JP2007194471A - Method for polishing wafer - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance a flexural strength, to require no detoxification process, to maintain a gettering effect at the time of polishing the grinding surface of a wafer, in order to prevent a lowering in quality of a device. <P>SOLUTION: A wafer W is polished by rotating the wafer W held by a holding table 20 by rotating the holding table 20, by positioning a grind stone 30a to a rotational center of the wafer W along a circular conical surface 20a, and by rotating a polishing wheel 30 in ferrying around with associated with the rotation of the table 20. The grinding stone 30a freely rotates associated with the rotation of the table 20 and the rear side of the wafer W is polished, therefore the rear side, the polished surface, of the wafer W is moderately and reasonably polished. A polishing strain is reduced but not completely eleminated not to eliminate the gettering effect, and no chemical polishing solution such as CMP is used to require no cost for detoxification. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for polishing a surface of a wafer by contacting the surface with a grindstone.

  A wafer on which a plurality of devices such as IC and LSI are formed on the front surface side is ground to a desired thickness and then diced into individual devices, which are used in various electronic devices and the like.

  However, when the back surface of the wafer is ground, grinding distortion such as fine cracks occurs on the ground surface, which causes a problem that the bending strength of each device is lowered. Therefore, a technique for removing grinding distortion by polishing the ground back surface by CMP (Chemical Mechanical Polishing) has been proposed (see, for example, Patent Document 1).

JP 2000-254857 A

  However, since chemical polishing liquid is used in CMP, detoxification treatment is indispensable, and there is a problem that costs increase. Further, when the grinding surface of the wafer is polished by CMP to completely remove the grinding distortion, the gettering effect is lost, and there is a problem that the quality of the device is deteriorated.

  Accordingly, the problem to be solved by the present invention is that, when polishing a ground surface of a wafer, the bending strength is increased, the detoxification treatment is not required, the gettering effect is maintained, and the device quality is not deteriorated. It is in.

  The present invention includes a holding unit that holds a wafer and a polishing unit that polishes the wafer held by the holding unit. The holding unit rotates a holding table having a holding surface that holds the wafer, and the holding table. And a holding wheel of the holding table is formed in a conical surface with the center of rotation as a vertex, and the polishing means is a polishing wheel in which a grindstone that contacts the wafer and performs a polishing action is fixed in a circular shape. The present invention relates to a wafer polishing method for polishing a wafer using a polishing apparatus comprising a spindle unit that supports the polishing wheel so as to freely rotate and an advance / retreat drive unit that moves the polishing wheel toward or away from the holding table. Rotate the holding table to rotate the wafer held on the holding table, and rotate the wafer by following the conical surface of the grindstone Positioned in mind, by rotation around take grinding wheel with rotation of the holding table is characterized in that polishing the wafer.

  In such a wafer polishing method, the rotation speed of the holding table is preferably 200 rpm to 500 rpm. Further, it is preferable that a load of 10 kg to 20 kg is applied from the grindstone to the wafer held by the holding means.

  The gradient of the conical surface constituting the holding surface is, for example, 1/1000 to 1/10000.

  The abrasive grains constituting the grindstone are diamond abrasive grains. The grain diameter of the abrasive grains is preferably 1 μm or less, and the abrasive grains are preferably formed of a bond agent. In this case, a vitrified bond is an example of the bonding agent.

  In the present invention, since the polishing wheel is not rotated by being driven by a motor or the like, but is rotated with the rotation of the holding table, the ground surface of the wafer is polished reasonably and reasonably. Therefore, since the grinding distortion is not completely removed and the polishing is performed with high accuracy, the gettering effect is not lost, and the quality of the device can be improved. Further, since no chemical polishing liquid is used unlike CMP, no detoxification treatment is required, and the cost does not increase. On the other hand, since the grinding distortion is reduced, the bending strength is improved.

1. First Example In the first example, a method for polishing a wafer using the polishing apparatus 1 shown in FIG. 1 will be described. A polishing apparatus 1 shown in FIG. 1 is used for setting conditions and controlling operations for a holding means 2 for holding a wafer, a polishing means 3 for polishing a wafer held by the holding means 2, and the holding means 2 and the polishing means 3. An operation means 4 and a counter balance 5 for adjusting the pressure on the wafer due to the weight of the polishing means 3 are provided.

  As shown in FIG. 2, the holding unit 2 is connected to the holding table 20 having a holding surface 20 a for holding a wafer, a rotating shaft 21 connected to the holding table 20, and the holding table 20 via the rotating shaft 21. The driving table 22 is configured to rotate the holding table 20 and can move directly below the polishing means 3 while holding the wafer W.

  As shown in FIG. 2, the holding surface 20 a is formed in a conical surface having the rotation center 20 b of the holding means 2 as a vertex. In FIG. 2, the gradient (H / R) of the conical surface is exaggerated, but the actual gradient is about 1/1000 to 1/10000. The holding table 20 is formed of a porous member such as porous ceramics, and the lower side of the holding table 20 is connected to a suction source 25 via an air flow passage 23 and a rotary joint 24. As shown in FIG. 1, a polishing liquid supply means 26 for supplying a polishing liquid such as pure water to the wafer is disposed in the vicinity of the holding table 20.

  As shown in FIG. 1, the polishing means 3 supports a polishing wheel 30 having a grindstone 30a that contacts the wafer held by the holding means 2 and applies a polishing action to the lower surface, and supports the polishing wheel 30 in a freely rotatable manner. The spindle unit 31 is configured to move the polishing wheel 30 toward or away from the holding table 20. Here, the free rotation means that it can be rotated by receiving an external force even if it is not equipped with a drive source for rotation.

  The spindle unit 31 is in a non-contact state by ejecting air to the spindle 310 having a vertical axis, a wheel mount 311 formed at a lower portion of the spindle 310 to which the grinding wheel 30 is connected, and the spindle 310. The spindle housing 312 is configured to support the spindle 310 so as to freely rotate.

  The grindstone 30a constituting the polishing wheel 30 is formed by solidifying abrasive grains such as diamond abrasive grains with a bonding agent, and the plurality of grindstones 30a are circularly formed on the lower surface of the polishing wheel 30 with a certain interval. Arranged and fixed. The grindstone 30a is suitable for mirror finishing, and the grain size of the abrasive grains is, for example, 1 μm or less. As the bonding agent, for example, vitrified bond is used.

  The advance / retreat drive unit 32 will be described with reference to FIG. 3 excluding the counter balance 5 in FIG. The advancing / retreating drive unit 32 includes an upright wall 320, a ball screw 321 disposed on one surface of the wall 320, a pair of guide rails 322 disposed in parallel to the ball screw 321, and a ball screw 321. A spindle motor 31, which is integrally formed with a pulse motor 323 connected to one end and rotating a ball screw, an elevating part 324 whose inner nut is screwed to the ball screw 321 and whose side is in sliding contact with the guide rail 322, and an elevating part 324. It is comprised from the support part 325 which supports. When the elevating unit 324 and the support unit 325 are driven by the pulse motor 323 and the ball screw 321 is rotated and guided up and down by the guide rail 322, the spindle unit 31 and the polishing wheel 30 supported by the support unit 325. Also moves up and down and approaches the holding table 20 or moves away from the holding table 20.

  Referring back to FIG. 1, the counter balance 5 includes an air cylinder 50 that drives the rod 51, and the distal end portion of the rod 51 and the support portion 325 are connected by a connecting portion 52. Then, when air is supplied to the air inlet 50a of the air cylinder 50, a force to lift the rod 51 works, and this force reduces the burden on the advance / retreat drive unit 32 due to the weight of the polishing means 3 itself. It becomes the composition which is done.

  A pressure gauge 53 is connected to the air inlet 50 a of the air cylinder 50, and the pressure gauge 53 is connected to the pressurizing means 55 via the pressure adjustment unit 54. The pressure of the air supplied from the pressurizing means 55 to the air cylinder 50 is adjusted by the pressure adjusting unit 54. Then, the air whose pressure has been adjusted is supplied to the air inlet 50 a of the air cylinder 50. The pressure adjustment unit 54 is configured by a flow rate adjustment valve, for example.

  The pressure gauge 53 is connected to a counter load calculating means 56 for calculating a load (counter load) in the counter balance 5 from the measured pressure. The value of the counter load calculated by the counter load calculating unit 56 can be read by the effective pressing load calculating unit 57.

  The effective pressure load calculating means 57 is connected with its own weight storage means 58 for storing the own weight of the polishing means 3. In the effective pressing load calculation means 57, the value of the load on the wafer W is obtained by subtracting the counter load value calculated by the counter load calculation means 56 from the weight value stored in the own weight storage means 58. The effective pressing load can be obtained.

  The value of the effective pressing load obtained by the effective pressing load calculating unit 57 is read by the comparison control unit 59. In the comparison control means 59, the value of the desired pressure load inputted from the operation means 4 and stored in the desired pressure load storage means 60 is compared with the value of the effective pressure load obtained by the effective pressure load calculation means 57. When the two values are equal, the pressure adjusting unit 53 is maintained as it is, but when the two values are not equal, the air flow rate in the pressure adjusting unit 54 is adjusted so that the two values are equal.

  For example, when the effective pressing load is larger than the desired pressing load, the load by the counter balance 5 is increased by increasing the air flow rate in the pressure adjusting unit 54 under the control of the comparison control means 59. Even in this process, the value of the desired pressure load and the value of the effective pressure load calculated by the effective pressure load calculation means 57 are compared by the comparison control means 59, and when the two values are equal, the increase of the air flow rate is increased. Stop. Thereafter, the comparison control means 59 performs feedback control so that the desired pressing load and the effective pressing load are kept equal, that is, the effective pressing load is kept constant.

  By such control, the wafer W can be polished with a desired pressing load. Therefore, when the operator inputs a desired load value from the operation means 4 and stores it in the desired pressing load storage means 60, the polishing is performed while the desired pressing load is maintained.

  At the time of polishing the wafer W, the front side of the wafer W after the back surface grinding is held by the holding table 20 at the time of polishing, and the back surface is exposed. At this time, as shown in FIG. 4, the wafer W is held in a state following the inclination of the holding surface 20a. Then, when the holding unit 2 moves in the horizontal direction, the wafer W is positioned immediately below the polishing unit 3, and then driven by the advance / retreat drive unit 32 to lower the polishing wheel 30 and the spindle unit 31. At this time, the polishing wheel 30 and the spindle unit 31 are not rotationally driven.

  As shown in FIG. 4, the spindle unit 31 is also slightly inclined so that the lower surface of the non-rotating grindstone 30a follows the holding surface 20a formed as a conical surface. When the polishing wheel 30 and the spindle unit 31 are lowered, the polishing is performed. The lower surface of the grindstone 30 a constituting the wheel 30 contacts the back surface of the wafer W. At this time, the grindstone 30a is positioned and brought into contact with the rotation center 20b of the wafer W. The pressure applied to the wafer W is adjusted by the counter balance 5 shown in FIG. 1 as follows.

  First, the desired pressure applied to the wafer W is input in advance from the operation means 4 by the operator and stored in the desired pressure load storage means 60. The load applied from the grindstone 30a to the wafer W is, for example, about 10 kg to 20 kg.

  For example, when the weight of the polishing means 3 is 150 [kg] and the desired pressing load on the wafer W during polishing is 20 [kg], the value of the weight of the polishing means 3 (150 [kg]) is set in advance. It is stored in its own weight storage means 58. On the other hand, a desired pressure load value (20 [kg]) is input from the operation means 4 by the operator and stored in the desired pressure load storage means 60.

