JP2002126980A - Grinding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a grinding device capable of efficiently and accurately grinding plate surfaces of plural pieces of work to be flat, in grinding thin platy work. SOLUTION: This grinding device 1 rotates disc-shaped work 2 provided with a circular center hole 2a in the center thereof while supporting by a work supporting mechanism 12, and grinds a plane surface of the work 2 by rotating grinding wheels 6, 7. The grinding device 1 has a work carrier 10 simultaneously holding plural pieces of the work 2, and a series of the several ground work 2 and a series of the work 2 that has not been ground can be replaced by the work carrier 10. The grinding device 1 is provided with a carrying-in arm 81 for carrying in the work 2 that has not been ground and a carrying-out arm 91 for carrying out the ground work 2, thereby enabling simultaneously carrying out the ground work 2 from the work carrier 10 and carrying in the work 2 that has not been ground to the work carrier 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding apparatus for grinding a surface of a workpiece having a disk shape and having a hole formed in a central portion thereof.

[0002]

2. Description of the Related Art Conventionally, a grinding apparatus for simultaneously grinding both surfaces of a workpiece by sandwiching a plate surface of a thinly cut disk-shaped workpiece (workpiece) between two rotating grindstones. It has been known. In the grinding device, since it is necessary to rotate the grindstone and also the workpiece, the outer periphery of the disk-shaped work is sandwiched by a plurality of rollers, and at least one of the rollers is rotationally driven. , Rotating the work.

[0003] As an example, a grinding apparatus is schematically shown in FIG.
And FIG. FIG. 15 is a perspective view showing a state in which a workpiece is ground by a conventional grinding apparatus. FIG. 16 is a front view of the grinding apparatus as viewed from a direction perpendicular to the plate surface of the workpiece. Depiction of the grindstone is omitted. As shown in FIG. 15, the conventional grinding apparatus holds a disk-shaped work 102 so that the plate surface is perpendicular to the ground, and holds the plate surface of the work 102 with two rotating grindstones 106,
This is a device for sandwiching and grinding by 107.

[0004] Three guide rollers 103, 104 and 105 are provided on the outer periphery of the work 102, and the outer peripheral surface of each guide roller is in contact with the outer peripheral surface of the work 102. As shown in FIG. 16, when the driving roller 103, which is one of the guide rollers, is rotated counterclockwise by a work driving motor (not shown), the driving roller 103 is rotated.
The work 102 rotates clockwise by the frictional force of the contact portion between the outer peripheral surface of the work 102 and the outer peripheral surface of the work 102. Then, as shown in FIG. 15, the two grindstones 106, 1 rotating in the counterclockwise direction opposite to the rotation direction of the work 102.
07, the plate surface of the work 102 is sandwiched from both sides, and both grindstones 106 and 107 are cut in the direction of the work 102, whereby the front and back surfaces of the work 102 are simultaneously ground.

As described above, in the case of the supporting method in which the outer peripheral portion of the disk-shaped work 102 is sandwiched by the guide rollers, FIG.
As shown in FIG. 6, at least three rollers are required. Further, the three rollers have acute angles of all triangles formed by connecting the contact points between the respective outer peripheral surfaces and the outer peripheral surface of the work 102. It is necessary to arrange them so as to form an acute triangle.

[0006]

According to the above-mentioned conventional grinding apparatus, the outer periphery of a thin disk-shaped work 102 is sandwiched between a plurality of guide rollers 103, 104 and 105, and a rotation operation is given by the rotation of a drive roller 103. It has a structure. Therefore, in order to prevent the drive roller 103 from running idle, it is necessary to press at least one roller, for example, the roller 105, from the outer periphery of the work 102 toward the center of gravity of the triangle.

The work 10 is guided by a guide roller.
In the case of a structure in which the outer periphery of the roller 2 is clamped, a triangular distortion region 108 (obliquely rising portion in FIG. 16) formed by at least three rollers 103, 104, and 105 is pressed by the roller 105. Distortion will occur. Further, the grinding area 109 where the grinding is performed by the rotary grindstones 106 and 107 (the hatched portion in the lower right direction in FIG. 16) must extend at least from the outer peripheral portion of the work 102 to the center hole 102a. Therefore, a triangular distortion region 108 in which distortion due to the pressing of the roller 105 has occurred.
The grinding regions 109 where grinding is performed by the action of the grindstones 106 and 107 are overlapped. In the overlapping strain grinding region 110 (the crossing of the hatched portion in FIG. 16), the pressing of the roller 105 is performed. Thus, the work 102 in the state where the distortion is generated is ground by the rotating grindstones 106 and 107 to achieve flattening.

However, in this case, when the grinding is finished, the roller 105 that has been pressed is retracted and the work 102 is removed from the guide roller, the distortion of the work 102 caused by the pressing of the roller 105 returns to its original state. ,
The work 102 has a distorted shape instead of being flat. That is, since the workpiece 102 which is distorted by the pressing of the roller 105 is ground to be flattened,
When the pressing of No. 5 is released and the distortion returns to its original state, the processed surface flattened by the grinding will be distorted.

The invention according to the present application has been made in order to solve the above-mentioned problems, and an object of the invention is to support a thin plate-like work without causing distortion in the work. It is another object of the present invention to provide a grinding device capable of efficiently and highly accurately flattening a plate surface of a work.

Another object of the present invention is to provide a grinding apparatus capable of simultaneously and efficiently grinding a plurality of workpieces and automating the loading and unloading of workpieces which has been conventionally performed manually. Is to do.

[0011]

In order to achieve the above object, a first aspect of the present invention provides a disk-shaped workpiece provided with a circular hole at the center while supporting the disk-shaped workpiece by a support mechanism. A grinding device that rotates and grinds a plane of the workpiece by a rotating grindstone, wherein the support mechanism arranges a roller at least in a hole of the workpiece, and a roller is also provided on an outer periphery of the workpiece. Is disposed, and the workpiece is held and supported by the plurality of rollers,
A plurality of this support mechanism is provided around the grindstone by distributing the outer peripheral direction of the grindstone, and a carrier is provided for simultaneously holding a plurality of the workpieces and carrying in and out of the plurality of support mechanisms. On the other hand, there is provided a grinding apparatus characterized in that a plurality of ground workpieces and a plurality of unground workpieces can be continuously replaced.

According to a second aspect of the present invention, the grinding apparatus has a loading mechanism for loading an unground workpiece and an unloading mechanism for transporting a ground workpiece. The grinding apparatus according to the first invention, wherein the unloading of the ground workpiece from the carrier and the loading of the unground workpiece to the carrier can be performed simultaneously. is there.

Further, according to a third aspect of the present invention, the grinding wheel has an annular grinding action surface, the carrier is disposed within the annular shape of the grinding wheel, and the carrier is
The grinding device according to the first or second invention, wherein the grinding device is rotatable independently of the whetstone.

A fourth invention according to the present application is characterized in that a work rest for holding the workpiece supported by the support mechanism at least from the lower surface under a static pressure is provided on the outer peripheral side of the grindstone. A grinding device according to any one of the first to third inventions.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the invention according to the present application will be described below in detail with reference to FIGS.

FIG. 3 is a plan view of the entire grinding apparatus 1 according to the present embodiment shown in FIG.
FIG. 2 is an enlarged plan view showing the configuration of FIG. As shown by a two-dot chain line in FIG. 3, the work 2 has a substantially disk shape, and a center hole 2a, which is a through hole, is formed in the center of the work 2 to form a so-called disk. The disk-shaped work 2 is made of, for example, amorphous or crystallized glass. The size of the work 2 is assumed to be used for a hard disk which is an auxiliary storage device such as a computer. 2.5 inch and center hole diameter is about 20m
The case of grinding a workpiece 2 having a workpiece thickness of 1 mm or less will be described. It should be noted that the present invention is not limited to the grinding of a workpiece having the above-mentioned size, and it goes without saying that various values can be taken according to the type of the workpiece.

First, the work 2 is cut out of a glass plate material formed as a single thin plate into a disk shape by, for example, a press. This glass plate material is not necessarily formed flat with high precision, and the glass plate itself may have distortion, undulation, or the like. Also, since the pressure is applied by a punching process such as a press, the center hole 2
a and the outer peripheral portion are slightly deformed. When the cut work 2 is used for a hard disk or the like of a computer, the work 2 is rotated at an extremely high speed, and therefore, particularly, flatness is required.

Therefore, the cut work 2 is ground by the grinding device 1 of the present embodiment to flatten it. FIG. 6 is a longitudinal sectional view showing a sectional structure of a grinding section of the grinding device 1.
As shown in FIG. 6, the grinding device 1 in the present embodiment
The work 2 is arranged so that the plate surface is horizontal, and both upper and lower plate surfaces of the work 2 are cut by the upper grindstone 6 and the lower grindstone 7 to perform grinding. The upper grindstone 6 is a disk-shaped upper grindstone plate 6b provided with an annular grinding grindstone 6a, and performs the same function as a so-called cup grindstone. In the present embodiment, the grinding wheel 6a is a diamond wheel, and is formed by bonding diamond abrasive grains with a binder,
It is generally used to grind an object to be ground made of a hard and brittle material.

The upper grindstone 6 is fixed to the upper grindstone shaft 8 by fastening a flange 8a formed at the tip of an upper grindstone shaft 8 for rotating the grindstone and an upper grindstone plate 6b with bolts 8b. Since the upper grindstone shaft 8 is a rotation axis of the upper grindstone 6 and is disposed vertically, the annular grinding working surface on which the grinding grindstone 6a acts on the workpiece is horizontal, that is, the plate surface of the workpiece 2 Be parallel. Similarly, the lower grindstone 7 also includes a lower grindstone plate 7b and a grinding grindstone 7a, and is fastened to a flange 9a provided at the tip of the lower grindstone shaft 9 by bolts 9b. The grinding wheel 7a is a diamond wheel, and the annular grinding surface of the grinding wheel 7a is arranged in parallel with the plate surface of the workpiece 2. In the present embodiment, a cup-shaped grindstone is used as described above, but the present invention is not limited to these, and a flat grindstone or a segment grindstone having a circular grinding action surface may be used. Can also.

As shown in FIG. 1, the lower grinding wheel shaft 9 is formed in a hollow cylindrical shape, and a carrier rotating shaft 19 is rotatably supported in the inside thereof through a bearing. The carrier rotation shaft 19 is supported immovably in the vertical direction, and the work carrier 10 is fixed to the upper end thereof. As shown in FIG. 5, the work carrier 10 has a shape in which the outer periphery of a disk-shaped plate member is arranged at four equal positions, and is concave toward the center and lacks an arc shape. The arc-shaped recess forms a work setting portion 10a on which the work 2 is set.
Has a slightly larger radius of curvature than the outer shape of
Can be loosely fitted around. The work 2 is conveyed by the rotation of the work carrier 10 in a state where the work 2 is loosely fitted to the work setting section 10a.

As shown in FIG. 1, a pulley 19a is fixed to the lower end of the carrier rotating shaft 19. Further, a carrier drive motor 21 for rotating the work carrier 10 is provided on the bed 14 of the grinding apparatus 1 main body. A pulley 21 b is fixed to a rotation shaft 21 a of the carrier drive motor 21.
A drive belt 22 extends from 1b to the pulley 19a of the carrier rotating shaft 19. Carrier drive motor 2
The rotation of 1 is transmitted from the pulley 21b to the pulley 19a by the drive belt 22. The rotation of the pulley 19a causes the carrier rotation shaft 19 to rotate independently of the rotation of the lower grinding wheel shaft 9. In the present embodiment, the ratio of the diameter of the pulley 21b to the diameter of the pulley 19a is configured to be 1: 8, and when the pulley 21b makes one rotation, the work carrier 10 rotates one-eighth (45 ° rotation). ).

As shown in FIG. 1, in a grinding apparatus 1 according to the present embodiment, a bed 14 is provided with a lower grindstone 7, a work support mechanism 12, a grindstone correcting device (not shown), and the like. Column 2 with top rail integrated on bed 14
3 is provided with an upper grinding wheel 6, and a control box 25 is provided on a side surface of the bed 14.

As shown in the figure, a stator 11c is fitted and fixed in the lower quill 33, and forms a lower wheel driving motor 11 in a pair with the rotor 11b. The lower grinding wheel shaft 9 is integral with the rotation shaft of the lower grinding wheel drive motor 11,
The rotor 11b is shrink-fitted and fixed to the lower grinding wheel shaft 9.
The rotation of the rotor 11b of the lower grindstone drive motor 11 causes the lower grindstone shaft 9 and the lower grindstone 7 to be rotationally driven. Similarly, although not shown, the upper grinding wheel shaft 8 serves as a rotating shaft of the upper grinding wheel drive motor, and rotation is given by rotation of the rotor of the upper grinding wheel drive motor.

The lower grindstone drive motor 11 is provided in the lower grindstone raising / lowering mechanism 30, and the lower grindstone 7 can be moved up and down by the lower grindstone raising / lowering mechanism 30. The lower whetstone lifting mechanism 30 includes a lower quill 33 and a Z-axis control motor 3.
4 and a Z-axis feed screw 35 and a nut 36. The Z-axis feed screw 35 is provided on the axis of the rotary shaft 34a of the Z-axis control motor 34 so as to be connected to the rotary shaft 34a. The rotation of the Z-axis control motor 34 causes the Z-axis feed screw 35 to rotate. The Z-axis control motor 34 is a servomotor, and is fixed to the bed 14.

The lower quill 33 is fitted on the bed 14 so as to be movable up and down.
The nut 36 screwed into the nut 5 is fixed.
Then, as the Z-axis feed screw 35 rotates, the nut 36 moves upward or downward, and the lower quill 33 moves up and down. Since the lower wheel drive motor 11 has its stator 11 c fixed to the lower quill 33, the lower wheel drive motor 11 moves up and down according to the up and down movement of the lower quill 33. At this time, the carrier rotation shaft 19 keeps a fixed position in the vertical direction, and only the lower quill 33 moves vertically.

Although not shown, the upper grinding wheel driving motor is also provided in the upper grinding wheel lifting mechanism 20 having the same configuration as the lower grinding wheel lifting mechanism 30. The feed screw feeds the nut,
The upper quill to which the nut is fixed performs the elevating operation. Since the stator of the upper grindstone drive motor is fixed to the upper quill, the upper grindstone drive motor moves up and down according to the up and down movement of the upper quill.

Next, the work supporting mechanism 12 for supporting the work 2 will be described with reference to FIGS. The work 2 punched from a glass plate by a press is rotatably held on a work support 13. As shown in FIG. 3, the work support table 13 includes a driving roller 3, which is three guide rollers, an outer peripheral driven roller 4, and an in-hole driven roller 5.

The three guide rollers 3, 4, and 5 have a disk shape, and the center of each of the guide rollers is a work support table 13.
Rotating shafts 3a, 4a, 5 in the direction perpendicular to
a and is rotatably held by the rotating shafts 3a, 4a and 5a. Each of the guide rollers 3, 4, and 5 is formed to be thicker than the work thickness so that the outer peripheral portion of the work 2 and the center hole 2a can be reliably clamped (see FIG. 4). The material of the guide rollers 3, 4, and 5 is softer than the material of the work 2 so as not to damage the work 2, and furthermore, a material having some elasticity is used. In the present embodiment, a material having a certain degree of elasticity and hardness, such as urethane or plastic, is used.

As shown in FIG. 4, the drive roller 3 is fixed to a rotating shaft 3a rotatably supported on the work support table 13, and a pulley 3b is fixed to a lower end of the rotating shaft 3a. An elevating table 70 is fixed to the lower surface of the work support table 13, and a roller driving motor 18 is provided on a bracket 70 a formed on the elevating table 70. The roller drive motor 18 has its rotating shaft 18
It is fixed to the bracket 70a so that a is vertical. A belt 17 is hung on the pulley 3b, and the belt 17 is provided in an elongated ring shape on a plane parallel to the table surface 13b of the work support table 13. One end of the belt 17 is hung on a pulley 3b, and the other end is a pulley 18b fixed to a rotation shaft 18a of a roller drive motor 18.
It is hung on.

The rotation of the roller drive motor 18 causes the belt 17 to rotate via the pulley 18b.
7, the rotational power of the roller drive motor 18 is changed to the pulley 3b.
Is transmitted to The pulley 3b is rotated by a driving shaft 3a rotatably supported by a work support 13 through a driving roller 3b.
Is transmitted to The outer peripheral surface of the drive roller 3 is in contact with the outer peripheral surface of the work 2, and the rotation of the drive roller 3 causes the work 2 to rotate.

In FIG. 3, the roller drive motor 18 rotates counterclockwise and the belt 17 drives the drive roller 3.
Also rotates counterclockwise. Thereby, the work 2 abutting on the drive roller 3 rotates clockwise. The outer peripheral surface of the outer peripheral driven roller 4 is in contact with the outer peripheral surface of the work 2, and the outer peripheral driven roller 4 rotates counterclockwise as the work 2 rotates.

In the center hole 2a of the work 2, an in-hole driven roller 5 is disposed, and the outer peripheral surface of the roller 5 is located in the center hole 2a.
a, the driven roller 5 in the hole also rotates clockwise as the work 2 rotates. The roller diameter of the in-hole driven roller 5 is formed to be at least smaller than the diameter of the center hole 2a of the work 2 so that the upper and lower grinding wheels 6, 7 do not contact the in-hole driven roller.

In this embodiment, the work 2
Although two rollers of the driving roller 3 and the outer peripheral driven roller 4 are arranged as guide rollers arranged on the outer periphery of the present invention, the present invention is not limited to these embodiments. For example,
The number of rollers disposed in the center hole 2a may be two or more, and the number of rollers disposed on the outer periphery may be three or more. Further, the drive roller does not necessarily need to be arranged on the outer periphery, and a structure in which the roller arranged in the center hole 2a is driven may be used.

In the grinding apparatus 1 according to the present embodiment, in order to support the work 2, in addition to supporting the work side surfaces by three guide rollers, an upper work rest 15 and a lower work support for supporting the upper and lower ground surfaces of the work. Rest 16
Is provided. Upper and lower work rest 1 as shown in FIG.
Numerals 5 and 16 hold the area other than the area where the workpiece 2 is ground by the upper and lower grindstones 6 and 7 using static pressure, and in the present embodiment, the outer peripheral side of the upper and lower grindstones 6 and 7 Are provided with work rests 15 and 16 to hold the work 2 under static pressure.

As shown in FIG.
Is provided in an annular shape so as to surround the outer periphery of the lower grindstone 7. A plurality of ejection holes 16a are formed on the surface of the lower work rest 16, and the ejection holes 16a are connected to a pump (not shown) for supplying a fluid. Although not shown, the planar shape of the upper work rest 15 is substantially the same as the planar shape of the lower work rest 16, and a plurality of ejection holes 15a are provided on the surface thereof. The upper work rest 15 and the lower work rest 16 overlap so as to coincide with each other in the vertical direction.

As shown in FIG. 6, a main body frame 26 is fixed to the bed 14, and the main body frame 26 forms a support frame for holding the upper and lower work rests 15, 16 and the like. An upper end surface of the upper work rest 15 is fixed to a tip of a cylinder rod 45 a of a hydraulic cylinder 45 formed on the main body frame 26. A cylinder chamber 45b forming a cylindrical hole is formed in the main body frame 26, and two oil feed pipes 46a and 46b for supplying or discharging oil into and from the cylinder chamber 45b are provided. Upper work rest 1
Since 5 is fixed to the cylinder rod 45a of the hydraulic cylinder 45, it moves up and down integrally with the vertical movement of the cylinder rod 45a. Since the cylinder chamber 45b is provided in the main body frame 26, it maintains a fixed position, and the cylinder rod 45a moves up and down relatively to the main body frame 26. In the present embodiment, the hydraulic cylinder 45
However, the present invention is not limited to this, and it goes without saying that a pneumatic cylinder, a screw feed structure, or the like can be applied as long as the upper work rest 15 can be moved up and down.

Fluid is ejected downward from the ejection hole 15a of the upper work rest 15, and the lower work rest 1
6, the fluid is ejected upward from the ejection hole 16a, and the upper and lower surfaces of the work 2 are sandwiched between the upper work rest 15 and the lower work rest 16, and the work 2 is held at a static pressure. In the present embodiment, the ejected fluid uses air, but the ejected fluid may be a gas or a liquid, and the use of the grinding fluid may serve as both the grinding fluid and the work static pressure holding in the grinding action section. it can.

Next, a mechanism for pressing the drive roller 3 against the work 2 will be described. As shown in FIGS. 3 and 4, the fixed shaft 5 a of the driven roller 5 in the hole is fixed to a plate-shaped support rod 47 provided on the table surface 13 b of the work support 13. The distal end of the support rod 47 has a large width, and is provided with a flat support portion 47a. The columnar fixed shaft 5a is fixed to the support portion 47a vertically upward with respect to the plate surface of the support portion 47a. Since the plate surface of the support portion 47a is arranged so as to be parallel to the table surface 13b of the work support table 13, the fixed shaft 5a is mounted on the table surface 1 of the work support table 13.
3b. An in-hole driven roller 5 is rotatably mounted on the fixed shaft 5a via a bearing.

A guide member 48 is provided on the table surface 13b of the work support table 13. The guide member 48 guides the support rod 47 so that the support rod 47 can move in a direction parallel to a straight line connecting the centers of the upper and lower grinding wheels 6 and 7 and the center of the workpiece 2 (on a straight line when viewed from above). . Further, the guide member 48 is configured such that the support rod 47 is attached to the surface 13 b of the work support table 13.
The support bar 47 is held so that it can move in the longitudinal direction (the left-right direction in FIG. 4) in a plane parallel to.

One end 49a of a tension coil spring 49 is locked to an end 47b on the opposite side of the support rod 47. The other end 49b of the tension coil spring 49 is hooked on a spring hook 13c provided on the work support table 13, and the tension coil spring 49 attaches the driven roller 5 in the hole in a direction away from the upper and lower grinding wheels 6, 7. It is being rushed.

Then, as shown in FIG. 3, the inner contacting roller 5 presses the center hole 2a against the inner peripheral surface, and the three contact points of the workpiece 2 with the inner driving roller 5, the driving roller 3, and the outer peripheral driving roller 4 are formed. Holds the disk-shaped work 2 in a plane.

At this time, the three guide rollers 3, 4, 5
A triangular distortion region 108 formed by connecting a contact point between the outer peripheral surface of the workpiece 2 and the peripheral surface of the work 2 (a hatched portion rising to the right in FIG. 3) and a grinding region 109 of the upper and lower grindstones 6 and 7 (downward right in FIG. Since the hatched portions do not overlap, the distortion of the work 2 due to the pressure of the driven roller 5 in the hole does not affect the grinding area 109, and the area where no distortion occurs can be ground flat.

Accordingly, after the grinding is completed, the driven roller 5
When the pressurization is released, the workpiece 2 is not distorted and can be ground flat with high precision.

As shown in FIG. 3, the support rod 47 on which one end 49a of the tension coil spring 49 is hooked is provided with a columnar release shaft 50 extending vertically upward. Also,
An arm member 51 provided with an elongated hole 51a into which the release shaft 50 is fitted is attached to the work support 13. One end of the arm member 51 is rotatably supported by a support shaft 43a on a moving shaft 52a of a solenoid 52 mounted on the work support base 13. The other end of the arm member 51 is supported by a cylindrical support shaft 43b fixed to the work support table 13.
It is rotatably supported by the work support 13. Then, the movement shaft 52a moves rightward in the longitudinal direction by the operation of the solenoid 52, and the arm member 51 rotates counterclockwise about the support shaft 43b. The mechanism for rotating the arm member 51 is not limited to the mechanism using the solenoid 52, but may be a mechanism using a torque motor, a fluid pressure rotary motor, or the like.

A long hole 51a is formed in the middle of the arm member 51, and the release shaft 50 is fitted in the long hole 51a.
Since it is provided so as to be movably fitted in a, the in-hole driven roller 5 moves in a direction (rightward in FIG. 3) approaching the upper and lower grindstones 6 and 7 according to the operation of the arm member 51. The arm member 51 is used when removing the work 2 from the work support 13. When the grinding is completed, the solenoid 52 is operated to rotate the arm member 51 counterclockwise around the support shaft 43b against the spring force of the tension coil spring 49. At this time, the elongated hole 51a of the arm member 51 moves in a direction approaching the upper and lower grindstones 6 and 7, and the support bar 47 also moves in a direction approaching the upper and lower grindstones 6 and 7 via the release shaft 50. Then, the pressurization of the center hole 2a of the work 2 by the in-hole driven roller 5 supported by the support rod 47 is released, and the work 2 can be removed.

When the driven roller 5 in the hole is pressed against the work 2, the supply of power to the solenoid 52 is stopped so that the arm member 51 can freely rotate, and the driven roller in the hole is driven by the tension coil spring 49. 5 is pressed against the work 2. FIG. 4 shows the work supporting mechanism 12.
The work support 13 is fixed on a lifting table 70 as shown in FIG. A through hole 70b is formed in the elevating table 70, and the belt 17 is inserted through the through hole 70b. Further, a lifting guide 71 is fixed to the lifting table 70. The elevating table 70 is supported to be vertically movable with respect to the substrate 73. Two slide rails 72 for vertically moving the elevating table 70 are fixed to the substrate 73 in the vertical direction. The two slide rails 72 are arranged in parallel with each other, and as shown in FIG. 5, a lift guide 71 fixed to a lift table 70 is fitted to the slide rail 72.

A servo motor 74 for raising and lowering is provided on the substrate 73.
The rotation shaft is fixed at a fixed position with the rotation shaft directed vertically upward. A ball screw 75 a is formed on an extension of the rotation axis of the lifting servomotor 74, and the ball screw 75 a is fitted to a ball nut 75 b fixed to the lifting table 70. Then, the ball nut 75b is screw-fed by the rotation of the ball screw 75a, and the ball nut 75b
Performs a lifting operation. Since the ball nut 75b is fixed to the lifting table 70, the ball nut 75b and the lifting table 70 move up and down by rotation of the lifting servomotor 74. At this time, the elevating table 70 is guided by the elevating guide 71 on the slide rail 72 and moves up and down in the vertical direction.

Work support mechanism 12 in this embodiment
Is configured as a unit including a substrate 73, a lifting table 70, a work support 13 and the like as shown in FIG. As shown in FIG. 5, the grinding apparatus 1 is provided with four sets of the work supporting mechanism 12 configured as described above, in which the outer circumferences of the upper and lower grinding wheels 6, 7 are divided into four equal parts. The work supporting mechanism 12 is fixed by fastening the substrate 73 and the main body frame 26 with bolts 76 as shown in FIG.

Next, a mechanism for loading and unloading the work 2 will be described.

FIG. 2 is a plan view of the grinding apparatus 1 and is shown in a cross-sectional view with the column 23 omitted for the sake of explanation. As shown in FIG. 2, loading and unloading of the work 2 are performed by a loader 80 and an unloader 90, respectively. The loader 80 has a carry-in arm 81, and the work 2 which has not been ground is moved by the carry-in arm 81 to the work setting section 10a
Transport to On the other hand, the unloader 90 has a carry-out arm 91, and takes out the ground work 2 from the work setting section 10 a of the work carrier 10 by the carry-out arm 91.

Next, the loader 80 and the unloader 90 will be described in detail. Since the structures of the loader 80 and the unloader 90 are almost the same, the loader 80 will be described with reference to FIG. 7 and the description of the specific configuration of the unloader 90 will be omitted. As shown in FIG.
0 carry-in arm 81 is the cylinder rod 8 of the cylinder 82
2a. The cylinder 82 is a hydraulic or pneumatic cylinder, and is arranged so as to be movable in a direction in which the cylinder rod 82a approaches or separates from the upper and lower grinding wheels 6, 7. Cylinder case 82b of cylinder 82
Is supported on the bed 14 of the grinding device 1 by a vertically movable cylinder 84 so as to be vertically movable.

On the lower surface of the loading arm 81, three suction pads 83 are provided. The suction pad 83 is used for the loading arm 8.
1 has an opening 83a on the lower surface and an air suction pipe 83 on the upper side.
b is connected. The periphery of the opening 83a protrudes downward in a circular shape as shown in FIG. At the time of conveyance, the work 2 is sucked to the suction pad 83 by arranging the carry-in arm 81 on the work 2 and sucking air from the air suction pipe 83b under vacuum. In the present embodiment, as shown in FIG. 14, three suction pads 83 are provided on the carry-in arm 81, and the work 2 is horizontally sucked to the lower surface of the carry-in arm 81.

As shown in FIG. 2, a carry-in belt conveyor 85 for carrying the work 2 is disposed between the upper and lower grinding wheels 6, 7 and the cylinder 82. The carry-in belt conveyor 85 carries the unground work 2 on a conveyor belt. In the present embodiment, the carry-in belt conveyor 85 is arranged so as to carry the work 2 in a direction orthogonal to the moving direction of the carry-in arm 81. Then, the unground work 2 is conveyed toward the carry-in arm 81 by the belt conveyor 85, and is attracted by the carry-in arm 81, and the work setting section 10 a of the work carrier 10 is formed.
Carry in.

The unloader 90 has the same configuration as the loader 80. The unloading arm 91 sucks the ground work 2 in the work setting section 10a by the unloading arm 91 and takes out the ground work 2 from the work setting section 10a. And
The ground work 2 is placed on the carry-out belt conveyor 95, and the ground work 2 is transported to transport the ground work 2 from the grinding device 1 body. As described above, the loading of the unground work 2 and the discharge of the ground work 2 are performed by the loader 80 and the unloader 90.

Next, the operation of the grinding device 1 will be described.

First, a glass disk formed by punching from a glass plate is carried into the grinding device 1. Loading is performed by the loader 80. As shown in FIG. 14, the unground work 2 is conveyed by the carry-in belt conveyor 85 toward the carry-in arm 81. Loading arm 81
When the unground work 2 comes under the loading arm 81,
Air is sucked from the opening 83a, and the work 2 is carried into the loading arm 8
The vacuum suction is performed on a suction pad 83 provided on the lower surface of the first device 1.
After that, the carry-in arm 81 is advanced toward the work carrier 10. The carry-in arm 81 is advanced by a cylinder 82 as shown in FIG. At this time, the upper work rest 15 and the upper grindstone 6 are arranged at positions retracted upward, and the carry-in arm 81 does not contact the upper work rest 15 and the upper grind stone 6.

When the work 2 is fitted to the work setting section 10a and set at a predetermined position, the suction by the suction pad 83 is stopped, and the work 2 is placed on the lower work rest 16. At this time, as shown in FIG. 14, since air is ejected upward from ejection holes 16 a formed on the upper surface of the lower work rest 16, the unground work 2 is suspended on the lower work rest 16. Will be retained.

