TW200801494A - Visual inspection apparatus - Google Patents
Visual inspection apparatusInfo
- Publication number
- TW200801494A TW200801494A TW95120323A TW95120323A TW200801494A TW 200801494 A TW200801494 A TW 200801494A TW 95120323 A TW95120323 A TW 95120323A TW 95120323 A TW95120323 A TW 95120323A TW 200801494 A TW200801494 A TW 200801494A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- inspection apparatus
- visual inspection
- capturing device
- image capturing
- Prior art date
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
In a visual inspection apparatus of the present invention, a holding stage 2 holds and swings a substrate 1. A light source 3 emits illumination light onto a surface of the substrate 1. An image capturing device 4 captures an image of the substrate 1, generates its image data and outputs it to a control device 6. The image capturing device 4 is arranged at a position near a view point P of an operator. The control device 6 causes an internal memory to store the image data output from the image capturing device 4.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004359113A JP2006170622A (en) | 2004-12-10 | 2004-12-10 | Visual inspection apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200801494A true TW200801494A (en) | 2008-01-01 |
TWI408361B TWI408361B (en) | 2013-09-11 |
Family
ID=36671557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95120323A TWI408361B (en) | 2004-12-10 | 2006-06-07 | Visual inspection apparatus |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2006170622A (en) |
TW (1) | TWI408361B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI414778B (en) * | 2008-10-01 | 2013-11-11 | Kawasaki Heavy Ind Ltd | Substrate detection device and method |
TWI490477B (en) * | 2008-03-04 | 2015-07-01 | Kyodo Design & Planning Corp | Electronic component inspection method and device used therein |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2060907A1 (en) * | 2006-08-28 | 2009-05-20 | I-Pulse Kabushiki Kaisha | Board appearance inspection method and device |
JP2008070238A (en) * | 2006-09-14 | 2008-03-27 | Olympus Corp | Substrate inspection device |
JP5017605B2 (en) * | 2006-10-20 | 2012-09-05 | 株式会社 日立技研 | Visual inspection support device, visual inspection support system, and visual inspection support method |
JP4914761B2 (en) | 2007-05-16 | 2012-04-11 | オリンパス株式会社 | Appearance inspection device |
US8224020B2 (en) | 2007-11-29 | 2012-07-17 | Kabushiki Kaisha Toshiba | Appearance inspection apparatus, appearance inspection system, and appearance inspection appearance |
KR101317982B1 (en) * | 2012-04-04 | 2013-10-14 | 에스피티씨주식회사 | Remote dust measurement system |
JP6142655B2 (en) * | 2013-05-09 | 2017-06-07 | 株式会社島津製作所 | Appearance inspection apparatus and appearance inspection method |
JP6337822B2 (en) * | 2015-04-15 | 2018-06-06 | 株式会社デンソー | Inspection device and program |
CN113330346B (en) * | 2018-06-13 | 2023-06-23 | 奇跃公司 | Light leakage detection of optical device edge sealants |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6015939A (en) * | 1983-07-08 | 1985-01-26 | Hitachi Ltd | Inspecting device for foreign matter |
JPH0685581B2 (en) * | 1990-04-06 | 1994-10-26 | 東京電力株式会社 | Vision sharing device |
JP3272906B2 (en) * | 1995-05-29 | 2002-04-08 | シャープ株式会社 | Gaze direction detecting method and apparatus and man-machine interface apparatus including the same |
JP2000266511A (en) * | 1999-03-19 | 2000-09-29 | Olympus Optical Co Ltd | Inspection device |
JP2001305063A (en) * | 2000-04-19 | 2001-10-31 | Matsushita Electric Ind Co Ltd | Projection device for fine work |
-
2004
- 2004-12-10 JP JP2004359113A patent/JP2006170622A/en not_active Withdrawn
-
2006
- 2006-06-07 TW TW95120323A patent/TWI408361B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI490477B (en) * | 2008-03-04 | 2015-07-01 | Kyodo Design & Planning Corp | Electronic component inspection method and device used therein |
TWI414778B (en) * | 2008-10-01 | 2013-11-11 | Kawasaki Heavy Ind Ltd | Substrate detection device and method |
Also Published As
Publication number | Publication date |
---|---|
JP2006170622A (en) | 2006-06-29 |
TWI408361B (en) | 2013-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |