TW200604516A - Image inspecting device - Google Patents

Image inspecting device

Info

Publication number
TW200604516A
TW200604516A TW094117312A TW94117312A TW200604516A TW 200604516 A TW200604516 A TW 200604516A TW 094117312 A TW094117312 A TW 094117312A TW 94117312 A TW94117312 A TW 94117312A TW 200604516 A TW200604516 A TW 200604516A
Authority
TW
Taiwan
Prior art keywords
work
strip
pattern
inspecting device
holding
Prior art date
Application number
TW094117312A
Other languages
English (en)
Other versions
TWI323343B (zh
Inventor
Atsushi Mito
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200604516A publication Critical patent/TW200604516A/zh
Application granted granted Critical
Publication of TWI323343B publication Critical patent/TWI323343B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/79—Apparatus for Tape Automated Bonding [TAB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
    • B01L2400/049—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/5907—Densitometers
    • G01N2021/5957—Densitometers using an image detector type detector, e.g. CCD

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW094117312A 2004-07-05 2005-05-26 Image inspecting device TW200604516A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004197595A JP4479383B2 (ja) 2004-07-05 2004-07-05 パターン検査装置

Publications (2)

Publication Number Publication Date
TW200604516A true TW200604516A (en) 2006-02-01
TWI323343B TWI323343B (zh) 2010-04-11

Family

ID=35792062

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094117312A TW200604516A (en) 2004-07-05 2005-05-26 Image inspecting device

Country Status (4)

Country Link
JP (1) JP4479383B2 (zh)
KR (1) KR20060048549A (zh)
CN (1) CN100516847C (zh)
TW (1) TW200604516A (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5117243B2 (ja) * 2008-03-27 2013-01-16 株式会社オーク製作所 露光装置
JP5553532B2 (ja) * 2009-06-04 2014-07-16 パナソニック株式会社 光学検査装置
JP6142486B2 (ja) * 2012-09-07 2017-06-07 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6061182B2 (ja) * 2012-09-07 2017-01-18 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6146638B2 (ja) * 2012-11-05 2017-06-14 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6217070B2 (ja) * 2012-11-05 2017-10-25 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6007740B2 (ja) * 2012-11-13 2016-10-12 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6016105B2 (ja) * 2012-11-20 2016-10-26 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
JP6101481B2 (ja) * 2012-12-26 2017-03-22 東レエンジニアリング株式会社 積層構造を有するワークの内部検査装置
JP6399119B2 (ja) * 2017-02-14 2018-10-03 大日本印刷株式会社 金属薄板の寸法測定装置及び金属薄板の寸法測定方法
WO2020194595A1 (ja) * 2019-03-27 2020-10-01 シャープ株式会社 フレキシブル表示基板の接続部の検査装置及びフレキシブル表示装置の製造方法
CN115855944B (zh) * 2023-02-03 2023-05-05 郯城永耀电子科技有限公司 一种fpc连接器多个弹片自动检查装置

Also Published As

Publication number Publication date
TWI323343B (zh) 2010-04-11
JP4479383B2 (ja) 2010-06-09
KR20060048549A (ko) 2006-05-18
CN1721842A (zh) 2006-01-18
JP2006017642A (ja) 2006-01-19
CN100516847C (zh) 2009-07-22

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees