200410888 (1) 玖、發明說明 【發明所屬之技術領域】 本發明係關於板狀體的運送裝置。 【先前技術】 在玻璃基板、使用玻璃基板之液晶面板、太陽電池面 板等的薄板狀體之運送，從以往使用有帶式運送機、滾子 運送機、輪式運送機等運送裝置，使用輪式運送機之玻璃 基板等的薄板狀體之運送裝置的過去之一例，係被顯示在 圖9〜圖1 3。然而，運送裝置，係如圖1 2所示，以平面視將 對薄板狀體運送方向D正交的方向以一定的間隔配置之多 數列的輸式運送機a，對薄板狀體運送方向D平行的方向備 有多數組。 各輪式運送機a，係如在圖9〜圖1 1所示，備有框b、和 在該框體b向與薄板狀體運送方向D平行的方向以一定間 隔被配置之比較窄的多數之被水平配置的輪子c，雖然輪子 c未被圖示，但是成爲能夠藉由過去眾所周知之驅動裝置以 同一周速度被驅動。 然後，如在圖12所示，在對於薄板狀體運送方向D的上 游側的多數列之輪式運送機a的在薄板狀體運送方向D下游 端之輪子c、和對薄板狀體運送方向D下游側的多數列的輪 式運送機a的薄板狀體運送方向D上游端之輪子c，雖然互相 地朝軸線方向鄰接的方式，被配置在同軸線上，此係，爲了 使薄板狀體e在運送時能從上游側的輪式運送機a順利地換乘 -5- (2) (2)200410888 到下游側之輪式運送機a的方式。 將薄板狀體e運送時，輪式運送機a的輪子c係全部被驅 動而旋轉。因此’被移送至上游側的輪式運送機a之薄板狀 體e是在上游側的輪式運送機a備運送而移送至下游側之輪式 運送機a，藉由下游側的輪式運送機a再行運送。 作爲運送薄板狀體的其他之運送裝置之側，有如日本開 平9 - 278 1 8 1號公報所揭示的運送裝置。在該運送裝置，將 薄板狀體的沿著運送方向之兩端附近支持，同時備有將薄板 狀體向下游方向運送之水平滾子。 然而，在圖9〜圖13顯示的運送裝置時，薄板狀體e之前 端部，係向薄板狀體運送方向D移動而成爲不被輪子c支持 的單邊支持狀態時，藉由自重而向下方彎曲，因此，薄板狀 體e之前端是在換乘至薄板狀體運送方向D下游側的下一個 輪子c時，將會抵接在輪子c之外周面而振動，結果，有對薄 板狀體e施予不良影響之虞。 並且，在薄板狀體e的前端換乘至下游側之輪子c時，抵 接到該輪子c，薄板狀體e是受到從下游側的輪子c來的力量 ，結果，薄板狀體e有移位而蛇行之虞，因此在過去的運送 裝置是必須要製作成爲了防止蛇行的側引導。 而且，在輪子c的外周面有灰塵附著時，在薄板狀體e也 有附著灰麈之虞。 在日本特開平9 - 278 1 8 1號公報顯示的運送裝置，係將 多孔質構件配置在左右的滾子之間位於供氣片的上方’從多 孔質構件在薄板體體下面供給空氣，而使灰塵不會附*著在薄 -6- 200410888 - 、 * # (3) 板狀體下面。然而，薄板狀體的前端換乘至下游側之滾子時 ，將與在圖9〜圖1 3所示的運送裝置一樣，會抵接在滾子之外 周面。因此，薄板狀體會藉由振動受到不良影響，或有蛇行 之虞或者防止蛇行將需要側引導，係與圖9〜圖13的運送裝置 時一樣。 本發明，係有鑑於如此之實際情況，其目的係減輕薄板 狀體的運送時之振動，同時防止蛇行，而且，提供對薄板狀 體無灰塵附著之虞的板狀體之運送裝置。 【發明內容】 根據本發明之板狀體的運裝置，係備有在板狀體運送 方向隔著間隔被配置之在旋轉體被捲掛成能夠驅動的無端 狀之帶狀體或繩狀體，及向與該帶狀體或繩狀體的板狀體 運送方向平行之方向隔著間隔被安裝且使之能在運送側支 持板狀體的支持體。 在根據本發明之板狀體的運送裝置，能以平面視將前 述帶狀體或繩狀體對板狀體運送方向正交之方向配置多數 列。 在根據本發明之板狀體的運送裝置，能以平面視將前 述帶狀體或繩狀體對板狀體運送方向平行之方向配置多數 組。 在根據本發明之板狀體的運送裝置，上游側之狀體或 繩狀體的板狀體運送方向下游側之部份，和下游側的帶狀 體或繩狀體之板狀體運送方向上游側的部份，能以側面視 -7- (4) (4)200410888 配置成重疊的方式。 在根據本發明之板狀體的運送裝置，能使前述旋轉體 及帶狀體或繩狀體，在該帶狀體或繩狀體所安裝的支持體 之運送側的頂部以向上方突出的方式，以被覆體覆蓋。 在根據本發明之板狀體的運送裝置，能設置進行前述 被覆體內的排氣之排氣裝置。 根據本發明之板狀體的運送裝置的話，因能減輕在運 送時的板狀體之振動，同時防止蛇行，故將不會由於運送 而波及對板狀體有不良影響，且能將品質保持良好，而且 因不需要側引導，故能降低設備費，並且，爲了藉由排氣 裝置將框體內排氣的方式，故能減低在帶狀體或繩狀體安 裝的板狀體之支持體附著灰塵，結果，減低灰塵附著在板 狀體之虞，而減輕損害其品質之虞。 【實施方式】 以下，參照附圖說明本發明之實施例。 圖〗〜圖8係顯示本發明的一實施例。 在圖1〜圖4，1係運送裝置本體，運送裝置本體1，係 備有向與薄板狀體運送方向D平行的方向延在之框體2。 框體2，係被形成將底面及兩側面以及前後面以板狀的被 覆體被覆蓋之直方體狀，在上面有對於長度方向遍及大致 全長之開口 2 a。 在框體2內的薄板狀體運送方向D上游端及下游端附· 近’水平設置有滑車3、4，在滑車3、4是架設有以無端狀 (5) (5)200410888 並且狹窄之皮帶5。在皮帶5的表面是安裝有在運送側的頂 部側於從開口 2 a稍向上方突出而運送的薄板狀體6之下面 可支持的方式之突起狀支持體7。突起狀支持體7係例如以 樹脂製，其頂部係如圖5所示，形成呈半圓形。做成如此 ，係爲了防止在薄板狀體6之被支持部份受傷或附著灰塵 〇 外嵌；固定有滑車3、4的軸8、9，係例如在框體2之 外側部設置的軸承被旋轉自如地支持，軸8或9係成爲藉由 以往眾所周知之驅動裝置而旋轉驅動的方式。然後’藉由 驅動軸8或9，皮帶5將經由滑車3、4轉動，成爲藉由皮帶5 的轉動而突起狀支持體7可移動的方式。圖1中，1 〇係用來 將框體2內的空氣排氣用之排風機等的排氣裝置。 上述運送裝置本體1，係如圖6所示，以平面視，對於 薄板狀體運送方向D正交的方向以預定之間隔配置成多數 列，多數列的運送裝置本體1係對於薄板體運送方向D配 置成多數組，所有的運送裝置全體1之突起狀支持體7的上 端係位於同一平面上。 然後，對於薄板狀體運送方向D，上游側的運送裝置 本體1之下游側端部與下游側的運送裝置本體1之上游側端 部，係如圖6所示，互相在寬度方向相鄰接而配置成套匣 狀，成爲在上游側的運送裝置本體1之前端的滑車3和在下 游側的運送裝置本體1之後端的滑車4之軸線是位於同一線 上。於是，以側面視，在上游側的運送裝置本體1之前端 的滑車3和在下游側之運送裝置本體1的後端之滑車4，皮 -9- (6) (6)200410888 帶5的一部份係成爲重疊的方式。 作爲如此，係進行使上游側的前端部之突起狀支持體 7和下游側的後端部之突起狀支持體7之間的薄板狀體運送 方向D之間隔不會變大的方式，薄板狀體6從上游側的運 送裝置本體1換乘至下游側之運送裝置本體1時，雖然藉由 皮帶5的轉動來下降之上游側前端的突起狀支持體7，但是 即使從薄板狀體6之前端部下面脫離，進行藉由薄板狀體6 前端部的自重來使彎曲不會變大的方式，使之順利地被支 持在藉由下游側後端部5的轉動而上升來之突起狀支持體7 〇 接著，說明上述實施例的動作。 在將薄板狀體6運送時，所有的運送裝置本體1係被驅 動，因此，在運送側，突起狀支持體7係與皮帶5 —起向薄 板狀體運送方向D移動，另外，所有的框體2內，係藉由 排氣裝置10排氣。 上游側的多數列之運送裝置本體1所移送的薄板狀體6 ，係上游側之運送裝置本體1的突起狀支持體7所支持而與 突起狀支持體7 —起向薄板狀體運送方向D下游側運送， 從上游側的多數列之運送裝置本體1換乘至下游側的多數 列之運送裝置本體1，下游側的多數列之運送裝置本體1的 突起狀支持體7所支持而與突起狀支持體7—起向薄板狀體 搬運方向D下游側運送。 另外，藉由上游側的多數列之運送裝置本體1運送的 薄板狀體6換乘至下游側之多數列的運送裝置本體1時，在 (7) (7)200410888 上游側運送裝置本體1的突起狀支持體7，係雖然藉由向伴 隨在前端部的滑車3之旋轉的皮帶5的下方之轉動來下降而 從薄板狀體6的下面離開，可是大致同時地在下游側之運 送裝置本體1的突起狀支撐體7，藉由向伴隨在後端部的滑 車4之旋轉的皮帶5的上方的轉動來上升而在薄板狀體6之 下面支持。 因此，在運送時，薄板狀體6係將突起狀支持體7所支 持而與突起狀支持體7—起向薄板狀體運送方向D移動， 薄板狀體6係對於突起狀支持體7不會偏位。結果，將會減 輕薄板狀體6運送時的振動，同時在薄板狀體6不會產生蛇 行。因此，不會由於運送而使薄板狀體6承受不良影響， 能將品質保持良好，同時因不需要側引導，而可減低設備 費。 另外，藉由利用排氣裝置1 0的框體2內之排氣，將會 減低灰塵附著在皮帶5或突起狀支持體7之虞，將減輕灰塵 附著在薄板狀體6而損害品質之虞。 而且，在本發明的板狀體之運送裝置，在不超出本發 明的要旨之範圍內，能進行各種變更。亦即，雖然說明以 平面視向對於薄板狀體運送方向正交的方向配置成多數列 之運送裝置本體，向薄板狀體運送方向配置多數組的情況 ，可是如果將安裝有多數之突起狀支持體的皮帶，以平面 視朝對於薄板狀體運送方向正交之方向配置多數列的話， 即使未將前述皮帶對於薄板狀體運送方向配置多數組，也 能夠實施。 (8) (8)200410888 另外，雖然說明在帶狀體的皮帶安裝突起狀支持體之 情況，可是將突起狀支持體安裝在鏈條、繩索等繩狀體的 方式也能實施，被搬運的板狀體並不限於薄板，也能適用 在各種厚度者，排氣裝置係即使在各搬運裝置本體之框體 分別設置，或者，以1部排氣裝置，即使將該排氣裝置藉 由風道與各框體連接的方式也能實施。 而且，將在滑車及皮帶以及突起狀支持體的薄板狀體運 送側的頂部附近以外的部分覆蓋的被覆體，係雖然說明每個 運送裝置本體所設置的情況，但是即使將全體以1組之被覆 體進行覆蓋的方式也可實施。 如以上所述，根據本發明之板狀體的運送裝置的話，將 能減輕運送時之板狀體的振動，同時能夠防止蛇行，不會由 於搬運而對板狀體有不良影響，且可保持良好的品質，而且 因不需要側引導，能減低設備費，並且，因由於排氣裝置使 框體內進行排氣的方式，故能減低安裝在帶狀體或繩狀體的 板狀體之支持體附著灰塵，結果，將減低灰塵附著在板狀體 而減輕損害品質之虞，發揮各種優異的效果。 【圖式簡單說明】 第1圖是適用於本發明的板狀體的運送裝置的運送裝置 本體的側剖面圖 第2圖是第1圖的π— II箭號方向視圖。 第3圖是第2圖的III 一 III箭號方向視圖。 第4圖是第3圖的IV — IV箭號方向視圖。 (9) (9)200410888 第5圖是第1圖的放大圖。 第6圖是顯示在本發明的一實施例，以平面視運送裝置 本體朝對於薄板狀體運送方向配置多數列的同時，朝薄板狀 體運送方向配置多數組的狀態的平面圖。 第7圖是第6圖的VII — VII箭號方向視圖。 第8圖是第7圖的VIII — VIII箭號方向視圖。 第9圖是適用於傳統的板狀體運送裝置的輪式運送機的 側面圖。 第10圖是第9圖的X— X箭號方向視圖。 第11圖是第9圖的XI— XI箭號方向視圖。 第1 2圖是顯示在傳統的板狀體運送裝置的例，以平面 視輪式運送機朝對於薄板狀體運送方向配置多數列的同時， 朝薄板狀體運送方向配置多數組的狀態的平面圖。 弟13圖是第12圖的XIII— XIII箭號方向視圖。 [主要元件對照表] 1 運送裝置本體 2 框體 3、4 滑車 5 皮帶 6、e 薄板狀體 7 突起狀支持體 8、9 軸 10 排氣裝置 -13- 200410888 (10) a 輪式運送機 b 框體 2a 開口 D 薄板狀體運送方向200410888 (1) (ii) Description of the invention [Technical field to which the invention belongs] The present invention relates to a conveying device for a plate-shaped body. [Prior art] In the transportation of thin substrates such as glass substrates, liquid crystal panels using glass substrates, solar cell panels, and the like, belt conveyors, roller conveyors, and wheel conveyors have been used conventionally. A conventional example of a thin plate-like body conveying device such as a glass substrate of a type conveyor is shown in FIGS. 9 to 13. However, as shown in FIG. 12, the transport device is a transport conveyor a in which a plurality of rows of the conveyors a arranged at a certain interval in a direction orthogonal to the sheet-shaped object conveying direction D are viewed in plan view, and the sheet-shaped object is conveyed in the direction D. Multiple arrays are available in parallel directions. Each of the wheeled conveyors a has a frame b as shown in FIGS. 9 to 11, and a relatively narrow frame b arranged at a certain interval in a direction parallel to the sheet-shaped body conveying direction D. Although most of the wheels c arranged horizontally are not shown in the figure, they can be driven at the same speed by a driving device known in the past. Then, as shown in FIG. 12, the wheels c at the downstream end of the thin plate-shaped object conveying direction D in the plurality of rows of wheeled conveyors a upstream of the thin plate-shaped object conveying direction D, and the thin plate-shaped object conveying direction The wheels c on the upstream side of the plurality of rows of wheeled conveyors a on the downstream side D of the thin plate-shaped body D are arranged on the coaxial line so as to be adjacent to each other in the axial direction. In order to make the thin plate-shaped body e The method of smoothly transferring from the upstream wheeled conveyor a to -5- (2) (2) 200410888 during transportation to the downstream wheeled conveyor a. When the thin plate-shaped body e is transported, all the wheels c of the wheeled conveyor a are driven to rotate. Therefore, the thin plate body e transferred to the upstream wheeled conveyor a is transported on the upstream side wheeled conveyor a and transferred to the downstream side wheeled conveyor a, and is transported by the downstream side wheeled conveyor a. Machine a will be shipped again. As a side of another conveying device for conveying a thin plate-shaped body, there is a conveying device as disclosed in Japanese Unexamined Patent Publication No. 9-278 1 81. This conveying device supports horizontal portions of the thin plate-like body in the vicinity of both ends in the conveying direction, and horizontal rollers are used to convey the thin plate-like body in the downstream direction. However, in the conveying device shown in FIGS. 9 to 13, when the front end portion of the thin plate-shaped body e moves in the thin-plate-shaped body conveying direction D and becomes a unilateral support state that is not supported by the wheel c, it is moved by its weight. The lower part is curved. Therefore, when the front end of the sheet-like body e is transferred to the next wheel c downstream of the sheet-like body conveying direction D, it will abut the outer peripheral surface of the wheel c and vibrate. As a result, System e may cause adverse effects. When the front end of the thin plate-shaped body e transfers to the wheel c on the downstream side, the thin plate-shaped body e receives the force from the downstream wheel c. As a result, the thin plate-shaped body e moves. Because of the risk of snakes, transport devices in the past had to be manufactured as side guides to prevent snakes. In addition, when dust adheres to the outer peripheral surface of the wheel c, the thin plate-like body e may also adhere to dust. The conveying device shown in Japanese Unexamined Patent Publication No. 9-278 1 81 is a porous device which is disposed between left and right rollers and is positioned above an air supply sheet. 'Air is supplied from the porous member under the thin plate body, and So that the dust does not adhere to the thin -6-200410888-, * # (3) under the plate. However, when the front end of the thin plate-shaped body is transferred to the roller on the downstream side, it will abut against the outer surface of the roller in the same manner as the conveying device shown in FIGS. 9 to 13. Therefore, the thin plate-like body may be adversely affected by vibration, may be meandering, or need to be guided sideways to prevent meandering, as in the case of the transport device of Figs. 9 to 13. The present invention has been made in view of such circumstances, and its object is to reduce the vibration of the thin plate-like body during transportation, meanwhile prevent the meandering, and to provide a plate-like body conveying device without the risk of dust adherence to the thin plate-like body. [Summary of the Invention] According to the plate-shaped body transporting device of the present invention, there is provided an endless belt-like body or a rope-shaped body which is arranged on the rotating body and can be driven to be spaced apart from each other in the plate-shaped body conveying direction. And a support body which is installed at intervals in a direction parallel to the direction in which the belt-shaped body or the rope-shaped body is transported to support the plate-shaped body on the transport side. In the plate-shaped body conveying device according to the present invention, a plurality of rows can be arranged in a plane view in which the aforementioned belt-shaped body or rope-shaped body is orthogonal to the plate-shaped body conveying direction. In the plate-shaped body conveying device according to the present invention, a plurality of groups can be arranged in a plane view in which the aforementioned belt-shaped body or rope-shaped body is parallel to the plate-shaped body conveying direction. In the plate-shaped body conveying device according to the present invention, a portion of the plate-shaped body on the upstream side or a rope-shaped body is conveyed in the downstream side, and a plate-shaped body on the downstream side is conveyed in the plate-shaped body or rope. The upstream part can be arranged in a superimposed manner in side view -7- (4) (4) 200410888. In the conveying device for a plate-shaped body according to the present invention, the rotating body and the belt-shaped body or the rope-shaped body can be made to protrude upward at the top of the conveying side of the support body to which the belt-shaped body or the rope-shaped body is mounted. Way to cover with a covering body. The plate-shaped body conveying device according to the present invention can be provided with an exhaust device for exhausting the air in the coating body. According to the plate-shaped body conveying device of the present invention, since the vibration of the plate-shaped body during transportation can be reduced and meandering is prevented, the plate-shaped body will not be affected by the transportation, and the quality can be maintained. Good, and because side guidance is not required, the equipment cost can be reduced, and in order to exhaust the inside of the frame by the exhaust device, the support of the plate-shaped body mounted on the band-shaped or rope-shaped body can be reduced Dust adheres, and as a result, the risk of dust adhering to the plate-shaped body is reduced, and the risk of impairing its quality is reduced. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figures 17 to 8 show an embodiment of the present invention. In Figs. 1 to 4, reference numeral 1 denotes a conveying apparatus main body, and the conveying apparatus main body 1 is provided with a frame 2 extending in a direction parallel to the sheet-shaped object conveying direction D. The frame body 2 is formed in a rectangular parallelepiped shape in which the bottom surface, both side surfaces, and the front and rear surfaces are covered with a plate-shaped covering body, and an opening 2 a is formed on the upper surface for the lengthwise direction over a substantially full length. At the upstream and downstream ends of the thin plate-shaped body in the transport direction D in the frame 2, there are pulleys 3 and 4 installed horizontally. The pulleys 3 and 4 are set up in an endless shape (5) (5) 200410888 and narrow. Belt 5. On the surface of the belt 5, a projecting support 7 in a supportable manner is mounted below the thin plate-like body 6 which is transported on the top side of the conveying side and protrudes slightly upward from the opening 2a. The protruding support 7 is made of resin, for example, and its top is formed in a semicircular shape as shown in FIG. In order to prevent this, the thin plate-shaped body 6 is supported to prevent injury or dust from being attached. The shafts 8 and 9 to which the pulleys 3 and 4 are fixed are, for example, bearings provided on the outer side of the frame 2. The shaft 8 or 9 is rotatably supported, and the shaft 8 or 9 is driven by a conventionally well-known driving device. Then, with the drive shaft 8 or 9, the belt 5 will rotate via the pulleys 3 and 4, and the protrusion-shaped support 7 can be moved by the rotation of the belt 5. In FIG. 1, 10 is an exhaust device such as an exhaust fan for exhausting the air in the casing 2. As shown in FIG. 6, the above-mentioned conveying device bodies 1 are arranged in a plurality of rows at predetermined intervals in a direction orthogonal to the sheet-like body conveying direction D as viewed in plan. D is arranged in a plurality of arrays, and the upper ends of the protrusion-shaped supports 7 of all the transport devices 1 are located on the same plane. Then, with respect to the sheet-shaped body conveying direction D, the downstream end portion of the upstream conveying device body 1 and the upstream end portion of the downstream conveying device body 1 are adjacent to each other in the width direction as shown in FIG. 6. Moreover, the axes of the pulleys 3 arranged at the front end of the transporter body 1 on the upstream side and the pulleys 4 at the rear end of the transporter body 1 on the downstream side are arranged on the same line. Then, from a side view, the pulley 3 at the front end of the upstream conveying device body 1 and the pulley 4 at the rear end of the downstream conveying device body 1 are parts of the leather-9- (6) (6) 200410888 with 5 Duties are a way of overlapping. As such, the thin-plate-like body conveying direction D between the protrusion-shaped support body 7 on the upstream front end portion and the protrusion-shaped support body 7 on the downstream rear end portion is performed in such a manner that the distance between the thin plate-like body is not increased, and the plate shape When the body 6 is transferred from the upstream conveying device body 1 to the downstream conveying device body 1, although the protruding support 7 on the upstream front end is lowered by the rotation of the belt 5, The lower end of the front end portion is detached, and the bending is not increased by the weight of the front end portion of the thin plate-shaped body 6 so that it is smoothly supported by the protrusion-shaped support that is raised by the rotation of the downstream rear end portion 5体 7〇 Next, the operation of the above embodiment will be described. When the thin plate-shaped body 6 is conveyed, all the conveying device bodies 1 are driven. Therefore, on the conveying side, the protruding support body 7 and the belt 5 move together toward the thin plate-shaped body conveying direction D, and all the frames The inside of the body 2 is exhausted by an exhaust device 10. The thin plate-like body 6 transferred by the upstream-side plurality of conveying device bodies 1 is supported by the protruding-shaped support 7 of the upstream-side conveying device body 1 and is aligned with the protruding-shaped support 7 toward the thin-plate-shaped body conveying direction D. The downstream side transport is transferred from the upstream side transporting unit body 1 to the downstream side transporting unit body 1, and the downstream side transporting unit body 1 is supported and protruded by the protrusion-shaped support 7 The support 7 is transported to the downstream side of the sheet-shaped body conveying direction D. In addition, when the thin plate-shaped body 6 conveyed by the upstream-side plurality of conveying device bodies 1 is transferred to the downstream-side plurality of conveying device bodies 1, the (7) (7) 200410888 of the upstream conveying device body 1 The protruding support body 7 is lowered from the lower side of the thin plate-shaped body 6 by being lowered by turning downward under the belt 5 accompanying the rotation of the pulley 3 at the front end, but the conveying device body on the downstream side is substantially simultaneously. The protrusion-shaped support 7 of 1 is supported by the lower surface of the thin-plate-shaped body 6 by being rotated upward by the belt 5 accompanying the rotation of the pulley 4 at the rear end portion. Therefore, during transportation, the thin plate-like body 6 is supported by the protrusion-shaped support 7 and moves together with the protrusion-shaped support 7 toward the thin-plate-shaped body conveying direction D. The thin plate-shaped body 6 does not support the protrusion-shaped support 7. Offset. As a result, vibration of the thin plate-like body 6 during transportation is reduced, and meandering does not occur in the thin plate-like body 6. Therefore, the thin plate-shaped body 6 is not subjected to adverse effects due to transportation, and the quality can be maintained. At the same time, since side guidance is not required, the equipment cost can be reduced. In addition, by using the exhaust in the casing 2 of the exhaust device 10, the risk of dust adhered to the belt 5 or the protruding support 7 is reduced, and the risk of dust attached to the thin plate-shaped body 6 is impaired. . In addition, the plate-shaped body conveying device of the present invention can be variously modified without departing from the gist of the present invention. That is, although the case where the transport device bodies are arranged in a plurality of rows in a direction orthogonal to the transport direction of the thin plate-like body in a plane view, and a plurality of arrays are disposed in the transport direction of the thin plate-like body, if a large number of protrusion-shaped supports are installed If a plurality of rows of belts are arranged in a direction orthogonal to the conveying direction of the thin plate-shaped body in plan view, the belts can be implemented without arranging the belts in a plurality of arrays in the conveying direction of the thin plate-shaped body. (8) (8) 200410888 In addition, although the case where the protrusion-shaped support is attached to the belt of the belt-shaped body will be described, the method of attaching the protrusion-shaped support to a rope-shaped body such as a chain or a rope can also be implemented. The shape is not limited to a thin plate, and can be applied to various thicknesses. The exhaust device is provided separately in the frame of each conveying device body, or one exhaust device is used even if the exhaust device is passed through an air duct. The method of connecting to each frame can also be implemented. In addition, although the covering body covering the parts other than the vicinity of the top of the thin-plate-shaped body conveyance side of the pulley and the belt and the protrusion-shaped support body will be described for each conveying device body, even if the entire body is arranged in one group, The form of covering the covering body may be implemented. As described above, according to the plate-shaped body conveying device of the present invention, the vibration of the plate-shaped body during transportation can be reduced, meanwhile, the meandering can be prevented, the plate-shaped body can be prevented from being adversely affected by the transportation, and can be maintained. Good quality, and because side guidance is not required, equipment costs can be reduced, and because of the way the exhaust device exhausts the inside of the frame, it can reduce the support of the plate-shaped body mounted on the belt or rope As a result, dust adheres to the body. As a result, the adhesion of dust to the plate-shaped body is reduced, and the risk of damage to quality is reduced, and various excellent effects are exhibited. [Brief description of the drawings] FIG. 1 is a side cross-sectional view of a main body of a conveying device applied to a plate-shaped body conveying device according to the present invention. FIG. 2 is a view in a direction of arrow π-II of FIG. Fig. 3 is a view from arrow III to III in Fig. 2. FIG. 4 is a view in the direction of arrows IV-IV in FIG. 3. (9) (9) 200410888 Figure 5 is an enlarged view of Figure 1. Fig. 6 is a plan view showing a state in which a plurality of rows are arranged in a plane-like conveyance direction of the body of the sheet-shaped body and a plurality of arrays are arranged in the conveyance direction of the thin-plate body in an embodiment of the present invention. FIG. 7 is a view in the direction of arrows VII-VII of FIG. 6. FIG. 8 is a view in the direction of arrows VIII-VIII in FIG. 7. Fig. 9 is a side view of a wheeled conveyor applied to a conventional plate-shaped body conveying device. FIG. 10 is a view in the direction of the arrow X-X in FIG. 9. FIG. 11 is a view in the direction of arrows XI-XI in FIG. 9. FIG. 12 is a plan view showing an example of a conventional plate-shaped body conveying device, in which a plurality of rows are arranged in a flat-plate wheel conveying direction in a flat-plate-like conveying direction, and a plurality of arrays are arranged in a thin-plate-like conveying direction . Brother 13 is the XIII-XIII arrow view of Figure 12. [Comparison of main components] 1 Conveyor body 2 Frame 3, 4 Pulley 5 Belt 6, e Thin plate 7 Protruding support 8, 9 Shaft 10 Exhaust device-13- 200410888 (10) a Wheeled conveyor b Frame 2a Opening D Thin plate-shaped body conveying direction