CN100436291C - Conveyer for plate - Google Patents

Conveyer for plate Download PDF

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Publication number
CN100436291C
CN100436291C CNB031588468A CN03158846A CN100436291C CN 100436291 C CN100436291 C CN 100436291C CN B031588468 A CNB031588468 A CN B031588468A CN 03158846 A CN03158846 A CN 03158846A CN 100436291 C CN100436291 C CN 100436291C
Authority
CN
China
Prior art keywords
tabular
feedway
lamellar
throughput
shoestring
Prior art date
Application number
CNB031588468A
Other languages
Chinese (zh)
Other versions
CN1511773A (en
Inventor
安田智彦
和田芳幸
大野俊孝
Original Assignee
石川岛播磨重工业株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP380012/2002 priority Critical
Priority to JP2002380012A priority patent/JP2004210440A/en
Priority to JP380012/02 priority
Application filed by 石川岛播磨重工业株式会社 filed Critical 石川岛播磨重工业株式会社
Publication of CN1511773A publication Critical patent/CN1511773A/en
Application granted granted Critical
Publication of CN100436291C publication Critical patent/CN100436291C/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/02—Belt or chain conveyors
    • B65G2812/02128—Belt conveyors
    • B65G2812/02138—Common features for belt conveyors
    • G—PHYSICS
    • G02—OPTICS
    • G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Abstract

A plurality of lines of endless belt 5 running around pulleys 3, 4 provided on back and front portions so as to be driven are disposed in a thin platy member carrying direction D in a plane view, and a plurality of sets of endless belt 5 are disposed in the thin platy member carrying direction D. Projection-shaped supporting bodies 7 capable of supporting thin platy member 6 are attached to each belt 5 in a longitudinal direction at specified intervals. So as to make the projection-shaped supporting bodies 7 project slightly upward in the thin platy member 6 carrying side, the pulleys 3, 4, the belt 5, and the projection-shaped supporting bodies 7 are stored in a frame 2, and an exhausting means 10 for exhausting air from the frame 2 is provided.

Description

The feedway of tabular body

Technical field

The present invention relates to the feedway of tabular body.

Background technology

The conveying of lamellar bodies such as glass substrate, the liquid crystal board that adopts glass substrate, solar cell panel, what used is feedways such as belt conveyer, roller path, wheel conveyer in the past, and an example of the prior art of the feedway of lamellar bodies such as employing wheel conveyer conveying glass substrate is shown in Fig. 9～Figure 13.As shown in figure 12, feedway is seen over from depression angle, and possess towards parallel direction with respect to lamellar body throughput direction D has organize with respect to lamellar body throughput direction D to the multi-row wheel conveyer a of vertical direction with certain arranged spaced more.

As Fig. 9～shown in Figure 11, each wheel conveyer a has, framework b and, on this framework b to the runner c of the direction parallel with the narrower a plurality of horizontal arrangement of the width of certain arranged spaced with lamellar body throughput direction D, though runner c is not shown, under the driving of existing well-known driver train, can rotate with same circumferential velocity.

As shown in figure 12, be positioned at respect to lamellar body throughput direction D upstream side multi-row wheel conveyer a lamellar body throughput direction D downstream end runner c, with, be positioned at the runner c of lamellar body throughput direction D upstream extremity of the multi-row wheel conveyer a in downstream with respect to lamellar body throughput direction D, be to be adjacent on the centerline direction be configured on the same line of centers each other, this is for lamellar body e can be transferred on the wheel conveyer a of downstream sleekly from upstream side wheel conveyer a when carrying.

In the occasion of transporting thin tabular body e, the runner c of wheel conveyer a all is activated and rotates.Therefore, be shifted into the lamellar body e on the upstream side wheel conveyer a, move on upstream side wheel conveyer a and be shifted on the wheel conveyer a of downstream, wheel conveyer a further carries by the downstream.

Example as other feedway of transporting thin tabular body has the feedway shown in the Japanese kokai publication hei 9-278181 communique.This feedway has near the horizontal roller of lamellar body downstream being carried when supporting the two ends of throughput direction to lamellar body.

But, as Fig. 9～feedway shown in Figure 13, when the leading section of lamellar body e moves and is in when not obtaining single-ended status of support that runner c supports as yet to lamellar body throughput direction D, will be because of deadweight deflection downwards, therefore, when the front end of lamellar body e will be transferred on the next runner c in lamellar body throughput direction D downstream, will conflict with the outer peripheral face of runner c and produce vibration, its result might produce harmful effect to lamellar body e.

