JP2000326188A - Both-side cutting method and device for drilled thin disk- like work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately guide a work and to reduce deflection of the work due to a constraint force, by cutting both end surfaces with a cutting grinding wheel, while rotatingly supporting the work by grabbing in radius direction a radius part of the work with at least three rollers. SOLUTION: A radius driving and end surface guide method is employed where a work W is driven by outer peripheral side driving rollers 4, 5 while supported surfaces of upper and lower end surfaces of the work W are supported by a pair of static pressure support means with static pressure in a state where the work W is grabbed with the outer peripheral side driving rollers 4, 5 and an inner peripheral side guide roller 6, therefore, the work W can be machined accurately in flatness and surface accuracy. Since the work W is cut by a cutting grinding wheel in a state where a radius part of the work W is radially grabbed by the rollers 4, 5 on the opposite side of the cutting grinding wheel, direction of stress applied to the work W during cutting becomes a tensile direction to make the work W little deflectable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a double-side grinding method and a double-side grinding apparatus for grinding both end surfaces of a glass plate, an aluminum plate and other perforated thin disk-shaped workpieces in parallel.

[0002]

2. Description of the Related Art In a double-sided grinding apparatus for grinding both end surfaces of a perforated thin disk-shaped work such as a glass plate or an aluminum plate used as a recording medium of electronic equipment in parallel, a method for driving and holding the work is used. Conventionally, there are an end face drive / outside diameter guide method and an outside diameter drive / end face guide method.

As described in Japanese Patent Application Laid-Open No. 4-41167, an end face driving / outside diameter guide method is such that a driving roller is provided on both end faces of a workpiece and at least three guide rollers are provided circumferentially on the workpiece. Rolled and placed on the outer circumference respectively, while holding and guiding the workpiece on the outer circumference side by each guide roller,
The workpiece is driven from the end face side by a driving roller.

As described in JP-A-59-76764, at least three drive rollers are provided in the circumferential direction on the outer periphery of the workpiece, and the guide rollers are connected to the workpiece. Rolled and placed on both end faces of
While the workpiece is held and guided on both end faces by each guide roller, the workpiece is driven on the outer peripheral side by each drive roller.

[0005]

In the conventional end face driving / outside diameter guide method, a work is diametrically held between guide rollers, and the work is driven by a driving roller on the end face. There is a problem that the run-out accuracy of the roller greatly affects the work accuracy of the workpiece, particularly the flatness and surface roughness.

On the other hand, the outer diameter / diameter drive / end guide method is
In order to hold the work by sandwiching it from both sides with each guide roller on the end face side and drive the work piece with the drive roller on the outer circumference side,
There is a problem that the workpiece is easily bent and greatly affects the processing accuracy of the workpiece.

In the conventional method, the pressing force of the drive roller cannot be increased in order to reduce the bending of the workpiece, and the driving force of the workpiece decreases. Therefore, it is impossible to increase the number of revolutions of the workpiece, it is difficult to increase the cutting speed, and there is a problem that the cycle time becomes longer.

In view of the above problems, the present invention increases the rigidity of a workpiece and enables high-precision machining. In addition, the high-speed rotation of the workpiece can greatly reduce the cycle time, and furthermore, the workpiece can be highly accurate. It is an object of the present invention to provide a double-sided grinding method and a double-sided grinding apparatus for a thin disk-shaped workpiece with holes, which can guide the workpiece to a small extent and reduce the deflection of the workpiece due to the restraining force.

[0009]

SUMMARY OF THE INVENTION A double-sided grinding method according to the present invention is directed to a method for grinding both end faces of a perforated thin disk-shaped workpiece with a pair of grinding wheels while rotating the workpiece. By at least three rollers composed of a roller rolling in contact with the inner diameter of the hole and a roller rolling in contact with the outer periphery of the workpiece, the workpiece is rotatably supported while radially sandwiching a radial portion of the workpiece. And grinding both end faces of the workpiece with the grinding wheel.

[0010] A double-sided grinding apparatus according to the present invention is characterized in that, while rotating a thin disk-shaped workpiece with holes, both end faces of the workpiece are ground with a pair of grinding wheels. In an apparatus for grinding both sides of a workpiece, at least two rollers rolling in contact with the outer periphery of the workpiece, and a radius portion of the workpiece rolling between the at least two rollers rolling in contact with the bore diameter of the workpiece. And a roller rotatably supported by being sandwiched in the direction.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings. In FIG. 1 to FIG. 3, W is a glass plate, an aluminum plate, and other perforated thin disk-shaped workpieces. Reference numeral 1 denotes a vertical double-sided grinding device, which comprises a pair of upper and lower grinding wheels 2, 3 for grinding both upper and lower end surfaces of a workpiece W;
A pair of drive rollers 4 and 5 that roll on the outer periphery (outer peripheral surface) of W
To the inner diameter of the hole in the workpiece W
Guide rollers 6 that sandwich the workpiece W in the radial direction between
A rolling contact moving means 7 for moving the guide roller 6 in the distance direction with respect to the drive rollers 4 and 5; a pair of upper and lower static pressure supporting means 8 and 9 for supporting upper and lower end surfaces of the workpiece W; A retracting means 10 for retracting the static pressure supporting means 8 so as to be able to approach and separate from the supported surface of the workpiece W, and a sliding base 11 for supporting these movably in the diameter direction of the grinding wheels 2, 3. A fixed base 12 that slidably supports the sliding base 11;

The sliding base 11 is mounted on the fixed base 12 so as to be movable in the diameter direction of the grinding wheels 2 and 3, and can be reciprocated in the diameter direction of the grinding wheels 2 and 3 by driving means (not shown). ing. Each of the grinding wheels 2 and 3 is of a cup type or the like, is mounted on a vertical grinding wheel shaft (not shown) arranged on the same axis, and is rotated around the grinding wheel shaft by a rotation driving means (not shown).
It is rotationally driven in the same direction as the arrow. In addition, the grinding wheels 2 and 3 are in the same direction as the rotation direction of the drive rollers 4 and 5,
That is, the workpiece W rotates in the rotation direction with respect to the rotation of the workpiece W that is rotationally driven by the driving rollers 4 and 5.

Each of the drive rollers 4 and 5 drives the workpiece W in the direction of the arrow b, and is arranged on the opposite side of the grinding wheels 2 and 3 with respect to the workpiece W. Bearing box 13,1
4 fixed to the longitudinal axes 15, 16 rotatably supported by
The driving means 18 for rotation via the winding transmission means 17
It is driven to rotate in the direction indicated by the arrow. The rotation driving means 18 is constituted by a driving motor 19 and the like, and is mounted on the mounting base 20 of the sliding base 11 downward. The drive rollers 4 and 5
May be provided three or more in the circumferential direction of the workpiece W, but at least two are sufficient.

The wrapping transmission means 17 is arranged between a driving pulley 21 fixed to the rotating shaft of the driving motor 19, driven pulleys 22 and 23 fixed to the driving rollers 4 and 5, and between the driven pulleys 22 and 23. And a belt 25 wound around the drive pulley 21, the driven pulleys 22, 23, and the guide pulley 24. The guide pulley 24 is rotatably supported by a front end of a support member 27 protruding from the support base 26 via a support shaft.

The guide roller 6 has a smaller diameter than the inner diameter of the hole of the workpiece W so that it can be fitted into and removed from the lower side of the hole, and as shown in FIG.
It is rotatably supported by the longitudinal axis 29 on the tip side of 28.
The rolling movement means 7 includes a swing arm 28 pivotally supported on the slide base 11 by a middle pivot shaft 30 in the middle, and a swing arm connected to the other end of the swing arm 28. Operating drive means 31
Are connected. The oscillating drive means 31 is constituted by a cylinder or the like, and drives the oscillating arm 28 so that the guide roller 6 comes into contact with and separates from the inner diameter of the hole of the workpiece W. The workpiece W is urged with a predetermined pressure so as to sandwich the workpiece.

As shown in FIGS. 4 and 5, each of the static pressure supporting means 8 and 9 has a pair of drive rollers on opposite sides of the ground surfaces on which the grinding wheels 2 and 3 grind the upper and lower end surfaces of the workpiece W. The workpiece W is arranged between the guide rollers 4 and 5 and the guide rollers 6 to statically support and guide the supported surfaces on both upper and lower end surfaces of the workpiece W. Each of the static pressure support means 8, 9 comprises a static pressure support member 32, 33 and a static pressure pad 34, 35 mounted on the static pressure support member 32, 33 so as to face the supported surface of the workpiece W. Equipped with its hydrostatic pat 34,35
Is made of a porous material so that the static pressure fluid from the static pressure supporting members 32 and 33 is ejected to the supported surface side of the workpiece W.

The static pressure supporting members 32, 33 have static pressure pads 34, 3
Guide passages 36 and 37 for guiding the static pressure fluid are formed on the 5 side,
The guide passages 36 and 37 are connected to a static pressure fluid supply source (not shown) via a hose or the like. In addition, the static pressure fluid includes
Air, other static pressure gases, or coolants, grinding fluids, and other static pressure liquids have been used.

The static pressure supporting members 32, 33 are provided with ejection holes for ejecting a static pressure fluid on the supported surface side of the workpiece W instead of the static pressure pads 34, 35 made of a porous material. Is also good. The ejection hole may be provided with one large one or a plurality of small ones dispersedly provided.

The lower static pressure support means 9 is detachably fixed on a support base 38 on the slide base 11. The upper static pressure supporting means 8 is supported by the retracting means 10 so as to be retractable with respect to the supported surface of the workpiece W.

The retracting means 10 is constituted by elevating means 39 for elevating and lowering the static pressure supporting means 8 and turning means 40 for turning the static pressure supporting means 8 horizontally at the ascending position. The lifting / lowering means 39 includes a vertical lifting / lowering member 41 and a lifting / lowering driving means 42 for lifting / lowering the lifting / lowering member 41, and the lower end of the lifting / lowering member 41 has a static pressure supporting member 32 of the static pressure supporting means 8 Is installed. The lifting drive means 42 is constituted by a cylinder drive type, a motor drive type, or other appropriate means.

As shown in FIG. 6, the turning means 40 includes a turning arm 44 supported on a support base 26 so as to be turnable around a vertical turning axis 43, and a turning drive for driving the turning arm 44. Means 45, and the elevating means 39 is mounted on the tip side of the turning arm 44. The turning drive means 45 is constituted by a turning cylinder and other appropriate means. In addition,
A turning stopper 46 for positioning the turning arm 44 at a position where the static pressure supporting means 8 is located above the supported surface of the workpiece W is provided on the support base 26. The support 26 is fixed on the slide base 11 near the mount 20 for the drive motor 19.

Next, a description will be given of a grinding method in the double-sided grinding apparatus having the above-described configuration. First, in a retracted position in which the sliding base 11 is retracted from the grinding wheels 2 and 3, the swing arm 28 is swung by the swing driving means 31 so that the guide roller 6 and the drive roller
After widening the distance between the workpiece W and the workpiece W, the workpiece W is loaded so that the guide roller 6 is fitted to the inner diameter of the hole, and the workpiece W is set on the lower static pressure support means 9. Therefore, the workpiece W can be easily put on the static pressure support means 9 and set.

Next, the turning means 40 of the retreating means 10 is operated to turn the upper static pressure supporting means 8 above the workpiece W, and then the elevating means 39 is operated to operate the upper static pressure supporting means. 8
Then, the supported surface side of the workpiece W is statically supported from both the upper and lower sides via the static pressure fluid ejected from the static pressure pads 34, 35 of the respective static pressure support means 8, 9. At this time, static pressure support means 8, 9
The static pressure fluid ejected from the static pressure pads 34, 35 flows between the static pressure pads 34, 35 and the supported surface of the workpiece W. , 9 allows the workpiece W to be positioned.

When the positioning of the workpiece W by the static pressure support means 8 and 9 is completed, the swing arm 28 is swung by the swing driving means 31 to move the guide roller 6 to the work W.
The guide roller 6 is pressed against the workpiece W by the urging force of the swing drive means 31.

Then, each of the drive rollers 4 and 5 rolls on the outer periphery of the workpiece W, and the drive rollers 4 and 5 and the guide roller 6 radially move the radius of the workpiece W opposite to the surface to be ground in the radial direction. The work W is rotated in the direction indicated by the arrow a by the driving force of the drive rollers 4 and 5 because the work W is sandwiched. Therefore, the guide roller 6 can be easily rolled into the bore of the workpiece W, and the workpiece W can be reliably sandwiched between the guide roller 6 and the driving rollers 4 and 5.

Next, the sliding base 11 is advanced to the side of the grinding wheels 2 and 3 so that the surface to be ground of the workpiece W is moved to the upper and lower grinding wheels 2 and 3.
After that, the process proceeds to the grinding cycle, in which the upper and lower grinding surfaces of the workpiece W are ground by the upper and lower grinding wheels 2, 3 rotating in the direction of arrow a.

Therefore, the upper and lower static pressure supporting means 8 and 9 statically support the upper and lower end surfaces of the workpiece W on the supported surfaces side, and the driving rollers 4 and 5 and the guide roller 6 support the workpiece W. While the workpiece W is rotated in the direction of the arrow b by the drive rollers 4 and 5 while the workpiece W is sandwiched in the radial direction, a pair of upper and lower grinding wheels 2, Three
Thereby, the upper and lower end surfaces of the workpiece W are ground.

When the grinding by the grinding wheels 2 and 3 is completed, the sliding base 11 is retracted from the grinding wheels 2 and 3, and then the elevating means 39 of the retracting means 10 is operated to raise the static pressure supporting means 8 and Then, the turning means 40 is operated to retreat the static pressure supporting means 8 in the ascending state to the retreat position shown by the two-dot chain line in FIG.

On the other hand, the guide roller 6 is separated from the inner diameter of the hole of the workpiece W, and the clamping of the workpiece W by the drive rollers 4, 5 and the guide roller 6 is released. Therefore, the ground workpiece W
Can be easily taken out from the lower static pressure support means 9, whereby the grinding of the workpiece W is completed.

In this embodiment, with the workpiece W sandwiched between the outer peripheral drive rollers 4 and 5 and the inner peripheral guide roller 6, the supported surfaces of the upper and lower ends of the workpiece W are paired with a pair of static rollers. The radial drive / end guide method of driving the workpiece W by the outer peripheral drive rollers 4 and 5 while statically supporting the workpiece W by the pressure support means 8 and 9 adopts the flatness of the workpiece W, There are the following advantages, for example, the surface roughness can be processed with high accuracy.

That is, in a state where the radial portion of the workpiece W is sandwiched between the outer peripheral drive rollers 4, 5 and the inner peripheral guide roller 6, the outer peripheral drive rollers 4, 5 are interposed between the outer peripheral drive rollers 4, 5 and the inner peripheral guide rollers 6.
Since the workpiece W is driven and the workpiece W can be driven from the outer peripheral side of the radial portion, the rigidity of the workpiece W is increased as compared with the conventional art, and the workpiece W can be ground with less distortion and high precision. In addition, since the rigidity of the workpiece W is increased, the driving force by the drive rollers 4 and 5 can be increased, and the workpiece W can be rotated at a high speed to greatly reduce the cycle time of the grinding operation.

In particular, there is a guide roller 6 which comes into contact with the inner diameter of the hole of the workpiece W, and the guide roller 6 and the driving rollers 4, 5 opposite to the grinding wheels 2, 3 divide the radius of the workpiece W into a radius. Since the grinding is performed by the grinding wheels 2 and 3 while being sandwiched in the directions, the stress applied to the workpiece W during the grinding is in the tensile direction, and the workpiece W can be hardly bent.

Further, by separating the driving rollers 4, 5 holding the grinding force from the grinding wheels 2, 3 together with the guide rollers 6, the workpiece W can be moved between the driving rollers 4, 5 and the guide rollers 6.
Even if a bend occurs in the radius portion, the influence of the bend on the ground surface can be reduced.

The outer diameters of the grinding wheels 2 and 3 are shifted from the center of the workpiece W, and the driving rollers 4 and 5 move in a direction in which the workpiece W rotates with the grinding force of the grinding wheels 2 and 3. The rotation driving means 18
, The driving force of the workpiece W can be reduced. Accordingly, the pressing force for pressing the drive rollers 4 and 5 against the workpiece W for driving the workpiece W is reduced, and the deflection of the workpiece W can be reduced.

Further, both ends of the workpiece W are held by static pressure support means 8, 9
Since the workpiece W is guided in the rotational direction while supporting the workpiece W statically, the end faces of the workpiece W can be guided with high precision by the static pressure supporting means 8 and 9.

In addition, since the static pressure supporting means is used by the static pressure supporting means 8 and 9, the bending of the workpiece W due to the restraining force of the static pressure supporting means 8 and 9 can be reduced, and the spring effect by the static pressure fluid can be used. In addition, there is an advantage that the influence of the positioning accuracy between the grinding wheels 2 and 3 and the supporting surfaces of the static pressure supporting means 8 and 9 can be roughened, and the positioning adjustment can be simplified.

Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments. For example,
The double-sided grinding device may be a vertical type, a horizontal type, or another type. The arrangement of the drive rollers 4 and 5 and the guide roller 6 is as follows.
Two drive rollers are provided on the outer peripheral side of the workpiece W as in the embodiment.
4 and 5, one guide roller 6 is arranged on the inner diameter side of the hole, and at least two rollers are arranged outside the workpiece W, and one roller is arranged on the inner diameter side of the work W. Then, at least one of these rollers may be used as a driving roller.

Therefore, at least two of the outer peripheral sides of the workpiece W
One of the rollers may be used as a driving roller, the other roller may be used as a guide roller, or only one roller on the inner diameter side may be used as a driving roller. At least one drive roller may be disposed inside or outside the workpiece W, or all may be drive rollers.

In addition, one roller is arranged on the outer peripheral side of the workpiece W, and two rollers are arranged on the inner diameter side of the hole of the workpiece W.
At least three rollers may be arranged inside and outside the workpiece W. In this case, one roller may be used as a large-diameter drive roller on the outer peripheral side, and two rollers may be used as small-diameter guide rollers on the inner diameter side of the hole.

In the embodiment, the upper static pressure supporting means 8 of the pair of static pressure supporting means 8 and 9 is retracted by the retracting means 10 in the embodiment, but the lower static pressure supporting means 9 is retracted by the retracting means 10. You may do it. The same applies to the horizontal type. Of course, if holding of the workpiece W is possible, both static pressure support means
8,9 may be evacuated.

As the transfer moving means 7 for bringing the guide roller 6 into and out of contact with the inner diameter of the hole of the workpiece W, the swinging method using the swinging arm 28 and the swinging driving means 31 is the most structurally simple. The guide roller 6 may be moved linearly in the contact / separation direction. When the workpiece W is pressed against the plurality of drive rollers 4 and 5 by the guide roller 6 on the inner diameter side of the hole,
It is desirable to press toward the substantially center between the plurality of drive rollers 4 and 5.

It is sufficient for the retreating means 10 to retreat one of the static pressure supporting means 8 and 9 so that there is no support for attaching and detaching the workpiece W. As specific means, the elevating means 39 and the turning means It is also possible to adopt an evacuation method other than the lifting / turning method by 40. For example, instead of the turning means 40, the static pressure support means 8 in the ascending state may be linearly moved laterally, or may be constituted only by the elevating means 39.

Of course, in the case of the horizontal type, the retracting means 10 corresponding to the horizontal type may be employed. For example, the retreating means 10 can be easily provided by using a horizontal moving means for moving one or both of the static pressure supporting means 8 and 9 in the direction of perspective (lateral direction) with respect to the workpiece W and an elevating means or a turning means. Can be configured.

[0044]

According to the grinding method of the present invention, while rotating a thin disk-shaped workpiece with holes, when grinding both end surfaces of the workpiece with a pair of grinding wheels,
At least three rollers, each of which includes a roller that rolls on the inner diameter of the hole of the workpiece and a roller that rolls on the outer circumference of the workpiece, while rotatably supporting the workpiece while sandwiching the radial portion of the workpiece in the radial direction. Since both ends of the workpiece are ground by the grinding wheel, the rigidity of the workpiece is increased and the workpiece can be processed with high precision, and the cycle time can be greatly reduced by high-speed rotation of the workpiece.

Further, since the both end surfaces of the work are supported by the static pressure support means, the work can be guided with high precision and the bending of the work due to the restraining force can be reduced.

In addition, since the grinding wheel is rotated in the direction of rotation with respect to the workpiece, the driving force of the workpiece can be reduced, the pressing force for driving the workpiece can be reduced, and the deflection of the workpiece can be reduced. it can.

According to the grinding apparatus of the present invention, while rotating a perforated thin disc-shaped workpiece, both end faces of the perforated thin disc-shaped workpiece are ground by a pair of grinding wheels. In a double-sided object grinding apparatus, at least two rollers rolling in contact with the outer periphery of a workpiece, and rolling contact with the inner diameter of a hole in the workpiece and radially sandwiching a radial portion of the workpiece between the at least two rollers. The provision of the rotatably supported rollers increases the rigidity of the workpiece and enables high-precision machining, and the high-speed rotation of the workpiece greatly reduces the cycle time.

At least one of the rollers is a driving roller for rotationally driving the workpiece. The driving roller can drive the workpiece in a radius portion, thereby increasing the rigidity of the workpiece and enabling high precision machining. Cycle time can be greatly reduced by high-speed rotation of objects.

Moreover, two drive rollers which are in rolling contact with the outer periphery of the workpiece, and which are in rolling contact with the inner diameter of the hole of the workpiece and which are rotatably supported by sandwiching the radial portion of the workpiece in a radial direction between the two drive rollers. Since the guide roller and the transfer means for moving the guide roller in the distance direction with respect to both drive rollers are provided, the work can be easily attached and detached, and the work can be easily sandwiched between the drive roller and the guide roller. Assuredly, the entire apparatus can be easily configured.

Further, since a pair of static pressure supporting means for supporting both end surfaces of the workpiece are provided, the workpiece can be guided with high precision, and the bending of the workpiece due to the restraining force can be reduced.
Positioning adjustment between the grinding wheel and the static pressure supporting means can be easily performed. In addition, since there is provided a retracting means for retracting at least one of the pair of static pressure supporting means from the supported surface of the workpiece, the workpiece can be easily attached and detached.

Further, since the two drive rollers and the guide roller are arranged on the opposite side of the grinding wheel, and the static pressure support means is arranged between the two drive rollers and the guide roller, the workpiece can be kept high. It is possible to guide the workpiece with high precision, and to reduce the bending of the workpiece between the driving roller and the guide roller. Even if there is some bending, the influence on the ground surface of the workpiece can be reduced.

Further, since each roller and the static pressure supporting means are provided on an integral sliding base movable in the diameter direction of the grinding wheel, each roller and the static pressure supporting means on the sliding base are provided with respect to the grinding wheel. Can be easily moved forward and backward together.

[Brief description of the drawings]

FIG. 1 is a side view of a double-side grinding device showing an embodiment of the present invention.

FIG. 2 is a front view of a double-sided grinding apparatus showing one embodiment of the present invention.

FIG. 3 is a plan view of a double-sided grinding apparatus showing one embodiment of the present invention.

FIG. 4 is a sectional side view of a main part showing one embodiment of the present invention.

FIG. 5 is a sectional front view of a main part showing one embodiment of the present invention.

FIG. 6 is a plan view of a main part showing an embodiment of the present invention.

[Explanation of symbols]

 W Thin disk-shaped workpiece with holes 2,3 Grinding wheel 4,5 Drive roller 6 Guide roller 7 Moving means for rolling contact 8,9 Static pressure support means 10 Retraction means 11 Sliding base

Claims (10)

[Claims] 1. A roller which rolls into contact with an inner diameter of a hole of a workpiece when rotating both ends of the workpiece with a pair of grinding wheels while rotating the thin disk-shaped workpiece having a hole. The grinding wheel grinds both end surfaces of the workpiece while rotatingly supporting the workpiece with a radial portion of the workpiece being sandwiched in a radial direction by at least three rollers constituted by rollers that are in contact with the outer periphery. A method for grinding both sides of a thin disk-shaped workpiece with holes. 2. The method of claim 1, wherein both ends of the workpiece are supported by static pressure support means. 3. The grinding wheel according to claim 1, wherein the grinding wheel is rotated in a rotating direction with respect to the workpiece.
2. A double-sided grinding method for a thin disk-shaped workpiece having a hole according to the above. 4. A double-sided grinding machine for a perforated thin disc-shaped workpiece, wherein both end faces of the perforated thin disc-shaped workpiece are ground by a pair of grinding wheels while rotating the perforated thin disc-shaped workpiece. At least two rollers rolling on the outer circumference of the workpiece, and rotatably supporting the inner diameter of the workpiece and rotatably sandwiching a radial portion of the workpiece between the at least two rollers in a radial direction; A double-sided grinding machine for a thin disk-shaped workpiece having holes. 5. The apparatus according to claim 4, wherein at least one of the rollers is a drive roller for rotating the workpiece. 6. Two drive rollers rolling in contact with the outer circumference of the workpiece, and a radial portion of the workpiece being radially sandwiched between the two drive rollers in rolling contact with the inner diameter of the hole of the workpiece. The perforated thin plate according to claim 4 or 5, further comprising: a guide roller rotatably supported; and a rolling contact moving means for moving the guide roller in a near-far direction with respect to the two drive rollers. Double-sided grinding machine for disk-shaped workpieces. 7. A double-sided grinding of a perforated thin disk-shaped workpiece according to claim 4, further comprising a pair of static pressure supporting means for supporting both end faces of said workpiece. apparatus. 8. A hole according to claim 4, further comprising a retracting means for retracting at least one of said pair of static pressure supporting means from a supported surface of said workpiece. Double-sided grinding machine for thin disk-shaped workpieces. 9. The method according to claim 9, wherein the two driving rollers and the guide roller are arranged on the opposite side of the grinding wheel, and the static pressure supporting means is arranged between the two driving rollers and the guide roller. The double-sided grinding machine for a thin disk-shaped workpiece with holes according to any one of claims 6 to 8, characterized in that: 10. The grinding wheel according to claim 4, wherein said rollers and said static pressure supporting means are provided on an integral sliding base movable in a diameter direction of said grinding wheel. A double-sided grinding machine for thin disk-shaped workpieces with holes.