is a schematic diagram showing a top view structure of a probe card carrier according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a side view structure of a probe card carrier according to an embodiment of the present invention.

FIG. 3 is a schematic diagram showing a process of inserting a probe card into a probe card carrier according to an embodiment of the present invention.

FIG. 4 is a schematic view showing that a probe card is fixed on a probe card carrier according to an embodiment of the present invention.

FIG. 5 is a schematic diagram showing a top view structure of a probe card carrier according to another embodiment of the present invention.

FIG. 6 is a schematic diagram showing a side view structure of a probe card carrier in the long axis direction according to another embodiment of the present invention.

FIG. 7 is a schematic diagram showing the side view structure of the probe card carrier in the direction of the short axis according to another embodiment of the present invention.

FIG. 8 is a schematic diagram showing a probe card carrier fixing a first probe card according to another embodiment of the present invention.

FIG. 9 is a schematic diagram showing a probe card carrier fixing a second probe card according to another embodiment of the present invention.

FIG. 10 is a schematic diagram showing a side view structure of a probe card carrier according to another embodiment of the present invention.

FIG. 11 is a schematic diagram showing a probe card transfer trolley according to an embodiment of the present invention.

Fig. 12 is a schematic diagram showing a probe card storage system according to an embodiment of the present invention.

Various embodiments of the present invention will be described in detail below and illustrated with accompanying drawings. In addition to these detailed descriptions, the present invention can also be widely implemented in other embodiments, any easy replacement, modification, and equivalent changes of any of the embodiments are included in the scope of the present invention, and the scope of the patent application is allow. In the description of the specification, many specific details are provided in order to enable readers to have a more complete understanding of the present invention; however, the present invention may still be practiced under the premise of omitting some or all of the specific details. Furthermore, well-known steps or elements have not been described in detail in order to avoid unnecessarily limiting the invention. The same or similar elements in the drawings will be denoted by the same or similar symbols. It should be noted that the drawings are for illustrative purposes only, and do not represent the actual size or quantity of components, and some details may not be fully drawn for the sake of simplicity of the drawings.

Please refer to Fig. 1 and Fig. 2, the probe card carrier 10 of one embodiment of the present invention comprises a substrate 11, a plurality of first support members 12a, a plurality of first fixing members 13a, a first protective cover 14 and a plurality of 15 elastic parts. The substrate 11 needs to be rigid enough to carry a heavy probe card. In one embodiment, the base plate 11 may include a plurality of positioning holes 17, and the positioning holes 17 help to determine the relative positions of the probe card carrier 10 and the transporting device, so as to facilitate mechanical assistance operations. A plurality of first support members 12a are disposed on the base plate 11 . Please also refer to FIG. 4 , the plurality of first support members 12 a can support a first probe card 20 such that there is a first distance between the first probe card 20 and the substrate 11 . It can be understood that the first support member 12a corresponds to the connector of the first probe card 20 The contact surface can be designed according to the shape of the first probe card 20 . For example, the contact surface of the first supporting member 12a can be a plane or have a stepped structure.

Continuing the above description, a plurality of first fixing members 13 a are disposed on the substrate 11 to fix the first probe card 20 . In one embodiment, the surfaces of the first fixing member 13 a and the first supporting member 12 a in contact with the first probe card 20 are opposite to each other, and fix the first probe card 20 in a clamping manner. For example, please refer to FIG. 4 , the first probe card 20 is placed on the first supporting member 12 a such that the first probe card 20 and the substrate 11 have a first distance. The first fixing part 13 a is opposite to the first supporting part 12 a to clamp and fix the first probe card 20 . It can be understood that the purpose of fixing the first probe card 20 can also be achieved if the surfaces of the first fixing member 13 a and the first support member 12 a contacting the first probe card 20 are not opposite to each other. For example, a plurality of first support members 12 a are disposed on the short axis side of the substrate 11 , and a plurality of first fixing members 13 a are disposed on the long axis side of the substrate 11 to clamp and fix the first probe card 20 . In one embodiment, the first fixing member 13 a includes a guiding surface 131 . When the guiding surface 131 is stressed, the first fixing member 13a can be pushed to an unlocked position, as shown in FIG. 3 . According to this structure, the first fixing part 13 a can be easily unlocked for placing the first probe card 20 , and the first fixing part 13 a can be unlocked mechanically to assist in carrying the first probe card 20 . It should be noted that, in the embodiment shown in FIG. 3 , the first fixing member 13 a rotates relative to a rotation axis parallel to the base plate 11 to move between an unlocking position and a clamping position. It can be understood that the first fixing member 13 a rotates relative to a rotation axis perpendicular to the base plate 11 , or the first fixing member 13 a translates parallel to the base plate 11 and can also move between an unlocking position and a clamping position.