In addition, when the front end of lamellar body e is transferred on the runner c of downstream if conflict with this runner c, then lamellar body e will be subjected to the effect of the power of downstream runner c, its result, might cause lamellar body e offset and complications are advanced, therefore, existing feedway need be installed the side guides that prevents that complications from advancing.

Have, if adhere to dust on the outer peripheral face of runner c, then dust also might be attached on the lamellar body e again.

Feedway shown in the Japanese kokai publication hei 9-278181 communique, about roller between dispose the porous part that is positioned to above the gas plate, be attached on the lower surface of lamellar body to prevent dust from the lower surface air supply of porous part to lamellar body.But, same with the feedway of Fig. 9～shown in Figure 13 when the front end of lamellar body will be transferred on the roller of downstream, will conflict with the outer peripheral face of roller.Therefore, with the feedway of Fig. 9～Figure 13 be same, exist to be adversely affected because of vibration, or might be tortuous preceding and then for preventing the complications shortcomings such as needing the installation side guides of advancing such as lamellar body.

Summary of the invention

The present invention be directed to that above-mentioned actual conditions propose, its objective is, provide a kind of can alleviate lamellar body when carrying vibration and can prevent that its complications from advancing.

The feedway of tabular body provided by the present invention, have: around hang on the tabular body throughput direction on the swivel of arranged spaced and can driven jointless shoestring or restiform bodies, and, to the direction parallel with the tabular body throughput direction of this shoestring or restiform bodies across the support of installing at interval and can supporting tabular body at conveyor side.

As the feedway of tabular body provided by the present invention, also said shoestring or restiform bodies can be seen over from depression angle and be disposed multiple row to vertical direction with respect to the tabular body throughput direction.

As the feedway of tabular body provided by the present invention, also said shoestring or restiform bodies can be seen over respect to the tabular body throughput direction to the many groups of parallel direction configuration from depression angle.

Feedway as tabular body provided by the present invention, also can with the part of the tabular body conveyance direction downstream side of the shoestring of upstream side or restiform bodies, with the part of the tabular body throughput direction upstream side of the shoestring in, downstream or restiform bodies, see over overlaid ground from the side-looking angle and dispose.

As the feedway of tabular body provided by the present invention, also said swivel and shoestring or restiform bodies can be covered with the lining body, make that the top that is positioned at conveyor side that is installed in the support on this shoestring or the restiform bodies is outstanding upward.

As the feedway of tabular body provided by the present invention, the exhaust gear that carries out exhaust in the said lining body can be set also.

Feedway according to tabular body of the present invention, can alleviate the vibration of tabular body when carrying, and can prevent that its complications from advancing, therefore, can not produce harmful effect to tabular body because of carrying, its quality is remained intact, and owing to do not need the side guides, thereby can reduce cost of equipment, in addition, owing to utilize exhaust gear that exhaust is carried out in framework inside, therefore, can reduce dust and be attached to possibility on the tabular body support that is installed on shoestring or the restiform bodies, its result reduces the possibility that influences its quality and reduces thereby dust is attached to possibility on the tabular body.

Brief description of drawings

Fig. 1 is the sectional side view that is applied to the feedway body in the conveying appliance for plates of the present invention.

Fig. 2 is that the II-II of Fig. 1 is to view.

Fig. 3 is that the III-III of Fig. 2 is to view.

Fig. 4 is that the IV-IV of Fig. 3 is to view.

Fig. 5 is the enlarged drawing of the V part of Fig. 1.

Fig. 6 is the planar view of one embodiment of the invention, among this embodiment, sees over from Plane Angle, and the feedway body is disposed multiple row with respect to lamellar body throughput direction, and configuration is organized more on lamellar body throughput direction.

Fig. 7 is that the VII-VII of Fig. 6 is to view.

Fig. 8 is that the VIII-VIII of Fig. 7 is to view.

Fig. 9 is the lateral plan that is applied to the wheel conveyer in the existing conveying appliance for plates.

Figure 10 is that the X-X of Fig. 9 is to view.

Figure 11 is that the XI-XI of Fig. 9 is to view.

Figure 12 is the planar view of an example of existing conveying appliance for plates, in this example, sees over from Plane Angle, and wheel conveyer is disposed multiple row with respect to lamellar body throughput direction, and configuration is organized more on lamellar body throughput direction.

Figure 13 is that the XIII-XIII of Figure 12 is to view.

The best form of implementation of invention

Below, to embodiments of the invention in conjunction with the accompanying drawings.

Fig. 1～Fig. 8 illustrates one embodiment of the present of invention.

In Fig. 1～Fig. 4, the 1st, feedway body, feedway body 1 have the framework 2 of extending to the direction parallel with lamellar body throughput direction D.Framework 2 is bottom surface and two sides and front-back and is formed by the cuboid that tabular lining body covers, and its upper surface is formed with respect to the open 2a of length direction across about whole length.

Near the upstream extremity and downstream end in framework 2, lamellar body throughput direction D, be provided with horizontally disposed belt wheel 3,4, on belt wheel 3,4 around hang with non junction and width narrower be with 5.On with 5 surface, overshooting shape support 7 is installed, the top of this overshooting shape support 7 conveyor side from opening 2a outstanding upward a little and can support the lower surface of the lamellar body 6 that is transferred.Overshooting shape support 7 is for example by resin manufacture, and its top semicircular in shape as shown in Figure 5 forms.Why doing like this, is to be scratched or to adhere to dust for the position that is supported that prevents lamellar body 6.

Belt wheel 3,4 outer embeddings, fix the axle 8,9 on it, be subjected to for example being arranged on the support of the bearing on the outside left of framework 2 and can rotate freely, axle 8 or 9 is to rotate under the driving of existing well-known actuating device.By axle 8 or 9 is driven, be with 5 to rotate through belt wheel 3,4, can make overshooting shape support 7 along with moving with 5 rotation.Among Fig. 1, the 10th, be used for discharging the exhaust gears such as exhaust fan of the air in the framework 2.

As shown in Figure 6, see over from depression angle, above-mentioned feedway body 1, with set arranged spaced multiple row is arranged to vertical direction with respect to lamellar body throughput direction D, multi-row feedway body 1 disposes many groups on lamellar body throughput direction D, the upper end of the overshooting shape support 7 of all feedway bodies 1 at grade.

And with respect to lamellar body throughput direction D be positioned at the feedway body 1 of upstream side end of downstream side, with, be positioned at the upstream-side-end of the feedway body 1 in downstream, as shown in Figure 6, be adjacent and be the configuration of nested shape on Width each other, make the line of centers of belt wheel 3 and the belt wheel 4 of the rear end of downstream feedway body 1 of front end of upstream side feedway body 1 on a line.See over from the side-looking angle, the belt wheel 3 of the front end of upstream side feedway body 1 is overlapping with belt wheel 4, the part with 5 of the rear end of downstream feedway body 1.

The reason of doing like this, be for the interval on lamellar body throughput direction D between the overshooting shape support 7 of the rearward end in the overshooting shape support 7 of the leading section that makes upstream side and downstream can be very not big; For at lamellar body 6 when upstream side feedway body 1 is transferred on the downstream feedway body 1, even along with 5 rotation and the overshooting shape support 7 of the upstream side front end that descends leave from the leading section lower surface of lamellar body 6, the deflection that the leading section of lamellar body 6 produces because of deadweight can be very not big yet; For make its can obtain sleekly along with the downstream rearward end with 5 rotation and the support of the overshooting shape support 7 that rises.

Below, the principle of work of above-described embodiment is described.

When transporting thin tabular body 6, all feedway bodies 1 are activated, and therefore, at conveyor side, overshooting shape support 7 is with being with 5 to move to lamellar body throughput direction D, and, to the inside of all frameworks 2, carry out exhaust by exhaust gear 10.

Be shifted into the lamellar body 6 on the multi-row feedway body 1 of upstream side, obtain upstream side feedway body 1 overshooting shape support 7 support and move to lamellar body throughput direction D downstream with overshooting shape support 7, transfer to from the multi-row feedway body 1 of upstream side on the multi-row feedway body 1 in downstream, obtain the downstream multi-row feedway body 1 overshooting shape support 7 support and move to lamellar body throughput direction D downstream with overshooting shape support 7.