When the unground work 2 is set on the work carrier 10, the carry-in arm 81 is retracted in the direction of the carry-in belt conveyor 85. Carrier drive motor 21
Is rotated clockwise to pulley 21b → drive belt 22
→ The carrier rotating shaft 19 is rotated along the pulley 19a. Since the work carrier 10 is fixed to the upper end of the carrier rotation shaft 19, the work carrier 10 rotates clockwise. At this time, the work carrier 10 is rotated clockwise by 90 °. Since the diameter ratio between the pulley 21b and the pulley 19a is 1: 8, the carrier driving motor 2
When 1 is rotated twice, the work carrier 10 rotates 90 °.

Thereafter, the next unground work 2 conveyed by the carry-in belt conveyor 85 is sucked and carried by the carry-in arm 81 in the same manner as described above, and is set on the work carrier 10.

When the above operation is repeated and the four unground workpieces 2 have been set on the four workpiece setting sections 10a provided on the workpiece carrier 10, the carrier drive motor 21 is rotated by one rotation to bring the workpiece carrier 10 into rotation. Rotate 45 °. The four unground workpieces 2 are in the workpiece setting section 10.
In the state of being held at a, each is arranged at a position corresponding to the work support mechanism 12. At this time, as shown in FIG. 9, the work support base 13 is at the lowered position, and the upper work rest 15 and the upper and lower grinding wheels 6, 7 are also located at the retracted position. Also, as shown in FIG.
Stands by at a position retracted toward the carry-in belt conveyor 85.

Thereafter, the lifting servomotor 74 of the work support mechanism 12 is rotated to raise the work support 13. At this time, the solenoid 52 shown in FIG. 3 is operating on the work support table 13, and the moving shaft 52a has moved to the right. The support rod 47 is located on the right side against the spring force of the tension coil spring 49, and the driven roller 3 in the hole is located below the center hole 2a of the work 2 as shown in FIG. When the work support 13 rises, the driven roller 5 in the hole is fitted into the center hole 2a of the work 2, so that the work 2 is not pushed up from below by the driven roller 5 in the hole.
Further, since the work 2 is arranged at a position where the drive roller 3 and the outer peripheral driven roller 4 do not come into contact with each other by the carry-in arm 81, the work 2 is not pushed up by the drive roller 3 and the outer peripheral driven roller 4.

At the same time as raising the work support 13,
Oil is supplied from the oil feed pipe 46a side of the hydraulic cylinder 45 and oil is drained from the oil feed pipe 46b side, and the upper work rest 15 is lowered toward the work 2 as shown in FIG. Since the upper work rest 15 blows air downward from the blowing holes 15a provided on the lower surface thereof, the unground work 2
Is maintained at a static pressure by the pressure of the air ejected from the upper work rest 15 and the lower work rest 16.

When the work support 13 is raised, the operation of the solenoid 52 shown in FIG. 3 is stopped. The support bar 47 moves leftward in FIG. 3 by the spring force of the tension coil spring 49. The outer periphery of the work 2 is supported by the driving roller 3 and the outer peripheral driven roller 4, and the inner periphery of the center hole 2 a is supported by the in-hole driven roller 5. As described above, in the present embodiment, the outer circumference and the inner circumference of the work 2 are sandwiched by the three guide rollers 3, 4, and 5, and the work 2 is rotatably held.

When the roller drive motor 18 is rotated, the drive roller 3 rotates via the belt 17. Since the driving roller 3 is in contact with the outer periphery of the work 2, the frictional force between the outer peripheral surface of the driving roller 3 and the outer periphery of the work 2
Rotates. At this time, as shown in FIG. 5, the work 2 rotates while being accommodated in the work setting section 10a of the work carrier 10, but the outer peripheral surface of the work 2 does not contact the work setting section 10a, and It is supported and rotated by the two guide rollers 3, 4, and 5.

Then, the upper and lower grindstone drive motors 11 and 11 are operated to rotate the upper and lower grindstones 6 and 7. Upper and lower whetstones 6 and 7 have a diameter of 350m
m, the rotation speed is 500-3000 r. p. m, more preferably 500 to 1500 r. p. m. The diameter of the work 2 is 96 mm, and the rotation speed is 2 to 100.
r. p. m, more preferably 2 to 20 r. p. m
It is. Further, the Z-axis control motors 24 and 34 shown in FIG. 1 are operated to feed and move the upper grindstone 6 and the lower grindstone 7 toward the work 2. When the upper and lower whetstones 6 and 7 come into contact with the work 2, both upper and lower surfaces of the work 2 are simultaneously ground by the upper whetstone 6 and the lower whetstone 7. Since the work 2 itself is also rotated by the drive roller 3, both the upper and lower surfaces of the work 2 are uniformly ground.

Since the unground work 2 has warpage and thickness unevenness, the ejection holes 1 in the upper and lower work rests 15 and 16 are formed.
It is not preferable to forcibly flatten and grind the work 2 by the pressure of the fluid ejected from 5a and 16a. Therefore, in the initial stage of the grinding process, the ejection pressure of the fluid (air) from the ejection holes 15a, 16a of the upper and lower work rests 15, 16 is reduced, and the correcting force of the upper and lower work rests 15, 16 is applied to the work 2. Keep it from working. When sufficient flatness is obtained by removing warpage and thickness unevenness after grinding for a while, the pressure of the fluid ejected from the upper and lower work rests 15 and 16 is increased, and the work 2 is held strongly. Perform grinding. That is, in the initial stage of the grinding process, the pressure of the ejected fluid is controlled to be low, and in the later stage of the grinding process, the pressure of the ejected fluid is controlled to be increased. As described above, by changing the pressure of the fluid ejected from the work rest during the grinding, the thin work can be ground flat with high precision.

The cutting of the grindstone is performed by lowering the upper grindstone 6 toward the work 2 and simultaneously raising the lower grindstone 7 toward the work 2. The cutting speed of the grindstone at this time is about 50 to 1000 μm / min, and more preferably 50 to 400 μm / min.

As described above, according to the present invention, four workpieces 2 can be ground at once by the upper and lower grinding wheels 6 and 7. In addition, the grinding device 1 in the present embodiment has a structure shown in FIG.
Although four sets of the work supporting mechanisms 12 are provided on the outer periphery of the upper and lower whetstones 6 and 7 as shown in FIG. .

After the upper and lower grindstones 6 and 7 have been cut to the desired cutting positions, the servomotors 24 and 34 shown in FIG. 1 are operated to retract the upper and lower grindstones 6 and 7 away from the work 2.

By operating the solenoid 52 shown in FIG.
The support rod 47 is moved rightward in FIG. 3 against the spring force of the extension coil spring 49. With the movement of the support rod 47,
The urging of the workpiece 2 toward the center hole 2a by the in-hole driven roller 5 is released. Then, as shown in FIG. 9, the work support 13 is lowered by operating the elevation servomotor 74, whereby the support of the ground work 2 by the three guide rollers 3, 4, and 5 is released.

Further, as shown in FIG. 9, oil is supplied from the oil feed pipe 46b and oil is drained from the oil feed pipe 46a.
Is operated to raise the upper work rest 15. The ground work 2 is held in a floating state by the lower work rest 16. Then, the carrier drive motor 21
Is rotated by one rotation, and the work carrier 10 is rotated by 45 ° from the state shown in FIG. 5 to the state shown in FIG.

As shown in FIG. 10, by operating the cylinder 92, the carry-out arm 91 is advanced toward the work carrier 10, and the carry-out arm 91 is arranged on the ground work 2. Air is sucked from the suction pad 93, and the ground work 2 is vacuum-adsorbed to the suction pad 93.

As shown in FIG. 11, the carry-out arm 91 is retracted from the work carrier 10 by operating the cylinder 92, and the carry-out arm 91 is moved above the carry-out belt conveyor 95. The unloading arm 91 is the unloading belt conveyor 95
Is stopped, the suction by the suction pad 93 is stopped, and the ground work 2 is placed on the carry-out belt conveyor 95. Then, as shown in FIGS. 2 and 8, the work 2 having been ground is ground by the unloading belt conveyor 95.
It is carried out from.

The work 2 already ground from the work carrier 10
When one is taken out, the carrier drive motor 21 is rotated, and the work carrier 10 is rotated clockwise as shown in FIG. As shown in FIG.
When 0 rotates by 90 °, the rotation of the carrier drive motor 21 is stopped. Then, 2
The second grounded work 2 is sucked and conveyed onto a carry-out belt conveyor 95, and the ground work 2 is carried out from the grinding device 1 by the carry-out belt conveyor 95. At the same time as the removal of the ground work 2, the carry-in arm 81 sets the unground work 2 in the empty work setting section 10a.

Similarly, the work carrier 10 is set at 90 °
By rotating the workpiece 2 each time, the unloaded workpiece 2 and the unloaded workpiece 2 are carried out. When the unloading of the four ground workpieces 2 is completed, the work carrier 10 is rotated by 90 °,
The fourth unground work 2 is set by the loading arm 81.

The four unground workpieces 2 are transferred to the work carrier 1
When set to 0, the work carrier 10 is rotated by 45 °, and the unground work 2 is arranged so as to correspond to the position of the work support mechanism 12. The work support table 13 is raised, and the peripheral surface of the work 2 is supported by the three guide rollers 3, 4, 5 as described above, and the upper work rest 15 is lowered. Then, the four workpieces 2 are ground at once by cutting the upper and lower grinding stones 6 and 7 into the workpiece 2.

Thereafter, the same operation is repeated to carry in the unground work, carry out the grinding process, and carry out the ground work.

As described above, according to the present invention, four workpieces 2 can be ground at one time, and after the grinding operation, a plurality of ground workpieces 2 can be continuously replaced with unground workpieces 2. Therefore, the work efficiency is good and the grinding work time can be shortened. Further, the carrying out of the ground work 2 from the work carrier 10 by the carrying-out arm 91 and the carrying-in of the unground work 2 from the work carrier 10 by the carrying-in arm 81 can be performed at the same time, so that the working time can be further reduced.

Further, when grinding the work 2 having the center hole 2a, by disposing at least one guide roller (in-hole driven roller 3) in the center hole 2a, the distortion region 108 formed by the guide roller can be reduced. The overlapping of the grinding areas 109 of the grindstone can be avoided, and the thin plate-shaped workpiece can be ground flat with high precision. Furthermore, by changing the holding force of the upper and lower work rests 15 and 16 in accordance with the elapse of the grinding time, distortion and undulation of the thin plate-like work can be efficiently removed. In addition,
In the present embodiment, an example in which a so-called double-headed grinding machine is used for grinding is shown. However, the present invention focuses on how to hold, carry in and out a disk-shaped work. It is not limited to the board. Also,
Depending on the work 2, the upper work rest 15 is unnecessary,
It is also possible to hold only the lower work rest 16.

As described above, according to the present invention, the disk-shaped work 2 provided with the circular center hole 2a at the center is rotated while being supported by the work support mechanism 12, and the rotating grindstones 6 and 7 are rotated.
The work supporting mechanism 12 arranges the in-hole driven roller 5 at least in the center hole 2a of the work 2 and also arranges the drive roller 3 on the outer periphery of the work 2. Then, the work 2 is sandwiched and supported by the plurality of guide rollers, and a plurality of the work support mechanisms 12 are provided around the grindstone 7 (6) by distributing the outer circumferential direction of the grindstone 7 (6). , A plurality of workpieces 2 are simultaneously held, and the plurality of workpiece support mechanisms 1 are held.
The grinding apparatus 1 has a work carrier 10 that is carried in and out of the work carrier 2 and is capable of continuously replacing a plurality of ground and ungrounded works 2 with respect to the work carrier 10.

The grinding device 1 has a carry-in arm 81 for carrying in the unground work 2 and a carry-out arm 91 for carrying out the ground work 2. The grinding device 1 is capable of simultaneously carrying out and carrying in the unground work 2 into the work carrier 10.

Further, the grindstone 7 (and 6) has an annular grinding action surface, and the work carrier 10 is provided with the grindstone 7 (and 6).
Of the work carrier 10
Is a grinding device 1 characterized by being rotatable independently of the grindstones 7 (and 6).

The grinding device 1 is characterized in that a work rest 16 for holding the work 2 supported by the work support mechanism 12 at least from the lower surface under static pressure is provided on the outer peripheral side of the grindstone 7.

