TW200426306A - Control device for vacuum pump - Google Patents

Control device for vacuum pump Download PDF

Info

Publication number
TW200426306A
TW200426306A TW092135682A TW92135682A TW200426306A TW 200426306 A TW200426306 A TW 200426306A TW 092135682 A TW092135682 A TW 092135682A TW 92135682 A TW92135682 A TW 92135682A TW 200426306 A TW200426306 A TW 200426306A
Authority
TW
Taiwan
Prior art keywords
vacuum pump
load torque
increase
electric motor
vacuum
Prior art date
Application number
TW092135682A
Other languages
English (en)
Chinese (zh)
Inventor
Masahiro Kawaguchi
Shinya Yamamoto
Daisuke Sato
Ryosuke Koshizaka
Satoru Kuramoto
Original Assignee
Toyota Jidoshokki Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Jidoshokki Kk filed Critical Toyota Jidoshokki Kk
Publication of TW200426306A publication Critical patent/TW200426306A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW092135682A 2002-12-18 2003-12-17 Control device for vacuum pump TW200426306A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002366856A JP2004197644A (ja) 2002-12-18 2002-12-18 真空ポンプの制御装置

Publications (1)

Publication Number Publication Date
TW200426306A true TW200426306A (en) 2004-12-01

Family

ID=32763933

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092135682A TW200426306A (en) 2002-12-18 2003-12-17 Control device for vacuum pump

Country Status (6)

Country Link
US (1) US20050031468A1 (ja)
JP (1) JP2004197644A (ja)
KR (1) KR20040054577A (ja)
CN (1) CN1514133A (ja)
DE (1) DE10359270A1 (ja)
TW (1) TW200426306A (ja)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0502149D0 (en) 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
DE102008062054B4 (de) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
DE102009017887A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Grobpumpverfahren für eine Verdrängerpumpe
DE102009024336A1 (de) * 2009-06-09 2010-12-23 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
WO2011052675A1 (ja) * 2009-10-29 2011-05-05 株式会社アルバック ポンプユニット，ロードロックチャンバの排気装置，及び真空装置
WO2012042800A1 (ja) * 2010-09-28 2012-04-05 株式会社アルバック ロードロック装置、排気制御装置及びロードロック装置の動作方法
DK2479886T3 (en) * 2011-01-19 2017-02-13 Kih-Utveckling Ab Method for controlling the operation of an electric motor in a height-adjustable furniture device
US9080576B2 (en) * 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
GB2492065A (en) * 2011-06-16 2012-12-26 Edwards Ltd Noise reduction of a vacuum pumping system
CN104302922B (zh) * 2012-06-28 2017-08-08 斯特林工业咨询有限公司 用于排空腔室的泵装置和方法
CN102777371B (zh) * 2012-07-19 2015-11-25 奇瑞汽车股份有限公司 一种车用真空泵的耐久性试验机构及其耐久性试验方法
JP6050081B2 (ja) * 2012-10-05 2016-12-21 株式会社荏原製作所 ドライ真空ポンプ装置
TWI525254B (zh) * 2012-11-19 2016-03-11 財團法人工業技術研究院 一種防止失速控制的真空設備
DE102013223276A1 (de) * 2013-11-14 2015-05-21 Oerlikon Leybold Vacuum Gmbh Regelungsverfahren für einen Hochlauf einer Vakuumpumpe
DE102016223782A1 (de) * 2016-11-30 2018-05-30 Leybold Gmbh Verfahren zum Betreiben eines Vakuumpumpensystems
JP6841201B2 (ja) * 2017-10-06 2021-03-10 株式会社島津製作所 ガス推定装置および真空排気装置
JP7019513B2 (ja) * 2018-06-05 2022-02-15 株式会社荏原製作所 制御装置、制御システム、制御方法、プログラム及び機械学習装置
BR102019003311B1 (pt) * 2019-02-18 2023-12-12 Embraco Indústria De Compressores E Soluções Em Refrigeração Ltda Método e sistema de controle em um sistema de refrigeração e compressor de sistema de refrigeração
CN110932643A (zh) * 2019-12-11 2020-03-27 深圳市英威腾电气股份有限公司 变频器控制方法、装置、存储介质及变频器
CN110932644B (zh) * 2019-12-11 2021-12-24 深圳市英威腾电气股份有限公司 变频器控制方法、装置、存储介质及变频器
JP7186740B2 (ja) * 2020-03-17 2022-12-09 株式会社東芝 Ｄｃブラシモータの駆動装置、及び駆動方法
CN114370730A (zh) * 2020-10-15 2022-04-19 海信（山东）冰箱有限公司 冰箱
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5076763A (en) * 1984-12-31 1991-12-31 Rule Industries, Inc. Pump control responsive to timer, delay circuit and motor current
JP2000110735A (ja) * 1998-10-01 2000-04-18 Internatl Business Mach Corp <Ibm> ポンプ保護装置、ポンプ保護方法及びポンプ装置
DE19931961A1 (de) * 1999-07-12 2001-02-01 Danfoss As Verfahren zur Regelung einer Fördergröße einer Pumpe

Also Published As

Publication number Publication date
JP2004197644A (ja) 2004-07-15
CN1514133A (zh) 2004-07-21
DE10359270A1 (de) 2004-09-02
KR20040054577A (ko) 2004-06-25
US20050031468A1 (en) 2005-02-10

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