JP2014120612A - 半導体装置、およびそれを用いた半導体モジュール - Google Patents
半導体装置、およびそれを用いた半導体モジュール Download PDFInfo
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Abstract
【解決手段】半導体モジュールは、プリント基板の実装面に半導体装置50が実装される。半導体装置は、第2面1b側に露出された複数のチップ側接続端子5を有する。複数の半導体装置50が、プリント基板の実装面に第2面1bを対向させて実装される。複数のチップ側接続端子5は、境界辺と平行に並べて形成される。チップ側接続端子5には、複数のイネーブル端子が含まれる。イネーブル端子は、並べて形成されたチップ側接続端子5の中央部分に配設される。イネーブル端子には、チップイネーブル端子、ライトイネーブル端子、およびアウトプットイネーブル端子が含まれる。
【選択図】図1
Description
<半導体装置の構成>
図1は、第1の実施の形態にかかる半導体装置の概略構成を示す斜視図である。図2は、図1に示す矢印Xに沿って見た断面図である。半導体装置50は、平面形状が方形形状を呈し、全体として薄板状の形状を呈している。図2に示すように、半導体装置50は、シリコン基板1、内部配線層(第1の配線層)2、外部配線3、絶縁層4、チップ側接続端子5を備える。
図5−1は、本実施の形態にかかる半導体装置を備える半導体モジュールの断面構成を示す図である。半導体モジュール100は、プリント基板11の実装面11a上に複数の半導体装置50(51)が実装され、実装面11aと半導体装置50(51)を覆うようにモールド部12が設けられる。
次に、第1の実施の形態にかかる半導体装置50の製造手順を説明する。図10は、半導体装置50を個片化する前の半導体ウエハの平面図である。図11−1〜14−1は、半導体装置50の製造手順を説明するための図であって、図10に示すA−A線に沿った矢視断面図である。図11−2〜14−2は、半導体装置50の製造手順を説明するための図であって、図10に示すB−B線に沿った矢視断面図である。
図31は、半導体モジュール100の他の構成例を示す図である。図32は、図31に示す半導体モジュール100が備える半導体装置50をチップ側接続端子5側から見た図である。図31に示すように、大きさの異なる半導体装置50を並べて半導体モジュール100を構成してもよい。ここで、半導体装置50の並ぶ方向に同列に並ぶチップ側接続端子5同士の機能を揃えることで、図6−1に示したような帯状の表面電極13が形成されたプリント基板11を用いることができる。
Claims (10)
- 内部に第1の配線層が形成されたシリコン基板と、前記シリコン基板の表面のうち前記第1の配線層と略平行な第1面に積層された絶縁膜と、前記配線層と電気的に接続されて前記第1面から略垂直に連続する第2面側に露出された複数のチップ側接続端子と、を有する半導体装置と、
前記半導体装置が実装される実装面を有し、内部に第2の配線層が形成されるとともに前記配線層と電気的に接続された基板側接続端子が前記実装面から露出されたプリント基板と、
前記実装面に前記第2面を対向させて実装された複数の前記半導体装置と、を備え、
複数の前記半導体装置同士は互いに密着して前記第1面同士を対向させて並べられ、
複数の前記チップ側接続端子は、前記第1面と前記第2面との境界となる境界辺と平行に並べて形成され、
前記チップ側接続端子には、複数のイネーブル端子、アドレス端子および偶数個の電源端子が含まれ、
前記イネーブル端子は、並べて形成された前記チップ側接続端子の中央部分に配設され、
前記イネーブル端子には、チップイネーブル端子、ライトイネーブル端子、およびアウトプットイネーブル端子が含まれ、
前記アドレス端子は、前記イネーブル端子を挟んだ両側に配設され、
前記電源端子は、前記境界辺を通り前記第1面と垂直となる中央線を挟んで対称に配設され、
前記プリント基板には、前記実装面に実装された前記半導体装置を囲む囲み壁が形成されている半導体モジュール。 - 内部に第1の配線層が形成されたシリコン基板と、
前記シリコン基板の表面のうち前記第1の配線層と略平行な第1面に積層された絶縁膜と、
前記配線層と電気的に接続されて前記第1面から略垂直に連続する第2面側に露出された複数のチップ側接続端子と、を備える半導体装置。 - 前記接続端子は、前記絶縁膜側にも露出されている請求項2に記載の半導体装置。
- 請求項2または3に記載の半導体装置が実装される実装面を有し、内部に第2の配線層が形成されるとともに前記配線層と電気的に接続された基板側接続端子が前記実装面から露出されたプリント基板と、
前記実装面に前記第2面を対向させて実装された複数の前記半導体装置と、を備え、
複数の前記半導体装置同士は互いに密着して並べられる半導体モジュール。 - 複数の前記半導体装置は、前記第1面同士を対向させて配置される請求項4に記載の半導体モジュール。
- 複数の前記チップ側接続端子は、前記第1面と前記第2面との境界となる境界辺と平行に並べて形成され、
前記チップ側接続端子には、複数のイネーブル端子が含まれ、
前記イネーブル端子は、並べて形成された前記チップ側接続端子の中央部分に配設される請求項5に記載の半導体モジュール。 - 前記イネーブル端子には、前記チップイネーブル端子、前記ライトイネーブル端子、および前記アウトプットイネーブル端子が含まれる請求項6に記載の半導体モジュール。
- 前記チップ側接続端子には、アドレス端子が含まれ、
前記アドレス端子は、前記イネーブル端子を挟んだ両側に配設される請求項5に記載の半導体モジュール。 - 前記チップ側接続端子には、偶数個の電源端子が含まれ、
前記電源端子は、前記境界辺を通り前記第1面と垂直となる中央線を挟んで対称に配設される請求項5〜8のいずれか1つに記載された半導体モジュール。 - 前記プリント基板には、前記実装面に実装された前記半導体装置を囲む囲み壁が形成されている請求項4〜9のいずれか1つに記載の半導体モジュール。
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JP2012274725A JP2014120612A (ja) | 2012-12-17 | 2012-12-17 | 半導体装置、およびそれを用いた半導体モジュール |