In addition, in the time of on the multi-row feedway body 1 that will be transferred to the downstream by the lamellar body 6 of multi-row feedway body 1 conveying of upstream side, though, rotate downwards because of the rotation of the belt wheel 3 that is positioned at leading section with 5, lower surface from lamellar body 6 leaves overshooting shape support 7 on the upstream side feedway body 1 thereupon descending, but approximately at the same time, rotate upward because of the rotation of the belt wheel 4 that is positioned at rearward end with 5, the overshooting shape support 7 on the downstream feedway body 1 is supported the lower surface of lamellar body 6 thereupon rising.

Therefore, when carrying, lamellar body 6 obtains the support of overshooting shape support 7 and moves to lamellar body throughput direction D with overshooting shape support 7, and lamellar body 6 can be with respect to the skew of overshooting shape support 7 occurrence positions.Its result, the vibration of lamellar body 6 when carrying alleviated, and can prevent that lamellar body 6 complications from advancing.Therefore, lamellar body 6 can be because of conveying be adversely affected, and its quality can remain intact, and, owing to do not need the side guides, thereby can reduce cost of equipment.

In addition, by carrying out exhaust with 10 pairs of framework 2 inside of exhaust gear, can make dust be attached to 5 and overshooting shape support 7 etc. on possibility reduce, therefore, be attached to the possibility reduction that influence quality on the lamellar body 6 because of dust.

For the feedway of tabular body of the present invention, also can in the scope that does not exceed main idea of the present invention, do various changes.Promptly, though more than just, to see over respect to lamellar body throughput direction to vertical direction configuration multi-row feedway body from depression angle, the many groups of configuration on lamellar body throughput direction, example be illustrated, but disposing multiple row with respect to lamellar body throughput direction to vertical direction if the band that a plurality of overshooting shape supports will be installed is seen over from depression angle, also is feasible even said band is not disposed many groups on lamellar body throughput direction.

In addition, more than just as shoestring with on the overshooting shape support is installed example be illustrated, also be feasible but be installed in the overshooting shape support on the restiform bodies such as chain, wirerope; The tabular body of being carried is not limited to thin plate, also can be the tabular body of all thickness; As exhaust gear, both exhaust gear can be set respectively on the framework of each feedway body, also can adopt an exhaust gear, and this exhaust gear is connected with each framework by pipeline.

Have again, below, the lining body that near outside respectively being provided with the top of the lamellar body conveyor side of belt wheel and band and overshooting shape support on each feedway body part covers, example be illustrated, also be feasible but integral body is covered with one group of lining body.

As described above, feedway according to tabular body of the present invention, can alleviate the vibration of tabular body when carrying, and can prevent that complications from advancing, therefore, can not produce harmful effect to tabular body because of carrying, its quality is remained intact, and owing to do not need the side guides, thereby can reduce cost of equipment, in addition, owing to utilize exhaust gear that exhaust is carried out in framework inside, therefore, can reduce dust and be attached to possibility on the tabular body support that is installed on shoestring or the restiform bodies, its result reduces all good effects such as possibility minimizing influence its quality thereby have the possibility that dust is attached on the tabular body.

Claims (3)

1. the feedway of a tabular body, it is characterized in that, have: around hang on the tabular body throughput direction on the swivel of arranged spaced and can driven jointless shoestring or restiform bodies, and, to the direction parallel with the tabular body throughput direction of this shoestring or restiform bodies across the support of installing at interval and can supporting tabular body at conveyor side
Said shoestring or restiform bodies are seen over from depression angle and are disposed multiple row with respect to the tabular body throughput direction to vertical direction,
Said shoestring or restiform bodies are seen over respect to the tabular body throughput direction to the many groups of parallel direction configuration from depression angle,
The part of the tabular body conveyance direction downstream side of the shoestring of upstream side or restiform bodies, with the part of the tabular body throughput direction upstream side of the shoestring in, downstream or restiform bodies, see that from the side-looking angle past is that overlaid ground disposes.
2. as the feedway of the said tabular body of claim 1, it is characterized in that, said swivel and shoestring or restiform bodies covered with the lining body, make that the top that is positioned at conveyor side that is installed in the support on this shoestring or the restiform bodies is outstanding upward.
3. as the feedway of the said tabular body of claim 2, it is characterized in that, be provided with the exhaust gear that carries out exhaust in the said lining body.
CNB031588468A 2002-12-27 2003-09-15 Conveyer for plate CN100436291C (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP380012/2002 2002-12-27
JP2002380012A JP2004210440A (en) 2002-12-27 2002-12-27 Carrying device for platy member
JP380012/02 2002-12-27

