TW200907579A

TW200907579A - Positive resist composition and pattern forming method

Positive resist composition and pattern forming method Download PDF

Info

Publication number: TW200907579A
Authority: TW; Taiwan
Prior art keywords: group; acid; seconds; compound; component
Prior art date: 2007-07-20

Application number

TW097127283A

Other languages

English (en)

Chinese (zh)

Inventor

Shinji Tarutani

Kenji Wada

Hideaki Tsubaki

Original Assignee

Fujifilm Corp

Priority date

2007-07-20

Filing date

2008-07-18

Publication date

2009-02-16

2008-07-18 Application filed by Fujifilm Corp filed Critical Fujifilm Corp

2009-02-16 Publication of TW200907579A publication Critical patent/TW200907579A/zh

Links

239000000203 mixture Substances 0.000 title claims abstract description 87
238000000034 method Methods 0.000 title claims description 63
239000002253 acid Substances 0.000 claims abstract description 145
239000011347 resin Substances 0.000 claims abstract description 111
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150000001875 compounds Chemical class 0.000 claims abstract description 89
230000009471 action Effects 0.000 claims abstract description 28
239000003513 alkali Substances 0.000 claims abstract description 28
230000005855 radiation Effects 0.000 claims abstract description 15
229920002120 photoresistant polymer Polymers 0.000 claims description 128
125000000217 alkyl group Chemical group 0.000 claims description 107
238000010438 heat treatment Methods 0.000 claims description 72
125000000753 cycloalkyl group Chemical group 0.000 claims description 71
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229910052731 fluorine Inorganic materials 0.000 claims description 42
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125000001153 fluoro group Chemical group F* 0.000 claims description 29
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239000004094 surface-active agent Substances 0.000 claims description 25
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239000000126 substance Substances 0.000 claims description 17
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150000007514 bases Chemical class 0.000 claims description 14
239000000758 substrate Substances 0.000 claims description 14
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239000007864 aqueous solution Substances 0.000 description 9
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125000005647 linker group Chemical group 0.000 description 9
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230000003287 optical effect Effects 0.000 description 9
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