TW200716923A - Fluid heating apparatus - Google Patents
Fluid heating apparatusInfo
- Publication number
- TW200716923A TW200716923A TW095124856A TW95124856A TW200716923A TW 200716923 A TW200716923 A TW 200716923A TW 095124856 A TW095124856 A TW 095124856A TW 95124856 A TW95124856 A TW 95124856A TW 200716923 A TW200716923 A TW 200716923A
- Authority
- TW
- Taiwan
- Prior art keywords
- halogen lamp
- heating apparatus
- straight pipes
- fluid heating
- fluid
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
- F24H1/162—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled using electrical energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
- F28F2245/06—Coatings; Surface treatments having particular radiating, reflecting or absorbing features, e.g. for improving heat transfer by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Resistance Heating (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005199899A JP4743495B2 (ja) | 2005-07-08 | 2005-07-08 | 流体加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200716923A true TW200716923A (en) | 2007-05-01 |
TWI297762B TWI297762B (zh) | 2008-06-11 |
Family
ID=37124282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095124856A TW200716923A (en) | 2005-07-08 | 2006-07-07 | Fluid heating apparatus |
Country Status (6)
Country | Link |
---|---|
US (1) | US7593625B2 (zh) |
EP (1) | EP1741995A3 (zh) |
JP (1) | JP4743495B2 (zh) |
KR (1) | KR101123994B1 (zh) |
CN (1) | CN100554760C (zh) |
TW (1) | TW200716923A (zh) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008244318A (ja) * | 2007-03-28 | 2008-10-09 | Tokyo Electron Ltd | 基板搬送部材の洗浄方法、基板搬送装置及び基板処理システム |
ITVE20080012U1 (it) * | 2008-04-24 | 2009-10-24 | D H E S R L | Scambiatore di calore per fluidi. |
US8701308B2 (en) | 2008-06-02 | 2014-04-22 | Tokyo Electron Limited | Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing method |
JP5138515B2 (ja) | 2008-09-05 | 2013-02-06 | 東京エレクトロン株式会社 | 蒸気発生器、蒸気発生方法および基板処理装置 |
JP5415797B2 (ja) * | 2009-03-24 | 2014-02-12 | 株式会社Kelk | 流体加熱装置 |
JP2011075145A (ja) * | 2009-09-29 | 2011-04-14 | Fuji Heavy Ind Ltd | 流体加熱装置およびこれを用いた循環式加熱処理システム |
DE102010011702A1 (de) | 2010-03-10 | 2011-09-15 | E.G.O. Elektro-Gerätebau GmbH | Einrichtung zum Erhitzen von Wasser bzw. Dampf |
CN201839457U (zh) * | 2010-05-24 | 2011-05-18 | 小田(中山)实业有限公司 | 发热器以及即热式电热水机 |
JP5307780B2 (ja) * | 2010-09-13 | 2013-10-02 | 東京エレクトロン株式会社 | 液体加熱ユニット、これを備える液処理装置、および液処理方法 |
KR101036509B1 (ko) * | 2010-09-30 | 2011-05-24 | 정광호 | 탄소히터를 이용한 온수생성장치 |
JP2012087983A (ja) * | 2010-10-19 | 2012-05-10 | Tokyo Electron Ltd | 流体加熱装置及び基板処理装置 |
JP2012189385A (ja) * | 2011-03-09 | 2012-10-04 | Fujifilm Corp | 放射線画像検出装置の保守方法 |
