KR20010055184A - Optics apparatus for pattern inspection of pdp glass - Google Patents

Optics apparatus for pattern inspection of pdp glass Download PDF

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KR20010055184A
KR20010055184A KR1019990056298A KR19990056298A KR20010055184A KR 20010055184 A KR20010055184 A KR 20010055184A KR 1019990056298 A KR1019990056298 A KR 1019990056298A KR 19990056298 A KR19990056298 A KR 19990056298A KR 20010055184 A KR20010055184 A KR 20010055184A
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glass substrate
pattern
illuminator
defect
image
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황보준도
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구자홍
엘지전자 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: An optical instrument for inspecting pattern of a glass substrate is provided to reduce time for confirming a defect of the pattern by removing a defect which is not a real defect and erroneously judged as a defect, by obtaining the defect shown on the upper surface of the glass substrate as an image, thereby improving the efficiency of the inspection. CONSTITUTION: An optical instrument for inspecting pattern of a glass substrate(G) includes an illuminator(20) installed at the right angle with the glass substrate for radiating light, and a camera(30) installed at the predetermined angle from the illuminator to obtain upper surface image of the glass substrate, wherein the installation angle of the camera is clockwise 45°from the illuminator or counterclockwise 45°from the illuminator.

Description

유리기판의 패턴 검사용 광학 장치{OPTICS APPARATUS FOR PATTERN INSPECTION OF PDP GLASS }OPTICS APPARATUS FOR PATTERN INSPECTION OF PDP GLASS}

본 발명은 PDP(Plasma Display Panel),LCD(Liquid Crystal Display) 등과 같은 디스플레이의 유리표면상에 형성된 패턴의 결함을 검사하는 것에 관한 것으로서, 특히, 검사장치의 구성을 개선하여 실제 패턴 결함이 아니지만 결함으로 판정한 가성 결함을 줄여 결함을 확인하는 시간을 단축하고, 검사의 신뢰성을 높이는 유리기판의 패턴 검사용 광학 장치에 관한 것이다.The present invention relates to inspecting a defect of a pattern formed on a glass surface of a display, such as a plasma display panel (PDP), a liquid crystal display (LCD), and the like. The present invention relates to an optical device for pattern inspection of a glass substrate, which reduces the caustic defects determined to be shortened, shortens the time for identifying the defects, and increases the reliability of the inspection.

일반적으로 LCD, PDP등과 같은 디스플레이는 유리 표면상에 패턴을 형성하고 화소를 구성하여 영상을 표시하는 장치이다.In general, displays such as LCDs and PDPs are devices that display images by forming a pattern on a glass surface and forming pixels.

LCD는 초기에 소형 정보 단말기등에서 소규모로 표시장치로 활용되던 것이 최근에는 TV, MONITOR등으로 활용되기 시작하면서 대형화, 고세밀화가 요구되고 있다. 특히 PDP디스플레이 제품은 40인치(대각기준) 이상의 대면적 제품부터 시작하여 최근에는 60인치 이상, HDTV급으로 시장에 나타나고 있는 실정이다.LCDs, which were initially used as small display devices in small information terminals, have recently been used as TVs and monitors, and are required to be enlarged and highly detailed. In particular, PDP display products start with large-area products larger than 40 inches (diagonal basis), and have recently appeared in the market as 60-inch and larger HDTV class.

LCD, PDP를 이용한 최종 제품, 예를 들어 TV, MONITOR는 회로, 샤시, 디스플페이모듈로 구분할 수 있다. 특히, 디스플레이 모듈은 그 공정이 매우 복잡하고 단위 공정마다 불량이 발생할 경우 수리가 불가능하여 유입된 불량의 확인은 빨라야 디스플레이모듈로서 완성되었을 때 확인이 되므로 단위 공정마다의 검사는 필수적이다.Final products using LCD and PDP, such as TV and MONITOR, can be divided into circuit, chassis, and display module. In particular, since the display module is very complicated and cannot be repaired when defects occur in each unit process, it is impossible to repair the defects when the display module is confirmed as a display module.

특히 모듈 공정에서 유리기판 위에 형성하는 각종 패턴들의 결함의 정도가 화질결함으로 바로 이어지기 때문에 공정별 패턴 검사의 중요성은 매우 높아 국내외 제조 업체들은 CCD카메라를 이용한 광학적 검사장치(10)를 이용하여 패턴(P)의 이상 유무를 검사한다.In particular, since the degree of defects of various patterns formed on the glass substrate in the module process leads directly to image quality defects, the importance of pattern inspection by process is very high. Domestic and overseas manufacturers use the optical inspection apparatus 10 using a CCD camera to pattern the defects. Check for any abnormalities in (P).

상기 광학적 검사장치(10)의 구성은 도 2에 도시한 바와 같이 검사기본체(11)와, 상기 검사기본체(11)의 상측에 설치되어 PDP유리기판(G)을 올려놓는 거치대(13)와, 상기 거치대(13)면과 수직된 위치에 소정의 거리를 두고 설치되어 이미지를 만들어 이미지를 맺는 CCD카메라(15)와, 이미지 획득을 위해 빛을 조사시키는 조명기(17)로 이루어져 있다.As shown in FIG. 2, the optical inspection apparatus 10 includes an inspection main body 11, a holder 13 installed on an upper side of the inspection main body 11 and placing a PDP glass substrate G on the inspection main body 11. CCD camera 15 is installed at a position perpendicular to the surface of the holder 13 to form an image to form an image, and an illuminator 17 that irradiates light for image acquisition.

상기 광학적 검사장치(10)에 의해 검출된 패턴(P) 결함의 크기는 최소 10㎛ 수준이다.(도 3의 О표시부 참조)The size of the pattern P defect detected by the optical inspection device 10 is at least 10 μm.

한편, 상기 광학적 검사장치(10)를 통해서 검출된 결함은 공정에서 검사원에 의해 다시 한번 확인하여 실제 결함만을 걸러 내는데. 이때 광학적 검사장치(10)가 결함으로 판정한 것 중 70 ~ 80%정도는 패턴(P)의 결함이 아니고, 먼지나 이물 또는 검사대상(PDP유리기판)이 유리이기 때문에 검사표면이 아닌 유리 밑면에 생성된 흠집, 거치대(13)의 기구물들이 PDP유리기판(G)을 통해 CCD카메라(15)에 상으로 맺힘으로써 PDP유리기판(G) 표면의 패턴(P) 결함으로 잘못 인식하게 된다.(도 3참조)On the other hand, the defect detected through the optical inspection device 10 to check again by the inspector in the process to filter out only the actual defect. At this time, about 70 to 80% of what the optical inspection device 10 judges as a defect is not a defect of the pattern P, and since the dust or foreign material or the inspection target (PDP glass substrate) is glass, the bottom of the glass is not the inspection surface. Scratches and fixtures generated in the cradle 13 are formed on the CCD camera 15 through the PDP glass substrate G to be mistaken for a pattern P defect on the surface of the PDP glass substrate G. 3)

그런데, 이러한 결함(실제 결함이 아닌데 결함으로 판정한 결함)은 40인치 판넬 기준으로 500 ~ 1000점 정도 됨으로 검사원이 확인하는 데 소요되는 시간도 1 ~ 2시간 정도이므로 양산 공정에서 문제가 되고 있다.By the way, such defects (defects determined as defects but not actual defects) are about 500 to 1000 points on a 40-inch panel basis, which is a problem in the mass production process since the time required for the inspector is about 1 to 2 hours.

또한, 실제 결함(패턴(P) 결함)이 PDP유리기판(G) 밑면의 흠집 등과 같은 부분과 어울릴 경우 검사원도 놓칠 가능성이 있으므로 불량이 후 공정으로 이어 질수 있는 문제도 있다(도 4참조).In addition, when the actual defect (pattern P defect) is matched with a part such as a scratch on the bottom of the PDP glass substrate G, there is a possibility that the inspector may be missed, so there is a problem that the defect may lead to a later process (see FIG. 4).

이를 해결하기 위하여 종래의 기술은 렌즈의 초점 심도를 얕게 하여 관심영역 즉, PDP유리기판(G) 상면에만 렌즈 초점이 맺히게 하여 PDP유리기판(G) 하면의 영상이 CCD카메라(15)에 상으로 맺히지 않도록 하였다.In order to solve this problem, the related art makes the depth of focus of the lens shallow so that the lens focuses only on the upper surface of the PDP glass substrate G so that the image of the lower surface of the PDP glass substrate G is reflected onto the CCD camera 15. It was not formed.

그러나, 상기와 같이 적용된 종래의 기술에서는 PDP유리기판(G) 하면의 영상이 흐리게 얻어지지 완전히 없어지지는 못하므로 상술한 문제점을 근본적으로 해결 하지 못한다는 문제점이 있었다.(도 5 참조)However, the conventional technology applied as described above has a problem that the image of the lower surface of the PDP glass substrate G is not blurred and cannot be completely eliminated.

본 발명은 상기한 문제점을 해결하기 위하여 안출 된 것으로서, 본 발명의 목적은 광학적 검사장치를 개선하여 실제 결함이 아니지만 결함으로 판정되는 가성결함을 줄임으로서, 검사 신뢰성을 높이고, 결함을 확인하는 시간을 단축하여 검사효율을 향상시키는 유리기판의 패턴 검사용 광학 장치를 제공하는 데 있다.The present invention has been made to solve the above problems, an object of the present invention is to improve the optical inspection apparatus to reduce the false defects that are determined as defects, but not the actual defects, thereby increasing the inspection reliability, time to check the defects The present invention provides an optical device for pattern inspection of a glass substrate that shortens and improves inspection efficiency.

도 1은 일반적인 패턴 검사를 위한 광학 장치의 원리를 나타낸 원리도,1 is a principle diagram showing the principle of an optical device for a general pattern inspection;

도 2는 일반적인 패턴 검사를 위한 광학 장치의 구성을 도시한 구성도,2 is a block diagram showing the configuration of an optical device for a general pattern inspection;

도 3은 일반적인 패턴 검사장치에 의해 획득된 영상을 도시한 영상 구성도,3 is an image configuration diagram showing an image obtained by a general pattern inspection apparatus;

도 4는 일반적인 패턴 검사장치에 의해 획득된 영상을 도시한 영상 구성도,4 is an image configuration diagram showing an image obtained by a general pattern inspection apparatus;

도 5는 종래의 패턴 검사장치에 의해 획득된 영상을 도시한 영상 구성도,5 is an image configuration diagram showing an image obtained by a conventional pattern inspection apparatus;

도 은는 본 발명의 일 실시 예에 의한 패턴 검사를 위한 광학 장치의 원리를 도시한 원리도,FIG. Is a principle diagram illustrating a principle of an optical device for pattern inspection according to an embodiment of the present disclosure; FIG.

도 7은 본 발명의 일 실시 예에 의한 패턴 검사를 위한 광학 장치의 구성을 도시한 구성도,7 is a configuration diagram showing a configuration of an optical device for pattern inspection according to an embodiment of the present invention;

도 8은 본 발명의 일 실시 예에 의한 패턴 검사 장치에 의해 획득된 영상 상태의 결과를 도시한 영상 상태 결과도이다.8 is an image state result diagram illustrating a result of an image state obtained by the pattern inspection apparatus according to an exemplary embodiment.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

20 : 조명기 30 : 카메라20: illuminator 30: camera

G : PDP유리기판G: PDP Glass Substrate

상기한 과제를 실현하기 위한 본 발명에 따른 유리기판의 패턴 검사용 광학 장치는 유리기판의 패턴을 검사하는 장치에 있어서, 상기 유리기판과 수직된 위치에 설치되어 빛을 조사하는 조명기와, 상기 유리기판의 상면의 이미지만 얻도록 상기 조명기로부터 소정의 각도로 설치된 카메라를 포함하는 것을 특징으로 한다.Optical apparatus for inspecting a pattern of a glass substrate according to the present invention for realizing the above object is an apparatus for inspecting the pattern of the glass substrate, the illuminator installed at a position perpendicular to the glass substrate and irradiating light, the glass And a camera installed at a predetermined angle from the illuminator so as to obtain only an image of the upper surface of the substrate.

