EP1782510A4 - Fiber amplified based light source for semiconductor inspection - Google Patents

Fiber amplified based light source for semiconductor inspection

Info

Publication number
EP1782510A4
EP1782510A4 EP05813080A EP05813080A EP1782510A4 EP 1782510 A4 EP1782510 A4 EP 1782510A4 EP 05813080 A EP05813080 A EP 05813080A EP 05813080 A EP05813080 A EP 05813080A EP 1782510 A4 EP1782510 A4 EP 1782510A4
Authority
EP
European Patent Office
Prior art keywords
light source
based light
semiconductor inspection
amplified based
fiber amplified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05813080A
Other languages
German (de)
French (fr)
Other versions
EP1782510A2 (en
Inventor
Yung-Ho Chuang
Joseph J Armstrong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Tencor Technologies Corp
Original Assignee
KLA Tencor Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US60454004P priority Critical
Priority to US11/056,855 priority patent/US7924892B2/en
Application filed by KLA Tencor Technologies Corp filed Critical KLA Tencor Technologies Corp
Priority to PCT/US2005/028993 priority patent/WO2006023448A2/en
Publication of EP1782510A2 publication Critical patent/EP1782510A2/en
Publication of EP1782510A4 publication Critical patent/EP1782510A4/en
Application status is Withdrawn legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2383Parallel arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06754Fibre amplifiers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501Semiconductor wafers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/02Optical fibre with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • G02B6/02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02342Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
    • G02B6/02347Longitudinal structures arranged to form a regular periodic lattice, e.g. triangular, square, honeycomb unit cell repeated throughout cladding
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00Light guides
    • G02B6/02Optical fibre with cladding with or without a coating
    • G02B6/02295Microstructured optical fibre
    • G02B6/02314Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
    • G02B6/02342Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
    • G02B6/02366Single ring of structures, e.g. "air clad"
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057Temporal shaping, e.g. pulse compression, frequency chirping
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06729Peculiar transverse fibre profile
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06729Peculiar transverse fibre profile
    • H01S3/06741Photonic crystal fibre, i.e. the fibre having a photonic bandgap
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06708Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • H01S3/06745Tapering of the fibre, core or active region
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/06791Fibre ring lasers
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094003Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
    • H01S3/094007Cladding pumping, i.e. pump light propagating in a clad surrounding the active core
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/094003Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
    • H01S3/094019Side pumped fibre, whereby pump light is coupled laterally into the fibre via an optical component like a prism, or a grating, or via V-groove coupling
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/094Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
    • H01S3/0941Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
    • H01S3/09415Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11Pulse generation, e.g. Q-switching, mode locking
    • H01S3/1106Mode locking
    • H01S3/1112Passive mode locking
    • H01S3/1115Passive mode locking using a saturable absorber
    • H01S3/1118Solid state absorber, e.g. SESAM
EP05813080A 2004-08-25 2005-08-16 Fiber amplified based light source for semiconductor inspection Withdrawn EP1782510A4 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US60454004P true 2004-08-25 2004-08-25
US11/056,855 US7924892B2 (en) 2004-08-25 2005-02-11 Fiber amplifier based light source for semiconductor inspection
PCT/US2005/028993 WO2006023448A2 (en) 2004-08-25 2005-08-16 Fiber amplified based light source for semiconductor inspection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP11001760.5A EP2369695B1 (en) 2004-08-25 2005-08-16 Fiber amplifier based light source for semiconductor inspection

Publications (2)

Publication Number Publication Date
EP1782510A2 EP1782510A2 (en) 2007-05-09
EP1782510A4 true EP1782510A4 (en) 2010-04-07

Family

ID=35968096

Family Applications (2)

Application Number Title Priority Date Filing Date
EP11001760.5A Active EP2369695B1 (en) 2004-08-25 2005-08-16 Fiber amplifier based light source for semiconductor inspection
EP05813080A Withdrawn EP1782510A4 (en) 2004-08-25 2005-08-16 Fiber amplified based light source for semiconductor inspection

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP11001760.5A Active EP2369695B1 (en) 2004-08-25 2005-08-16 Fiber amplifier based light source for semiconductor inspection

Country Status (3)

Country Link
EP (2) EP2369695B1 (en)
JP (1) JP5255838B2 (en)
WO (1) WO2006023448A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7443903B2 (en) * 2006-04-19 2008-10-28 Mobius Photonics, Inc. Laser apparatus having multiple synchronous amplifiers tied to one master oscillator
CN101939880B (en) * 2008-02-07 2013-07-24 Imra美国公司 High power parallel fiber arrays
US8565861B2 (en) * 2008-05-02 2013-10-22 Olympus Corporation Optical inspection device, electromagnetic wave detection method, electromagnetic wave detection device, organism observation method, microscope, endoscope, and optical tomographic image generation device
JP5538072B2 (en) * 2010-06-03 2014-07-02 株式会社日立ハイテクノロジーズ Defect inspection method and apparatus
WO2013160770A2 (en) * 2012-04-27 2013-10-31 Biolitec Pharma Marketing Ltd. Fiber laser system for medical applications
WO2015105752A1 (en) * 2014-01-07 2015-07-16 Thorlabs, Inc. Adjustable mid-infrared super-continuum generator using a tunable femtosecond oscillator
JP6190317B2 (en) * 2014-05-19 2017-08-30 日本電信電話株式会社 Laser oscillator
JP6190318B2 (en) * 2014-05-19 2017-08-30 日本電信電話株式会社 Laser oscillator
CN106644391B (en) * 2016-09-19 2019-03-29 核工业理化工程研究院 Chain failure expert diagnostic system and diagnostic method are put in a kind of vibration of laser

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6014249A (en) * 1997-01-28 2000-01-11 Imra America, Inc. Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier
US20030008448A1 (en) * 1999-05-27 2003-01-09 Kafka James D. Remote UV laser system and methods of use
JP2003008115A (en) * 2001-06-26 2003-01-10 Mitsubishi Cable Ind Ltd Optical amplifier

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3646462A (en) * 1969-11-14 1972-02-29 American Optical Corp Fiber for distortion-free propagation
JP2656972B2 (en) * 1989-02-22 1997-09-24 日本電信電話株式会社 Multiwavelength glass waveguide laser array
EP0435217B1 (en) * 1989-12-26 1996-03-27 United Technologies Corporation Embedded Bragg grating pumped lasers
JPH04267578A (en) * 1991-02-22 1992-09-24 Toshiba Corp Pulse laser device
JP3657694B2 (en) * 1995-03-31 2005-06-08 リンテック株式会社 Lighting device
US5694408A (en) * 1995-06-07 1997-12-02 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
US5867305A (en) * 1996-01-19 1999-02-02 Sdl, Inc. Optical amplifier with high energy levels systems providing high peak powers
US5832006A (en) * 1997-02-13 1998-11-03 Mcdonnell Douglas Corporation Phased array Raman laser amplifier and operating method therefor
JP4232130B2 (en) * 1998-03-11 2009-03-04 株式会社ニコン Laser apparatus and light irradiation apparatus and exposure method using this laser apparatus
US6061170A (en) * 1998-03-16 2000-05-09 Mcdonnell Douglas Corporation Dual frequency laser amplifier array and operating method therefor
AT268482T (en) * 1998-06-09 2004-06-15 Crystal Fibre As Fiber with photonic bandgap
EP1113314A1 (en) * 1999-06-30 2001-07-04 Nippon Telegraph and Telephone Corporation Optical fiber
JP4132581B2 (en) * 2000-06-07 2008-08-13 ルーセント テクノロジーズ インコーポレーテッド Apparatus including multimode optical fiber
US6567605B1 (en) * 2000-08-25 2003-05-20 The Boeing Company Fiber optic projection device
FR2822243B1 (en) * 2001-03-16 2003-06-20 Cit Alcatel photonic crystal fiber with double cladding
JP4514130B2 (en) * 2002-12-20 2010-07-28 株式会社アルネアラボラトリ Optical pulse laser

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6014249A (en) * 1997-01-28 2000-01-11 Imra America, Inc. Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier
US20030008448A1 (en) * 1999-05-27 2003-01-09 Kafka James D. Remote UV laser system and methods of use
JP2003008115A (en) * 2001-06-26 2003-01-10 Mitsubishi Cable Ind Ltd Optical amplifier

Also Published As

Publication number Publication date
WO2006023448A3 (en) 2006-10-19
EP1782510A2 (en) 2007-05-09
EP2369695A2 (en) 2011-09-28
JP5255838B2 (en) 2013-08-07
EP2369695A3 (en) 2012-02-08
JP2008511177A (en) 2008-04-10
EP2369695B1 (en) 2013-11-13
WO2006023448A2 (en) 2006-03-02

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