DE102011013810B4 (de) * | 2011-03-14 | 2022-03-03 | Stiebel Eltron Gmbh & Co. Kg | Elektronisch geregelter Durchlauferhitzer und Verfahren zum Betrieb eines elektronisch geregelten Durchlauferhitzers |
US9140466B2 (en) | 2012-07-17 | 2015-09-22 | Eemax, Inc. | Fluid heating system and instant fluid heating device |
US10222091B2 (en) | 2012-07-17 | 2019-03-05 | Eemax, Inc. | Next generation modular heating system |
WO2014098943A1 (en) * | 2012-12-21 | 2014-06-26 | Eemax, Inc. | Next generation bare wire water heater |
JP6244529B2 (ja) * | 2013-03-05 | 2017-12-13 | 国立研究開発法人農業・食品産業技術総合研究機構 | 加熱媒体発生装置及び該加熱媒体発生装置を含む加熱処理装置 |
US10264629B2 (en) * | 2013-05-30 | 2019-04-16 | Osram Sylvania Inc. | Infrared heat lamp assembly |
JP6021767B2 (ja) * | 2013-09-04 | 2016-11-09 | 日本サーモスタット株式会社 | 液化ガス加温用ヒータ装置 |
KR101522714B1 (ko) * | 2014-01-14 | 2015-06-17 | 주식회사 미니맥스 | 반도체 및 엘씨디 제조 설비용 감압 장치 |
US9451792B1 (en) * | 2014-09-05 | 2016-09-27 | Atmos Nation, LLC | Systems and methods for vaporizing assembly |
MX2017008059A (es) | 2014-12-17 | 2018-01-09 | Eemax Inc | Calentador de agua electrico sin tanque. |
US10462950B2 (en) * | 2015-05-22 | 2019-10-29 | Fuji Corporation | Electronic component bonding device and electronic component mounter |
CN106288332B (zh) * | 2015-06-08 | 2019-03-22 | 福建斯狄渢电开水器有限公司 | 一种即热式加热器 |
TW201829961A (zh) * | 2016-10-25 | 2018-08-16 | 伊馬德 馬哈維利 | 蒸汽產生器及反應器 |
KR101837891B1 (ko) * | 2017-02-22 | 2018-03-13 | 이우주 | 액체 순환형 이중관 램프 |
KR101846509B1 (ko) * | 2017-03-29 | 2018-04-09 | (주)앤피에스 | 열원 장치 및 이를 구비하는 기판 처리 장치 |
JP6961211B2 (ja) * | 2017-07-20 | 2021-11-05 | メトロ電気工業株式会社 | 流体加熱器 |
JP2020009628A (ja) * | 2018-07-09 | 2020-01-16 | 有限会社フィンテック | 光加熱式ヒータ |
JP2020064764A (ja) * | 2018-10-17 | 2020-04-23 | シャープ株式会社 | 流体加熱装置、加熱調理器 |
JP7190888B2 (ja) * | 2018-12-06 | 2022-12-16 | 東京エレクトロン株式会社 | 配管加熱装置及び基板処理装置 |
CA3159200A1 (en) * | 2019-11-26 | 2021-06-03 | Nxstage Medical, Inc. | Heater devices, methods, and systems |
KR102089228B1 (ko) * | 2019-12-05 | 2020-03-13 | 신영현 | 조명 온수기 |
US11705345B2 (en) | 2020-04-30 | 2023-07-18 | Edwards Vacuum Llc | Semiconductor system with steam generator and reactor |
IT202200005471A1 (it) * | 2022-03-21 | 2023-09-21 | Rudi Foini | Dispositivo di nebulizzazione e metodo di scambio termico abbreviato per vaporizzazione sostanza liquida |
WO2023183190A1 (en) * | 2022-03-24 | 2023-09-28 | White Knight Fluid Handling Inc. | Fluid heater |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1767122A (en) * | 1929-07-03 | 1930-06-24 | Charles G Dean | Portable electric water heater |
US3546431A (en) * | 1969-04-25 | 1970-12-08 | Erich L Gibbs | Immersion heater and method of making the same |