  Pressure is applied from the pressurizing means 55, air is supplied to the air inlet 50 a of the air cylinder 50, and the rod 51 tends to rise upward, so that an upward force also acts on the polishing means 3. The pressure gauge 53 always measures the air pressure, and the counter load calculation means 56 obtains the load value of the counter balance 5 based on the measured value.

  For example, if the load value calculated by the counter load calculation unit 56 is 100 [kg], the effective pressure load calculation unit 57 stores the load value (100 [kg]) in the self-weight storage unit 60. Further, the effective value (50 [kg]) of the pressing load is obtained by subtracting from the weight value (150 [kg]).

  Then, the comparison control means 59 compares the calculated effective value (50 [kg]) with the desired pressure load value (20 [kg]) stored in the desired pressure load storage means 60. In this case, since the effective value is larger, in order to reduce the effective value, the counter load is increased by adjusting the pressure adjusting unit 54 to increase the air pressure. After that, calculation of counter load, calculation of effective pressure load, and comparison of desired pressure load and effective pressure load are always performed, and the air pressure is increased until the desired pressure load and the effective pressure load match. I will let you.

  Even after the desired pressing load and the effective pressing load coincide with each other, the same processing is always performed. For example, when the effective pressing load becomes smaller than the desired pressing load, until the effective pressing load becomes equal to the desired pressing load. The air pressure is lowered by adjusting the pressure adjusting unit 54. In this way, control is performed so that the effective pressing load is equal to the desired pressing load, and the desired pressing load is maintained.

  As described above, the load of the counter balance 5 acting in the direction opposite to the load of the polishing means 3 can be adjusted, and the difference between the weight of the polishing means 3 and the load of the counter balance 5 can be determined by the actual polishing tool with respect to the wafer W. It can be a pressing load.

  As described above, with the desired pressure applied and the grindstone 30a and the wafer W in contact with each other, the holding table 20 is rotated by the driving by the driving source 22 shown in FIG. The rotation speed of the holding table 20 is, for example, 200 rpm to 500 rpm. When the holding table 20 is rotated, the grinding wheel 30a is in contact with the rotation center of the wafer W as shown in FIG. For example, when the rotation speed of the holding table 20 is 300 rpm, the rotation speed of the polishing wheel 30 is about 100 rpm. Since the trajectory of the grindstone 30a passes through the center of rotation of the holding table 20, the grindstone 30a always contacts the back surface of the wafer W at the contact position 30b, whereby the entire back surface of the wafer W is polished. At the time of polishing, a polishing liquid such as pure water is supplied from the polishing liquid supply means 26.

  Thus, the polishing wheel 30 is not driven and rotated by a motor or the like, but rotates with the rotation of the holding table 20, so that the back surface, which is the grinding surface of the wafer W, is polished reasonably and reasonably. The Accordingly, although the grinding strain is reduced and the bending strength is increased, the grinding strain is not completely removed, so that the gettering effect is not lost and the quality of the device is not deteriorated. Further, since no polishing liquid is used unlike CMP, the cost does not increase.

2. Second Example In the second example, a method of polishing a wafer using the polishing apparatus 6 shown in FIG. 6 will be described. The grinding device 6 includes holding means 7a, 7b, 7c for holding the wafer, first grinding means 8 and second grinding means 9 for grinding the wafer held by each holding means, And a polishing means 10 for polishing the wafer.

  The holding means 7a, 7b, and 7c are configured in the same manner as the holding means 2 shown in FIGS. Therefore, the following description will be given with reference to FIGS. 2, 4 and 5 as appropriate.

  The grinding device 6 is provided with a first cassette 11a for storing unprocessed wafers and a second cassette 11b for storing processed wafers. In the vicinity of the first cassette 11a and the second cassette 11b, a loading / unloading unit having a function of unloading the unprocessed wafer from the first cassette 11a and loading the processed wafer into the second cassette 11b. 12 is disposed. The carry-in / out means 12 has a configuration in which a holding unit 121 that holds a wafer is provided at the tip of a bendable arm unit 120, and the wafer before processing is aligned with the movable range of the holding unit 121. Positioning means 13 and cleaning means 14 for cleaning the processed wafer are provided.

