TW200636230A - Apparatus and method for detection and/or categorization of defected spots - Google Patents
Apparatus and method for detection and/or categorization of defected spotsInfo
- Publication number
- TW200636230A TW200636230A TW095105686A TW95105686A TW200636230A TW 200636230 A TW200636230 A TW 200636230A TW 095105686 A TW095105686 A TW 095105686A TW 95105686 A TW95105686 A TW 95105686A TW 200636230 A TW200636230 A TW 200636230A
- Authority
- TW
- Taiwan
- Prior art keywords
- spots
- defected
- categorization
- detection
- workpiece
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N21/8903—Optical details; Scanning details using a multiple detector array
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The present invention provides an apparatus for inspection, especially for the defect spots on the surface of a workpiece, which is to align the apparatus with a light beam on a workpiece, and at least part of the light beam would be affected by the workpiece, and especially by the defected spots.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200510007715 DE102005007715B4 (en) | 2005-02-18 | 2005-02-18 | Device for detecting defects and use of the device |
DE102005062146 | 2005-12-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200636230A true TW200636230A (en) | 2006-10-16 |
Family
ID=36384461
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095105686A TW200636230A (en) | 2005-02-18 | 2006-02-20 | Apparatus and method for detection and/or categorization of defected spots |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR101332786B1 (en) |
TW (1) | TW200636230A (en) |
WO (1) | WO2006087213A2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI416346B (en) * | 2010-07-27 | 2013-11-21 | Applied Materials Israel Ltd | Defect classification with optimized purity |
TWI503535B (en) * | 2011-11-15 | 2015-10-11 | Mirtec Co Ltd | Noncontact inspection apparatus for light emitting diode |
CN105492862A (en) * | 2013-07-01 | 2016-04-13 | 萨科希瑞斯先进控制有限公司 | Method and device for optical shape recognition and/or examination of an object |
TWI658266B (en) * | 2018-04-03 | 2019-05-01 | 中國鋼鐵股份有限公司 | Method and system for evaluating quality of surface of work roll |
US10705346B2 (en) | 2016-10-11 | 2020-07-07 | Industrial Technology Research Institute | Laser uniformly machining apparatus and method |
TWI786238B (en) * | 2017-12-15 | 2022-12-11 | 南韓商三星顯示器有限公司 | System and method of defect detection on display |
TWI807567B (en) * | 2021-12-30 | 2023-07-01 | 致茂電子股份有限公司 | Multifunctional standard calibration piece and detecting method of optical detecting apparatus |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100890647B1 (en) * | 2008-06-27 | 2009-03-27 | 와이즈플래닛(주) | Particle inspection device using cylindrical lens array and rod lens |
DE102009021136A1 (en) * | 2009-05-13 | 2010-12-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | control device |
NL1039263C2 (en) * | 2011-12-23 | 2013-06-26 | Zevenaar Elektronica & Sensoren B V | DEVICE AND METHOD FOR COUNTING AND MEASURING PARTICLES. |
JP6476580B2 (en) * | 2014-04-21 | 2019-03-06 | 株式会社山梨技術工房 | Flat plate surface condition inspection apparatus and flat plate surface condition inspection method using the same |
KR101694379B1 (en) | 2014-12-29 | 2017-01-09 | 강우성 | Apparatus and Method for automatic sorting of optical lens |
KR101678169B1 (en) * | 2015-05-08 | 2016-11-21 | 주식회사 나노프로텍 | Upper Surface Foreign Matter Detection Device of Ultra-Thin Transparent Substrate |
KR20170133113A (en) * | 2016-05-25 | 2017-12-05 | 코닝정밀소재 주식회사 | Method and apparatus of detecting particles on upper surface of glass, and method of irradiating incident light |
KR102575017B1 (en) | 2016-11-17 | 2023-09-05 | 삼성디스플레이 주식회사 | Detecting method for defect of glass substrate |
CN110672618B (en) * | 2019-09-25 | 2023-03-03 | 上海智觉光电科技有限公司 | System and method for detecting bright surface of part appearance based on multi-angle light source |
CN114088665A (en) * | 2021-11-24 | 2022-02-25 | 广东医科大学 | Optical measurement device for light transmittance detection |