Please also refer to FIG. 3 , the first protective cover 14 can cover the plurality of probes 21 on the first probe card 20 to protect the probes 21 of the first probe card 20 , for example, to prevent dust or collision. A plurality of elastic members 15 are disposed on the substrate 11 and connected to the first protective cover 14 . The plurality of elastic members 15 can push the first protective cover 14 against the first probe card 20 so that the first protective cover 14 completely covers the probes 21 on the first probe card 20 . In the embodiment shown in FIG. 1 and FIG. 2 , the position of the substrate 11 corresponding to the first protective cover 14 is a hollow area 111 to reduce the weight of the probe card carrier. Therefore, each elastic member 15 is oblique Connect with the first protective cover 14. In one embodiment, each elastic member 15 is connected with the first protective cover 14 by a ball joint 151, so that each elastic The member 15 provides an appropriate force to the first protective cover 14 and keeps the first protective cover 14 horizontal during the lifting process. It can be understood that, when the substrate 11 does not have the hollow area 111 , one or more elastic members 15 can be disposed under the first protective cover 14 to make the first protective cover 14 rise and fall horizontally.

In one embodiment, the first protective cover 14 includes a buffer member 141 disposed on a contact surface between the first protective cover 14 and the first probe card 20 . The buffer member 141 can reduce the impact when the first protective cover 14 is in contact with the first probe card 20 , so as to prevent the circuit damage on the surface of the first probe card 20 caused by the first protective cover 14 . In one embodiment, the buffer member 141 can be a silicone material, a rubber material or a porous material.

Please refer to FIG. 1 again, the probe card carrier 10 of the present invention further includes a plurality of limiting members 16 disposed on the substrate 11 , the first supporting member 12a or both. A plurality of stoppers 16 surround the first probe card 20 to limit the lateral movement of the first probe card 20 parallel to the substrate 11, and also make the probes 21 of the first probe card 20 align with the first protection Cover 14. It should be noted that, in order to simplify the drawing, the probe card carrier 10 shown in FIG. 2 does not draw a plurality of limiting members 16 on the long-axis side of the substrate 11 .

Please refer to Fig. 5 to Fig. 7, in order to illustrate the probe card carrier 10a of another embodiment of the present invention, wherein, in order to make the figure concise, the probe card carrier 10a shown in Fig. 6 is not drawn on the substrate 11 Multiple components on the long axis side; the probe card carrier 10 a shown in FIG. 7 does not draw multiple components on the short axis side of the substrate 11 . Components in FIGS. 5 to 7 that are the same as those shown in FIGS. 1 and 2 will be marked with the same symbol, and their structures and functions are the same as those described above, and will not be repeated here. In addition to the aforementioned elements, the probe card carrier 10a of the present invention further includes a plurality of second supporting components 12b and a plurality of second fixing components 13b. A plurality of second supports 12b are also disposed on the substrate 11 . The plurality of second support members 12b can support a second probe card 20a so that there is a second distance between the second probe card 20a and the substrate 11 . A plurality of second fixing members 13b are disposed on the substrate 11 to fix the second probe card 20a. Similarly, the probe card carrier 10a may include a plurality of limiters 16a, which are disposed on the substrate 11, the second support member 12b or both, so as to limit the second probe card 20a parallel to the lateral direction of the substrate 11. move.

In one embodiment, the structure of the second probe card 20 a is different from that of the first probe card 20 , such as differences in substrate thickness, outer diameter, and edge structure of the probe card. Understandably, A plurality of first support members 12a and a plurality of first fixing members 13a are designed for the structure of the first probe card 20, so as to fix the first probe card 20 on the probe card carrier 10a, as shown in FIG. 8 and a plurality of second support members 12b and a plurality of second fixing members 13b are designed for the structure of the second probe card 20a, so as to fix the second probe card 20a on the probe card carrier 10a, as shown in the figure 9. Therefore, the probe card carrier 10a shown in FIGS. 5 to 7 can be loaded with different types of first probe card 20 or second probe card 20a according to requirements, and the probe card carrier 10a of the same type is convenient for handling Mechanically assists the operation and simplifies the design of the handling machinery. In one embodiment, the second distance is equal to or smaller than the first distance, that is, the height of the second supporting member 12b is equal to or smaller than the height of the first supporting member 12a.

It should be noted that, in the embodiments shown in Fig. 3, Fig. 4, Fig. 8 and Fig. 9, the first probe card 20 or the second probe card 20a is with the probes 21 facing down (that is, facing the first protection The cover 14) is clamped and fixed on the probe card carrier 10, but it is not limited thereto. In one embodiment, the first probe card 20 or the second probe card 20a can also be clamped and fixed on the probe card carrier 10 with the probes 21 facing upwards (that is, facing away from the first protective cover 14 ). 10, to perform required processing on the first probe card 20 or the second probe card 20a, such as adjusting or cleaning the probes 21 and the like.

It can be understood that when the first probe card 20 is clipped and fixed on the probe card carrier 10 facing away from the first protective cover 14 , the probes 21 cannot be covered and protected by the first protective cover 14 . In order to overcome this problem, please refer to FIG. 10 again. In one embodiment, the probe card carrier 10 of the present invention further includes a second protective cover 18 and at least one third fixing member 19a, 19b. The second protective cover 18 is arranged relative to the first protective cover 14, so that when the probes 21 of the first probe card 20 are facing upwards, the second protective cover 18 can cover the plurality of probes 21 on the first probe card 20 . At least one third fixing member 19 a, 19 b is used to interfere with the first probe card 20 to fix the second protective cover 18 on the first probe card 20 . For example, the third fixing member 19a, 19b can be a ball lock pin (ball lock pin), by inserting the ball lock pin into the corresponding hole (such as a positioning hole) of the first probe card 20, the The second protective cover 18 is fixed on the first probe card 20 . For example, the third fixing part 19 a, 19 b includes a movable part 191 , a sleeve 192 and at least one ball 193 . Movable part 191 penetrates sleeve 192 , and can move relative to the sleeve 192 . The movable part 191 has a groove 191 a for accommodating the ball 193 . To unlock, the user can push the movable part 191 so that the groove 191 a on the movable part 191 corresponds to the ball 193 . At this time, the ball 193 is accommodated in the groove 191a, so it will not protrude from the outer surface of the sleeve 192. As shown in the unlocked state of the third fixing member 19a, the user can insert or pull out the third fixing member 19a. out the corresponding hole of the first probe card 20. To lock, the user releases the movable part 191 , and the movable part 191 returns to the initial position due to the elastic element (such as a spring) 194 . At this moment, the ball 193 leaves the groove 191a, is pushed out by the movable part 191 and protrudes from the outer surface of the sleeve 192 . The protruding ball 193 interferes with the first probe card 20 to fix the second protective cover 18 on the first probe card 20 . It can be understood that, with proper design, the third fixing members 19 a, 19 b can also form interference with the substrate 11 to fix the second protective cover 18 on the first probe card 20 .

Please refer to FIG. 11 , the probe card transport trolley according to an embodiment of the present invention includes a trolley body 30 , a probe card carrier 10 and a carrier fixing member 31 . The trolley body 30 has a carrying position for carrying the probe card carrier 10 . The trolley body 30 includes basic components such as rollers 301, handles 302, and positioning parts 303, among which the positioning parts 303 can be combined with corresponding positioning parts of the probe card storage system, testing machine or adjustment device, etc., so that the probe card can be transported The trolley is fixed at a predetermined position for carrying the first probe card 20 . The basic elements of the trolley body 30 can be implemented by those with ordinary knowledge in the technical field of the present invention according to the prior art, so they will not be repeated here. The detailed structure and functions of the probe card carrier 10 are as described above, and will not be repeated here. The carrier fixing member 31 is disposed on the trolley body 30 to fix the probe card carrier 10 on the loading position of the trolley body 30 .

Please refer to FIG. 12 , a probe card storage system 40 according to an embodiment of the present invention includes a plurality of racks 401 , 402 , at least one probe card carrier 10 a and a transport device 403 . The detailed structure and functions of the probe card carrier 10a are as described above, and will not be repeated here. The racks 401, 402 include a plurality of storage locations and an access location. For example, a plurality of racks 401 are used as storage positions for storing a plurality of probe card carriers 10a; racks 402 are used as access positions. When the external probe card carrier 10a is to be stored in the probe card storage system 40, the probe card carrier 10a can be placed on the rack 402, and then the probe card storage system 40 transports the probe card carrier 10a on the rack 402 to one of the racks 401 for storage. Or, when it is desired to take out the probe card carrier 10a stored on the bracket 402, the probe card storage system 40 will move the selected probe card carrier 10a from the bracket 401 to the bracket 402 for the operator to take out The probe card carrier 10 a is mounted on the bracket 402 . The transport device 403 is used for transporting the probe card carrier 10 a between the storage position (rack 401 ) and the access position (rack 402 ). For example, the transporting device 403 includes a fork-type transporting arm 4031, which supports the probe card carrier 10a from below the probe card carrier 10a. In one embodiment, the fork-type transport arm 4031 may include a plurality of protrusions 4032 to be combined with the positioning holes 17 on the probe card carrier 10a to determine the relative position of the probe card carrier 10a and the fork-type transport arm 4031 , and can prevent the probe card carrier 10a from sliding on the fork-type transport arm 4031 . In one embodiment, the probe card storage system 40 may include a positioning member 404, which can be combined with the corresponding positioning member 303 of the probe card transport trolley to fix the connection between the probe card transport trolley and the probe card storage system 40. relative position.

Based on the above, the probe card carrier, the probe card transport trolley and the probe card storage system of the present invention can use the elastic force of the elastic member to press the first protective cover against the probe card and cover the probes to protect the probes. In this way, it is not necessary to stick the protective cover manually, so as to reduce manual operation. In addition, fixing the probe card on the probe card carrier in a clamping manner is also beneficial to mechanically assisting in unlocking the fixing part to take out the probe card, thereby improving the operation efficiency. Also, the properly designed probe card carrier of the present invention can be loaded with different types of probe cards, so that different types of probe cards can be converted into the same type of probe card carrier of the present invention, thus facilitating mechanically assisted operations , and can simplify the mechanical design.

The above-mentioned embodiments are only to illustrate the technical ideas and characteristics of the present invention, and its purpose is to enable those skilled in this art to understand the content of the present invention and implement it accordingly, and should not limit the patent scope of the present invention. That is to say, all equivalent changes or modifications made according to the spirit disclosed in the present invention should still be covered by the patent scope of the present invention.

10: Probe card carrier

11: Substrate

111: hollow area

12a: first support

13a: the first fixing member

131: Guide surface

14: The first protective cover

141: Buffer

15: Elastic parts

151: ball joint

16: limit piece

Claims (36)

A probe card carrier, comprising: a substrate; a plurality of first support members, which are arranged on the substrate to support a first probe card, so that there is a first probe card between the first probe card and the substrate a distance; a plurality of first fixing parts, which are arranged on the substrate, to fix the first probe card; a first protective cover, which is used to cover the plurality of probes on the first probe card; and At least one elastic member is arranged on the substrate and connected with the first protective cover to push the first protective cover against the first probe card. The probe card carrier according to claim 1, further comprising: a plurality of limiting members, which are arranged on at least one of the substrate and the first supporting member, so as to limit the first probe card to be parallel to the Lateral movement of the substrate. The probe card carrier as claimed in claim 1, wherein the surfaces of the first fixing member and the first support member in contact with the first probe card are opposite to each other, so as to fix the first probe card. The probe card carrier as claimed in claim 1, wherein each of the first fixing parts includes a guiding surface, which is used to push the first fixing part to an unlocked position when the guiding surface is stressed. The probe card carrier as claimed in claim 1, wherein there are multiple elastic members, and each elastic member is connected to the first protective cover by a ball joint. The probe card carrier as claimed in claim 1, wherein the first protective cover includes a buffer member disposed on a contact surface between the first protective cover and the first probe card. The probe card carrier as claimed in claim 6, wherein the buffer is a silicone material, a rubber material or a porous material. The probe card carrier as claimed in claim 1, wherein the substrate includes a hollow area corresponding to the first protective cover. The probe card carrier as claimed in claim 1, wherein the base plate includes a plurality of positioning holes for cooperating with a transport device to fix the relative position of the probe card carrier and the transport device. The probe card carrier as described in Claim 1 further includes: a plurality of second support members, which are arranged on the substrate to support a second probe card, so that the second probe card and the substrate There is a second distance between them, wherein the second distance is equal to or smaller than the first distance; and a plurality of second fixing parts are arranged on the substrate for fixing the second probe card. The probe card carrier as described in claim 1, further comprising: a second protective cover, which is arranged opposite to the first protective cover, to cover the plurality of probes on the first probe card; and at least A third fixing part is used for interfering with the substrate or the first probe card to fix the second protective cover on the first probe card. The probe card carrier as claimed in claim 11, wherein the third fixing member is a ball lock pin. A probe card transport trolley, comprising: a vehicle body, which has a loading position; a probe card carrier, which is detachably arranged at the loading position, wherein the probe card carrier includes: a substrate; a plurality of first support members, which are arranged on the substrate, to support a first probe card, so that there is a first distance between the first probe card and the substrate; A plurality of first fixing parts, which are arranged on the substrate, are used to fix the first probe card; a first protective cover, which is used to cover a plurality of probes on the first probe card; and at least one elastic a piece, which is arranged on the substrate and connected with the first protective cover, so as to push the first protective cover against the first probe card; and a carrier fixing piece, which is arranged on the trolley body, to fix The probe card carrier is at the carrying position. The probe card transport trolley as described in claim 13, wherein the probe card carrier further includes: a plurality of limiting members, which are arranged on at least one of the substrate and the first supporting member to limit the first supporting member A probe card moves laterally parallel to the substrate. The probe card transporting trolley according to claim 13, wherein surfaces of the first fixing part and the first support part in contact with the first probe card are opposite to each other, so as to fix the first probe card. The probe card transporting trolley according to claim 13, wherein each of the first fixing parts includes a guiding surface, which is used to push the first fixing part to an unlocked position when the guiding surface is stressed. The probe card transfer trolley according to claim 13, wherein there are multiple elastic members, and each elastic member is connected to the first protective cover by a ball joint. The probe card transporting trolley according to claim 13, wherein the first protective cover includes a buffer member disposed on a contact surface between the first protective cover and the first probe card. The probe card transporting trolley according to claim 18, wherein the buffer member is a silicon rubber material, a rubber material or a porous material. The probe card transfer trolley as claimed in claim 13, wherein the substrate includes a hollow area corresponding to the first protective cover. The probe card transporting trolley according to claim 13, wherein the base plate includes a plurality of positioning holes for matching with a transporting device to fix the relative position of the probe card carrier and the transporting device. The probe card transport trolley as described in claim 13, wherein the probe card carrier further includes: a plurality of second support members, which are arranged on the substrate to support a second probe card, so that the first There is a second distance between the second probe card and the substrate, wherein the second distance is equal to or smaller than the first distance; and a plurality of second fixing parts are arranged on the substrate for fixing the second probe card . The probe card transport trolley as described in claim 13, wherein the probe card carrier further includes: a second protective cover, which is arranged opposite to the first protective cover to cover the probe card on the first probe card. a plurality of probes; and at least one third fixing part, which is used for forming interference with the substrate or the first probe card, so as to fix the second protective cover on the first probe card. The probe card transporting trolley according to claim 23, wherein the third fixing member is a ball lock pin. A probe card storage system, comprising: a plurality of brackets, including a plurality of storage positions and an access position; at least one probe card carrier, which includes: a substrate; a plurality of first support members, which are arranged on The substrate is used to support a first probe card, so that there is a first distance between the first probe card and the substrate; A plurality of first fixing parts, which are arranged on the substrate, are used to fix the first probe card; a first protective cover, which is used to cover a plurality of probes on the first probe card; and at least one elastic a piece, which is arranged on the substrate and connected with the first protective cover, so as to push the first protective cover against the first probe card; transport the probe card carrier between locations. The probe card storage system as described in claim 25, wherein the probe card carrier further includes: a plurality of limiting members, which are arranged on at least one of the substrate and the first supporting member to limit the first A probe card moves laterally parallel to the substrate. The probe card storage system according to claim 25, wherein the surfaces of the first fixing member and the first support member in contact with the first probe card are opposite to each other, so as to fix the first probe card. The probe card storage system according to claim 25, wherein each of the first fixing parts includes a guiding surface, which is used to push the first fixing part to an unlocked position when the guiding surface is stressed. The probe card storage system according to claim 25, wherein there are multiple elastic members, and each elastic member is connected to the first protective cover by a ball joint. The probe card storage system according to claim 25, wherein the first protective cover includes a buffer member disposed on a contact surface between the first protective cover and the first probe card. The probe card storage system according to claim 30, wherein the buffer is a silicone material, a rubber material or a porous material. The probe card storage system according to claim 25, wherein the substrate includes a hollow area corresponding to the first protective cover. The probe card storage system according to claim 25, wherein the base plate includes a plurality of positioning holes for cooperating with the conveying device to fix the relative position of the probe card carrier and the conveying device. The probe card storage system as described in claim 25, wherein the probe card carrier further includes: a plurality of second support members, which are arranged on the substrate to support a second probe card, so that the first There is a second distance between the second probe card and the substrate, wherein the second distance is equal to or smaller than the first distance; and a plurality of second fixing parts are arranged on the substrate for fixing the second probe card . The probe card storage system as described in claim 25, wherein the probe card carrier further includes: a second protective cover, which is arranged opposite to the first protective cover, so as to cover the a plurality of probes; and at least one third fixing part, which is used for forming interference with the substrate or the first probe card, so as to fix the second protective cover on the first probe card. The probe card storage system according to claim 35, wherein the third fixing member is a ball lock pin.

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