KR880701059A (ko) * | 1986-02-07 | 1988-04-22 | 데이비드 에이. 라파포트 | 히이터 장치 |
US5054107A (en) * | 1989-05-19 | 1991-10-01 | Geoffrey Batchelder | Radiating lamp fluid heating system |
JP2749645B2 (ja) * | 1989-07-10 | 1998-05-13 | 古河電気工業株式会社 | 光信号増幅方式 |
GB8919700D0 (en) | 1989-08-31 | 1989-10-11 | Electricity Council | Infra-red radiation emission arrangement |
JPH0342637U (zh) * | 1989-09-01 | 1991-04-23 | ||
US5127465A (en) * | 1990-12-28 | 1992-07-07 | Fischer Industries, Inc. | Heat exchanger |
JP2583159B2 (ja) * | 1991-02-08 | 1997-02-19 | 株式会社小松製作所 | 流体加熱器 |
JPH06221677A (ja) * | 1993-01-22 | 1994-08-12 | Nishibori Minoru | ガス加熱装置 |
JP3501887B2 (ja) * | 1995-09-29 | 2004-03-02 | 小松エレクトロニクス株式会社 | 流体加熱装置 |
JP3033047B2 (ja) * | 1995-11-30 | 2000-04-17 | 株式会社小松製作所 | 流体の温度制御装置 |
JPH1024102A (ja) * | 1996-07-15 | 1998-01-27 | Meteku:Kk | 透析液加温ヒーター |
JPH10220909A (ja) | 1996-12-03 | 1998-08-21 | Komatsu Ltd | 流体温度制御装置 |
JP2000111155A (ja) * | 1998-10-02 | 2000-04-18 | Komatsu Electronics Kk | 液体加熱装置 |
JP3847469B2 (ja) * | 1998-10-02 | 2006-11-22 | 小松エレクトロニクス株式会社 | 流体加熱装置 |
JP2000146298A (ja) * | 1998-11-13 | 2000-05-26 | Matsushita Electric Ind Co Ltd | 触媒燃焼装置 |
JP3963610B2 (ja) * | 1999-04-20 | 2007-08-22 | 三益半導体工業株式会社 | 液体加熱装置 |
JP3587249B2 (ja) * | 2000-03-30 | 2004-11-10 | 東芝セラミックス株式会社 | 流体加熱装置 |
JP2002162113A (ja) * | 2000-11-24 | 2002-06-07 | Ses Co Ltd | 恒温液用昇温装置 |
WO2003014632A2 (en) | 2001-08-03 | 2003-02-20 | Integrated Circuit Development Corporation | In-line fluid heating system |
JP2003090613A (ja) * | 2001-09-18 | 2003-03-28 | Komatsu Electronics Inc | 流体加熱装置 |
JP2003097849A (ja) * | 2001-09-25 | 2003-04-03 | Orion Mach Co Ltd | 流体加熱装置 |
JP3936644B2 (ja) * | 2002-08-29 | 2007-06-27 | ニチアス株式会社 | 流体加熱装置 |
WO2004053400A1 (en) * | 2002-12-11 | 2004-06-24 | Thomas Johnston | Method device for heating fluids |
-
2005
- 2005-07-08 JP JP2005199899A patent/JP4743495B2/ja active Active
-
2006
- 2006-06-29 KR KR1020060059168A patent/KR101123994B1/ko active IP Right Grant
- 2006-07-06 US US11/481,253 patent/US7593625B2/en active Active
- 2006-07-07 EP EP06014160A patent/EP1741995A3/en not_active Withdrawn
- 2006-07-07 TW TW095124856A patent/TW200716923A/zh unknown
- 2006-07-07 CN CNB2006101054930A patent/CN100554760C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US7593625B2 (en) | 2009-09-22 |
CN100554760C (zh) | 2009-10-28 |
JP2007017098A (ja) | 2007-01-25 |
EP1741995A3 (en) | 2007-08-01 |
TWI297762B (zh) | 2008-06-11 |
KR20070006558A (ko) | 2007-01-11 |
KR101123994B1 (ko) | 2012-03-23 |
US20070017502A1 (en) | 2007-01-25 |
EP1741995A2 (en) | 2007-01-10 |
CN1892094A (zh) | 2007-01-10 |
JP4743495B2 (ja) | 2011-08-10 |
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