[0084]

According to the present invention, in the grinding of a thin plate-like work, the plate surfaces of a plurality of works can be efficiently ground with high precision.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing an entire grinding apparatus of the present invention.

FIG. 2 is a plan view of the entire grinding apparatus of the present invention as viewed from above.

FIG. 3 is an enlarged plan view showing a work supporting mechanism of the present invention.

FIG. 4 is a side view for explaining an elevating mechanism of the work supporting mechanism of the present invention.

FIG. 5 is a plan view showing a relationship between a work supporting mechanism and a work carrier of the present grinding device.

FIG. 6 is a vertical cross-sectional view for explaining an elevating mechanism of the work support base according to the present invention.

FIG. 7 is a longitudinal sectional view showing the configuration of the loader of the present invention.

FIG. 8 is a plan view showing how a work is carried out from a work carrier of the present grinding apparatus.

FIG. 9 is a vertical cross-sectional view for explaining a lifting / lowering mechanism of the work support base of the present invention.

FIG. 10 is a longitudinal sectional view showing an operation mechanism of the loader and the unloader of the present invention.

FIG. 11 is a longitudinal sectional view showing an operation mechanism of the unloader of the present invention.

FIG. 12 is a plan view showing a relationship between a work support mechanism and a work carrier of the present grinding device.

FIG. 13 is a plan view showing how a work is carried in and out of a work carrier using a loader and an unloader according to the present invention.

FIG. 14 is a plan view showing a state where an unground work is set on a work carrier of the present invention using a loader.

FIG. 15 is a perspective view of a grinding unit of a conventional grinding device.

FIG. 16 is a plan view showing a state of a grinding unit of a conventional grinding device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Grinding apparatus 2 ... Work 2a ... Center hole 3 ... Driving roller 3a ... Rotating shaft 3b ... Pulley 4 ... Peripheral driven roller 4a ... Rotating shaft 5 ... In-hole driven roller 5a ... Fixed shaft 6 ... Upper grindstone 6a ... Grinding grindstone 6b ... Upper grindstone plate 7 ... Lower grindstone 7a ... Grinding grindstone 7b ... Lower grindstone plate 8 ... Upper grindstone shaft 8a ... Flange part 8b ... Bolt 9 ... Lower grindstone shaft 9a ... Flange part 9b ... Bolt 10 ... Work carrier 10a ... Work set part 11 … Lower wheel drive motor 11b… Rotor 11c…
Stator 12 Work support mechanism 13 Work support 13a Support support rotating shaft 13b
Table surface 13c ... spring hook 14 ... bed 15 ... upper work rest 15a ... spout hole 16 ... lower work rest 16a ... spout hole 17 ... belt 18 ... roller drive motor 18a ... rotary shaft 18b ... pulley 19 ... carrier rotating shaft 19a ... pulley 20 ... Upper whetstone lifting mechanism 21. Carrier drive motor 21a.
Pulley 22 ... Drive belt 23 ... Column 24 ... Z axis control motor 25 ... Control box 26 ... Main body frame 30 ... Lower whetstone lifting / lowering mechanism 33 ... Lower quill 34 ... Z axis control motor 34a ... Rotating shaft 35 ... Z axis feed screw 36 ... Nuts 43a, 43b: Support shaft 45: Hydraulic cylinder 45a: Cylinder rod 45b
... Cylinder chambers 46a, 46b ... Oil feed pipe 47 ... Support rod 47a ... Support portion 47b ... End 48 ... Guide member 49 ... Tension coil spring 50 ... Release shaft 51 ... Arm member 51a ... Elongated hole 52 ... Solenoid 52a ... Movement shaft 70 ... Elevating Table 70a ... Bracket 70b ... Through Hole 71 ... Elevating Guide 72 ... Slide Rail 73 ... Substrate 74 ... Elevating Servo Motor 75a ... Ball Screw 75b ... Ball Nut 76 ... Bolt 80 ... Loader 81 ... Loading Arm 82 ... Cylinder 82a ... Cylinder rod 82b ... Cylinder case 83 ... Suction pad 83a ... Opening 83b ... Air suction tube 84 ... Vertical cylinder 85 ... Loading belt conveyor 90 ... Unloader 91 ... Unloading arm 92 ... Cylinder 93 ... Suction pad 95 ... Unloading belt conveyor 102 ... Work 102a ... Medium Holes 103 ... driving roller 104 ... guide rollers 106, 107 ... grindstone 108 ... strained region 109 ... ground region 110 ... distorted ground region.

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Shiro Murai 1 Shinmeicho, Yokosuka City, Kanagawa Prefecture F-term in Hihira Toyama Technical Center Co., Ltd. 3C034 AA08 AA13 BB75 BB76 BB77 BB82 BB85 3C043 BC07 BC08 CC04 DD05 DD06 DD14 EE04

Claims (4)

[Claims] 1. A grinding device for rotating a disk-shaped workpiece having a circular hole at the center thereof while supporting it by a support mechanism, and grinding a plane of the workpiece by a rotating grindstone. The support mechanism includes a roller disposed at least in a hole of the workpiece, and a roller disposed on an outer periphery of the workpiece to support the workpiece by being sandwiched by the plurality of rollers. A plurality of the support mechanisms are arranged around the grindstone by distributing the outer peripheral direction of the grindstone, and a carrier for holding a plurality of the workpieces simultaneously and carrying in / out the plurality of support mechanisms is provided. A grinding apparatus characterized in that a plurality of workpieces that have already been ground and a workpiece that has not been ground on a carrier can be continuously replaced. 2. The grinding device has a carry-in mechanism for carrying in an ungrounded workpiece, and a carry-out mechanism for carrying out a ground workpiece, and a grinding mechanism for removing the ground workpiece from the carrier. The grinding apparatus according to claim 1, wherein unloading and unloading of the unground workpiece to the carrier can be performed simultaneously. 3. The grinding wheel has an annular grinding action surface, the carrier is arranged in the annular shape of the grinding wheel, and the carrier is rotatable independently of the grinding wheel. The grinding device according to claim 1 or 2, wherein: 4. The grinding wheel according to claim 1, wherein a work rest for holding the workpiece supported by the support mechanism from at least a lower surface under a static pressure is provided on an outer peripheral side of the grindstone. A grinding device according to claim 1.