  A first transport unit 15 a is disposed in the vicinity of the alignment unit 13, and a second transport unit 15 b is disposed in the vicinity of the cleaning unit 14. The first transfer means 15a has a function of transferring the unprocessed wafer placed on the alignment means 13 to one of the holding means, and the second transfer means 15b is held by any of the holding means. The processed wafer is transported to the cleaning means 14. The second transport unit 15b includes a suction pad 150 that sucks the wafer, and removes polishing debris and the like attached to the suction pad constituting the second transport unit 15b in the movable range of the second transport unit 15b. A suction pad cleaning means 19 is provided.

  The holding means 7a, 7b, and 7c are supported by the turntable 16 so as to be able to rotate and revolve, and by the rotation of the turntable 16, any one of the holding means becomes the first conveying means 15a and the second conveying means 15b. Located in the vicinity.

  The first grinding means 8 includes a spindle 80 having a vertical axis, a housing 81 that rotatably supports the spindle 80, a motor 82 connected to one end of the spindle 80, and the other end of the spindle 80. The wheel mount 83, the grinding wheel 84 attached to the wheel mount 83, and the grindstone 85 fixed to the lower surface of the grinding wheel 84, the spindle 80 is rotated by the driving of the motor 82, and the grindstone 85 is accordingly accompanied. Is also configured to rotate. As the grindstone 85, a grindstone for rough grinding is used.

  The first grinding means 8 can be moved in the vertical direction by the first grinding feed means 17. The first grinding feed means 17 includes a ball screw 170 disposed in the vertical direction, a pair of guide rails 171 disposed in parallel to the ball screw 170, and a pulse motor 172 that is connected to the ball screw 170 and rotates the ball screw 170. And an elevating part 173 whose inner nut is screwed to the ball screw 170 and whose side part is in sliding contact with the guide rail 171; and a supporting part 174 that is formed integrally with the elevating part 173 and supports the spindle housing 81, The first grinding means 8 is also lifted and lowered as the lifting and lowering portion 173 is guided by the guide rail 171 and driven by the motor 172.

  The second grinding means 9 is provided at a spindle 90 having a vertical axis, a housing 91 for rotatably supporting the spindle 90, a motor 92 connected to one end of the spindle 90, and the other end of the spindle 90. The wheel mount 93, the grinding wheel 94 attached to the wheel mount 93, and the grindstone 95 fixed to the lower surface of the grinding wheel 94, and the spindle 90 rotates as the motor 92 is driven. Is also configured to rotate. As the grindstone 95, a grindstone for finish grinding is used.

  The second grinding means 9 can be moved in the vertical direction by the second grinding feed means 18. The second grinding feed means 18 includes a ball screw 180 arranged in the vertical direction, a pair of guide rails 181 arranged in parallel to the ball screw 180, and a pulse motor 182 connected to the ball screw 180 and rotating the ball screw 180. And an elevating part 183 whose inner nut is screwed to the ball screw 180 and whose side part is slidably in contact with the guide rail 181; and a support part 184 that is formed integrally with the elevating part 183 and supports the spindle housing 91. The second grinding means 9 is also lifted and lowered as the lifting and lowering portion 183 is guided by the guide rail 181 by driving by the motor 182.

  The polishing means 10 is for a polishing wheel 100 to which a grindstone 100a that contacts a wafer and performs a polishing action is fixed, a spindle unit 101 that supports the polishing wheel 100 so as to be freely rotatable, and a holding table positioned immediately below. An advancing / retreating drive unit 102 that moves the grinding wheel 100 closer to or away from the holding table, and a horizontal drive unit 103 that is installed above the turntable 16 and moves the advancing / retreating drive unit 102 in the horizontal direction. A polishing liquid supply means 104 for supplying a polishing liquid such as pure water to the wafer is disposed near the polishing wheel 100 and outside the turntable 16.