이하, 첨부된 도면 도 6 내지 도 8을 참조하여 본 발명의 일 실시 예를 설명한다.Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

도 6은 본 발명의 일 실시 예에 의한 패턴 검사를 위한 광학 장치의 원리를도시한 원리도를 나타내고, 도 7은 본 발명의 일 실시 예에 의한 패턴 검사를 위한 광학 장치의 구성을 도시한 구성도를 나타내고, 도 8은 본 발명의 일 실시 예에 의한 패턴 검사 장치에 의해 획득된 영상 상태의 결과를 도시한 영상 상태 결과도를 나타낸다.6 illustrates a principle diagram illustrating a principle of an optical apparatus for pattern inspection according to an embodiment of the present invention, and FIG. 7 illustrates a configuration of an optical apparatus for pattern inspection according to an embodiment of the present invention. 8 is a diagram illustrating an image state result diagram showing a result of an image state obtained by a pattern inspection apparatus according to an exemplary embodiment.

도면에 도시 한 바와 같이 본 발명의 일 실시 예에 의한 유리기판 패턴 검사용 광학 장치는 상면에 PDP유리기판(G)을 안착시키는 거치대(11)와, 상기 거치대(11)의 면과 수직된 방향으로 소정의 거리를 두고 설치된 조명기(20)와, 상기 조명기(20)와 소정의 각도(α。)로 회전된 위치에 설치되어 상기 조명기(20)에 의해 입사되어 나오는 광에 의해 상을 만들어 획득하는 CCD카메라(30)로 이루어져 있다.As shown in the drawing, the optical apparatus for inspecting a glass substrate pattern according to an embodiment of the present invention includes a holder 11 for mounting a PDP glass substrate G on an upper surface thereof, and a direction perpendicular to the surface of the holder 11. The illuminator 20 installed at a predetermined distance with the illuminator 20 and the illuminator 20 is rotated at a predetermined angle α. The image is generated by the light incident by the illuminator 20. It consists of a CCD camera 30.

상기 CCD카메라(30)는 상기 PDP유리기판(G)의 상면에서 반사되어 나오는 광만 맺히도록 조명기(20)로부터 시계방향으로 45。 회전된 위치 또는 반시계방향으로 45。 회전된 위치에 설치되어 있다.The CCD camera 30 is installed at a position rotated 45 ° clockwise from the illuminator 20 or 45 ° rotated counterclockwise so that only light reflected from the upper surface of the PDP glass substrate G is formed. .

다음은 상술 한 바와 같이 구성된 본 발명의 일 실시 예에 의한 유리기판 패턴 검사용 광학 장치의 작용에 대해서 설명한다.Next, the operation of the optical apparatus for inspecting a glass substrate pattern according to an embodiment of the present invention configured as described above will be described.

먼저, 조명기(20)로부터 입사되는 광은 PDP유리기판(G)의 상면 및 하면을 통하여 반사되어 나오게 되는 데, 이때, 상기 PDP유리기판(G)의 상면(A표시부)에서 반사되는 광만 CCD카메라(30)를 통과하여 이미지를 획득한다.First, the light incident from the illuminator 20 is reflected through the upper and lower surfaces of the PDP glass substrate G. In this case, only the light reflected from the upper surface (the A display portion) of the PDP glass substrate G is detected. Pass 30 to acquire an image.

즉, PDP회로기판(G)의 하면(B표시부)에서 반사되어 나오는 광은 상기 PDP회로기판(G)의 두께(T)만큼 거리 차가 생겨 CCD카메라(30)의 위치로부터 벗어나게 되어 이미지 획득이 불가하다.That is, the light reflected from the lower surface (B display portion) of the PDP circuit board G is separated by the distance T by the thickness T of the PDP circuit board G, which is out of the position of the CCD camera 30, thereby making it impossible to acquire an image. Do.

한편, 거치대(11)의 (C표시부)에서는 조명이 가해지지 않으므로 이 부분의 오염등은 영상획득에 영향을 주지 않는다.On the other hand, since the illumination is not applied to the (C display portion) of the holder 11, contamination of this portion does not affect image acquisition.

상기한 내용은 도 8을 통해서도 확실하게 확인 할 수 있다. 도면에 도시한 바와 같이 PDP유리기판(G)의 하면이 오염된 상태나 오염되지 않은 상태와 상관 없이 획득영상에는 아무런 영향을 주지 않는다는 것을 확실히 알 수 있다.The above contents can be reliably confirmed through FIG. 8. As shown in the figure, it can be clearly seen that the lower surface of the PDP glass substrate G has no effect on the acquired image regardless of the contaminated or uncontaminated state.

상술한 바와 같은 본 발명에 의한 유리기판의 패턴 검사용 광학 장치에 의하면, 광원을 PDP유리기판의 수직된 방향에 설치하고, 카메라를 상기 PDP유리기판의 45。 방향에 설치함에 따라 상기 PDP유리기판의 상면에서 반사되는 광만이 카메라를 통과하여 이미지 획득이 되도록 함에 따라 PDP유리기판의 상면에 있는 결함만을 이미지로 획득함으로서, 가성 결함(실제 결함이 아닌데 결함으로 판단한 결함)을 없애게 되어 패턴의 결함을 확인하는 시간을 단축 시켜 검사효율을 높이는 이점이 있다.According to the optical device for pattern inspection of a glass substrate according to the present invention as described above, the light source is installed in the vertical direction of the PDP glass substrate, and the camera is installed in the 45 ° direction of the PDP glass substrate. Since only the light reflected from the upper surface of the camera passes through the camera to acquire the image, only the defect on the upper surface of the PDP glass substrate is acquired as an image, thereby eliminating false defects (defects that are determined as defects, not actual defects). Shorten the time to check the advantage of increasing the inspection efficiency.

Claims (2)

유리기판의 패턴을 검사하는 장치에 있어서,In the device for inspecting the pattern of the glass substrate, 상기 유리기판과 수직된 위치에 설치되어 빛을 조사하는 조명기와,An illuminator installed at a position perpendicular to the glass substrate to irradiate light; 상기 유리기판의 상면의 이미지만 얻도록 상기 조명기로부터 소정의 각도로 설치된 카메라를 포함하는 것을 특징으로 하는 유리기판의 패턴 검사용 광학 장치.And a camera installed at a predetermined angle from the illuminator so as to obtain only an image of the upper surface of the glass substrate. 제 1항에 있어서,The method of claim 1, 상기 카메라의 설치 각도는 상기 조명기로부터 시계방향으로 45。 회전된 위치 또는 반시계방향으로 45。 회전된 위치에 설치된 것을 특징으로 하는 유리기판의 패턴 검사용 광학장치.The installation angle of the camera is an optical device for pattern inspection of a glass substrate, characterized in that installed in the position rotated 45 ° clockwise or counterclockwise from the illuminator.
KR1019990056298A 1999-12-09 1999-12-09 Optics apparatus for pattern inspection of pdp glass Ceased KR20010055184A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020015517A (en) * 2000-08-22 2002-02-28 박원재 Capping testing system of vessel
KR100838655B1 (en) * 2006-10-27 2008-06-16 (주)쎄미시스코 Quality inspection device of glass substrate and inspection method
JP2013040915A (en) * 2011-08-18 2013-02-28 Samsung Corning Precision Materials Co Ltd Surface defect inspection device and inspection method for glass substrate
KR101332786B1 (en) * 2005-02-18 2013-11-25 쇼오트 아게 Method and apparatus for detecting and/or classifying defects
US10067067B2 (en) 2015-09-09 2018-09-04 Samsung Electronics Co., Ltd. Substrate inspection apparatus
KR20190085634A (en) * 2018-01-11 2019-07-19 주식회사 에이치비테크놀러지 Top pattern inspection device of light guide plate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020015517A (en) * 2000-08-22 2002-02-28 박원재 Capping testing system of vessel
KR101332786B1 (en) * 2005-02-18 2013-11-25 쇼오트 아게 Method and apparatus for detecting and/or classifying defects
KR100838655B1 (en) * 2006-10-27 2008-06-16 (주)쎄미시스코 Quality inspection device of glass substrate and inspection method
JP2013040915A (en) * 2011-08-18 2013-02-28 Samsung Corning Precision Materials Co Ltd Surface defect inspection device and inspection method for glass substrate
KR101324015B1 (en) * 2011-08-18 2013-10-31 바슬러 비전 테크놀로지스 에이지 Apparatus and method for detecting the surface defect of the glass substrate
US10067067B2 (en) 2015-09-09 2018-09-04 Samsung Electronics Co., Ltd. Substrate inspection apparatus
KR20190085634A (en) * 2018-01-11 2019-07-19 주식회사 에이치비테크놀러지 Top pattern inspection device of light guide plate

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