Publications (2)

Publication Number Publication Date
CN1511773A CN1511773A (en) 2004-07-14
CN100436291C true CN100436291C (en) 2008-11-26

Family

ID=32816347

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031588468A CN100436291C (en) 2002-12-27 2003-09-15 Conveyer for plate

Country Status (4)

Country Link
JP (1) JP2004210440A (en)
KR (1) KR20040060713A (en)
CN (1) CN100436291C (en)
TW (1) TWI272236B (en)

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KR100924153B1 (en) * 2005-06-22 2009-10-28 히라따기꼬오 가부시키가이샤 Work transfer system
KR100721550B1 (en) * 2006-01-19 2007-05-23 주식회사 태성기연 Apparatus for transferring of glass panel
KR20080018465A (en) * 2006-08-24 2008-02-28 주식회사 탑 엔지니어링 Conveyor appratus of brittle material substrate
KR100873448B1 (en) * 2007-01-25 2008-12-11 유병석 Transfer device of a printed circuit borad
GB2449309A (en) * 2007-05-18 2008-11-19 Renewable Energy Corp Asa A method for exposing a solar cell wafer to a liquid
JP4756076B2 (en) * 2009-02-24 2011-08-24 東京エレクトロン株式会社 Substrate processing system
KR200470381Y1 (en) * 2010-08-19 2013-12-11 주식회사 동일테크 Timing belt for conveying glass for flat panel
CN102030190B (en) * 2010-11-09 2013-02-20 华映视讯（吴江）有限公司 Glass substrate transmitting device
JP5915358B2 (en) * 2012-04-26 2016-05-11 株式会社Ihi Transport device
CN104245547B (en) * 2012-04-26 2016-07-27 株式会社Ihi Conveyer device
CN104822613A (en) * 2013-02-26 2015-08-05 株式会社Ihi Transfer apparatus
TWI497239B (en) * 2013-05-30 2015-08-21 Mirle Automation Corp Synchronous control system and synchronous control method
CN104150181B (en) * 2014-07-24 2017-02-15 昆山龙腾光电有限公司 Supporting seat and supporting device
CN107600965A (en) * 2017-08-18 2018-01-19 武汉华星光电半导体显示技术有限公司 A kind of apparatus for transporting substrate
CN109665322A (en) * 2019-01-22 2019-04-23 深圳市华星光电半导体显示技术有限公司 It passes sheet devices and passes piece method

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Publication number Priority date Publication date Assignee Title
JPS6194913A (en) * 1984-10-13 1986-05-13 Nippon Sheet Glass Co Ltd Conveyer
CN87208521U (en) * 1987-05-30 1987-12-31 秦皇岛市海港耀华玻璃机械厂 Glass sheet conveyer
US5526832A (en) * 1994-07-01 1996-06-18 Fuji Seiki Machine Works, Ltd. Carrying apparatus for a thin sheet-like workpiece
JP2001341827A (en) * 2000-05-31 2001-12-11 Canon Inc Sheet type cleaner and intermediate bearing for roller conveyer used for sheet type cleaner
JP2002026490A (en) * 2000-07-06 2002-01-25 Shiizu:Kk Substrate-treating apparatus and treated substrate obtained by it

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6194913A (en) * 1984-10-13 1986-05-13 Nippon Sheet Glass Co Ltd Conveyer
CN87208521U (en) * 1987-05-30 1987-12-31 秦皇岛市海港耀华玻璃机械厂 Glass sheet conveyer
US5526832A (en) * 1994-07-01 1996-06-18 Fuji Seiki Machine Works, Ltd. Carrying apparatus for a thin sheet-like workpiece
JP2001341827A (en) * 2000-05-31 2001-12-11 Canon Inc Sheet type cleaner and intermediate bearing for roller conveyer used for sheet type cleaner
JP2002026490A (en) * 2000-07-06 2002-01-25 Shiizu:Kk Substrate-treating apparatus and treated substrate obtained by it

Also Published As

Publication number Publication date
CN1511773A (en) 2004-07-14
TW200410888A (en) 2004-07-01
JP2004210440A (en) 2004-07-29
KR20040060713A (en) 2004-07-06
TWI272236B (en) 2007-02-01

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