TW200703589A - Semiconductor package and method for manufacturing the same - Google Patents

Semiconductor package and method for manufacturing the same

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Publication number
TW200703589A
TW200703589A TW095114554A TW95114554A TW200703589A TW 200703589 A TW200703589 A TW 200703589A TW 095114554 A TW095114554 A TW 095114554A TW 95114554 A TW95114554 A TW 95114554A TW 200703589 A TW200703589 A TW 200703589A
Authority
TW
Taiwan
Prior art keywords
wiring section
wiring
manufacturing
substrate
same
Prior art date
Application number
TW095114554A
Other languages
English (en)
Other versions
TWI305034B (zh
Inventor
Masamichi Ishihara
Original Assignee
Kyushu Inst Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Inst Technology filed Critical Kyushu Inst Technology
Publication of TW200703589A publication Critical patent/TW200703589A/zh
Application granted granted Critical
Publication of TWI305034B publication Critical patent/TWI305034B/zh

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    • HELECTRICITY
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • H01L23/49548Cross section geometry
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    • H01L22/30Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/32Additional lead-in metallisation on a device or substrate, e.g. additional pads or pad portions, lines in the scribe line, sacrificed conductors
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    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01046Palladium [Pd]
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2924/01Chemical elements
    • H01L2924/01077Iridium [Ir]
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01079Gold [Au]
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    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
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    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Geometry (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Solid State Image Pick-Up Elements (AREA)
TW095114554A 2005-04-26 2006-04-24 Semiconductor package and method for manufacturing the same TW200703589A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101930929B (zh) * 2009-06-26 2012-07-18 日月光半导体(上海)股份有限公司 具有侧表面线路的封装用基板制造方法

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7939916B2 (en) * 2007-01-25 2011-05-10 Analog Devices, Inc. Wafer level CSP packaging concept
US7843046B2 (en) * 2008-02-19 2010-11-30 Vertical Circuits, Inc. Flat leadless packages and stacked leadless package assemblies
JP5033682B2 (ja) * 2008-03-12 2012-09-26 株式会社テラミクロス 半導体素子およびその製造方法並びに半導体装置およびその製造方法
JP2009277970A (ja) * 2008-05-16 2009-11-26 Fujikura Ltd 回路配線基板実装体
JP2009277969A (ja) * 2008-05-16 2009-11-26 Fujikura Ltd 半導体装置及びその製造方法並びに半導体装置積層体
JP5266009B2 (ja) * 2008-10-14 2013-08-21 株式会社フジクラ 部品内蔵形回路配線基板
CN102804379B (zh) * 2010-05-24 2015-12-09 全视科技有限公司 双面图像传感器
CN103155136B (zh) 2010-09-29 2015-03-04 Nxp股份有限公司 Ic封装件的分离
FR2967814A1 (fr) * 2010-11-23 2012-05-25 St Microelectronics Grenoble 2 Dispositif semi-conducteur a puce sur plaque support
US9153507B2 (en) * 2012-01-31 2015-10-06 Broadcom Corporation Semiconductor package with improved testability
JP2014120612A (ja) * 2012-12-17 2014-06-30 Toshiba Corp 半導体装置、およびそれを用いた半導体モジュール
JP6278251B2 (ja) * 2013-09-27 2018-02-14 富士電機株式会社 接合組立装置
US9881962B2 (en) * 2013-12-10 2018-01-30 Sony Corporation Semiconductor apparatus, solid state imaging device, imaging apparatus and electronic equipment, and manufacturing method thereof
US9972558B1 (en) 2017-04-04 2018-05-15 Stmicroelectronics, Inc. Leadframe package with side solder ball contact and method of manufacturing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5847930A (en) * 1995-10-13 1998-12-08 Hei, Inc. Edge terminals for electronic circuit modules
JP3599950B2 (ja) * 1997-04-16 2004-12-08 株式会社アルバック 金属ペーストの焼成方法
JP2002075999A (ja) 2000-08-31 2002-03-15 Ulvac Japan Ltd 銅配線パターンの形成方法
US7177137B2 (en) * 2002-04-15 2007-02-13 Avx Corporation Plated terminations
JP2004303884A (ja) * 2003-03-31 2004-10-28 Seiko Epson Corp 三次元実装モジュールの製造方法とその方法で得られる三次元実装モジュール
JP3574450B1 (ja) 2003-05-16 2004-10-06 沖電気工業株式会社 半導体装置、及び半導体装置の製造方法
JP2005005488A (ja) 2003-06-12 2005-01-06 Dainippon Printing Co Ltd 半導体モジュールおよびそれらの製造方法
JP3646719B2 (ja) * 2003-06-19 2005-05-11 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
SG120123A1 (en) * 2003-09-30 2006-03-28 Micron Technology Inc Castellated chip-scale packages and methods for fabricating the same
JP2005340647A (ja) * 2004-05-28 2005-12-08 Nec Compound Semiconductor Devices Ltd インターポーザ基板、半導体パッケージ及び半導体装置並びにそれらの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101930929B (zh) * 2009-06-26 2012-07-18 日月光半导体(上海)股份有限公司 具有侧表面线路的封装用基板制造方法

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WO2006117961A1 (ja) 2006-11-09
KR101189100B1 (ko) 2012-10-10
KR20080003832A (ko) 2008-01-08
JPWO2006117961A1 (ja) 2008-12-18
JP4635209B2 (ja) 2011-02-23
TWI305034B (zh) 2009-01-01
US7838983B2 (en) 2010-11-23

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