  The spindle unit 101 can freely rotate the spindle 101a in a non-contact state by ejecting air to the spindle 101a having a vertical axis, a wheel mount 101b formed below the spindle 101a, and the spindle 101a. The spindle housing 101c is supported by the spindle housing 101c.

  The grindstone 100a constituting the polishing wheel 100 is formed by solidifying abrasive grains such as diamond abrasive grains with a bonding agent. The grindstone 100a is suitable for mirror finishing, and the grain size of the abrasive grains is, for example, 1 μm or less. As the bonding agent, for example, vitrified bond is used. On the lower surface of the polishing wheel 100, a plurality of grindstones 100a are arranged in a circular shape and fixed at regular intervals.

  In the first cassette 11a, a plurality of wafers having a protective member for circuit protection attached to the surface are accommodated. The individual wafers W are transferred to the alignment unit 13 by the loading / unloading unit 12, and after the center of the wafer W is aligned at a fixed position, the wafers W are transferred to the holding unit 7a by the first transfer unit 15a. . In the holding means 7a, the surface side to which the protective member is attached is held.

  Next, when the turntable 16 rotates counterclockwise by a predetermined angle (120 degrees in the illustrated example), the holding means 7 a moves directly below the first grinding means 8. Then, while the wafer W rotates with the rotation of the holding unit 7a, and the grindstone 85 rotates with the rotation of the spindle 80, the first grinding unit 8 feeds the ground downward by the first grinding feed unit 17. And descend. Then, the rotating grindstone 85 comes into contact with the back surface of the wafer W and the back surface is roughly ground.

  When the rough grinding is thus completed, the turntable 16 rotates by a predetermined angle counterclockwise, whereby the wafer W held by the holding means 7a is positioned directly below the second grinding means 9. Then, the wafer W rotates with the rotation of the holding unit 7a, and the grindstone 95 rotates with the rotation of the spindle 90, while the second grinding unit 9 feeds the second grinding unit 9 downward. And descend. Then, the rotating grindstone 95 contacts the back surface of the wafer W, and the back surface is finish ground.

  When the finish grinding is finished, the holding table 7a is positioned directly below the polishing means 10 by rotating the turntable 16 by a predetermined angle counterclockwise.

  Next, the polishing wheel 100 is lowered by being driven by the advance / retreat driving unit 102, and the grindstone 100 a constituting the polishing wheel 100 is positioned at the rotation center of the wafer W and is brought into contact with the back surface (grinding surface) of the wafer W.

  The grindstone 100a is in contact with the rotation center of the wafer W. As shown in FIG. 5, the trajectory of the grindstone 100a passes through the rotation center of the holding table 20 constituting the holding means 7a. Along with this, the grindstone 100a freely rotates, and the back surface of the wafer W is polished. Since the polishing wheel 100 is not driven by a motor or the like, the back surface, which is the ground surface of the wafer W, is polished reasonably and reasonably. Therefore, although the grinding strain is reduced and the bending strength is improved, the grinding strain is not completely removed, so that the gettering effect is not lost and the quality of the device is not deteriorated. Further, since no chemical polishing liquid is used as in CMP, no detoxification treatment is required and no cost is required. In polishing, a polishing liquid such as pure water is supplied from the polishing liquid supply means 104.

  The wafer W whose grinding surface has been polished in this way is held by the second transfer means 15b and transferred to the cleaning means 14. In the cleaning means 14, the grinding dust adhering to the back surface of the wafer W is removed. The wafer W cleaned by the cleaning means 14 is accommodated in the second cassette 11b by the loading / unloading means 12.

  In addition, when the polishing waste or the like adheres to the suction pad 150 of the second transport means 15b by transporting the polished wafer, the suction pad cleaning means 19 cleans the suction pad 150.

