TW200720482A - Etch features with reduced line edge roughness - Google Patents
Etch features with reduced line edge roughnessInfo
- Publication number
- TW200720482A TW200720482A TW095128867A TW95128867A TW200720482A TW 200720482 A TW200720482 A TW 200720482A TW 095128867 A TW095128867 A TW 095128867A TW 95128867 A TW95128867 A TW 95128867A TW 200720482 A TW200720482 A TW 200720482A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- photoresist
- features
- line edge
- reduced line
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
- G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/427—Stripping or agents therefor using plasma means only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/208,098 US7273815B2 (en) | 2005-08-18 | 2005-08-18 | Etch features with reduced line edge roughness |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200720482A true TW200720482A (en) | 2007-06-01 |
TWI432605B TWI432605B (zh) | 2014-04-01 |
Family
ID=37758048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095128867A TWI432605B (zh) | 2005-08-18 | 2006-08-07 | 具有降低之線邊緣粗糙度的蝕刻特徵 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7273815B2 (zh) |
JP (2) | JP5250418B2 (zh) |
KR (1) | KR101257532B1 (zh) |
CN (2) | CN101292197A (zh) |
TW (1) | TWI432605B (zh) |
WO (1) | WO2007021540A2 (zh) |
Families Citing this family (32)
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US7250371B2 (en) * | 2003-08-26 | 2007-07-31 | Lam Research Corporation | Reduction of feature critical dimensions |
US20060134917A1 (en) * | 2004-12-16 | 2006-06-22 | Lam Research Corporation | Reduction of etch mask feature critical dimensions |
US7273815B2 (en) * | 2005-08-18 | 2007-09-25 | Lam Research Corporation | Etch features with reduced line edge roughness |
US7682516B2 (en) * | 2005-10-05 | 2010-03-23 | Lam Research Corporation | Vertical profile fixing |
US7309646B1 (en) * | 2006-10-10 | 2007-12-18 | Lam Research Corporation | De-fluoridation process |
JP5108489B2 (ja) * | 2007-01-16 | 2012-12-26 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
CN101855706A (zh) * | 2007-11-08 | 2010-10-06 | 朗姆研究公司 | 使用氧化物垫片减小节距 |
KR101606377B1 (ko) | 2007-12-21 | 2016-03-25 | 램 리써치 코포레이션 | 주입 포토레지스트를 위한 보호층 |
KR20100106501A (ko) * | 2007-12-21 | 2010-10-01 | 램 리써치 코포레이션 | 고 식각율 레지스트 마스크를 이용한 식각 |
CN101971301B (zh) * | 2008-03-11 | 2014-11-19 | 朗姆研究公司 | 利用稀有气体等离子的线宽粗糙度改进 |
US7772122B2 (en) * | 2008-09-18 | 2010-08-10 | Lam Research Corporation | Sidewall forming processes |
CN102308366B (zh) * | 2009-02-06 | 2015-08-12 | Lg化学株式会社 | 触摸屏及其制备方法 |
KR20170048609A (ko) * | 2009-04-09 | 2017-05-08 | 램 리써치 코포레이션 | 감소된 손상을 갖는 로우-k 유전체 에칭을 위한 방법 |
US8304262B2 (en) * | 2011-02-17 | 2012-11-06 | Lam Research Corporation | Wiggling control for pseudo-hardmask |
US20130078804A1 (en) * | 2011-09-22 | 2013-03-28 | Nanya Technology Corporation | Method for fabricating integrated devices with reducted plasma damage |
US20140162194A1 (en) * | 2012-05-25 | 2014-06-12 | Applied Materials, Inc. | Conformal sacrificial film by low temperature chemical vapor deposition technique |
CN103871956A (zh) * | 2012-12-10 | 2014-06-18 | 中微半导体设备(上海)有限公司 | 一种深孔硅刻蚀方法 |
CN104157556B (zh) * | 2013-05-15 | 2017-08-25 | 中芯国际集成电路制造(上海)有限公司 | 金属硬掩模开口刻蚀方法 |
US8883648B1 (en) * | 2013-09-09 | 2014-11-11 | United Microelectronics Corp. | Manufacturing method of semiconductor structure |
CN104465386A (zh) * | 2013-09-24 | 2015-03-25 | 中芯国际集成电路制造(北京)有限公司 | 半导体结构的形成方法 |
CN104275171B (zh) * | 2014-06-18 | 2016-07-20 | 河海大学 | 一种二氧化硅纳米层包覆的γ-氧化铝粉体材料的制备方法 |
JP6239466B2 (ja) * | 2014-08-15 | 2017-11-29 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
CN105719965A (zh) * | 2014-12-04 | 2016-06-29 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 二氧化硅基片的刻蚀方法和刻蚀设备 |
CN106158595B (zh) * | 2015-04-20 | 2019-03-12 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的形成方法 |
US9543203B1 (en) | 2015-07-02 | 2017-01-10 | United Microelectronics Corp. | Method of fabricating a semiconductor structure with a self-aligned contact |
KR20170016107A (ko) | 2015-08-03 | 2017-02-13 | 삼성전자주식회사 | 반도체 장치 제조 방법 |
WO2017111822A1 (en) * | 2015-12-24 | 2017-06-29 | Intel Corporation | Pitch division using directed self-assembly |
US9852924B1 (en) * | 2016-08-24 | 2017-12-26 | Lam Research Corporation | Line edge roughness improvement with sidewall sputtering |
CN107527797B (zh) * | 2017-08-16 | 2022-04-05 | 江苏鲁汶仪器有限公司 | 一种改善光刻胶线条边缘粗糙度的方法 |
US20190378725A1 (en) * | 2018-06-08 | 2019-12-12 | Lam Research Corporation | Method for transferring a pattern from an organic mask |
JP7357528B2 (ja) | 2019-12-06 | 2023-10-06 | 東京エレクトロン株式会社 | エッチング方法及びエッチング装置 |
WO2024024925A1 (ja) * | 2022-07-29 | 2024-02-01 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理システム |
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US7012027B2 (en) * | 2004-01-27 | 2006-03-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Zirconium oxide and hafnium oxide etching using halogen containing chemicals |
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US7723235B2 (en) * | 2004-09-17 | 2010-05-25 | Renesas Technology Corp. | Method for smoothing a resist pattern prior to etching a layer using the resist pattern |
US20060134917A1 (en) * | 2004-12-16 | 2006-06-22 | Lam Research Corporation | Reduction of etch mask feature critical dimensions |
US7271107B2 (en) * | 2005-02-03 | 2007-09-18 | Lam Research Corporation | Reduction of feature critical dimensions using multiple masks |
US20070026682A1 (en) * | 2005-02-10 | 2007-02-01 | Hochberg Michael J | Method for advanced time-multiplexed etching |
US7491647B2 (en) * | 2005-03-08 | 2009-02-17 | Lam Research Corporation | Etch with striation control |
KR100810303B1 (ko) * | 2005-04-28 | 2008-03-06 | 삼성전자주식회사 | 휴대단말기의 데이터 표시 및 전송방법 |
US7695632B2 (en) * | 2005-05-31 | 2010-04-13 | Lam Research Corporation | Critical dimension reduction and roughness control |
US7273815B2 (en) * | 2005-08-18 | 2007-09-25 | Lam Research Corporation | Etch features with reduced line edge roughness |
-
2005
- 2005-08-18 US US11/208,098 patent/US7273815B2/en active Active
-
2006
- 2006-08-01 JP JP2008526963A patent/JP5250418B2/ja active Active
- 2006-08-01 WO PCT/US2006/030028 patent/WO2007021540A2/en active Application Filing
- 2006-08-01 KR KR1020087006628A patent/KR101257532B1/ko active IP Right Grant
- 2006-08-01 CN CNA2006800386231A patent/CN101292197A/zh active Pending
- 2006-08-01 CN CN2013100206245A patent/CN103105744A/zh active Pending
- 2006-08-07 TW TW095128867A patent/TWI432605B/zh active
-
2007
- 2007-08-22 US US11/843,131 patent/US20070284690A1/en not_active Abandoned
-
2013
- 2013-02-08 JP JP2013023716A patent/JP2013110437A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
TWI432605B (zh) | 2014-04-01 |
JP2013110437A (ja) | 2013-06-06 |
US7273815B2 (en) | 2007-09-25 |
CN103105744A (zh) | 2013-05-15 |
JP5250418B2 (ja) | 2013-07-31 |
WO2007021540A3 (en) | 2007-12-21 |
KR20080046665A (ko) | 2008-05-27 |
KR101257532B1 (ko) | 2013-04-23 |
US20070284690A1 (en) | 2007-12-13 |
WO2007021540A2 (en) | 2007-02-22 |
JP2009505421A (ja) | 2009-02-05 |
CN101292197A (zh) | 2008-10-22 |
US20070042607A1 (en) | 2007-02-22 |
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