TW200614404A - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof

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Publication number
TW200614404A
TW200614404A TW094131762A TW94131762A TW200614404A TW 200614404 A TW200614404 A TW 200614404A TW 094131762 A TW094131762 A TW 094131762A TW 94131762 A TW94131762 A TW 94131762A TW 200614404 A TW200614404 A TW 200614404A
Authority
TW
Taiwan
Prior art keywords
ion
semiconductor substrate
semiconductor device
sealing material
manufacturing
Prior art date
Application number
TW094131762A
Other languages
English (en)
Other versions
TWI296139B (zh
Inventor
Takeshi Wakabayashi
Ichiro Mihara
Original Assignee
Casio Computer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Casio Computer Co Ltd filed Critical Casio Computer Co Ltd
Publication of TW200614404A publication Critical patent/TW200614404A/zh
Application granted granted Critical
Publication of TWI296139B publication Critical patent/TWI296139B/zh

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    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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US7816790B2 (en) 2006-05-19 2010-10-19 Casio Computer Co., Ltd. Semiconductor device having low dielectric insulating film and manufacturing method of the same
US9177848B2 (en) 2007-05-04 2015-11-03 Stats Chippac, Ltd. Semiconductor wafer having through-hole vias on saw streets with backside redistribution layer
US9524938B2 (en) 2007-05-04 2016-12-20 STATS ChipPAC Pte. Ltd. Package-in-package using through-hole via die on saw streets
US9847253B2 (en) 2007-05-04 2017-12-19 STATS ChipPAC Pte. Ltd. Package-on-package using through-hole via die on saw streets
US8587124B2 (en) 2007-09-21 2013-11-19 Teramikros, Inc. Semiconductor device having low dielectric insulating film and manufacturing method of the same
US8871627B2 (en) 2007-09-21 2014-10-28 Tera Probe, Inc. Semiconductor device having low dielectric insulating film and manufacturing method of the same
US9070638B2 (en) 2007-09-21 2015-06-30 Tera Probe, Inc. Semiconductor device having low dielectric insulating film and manufacturing method of the same
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KR20060051364A (ko) 2006-05-19
US20060060984A1 (en) 2006-03-23
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