It is a perspective view which shows the 1st example of a grinding | polishing apparatus. It is sectional drawing which shows the structure of a holding means schematically. It is a perspective view which shows the 2nd example of a grinding | polishing apparatus. It is sectional drawing which shows the state which grind | polishes a wafer schematically. It is explanatory drawing which shows the state which grind | polishes a wafer. It is a perspective view which shows the 2nd example of a grinding | polishing apparatus.

Explanation of symbols

1: Polishing device 2: Holding means 20: Holding table
20a: holding surface 20b: rotation center 21: rotation shaft 22: driving source 23: air flow path 24: rotary joint 25: suction source 3: polishing means 30: polishing wheel
30a: Whetstone 31: Spindle unit
310: Spindle 311: Wheel mount
312: Spindle housing 32: Advance / retreat drive
320: Wall 321: Ball screw 322: Guide rail
323: Pulse motor 324: Elevating part 325: Supporting part 4: Operating means 5: Counter balance 50: Air cylinder 51: Rod 52: Connecting part 53: Pressure gauge 54: Pressure adjusting part 55: Pressurizing means 56: Counter load calculation Means 57: Effective pressure load calculation means 58: Own weight storage means 59: Comparison control means 60: Desired pressure load storage means 6: Polishing devices 7a, 7b, 7c: Holding means 20: Holding table
20a: Holding surface 20b: Center of rotation 21: Rotating shaft 22: Drive source 23: Air flow path 24: Rotary joint 25: Suction source 26: Polishing liquid supply means 8: First grinding means 80: Spindle 81: Housing 82: Motor 83: Wheel mount 84: Grinding wheel 85: Grinding wheel 9: Second grinding means 90: Spindle 91: Housing 92: Motor 93: Wheel mount 94: Grinding wheel 95: Grinding wheel 10: Polishing means 100: Polishing wheel
100a: Whetstone 101: Spindle unit
101a: Spindle 101b: Wheel mount
101c: spindle housing 102: advance / retreat drive unit 103: horizontal drive unit 104: polishing liquid supply means 11a: first cassette 11b: second cassette 12: carry-in / out means 120: arm part 121: holding part 13: positioning means 14: Cleaning means 15a: First conveying means 15b: Second conveying means 16: Turntable 17: First grinding feed means 170: Ball screw 171: Guide rail 172: Pulse motor 173: Elevating part 174: Supporting part 18 : Second grinding feed means 180: Ball screw 181: Guide rail 182: Pulse motor 183: Lifting part 184: Support part 19: Suction pad cleaning means

Claims (6)

A holding means for holding the wafer, and a polishing means for polishing the wafer held by the holding means,
The holding means includes a holding table having a holding surface for holding a wafer and a drive source for rotationally driving the holding table, and the holding surface of the holding table is formed in a conical surface having the rotation center as a vertex. ,
The polishing means includes a polishing wheel in which a grindstone that contacts a wafer and performs a polishing action is fixed in a circular shape, a spindle unit that supports the polishing wheel so as to freely rotate, and the polishing wheel with respect to the holding table. A wafer polishing method for polishing a wafer using a polishing apparatus comprising an advance / retreat drive unit that approaches or separates,
The holding table is rotated to rotate the wafer held on the holding table, the grindstone is positioned at the rotation center of the wafer along the conical surface, and the polishing wheel is moved along with the rotation of the holding table. A wafer polishing method in which the wafer is polished by rotating around.   The wafer polishing method according to claim 1, wherein a rotation speed of the holding table is 200 rpm to 500 rpm.   The wafer polishing method according to claim 1, wherein a load of 10 kg to 20 kg is applied from the grindstone to the wafer held by the holding means.   The polishing apparatus according to claim 1, wherein a slope of the conical surface is 1/1000 to 1/10000.   5. The wafer according to claim 1, wherein the abrasive grains constituting the grindstone are diamond abrasive grains, the grain diameter of the abrasive grains is 1 μm or less, and the abrasive grains are formed by a bond agent. Polishing method.   The method for polishing a wafer according to claim 5, wherein the bonding agent is a vitrified bond.

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