TW200900258A - Apparatus for discharging liquid droplet, method for manufacturing electo-optical apparatus, electo-optical apparatus and electronic equipment - Google Patents
Apparatus for discharging liquid droplet, method for manufacturing electo-optical apparatus, electo-optical apparatus and electronic equipment Download PDFInfo
- Publication number
- TW200900258A TW200900258A TW096137578A TW96137578A TW200900258A TW 200900258 A TW200900258 A TW 200900258A TW 096137578 A TW096137578 A TW 096137578A TW 96137578 A TW96137578 A TW 96137578A TW 200900258 A TW200900258 A TW 200900258A
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid
- functional
- droplet
- layer
- electrode
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 124
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000000034 method Methods 0.000 title claims description 19
- 238000007599 discharging Methods 0.000 title abstract description 13
- 230000007246 mechanism Effects 0.000 claims description 31
- 230000006870 function Effects 0.000 claims description 23
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 5
- 230000005693 optoelectronics Effects 0.000 claims description 4
- 206010036790 Productive cough Diseases 0.000 claims description 3
- 210000003802 sputum Anatomy 0.000 claims description 3
- 208000024794 sputum Diseases 0.000 claims description 3
- 235000010627 Phaseolus vulgaris Nutrition 0.000 claims 1
- 244000046052 Phaseolus vulgaris Species 0.000 claims 1
- 239000002131 composite material Substances 0.000 claims 1
- 230000000750 progressive effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 130
- 239000010408 film Substances 0.000 description 71
- 239000000758 substrate Substances 0.000 description 66
- 208000028659 discharge Diseases 0.000 description 57
- 239000004973 liquid crystal related substance Substances 0.000 description 47
- 238000005259 measurement Methods 0.000 description 32
- 238000002347 injection Methods 0.000 description 28
- 239000007924 injection Substances 0.000 description 28
- 239000000463 material Substances 0.000 description 20
- 239000000203 mixture Substances 0.000 description 18
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 16
- 239000011159 matrix material Substances 0.000 description 16
- 230000001681 protective effect Effects 0.000 description 13
- 238000007689 inspection Methods 0.000 description 11
- 239000002346 layers by function Substances 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 8
- 239000012454 non-polar solvent Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 239000003566 sealing material Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 239000011344 liquid material Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 6
- 239000003086 colorant Substances 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 238000011010 flushing procedure Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 238000004381 surface treatment Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000004108 freeze drying Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000011358 absorbing material Substances 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 235000014493 Crataegus Nutrition 0.000 description 1
- 241001092040 Crataegus Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
- B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0456—Control methods or devices therefor, e.g. driver circuits, control circuits detecting drop size, volume or weight
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0459—Height of the driving signal being adjusted
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Coating Apparatus (AREA)
- Electroluminescent Light Sources (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Optical Filters (AREA)
- Ink Jet (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006281684A JP4258544B2 (ja) | 2006-10-16 | 2006-10-16 | 液滴吐出装置および電気光学装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200900258A true TW200900258A (en) | 2009-01-01 |
| TWI353931B TWI353931B (enExample) | 2011-12-11 |
Family
ID=39302684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW096137578A TW200900258A (en) | 2006-10-16 | 2007-10-05 | Apparatus for discharging liquid droplet, method for manufacturing electo-optical apparatus, electo-optical apparatus and electronic equipment |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8075082B2 (enExample) |
| JP (1) | JP4258544B2 (enExample) |
| KR (1) | KR100897877B1 (enExample) |
| CN (2) | CN101817255A (enExample) |
| TW (1) | TW200900258A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103837218A (zh) * | 2012-11-22 | 2014-06-04 | 万润科技股份有限公司 | 胶滴量测方法及装置 |
| CN104275277A (zh) * | 2013-07-09 | 2015-01-14 | 万润科技股份有限公司 | 粘性材料涂覆调校方法 |
| TWI567368B (zh) * | 2012-11-22 | 2017-01-21 | All Ring Tech Co Ltd | Method and device for measuring ink droplets |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4258544B2 (ja) * | 2006-10-16 | 2009-04-30 | セイコーエプソン株式会社 | 液滴吐出装置および電気光学装置の製造方法 |
| US10744759B2 (en) * | 2010-06-29 | 2020-08-18 | CARDINAL HEALTH SWITZERLAND 515 GmbH | First drop dissimilarity in drop-on-demand inkjet devices and methods for its correction |
| JP5729105B2 (ja) * | 2011-04-19 | 2015-06-03 | セイコーエプソン株式会社 | 液滴噴射装置及び液滴噴射方法 |
| CN102564747B (zh) * | 2011-12-13 | 2014-12-10 | 中国农业大学 | 一种滴灌系统灌水器堵塞特性的综合评价方法及测试系统 |
| JP7019303B2 (ja) * | 2017-03-24 | 2022-02-15 | 東芝テック株式会社 | 液滴分注装置 |
| JP2019037906A (ja) * | 2017-08-22 | 2019-03-14 | 東芝テック株式会社 | 薬液吐出装置及び薬液滴下装置 |
| JP7257760B2 (ja) * | 2018-09-12 | 2023-04-14 | 東京エレクトロン株式会社 | 描画装置および描画方法 |
| JP2022014744A (ja) * | 2020-07-07 | 2022-01-20 | 東京エレクトロン株式会社 | 液滴吐出装置および位置調整方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69307590T2 (de) * | 1992-05-11 | 1997-05-15 | Hewlett Packard Co | Verfahren und Vorrichtung zur Druckdichtesteuerung in einem Tintenstrahldrucker |
| US5342581A (en) | 1993-04-19 | 1994-08-30 | Sanadi Ashok R | Apparatus for preventing cross-contamination of multi-well test plates |
| JP2002361907A (ja) | 2001-06-13 | 2002-12-18 | Dainippon Printing Co Ltd | パターン形成装置及びその使用方法 |
| US7059699B2 (en) * | 2001-07-20 | 2006-06-13 | Seiko Epson Corporation | Ink tank with data storage for drive signal data and printing apparatus with the same |
| JP4032942B2 (ja) | 2002-11-27 | 2008-01-16 | セイコーエプソン株式会社 | 吐出機能液の重量測定装置、およびこれを備えた液滴吐出装置、並びに電気光学装置、電気光学装置の製造方法および電子機器 |
| JP4378950B2 (ja) | 2002-12-24 | 2009-12-09 | セイコーエプソン株式会社 | 液滴吐出装置および電気光学装置の製造方法 |
| JP4273762B2 (ja) | 2002-12-24 | 2009-06-03 | セイコーエプソン株式会社 | 液滴吐出装置および電気光学装置の製造方法 |
| JP2004216596A (ja) | 2003-01-09 | 2004-08-05 | Seiko Epson Corp | 波形決定装置、波形決定方法、液滴吐出装置、液滴吐出方法、成膜方法、デバイス製造方法、電気光学装置、および、電子機器 |
| JP2004004915A (ja) * | 2003-06-30 | 2004-01-08 | Seiko Epson Corp | フィルター製造装置、フィルター製造方法、このフィルターを備えた表示装置の製造方法、インクジェットパターニング装置及びインクジェットパターニング方法 |
| JP4659345B2 (ja) | 2003-07-25 | 2011-03-30 | 芝浦メカトロニクス株式会社 | 塗布装置および塗布方法 |
| JP4347187B2 (ja) * | 2004-02-13 | 2009-10-21 | セイコーエプソン株式会社 | 液滴吐出装置、並びに電気光学装置の製造方法、電気光学装置および電子機器 |
| JP4049105B2 (ja) | 2004-02-24 | 2008-02-20 | セイコーエプソン株式会社 | ワイピング装置および液滴吐出装置、並びに電気光学装置、電気光学装置の製造方法および電子機器 |
| JP2006167544A (ja) | 2004-12-14 | 2006-06-29 | Seiko Epson Corp | 機能液滴吐出ヘッドの吐出量測定方法、機能液滴吐出ヘッドの駆動制御方法、機能液滴吐出ヘッドの吐出量測定装置、液滴吐出装置、電気光学装置の製造方法、電気光学装置および電子機器 |
| JP4517893B2 (ja) | 2005-03-01 | 2010-08-04 | セイコーエプソン株式会社 | 弾性表面波デバイスの製造方法、及び吐出装置 |
| JP4258544B2 (ja) * | 2006-10-16 | 2009-04-30 | セイコーエプソン株式会社 | 液滴吐出装置および電気光学装置の製造方法 |
| KR101296653B1 (ko) * | 2007-10-05 | 2013-08-14 | 엘지디스플레이 주식회사 | 액정 표시 장치 및 이의 제조 방법 |
| US8461582B2 (en) * | 2009-03-05 | 2013-06-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| RU2507551C2 (ru) * | 2009-06-04 | 2014-02-20 | Шарп Кабусики Кайся | Способ изготовления жидкокристаллической панели, жидкокристаллическая панель и устройство коррекции |
| TW201321871A (zh) * | 2011-11-29 | 2013-06-01 | Au Optronics Corp | 顯示面板及其製作方法 |
-
2006
- 2006-10-16 JP JP2006281684A patent/JP4258544B2/ja not_active Expired - Fee Related
-
2007
- 2007-10-05 TW TW096137578A patent/TW200900258A/zh not_active IP Right Cessation
- 2007-10-11 KR KR1020070102501A patent/KR100897877B1/ko active Active
- 2007-10-15 US US11/974,632 patent/US8075082B2/en active Active
- 2007-10-16 CN CN201010165050A patent/CN101817255A/zh active Pending
- 2007-10-16 CN CN2007101626811A patent/CN101164781B/zh not_active Expired - Fee Related
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2011
- 2011-11-04 US US13/289,566 patent/US8891046B2/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103837218A (zh) * | 2012-11-22 | 2014-06-04 | 万润科技股份有限公司 | 胶滴量测方法及装置 |
| CN103837218B (zh) * | 2012-11-22 | 2016-05-18 | 万润科技股份有限公司 | 胶滴量测方法及装置 |
| TWI567368B (zh) * | 2012-11-22 | 2017-01-21 | All Ring Tech Co Ltd | Method and device for measuring ink droplets |
| CN104275277A (zh) * | 2013-07-09 | 2015-01-14 | 万润科技股份有限公司 | 粘性材料涂覆调校方法 |
| CN104275277B (zh) * | 2013-07-09 | 2017-04-12 | 万润科技股份有限公司 | 粘性材料涂覆调校方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8075082B2 (en) | 2011-12-13 |
| US20080088663A1 (en) | 2008-04-17 |
| CN101164781A (zh) | 2008-04-23 |
| US8891046B2 (en) | 2014-11-18 |
| JP2008093637A (ja) | 2008-04-24 |
| KR100897877B1 (ko) | 2009-05-15 |
| US20120050368A1 (en) | 2012-03-01 |
| CN101817255A (zh) | 2010-09-01 |
| KR20080034395A (ko) | 2008-04-21 |
| CN101164781B (zh) | 2010-06-09 |
| JP4258544B2 (ja) | 2009-04-30 |
| TWI353931B (enExample) | 2011-12-11 |
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