WO2023199265A1 (en) * | 2022-04-15 | 2023-10-19 | 3M Innovative Properties Company | Systems and methods for inspecting a worksurface |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2078535A5 (en) * | 1970-02-16 | 1971-11-05 | British Aircraft Corp Ltd | |
US3814946A (en) * | 1972-12-04 | 1974-06-04 | Asahi Glass Co Ltd | Method of detecting defects in transparent and semitransparent bodies |
FR2500630A1 (en) * | 1981-02-25 | 1982-08-27 | Leser Jacques | METHOD FOR SEARCHING FOR DEFECTS IN GLASS SHEETS AND DEVICE USING SAID METHOD |
DE3534019A1 (en) * | 1985-09-24 | 1987-04-02 | Sick Optik Elektronik Erwin | OPTICAL RAILWAY MONITORING DEVICE |
WO1988009497A1 (en) * | 1987-05-27 | 1988-12-01 | Nippon Sheet Glass Co., Ltd. | Discriminative flaw detector for light-transmissive sheet material |
DE3800053A1 (en) * | 1988-01-04 | 1989-07-13 | Sick Optik Elektronik Erwin | OPTICAL ERROR INSPECTION DEVICE |
GB2219394B (en) * | 1988-05-06 | 1992-09-16 | Gersan Ets | Sensing a narrow frequency band of radiation and examining objects or zones |
DE3926349A1 (en) * | 1989-08-09 | 1991-02-14 | Sick Optik Elektronik Erwin | Optical defect inspection arrangement for flat transparent material - passes light via mirror forming image of illumination pupil on camera lens of photoreceiver |
FR2697086B1 (en) * | 1992-10-20 | 1994-12-09 | Thomson Csf | Method and device for inspecting transparent material. |
JPH10160683A (en) | 1996-11-29 | 1998-06-19 | Matsushita Electric Ind Co Ltd | Foreign object inspection method and device |
GB9812091D0 (en) * | 1998-06-05 | 1998-08-05 | Glaverbel | Defect detecting unit |
CA2252308C (en) * | 1998-10-30 | 2005-01-04 | Image Processing Systems, Inc. | Glass inspection system |
KR20010055184A (en) * | 1999-12-09 | 2001-07-04 | 구자홍 | Optics apparatus for pattern inspection of pdp glass |
US6731384B2 (en) * | 2000-10-10 | 2004-05-04 | Hitachi, Ltd. | Apparatus for detecting foreign particle and defect and the same method |
US6833913B1 (en) * | 2002-02-26 | 2004-12-21 | Kla-Tencor Technologies Corporation | Apparatus and methods for optically inspecting a sample for anomalies |
US6809808B2 (en) * | 2002-03-22 | 2004-10-26 | Applied Materials, Inc. | Wafer defect detection system with traveling lens multi-beam scanner |
-
2006
- 2006-02-17 WO PCT/EP2006/001465 patent/WO2006087213A2/en not_active Application Discontinuation
- 2006-02-17 KR KR1020077021449A patent/KR101332786B1/en active IP Right Grant
- 2006-02-20 TW TW095105686A patent/TW200636230A/en unknown
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI416346B (en) * | 2010-07-27 | 2013-11-21 | Applied Materials Israel Ltd | Defect classification with optimized purity |
TWI503535B (en) * | 2011-11-15 | 2015-10-11 | Mirtec Co Ltd | Noncontact inspection apparatus for light emitting diode |
CN105492862A (en) * | 2013-07-01 | 2016-04-13 | 萨科希瑞斯先进控制有限公司 | Method and device for optical shape recognition and/or examination of an object |
CN110388885A (en) * | 2013-07-01 | 2019-10-29 | 萨科希瑞斯先进控制有限公司 | For optically SHAPE DETECTION and/or the method and apparatus for checking object |
CN105492862B (en) * | 2013-07-01 | 2021-08-10 | 萨科希瑞斯先进控制有限公司 | Method and device for optically detecting the shape of and/or inspecting an object |
US10705346B2 (en) | 2016-10-11 | 2020-07-07 | Industrial Technology Research Institute | Laser uniformly machining apparatus and method |
TWI786238B (en) * | 2017-12-15 | 2022-12-11 | 南韓商三星顯示器有限公司 | System and method of defect detection on display |
TWI658266B (en) * | 2018-04-03 | 2019-05-01 | 中國鋼鐵股份有限公司 | Method and system for evaluating quality of surface of work roll |
TWI807567B (en) * | 2021-12-30 | 2023-07-01 | 致茂電子股份有限公司 | Multifunctional standard calibration piece and detecting method of optical detecting apparatus |
Also Published As
Publication number | Publication date |
---|---|
WO2006087213A3 (en) | 2007-03-29 |
WO2006087213A2 (en) | 2006-08-24 |
KR20070107773A (en) | 2007-11-07 |
KR101332786B1 (en) | 2013-11-25 |
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