US14/023,927 US20140167251A1 (en) | 2012-12-17 | 2013-09-11 | Semiconductor device, semiconductor module, and manufacturing method for semiconductor device |
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KR101726241B1 (ko) * | 2014-11-12 | 2017-04-12 | 인텔 코포레이션 | 소형 폼 팩터 또는 웨어러블 디바이스를 위한 집적 회로 패키징 기술, 구성, 장치, 조립체 및 방법 |
US10134670B2 (en) | 2015-04-08 | 2018-11-20 | International Business Machines Corporation | Wafer with plated wires and method of fabricating same |
US11532524B2 (en) * | 2020-07-27 | 2022-12-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit test method and structure thereof |
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JPH01137581U (ja) * | 1988-03-11 | 1989-09-20 | ||
JPH05206688A (ja) * | 1992-01-24 | 1993-08-13 | Toshiba Corp | 半導体装置とその面実装方法 |
JPH0922959A (ja) * | 1995-07-06 | 1997-01-21 | Fujitsu Ltd | 半導体装置及び半導体装置ユニット |
JPH10340974A (ja) * | 1997-06-10 | 1998-12-22 | Toshiba Corp | 半導体装置およびその製造方法 |
US7009296B1 (en) * | 2004-01-15 | 2006-03-07 | Amkor Technology, Inc. | Semiconductor package with substrate coupled to a peripheral side surface of a semiconductor die |
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US7189077B1 (en) * | 1999-07-30 | 2007-03-13 | Formfactor, Inc. | Lithographic type microelectronic spring structures with improved contours |
US6759311B2 (en) * | 2001-10-31 | 2004-07-06 | Formfactor, Inc. | Fan out of interconnect elements attached to semiconductor wafer |
JP2004303884A (ja) * | 2003-03-31 | 2004-10-28 | Seiko Epson Corp | 三次元実装モジュールの製造方法とその方法で得られる三次元実装モジュール |
US7838983B2 (en) * | 2005-04-26 | 2010-11-23 | Kyushu Institute Of Technology | Packaged semiconductor device and method of manufacturing the packaged semiconductor device |
KR101185886B1 (ko) * | 2007-07-23 | 2012-09-25 | 삼성전자주식회사 | 유니버설 배선 라인들을 포함하는 반도체 칩, 반도체패키지, 카드 및 시스템 |
US8786060B2 (en) * | 2012-05-04 | 2014-07-22 | Advanced Semiconductor Engineering, Inc. | Semiconductor package integrated with conformal shield and antenna |
US9437490B2 (en) * | 2013-11-18 | 2016-09-06 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor device and manufacturing method thereof |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01137581U (ja) * | 1988-03-11 | 1989-09-20 | ||
JPH05206688A (ja) * | 1992-01-24 | 1993-08-13 | Toshiba Corp | 半導体装置とその面実装方法 |
JPH0922959A (ja) * | 1995-07-06 | 1997-01-21 | Fujitsu Ltd | 半導体装置及び半導体装置ユニット |
JPH10340974A (ja) * | 1997-06-10 | 1998-12-22 | Toshiba Corp | 半導体装置およびその製造方法 |
US7009296B1 (en) * | 2004-01-15 | 2006-03-07 | Amkor Technology, Inc. | Semiconductor package with substrate coupled to a peripheral side surface of a semiconductor die |
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