TW200715594A - Semiconductor device and fabrication method thereof - Google Patents

Semiconductor device and fabrication method thereof

Info

Publication number
TW200715594A
TW200715594A TW095130581A TW95130581A TW200715594A TW 200715594 A TW200715594 A TW 200715594A TW 095130581 A TW095130581 A TW 095130581A TW 95130581 A TW95130581 A TW 95130581A TW 200715594 A TW200715594 A TW 200715594A
Authority
TW
Taiwan
Prior art keywords
photodiodes
separated
common
semiconductor device
anode
Prior art date
Application number
TW095130581A
Other languages
English (en)
Chinese (zh)
Other versions
TWI307968B (https=
Inventor
Chihiro Arai
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of TW200715594A publication Critical patent/TW200715594A/zh
Application granted granted Critical
Publication of TWI307968B publication Critical patent/TWI307968B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/103—Integrated devices the at least one element covered by H10F30/00 having potential barriers, e.g. integrated devices comprising photodiodes or phototransistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/107—Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/957—Circuit arrangements for devices having potential barriers for position-sensitive photodetectors, e.g. lateral-effect photodiodes or quadrant photodiodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/19—Preparing inhomogeneous wafers
    • H10P90/1904—Preparing vertically inhomogeneous wafers
    • H10P90/1906—Preparing SOI wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/014—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/061—Manufacture or treatment using SOI processes together with lateral isolation, e.g. combinations of SOI and shallow trench isolations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/17—Isolation regions comprising dielectric materials formed using trench refilling with dielectric materials, e.g. shallow trench isolations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers

Landscapes

  • Light Receiving Elements (AREA)
  • Element Separation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
TW095130581A 2005-09-12 2006-08-21 Semiconductor device and fabrication method thereof TW200715594A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005263366A JP4618064B2 (ja) 2005-09-12 2005-09-12 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
TW200715594A true TW200715594A (en) 2007-04-16
TWI307968B TWI307968B (https=) 2009-03-21

Family

ID=37864763

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095130581A TW200715594A (en) 2005-09-12 2006-08-21 Semiconductor device and fabrication method thereof

Country Status (7)

Country Link
US (1) US7928511B2 (https=)
EP (1) EP1933390A4 (https=)
JP (1) JP4618064B2 (https=)
KR (1) KR101248084B1 (https=)
CN (1) CN101300685B (https=)
TW (1) TW200715594A (https=)
WO (1) WO2007032165A1 (https=)

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CN101904017A (zh) * 2008-02-26 2010-12-01 硅绝缘体技术有限公司 制造半导体衬底的方法
CN103915525A (zh) * 2014-04-08 2014-07-09 上海电力学院 一种提高光电转化性能的红外焦平面探测器
CN107039425B (zh) * 2017-03-29 2018-07-13 湖北京邦科技有限公司 一种半导体光电倍增器件
FR3071356B1 (fr) * 2017-09-21 2020-11-13 Safran Electronics & Defense Dispositif de detection et de localisation comprenant une pluralite de photodiodes
DE102018105752B4 (de) * 2018-03-13 2019-10-24 X-Fab Semiconductor Foundries Gmbh Elektrisch modulierte Fotodiode und Verfahren zu deren Herstellung
KR102017125B1 (ko) * 2018-03-28 2019-09-03 주식회사 포셈 포토다이오드의 제조방법
CN108573989B (zh) * 2018-04-28 2021-09-14 中国科学院半导体研究所 硅基雪崩光电探测器阵列及其制作方法
JP7039411B2 (ja) 2018-07-20 2022-03-22 株式会社東芝 光検出器、光検出システム、ライダー装置及び車
US11018168B2 (en) * 2018-09-20 2021-05-25 Taiwan Semiconductor Manufacturing Co., Ltd. Image sensor with improved timing resolution and photon detection probability
JP7222851B2 (ja) 2019-08-29 2023-02-15 株式会社東芝 光検出器、光検出システム、ライダー装置、及び車
JP7153001B2 (ja) 2019-09-18 2022-10-13 株式会社東芝 光検出器、光検出システム、ライダー装置、及び車
WO2025085277A1 (en) * 2023-10-18 2025-04-24 Gpd Optoelectronics Corp. Radial wedge and central quadrant photodetector having a lock-in amplifier and/or overlays
CN117954378A (zh) * 2024-03-26 2024-04-30 粤芯半导体技术股份有限公司 一种半导体器件及其制备方法

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JPH0818093A (ja) * 1994-06-30 1996-01-19 Sony Corp 半導体受光素子及び半導体装置並びにそれらの作製方法
US5610790A (en) * 1995-01-20 1997-03-11 Xilinx, Inc. Method and structure for providing ESD protection for silicon on insulator integrated circuits
JPH0953984A (ja) * 1995-08-18 1997-02-25 Mitsubishi Electric Corp 輝度検出回路
JPH09237912A (ja) * 1995-12-28 1997-09-09 Sony Corp 受光素子及びその製造方法
JPH09331080A (ja) * 1996-06-12 1997-12-22 Sony Corp 受光素子を含む半導体装置およびその製造方法
JP3918220B2 (ja) * 1997-02-27 2007-05-23 ソニー株式会社 半導体装置及びその製造方法
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JP2000150842A (ja) * 1998-11-05 2000-05-30 Sharp Corp 受光素子及びその製造方法
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Also Published As

Publication number Publication date
TWI307968B (https=) 2009-03-21
WO2007032165A1 (ja) 2007-03-22
EP1933390A1 (en) 2008-06-18
US7928511B2 (en) 2011-04-19
US20100155867A1 (en) 2010-06-24
EP1933390A4 (en) 2012-05-23
KR101248084B1 (ko) 2013-03-27
CN101300685B (zh) 2010-05-19
JP2007080905A (ja) 2007-03-29
JP4618064B2 (ja) 2011-01-26
KR20080053464A (ko) 2008-06-13
CN101300685A (zh) 2008-11-05

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