TW200801494A - Visual inspection apparatus - Google Patents

Visual inspection apparatus

Info

Publication number
TW200801494A
TW200801494A TW95120323A TW95120323A TW200801494A TW 200801494 A TW200801494 A TW 200801494A TW 95120323 A TW95120323 A TW 95120323A TW 95120323 A TW95120323 A TW 95120323A TW 200801494 A TW200801494 A TW 200801494A
Authority
TW
Taiwan
Prior art keywords
substrate
inspection apparatus
visual inspection
capturing device
image capturing
Prior art date
Application number
TW95120323A
Other languages
Chinese (zh)
Other versions
TWI408361B (en
Inventor
Katsuyuki Hashimoto
Hiroyuki Tokita
Hiroshi Naiki
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200801494A publication Critical patent/TW200801494A/en
Application granted granted Critical
Publication of TWI408361B publication Critical patent/TWI408361B/en

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

In a visual inspection apparatus of the present invention, a holding stage 2 holds and swings a substrate 1. A light source 3 emits illumination light onto a surface of the substrate 1. An image capturing device 4 captures an image of the substrate 1, generates its image data and outputs it to a control device 6. The image capturing device 4 is arranged at a position near a view point P of an operator. The control device 6 causes an internal memory to store the image data output from the image capturing device 4.
TW95120323A 2004-12-10 2006-06-07 Visual inspection apparatus TWI408361B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004359113A JP2006170622A (en) 2004-12-10 2004-12-10 Visual inspection apparatus

Publications (2)

Publication Number Publication Date
TW200801494A true TW200801494A (en) 2008-01-01
TWI408361B TWI408361B (en) 2013-09-11

Family

ID=36671557

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95120323A TWI408361B (en) 2004-12-10 2006-06-07 Visual inspection apparatus

Country Status (2)

Country Link
JP (1) JP2006170622A (en)
TW (1) TWI408361B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI414778B (en) * 2008-10-01 2013-11-11 Kawasaki Heavy Ind Ltd Substrate detection device and method
TWI490477B (en) * 2008-03-04 2015-07-01 Kyodo Design & Planning Corp Electronic component inspection method and device used therein

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2060907A1 (en) * 2006-08-28 2009-05-20 I-Pulse Kabushiki Kaisha Board appearance inspection method and device
JP2008070238A (en) * 2006-09-14 2008-03-27 Olympus Corp Substrate inspection device
JP5017605B2 (en) * 2006-10-20 2012-09-05 株式会社 日立技研 Visual inspection support device, visual inspection support system, and visual inspection support method
JP4914761B2 (en) 2007-05-16 2012-04-11 オリンパス株式会社 Appearance inspection device
US8224020B2 (en) 2007-11-29 2012-07-17 Kabushiki Kaisha Toshiba Appearance inspection apparatus, appearance inspection system, and appearance inspection appearance
KR101317982B1 (en) * 2012-04-04 2013-10-14 에스피티씨주식회사 Remote dust measurement system
JP6142655B2 (en) * 2013-05-09 2017-06-07 株式会社島津製作所 Appearance inspection apparatus and appearance inspection method
JP6337822B2 (en) * 2015-04-15 2018-06-06 株式会社デンソー Inspection device and program
CN113330346B (en) * 2018-06-13 2023-06-23 奇跃公司 Light leakage detection of optical device edge sealants

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015939A (en) * 1983-07-08 1985-01-26 Hitachi Ltd Inspecting device for foreign matter
JPH0685581B2 (en) * 1990-04-06 1994-10-26 東京電力株式会社 Vision sharing device
JP3272906B2 (en) * 1995-05-29 2002-04-08 シャープ株式会社 Gaze direction detecting method and apparatus and man-machine interface apparatus including the same
JP2000266511A (en) * 1999-03-19 2000-09-29 Olympus Optical Co Ltd Inspection device
JP2001305063A (en) * 2000-04-19 2001-10-31 Matsushita Electric Ind Co Ltd Projection device for fine work

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490477B (en) * 2008-03-04 2015-07-01 Kyodo Design & Planning Corp Electronic component inspection method and device used therein
TWI414778B (en) * 2008-10-01 2013-11-11 Kawasaki Heavy Ind Ltd Substrate detection device and method

Also Published As

Publication number Publication date
JP2006170622A (en) 2006-06-29
TWI408361B (en) 2013-09-11

Similar Documents

Publication Publication Date Title
TW200801494A (en) Visual inspection apparatus
TW200745538A (en) Defect inspection apparatus
EP1530123A3 (en) Projector and projector accessory
ATE553692T1 (en) IMAGE CAPTURE METHOD AND IMAGE CAPTURE DEVICE
EP1708513A3 (en) Illumination unit and image projection apparatus employing the same
TW200719077A (en) Digital image capturing device
MY149740A (en) Optical detection device and method for detecting surface of components
ATE546799T1 (en) DEVICE AND METHOD FOR ADJUSTING IMAGE ALIGNMENT
TW200716970A (en) Substrate inspection apparatus
EP2161923A3 (en) Digital camera
JP2005198320A5 (en)
EP1830306A3 (en) Image capturing apparatus having distance measurement function
ATE447879T1 (en) OPHTHALMOSCOPE
EP2458656A3 (en) Light emitting apparatus
EP1580524A3 (en) Method and device for characterising structural damage using moiré shadows
ATE477672T1 (en) PORTABLE ELECTRONIC IMAGE CAPTURE DEVICE
EP2043081A3 (en) Display devices with ambient light sensing
EP1814314A3 (en) Image sensing devices, image sensor modules, and associated methods
NO20075896L (en) Inspection device for superconducting wire and inspection method
ATE385013T1 (en) MONITORING DEVICE
TWI256834B (en) Inspection device for substrate
EP2071399A4 (en) Electronic device, electronic camera, light source device, illuminating device and projector device
WO2007095433A3 (en) Multi-direction image capture apparatus
TW200716944A (en) Apparatus for and method of measuring image
DE602004005708D1 (en) METHOD AND DEVICE FOR RECORDING AND PROCESSING IMAGES OF AN OBJECT, SUCH AS, FOR EXAMPLE A TOOTH

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees