WO2006137249A1

WO2006137249A1 - Work transfer system

Info

Publication number: WO2006137249A1
Application number: PCT/JP2006/310742
Authority: WO
Inventors: Katsuyoshi Tachibana
Original assignee: Hirata Corporation
Priority date: 2005-06-22
Filing date: 2006-05-30
Publication date: 2006-12-28
Also published as: CN101203445A; TWI382951B; JP4629731B2; CN101203445B; KR20080016745A; KR100924153B1; JPWO2006137249A1; TW200720170A

Abstract

A work transfer system by which a work such as a substrate can be transferred in an aligned status, without having the work inclined during transfer. In the work transfer system, the work is aligned by permitting first and second abutting sections to abut to both facing edges of the work, respectively, and the work is transferred in the aligned status. Therefore, the work does not incline while being transferred, and the work can be transferred in the aligned status.

Description

Specification

Work transfer system

Technical field

[0001] The present invention relates to a technique for conveying a workpiece such as a glass substrate.

Background art

[0002] Generally, a plurality of substrates typified by a thin glass substrate used in the manufacture of a thin display are stored in a substrate storage cassette. Then, at the time of the processing, the substrates are taken out one by one from the substrate storage cassette and transferred to the substrate processing apparatus, and after the processing, the substrate processing apparatus is loaded again into the substrate storage cassette. In the case of this type of equipment, a transport device that transports the substrates one by one between the substrate storage cassette and the processing equipment is required. As a transport apparatus for transporting a substrate, for example, an apparatus using a single conveyor as described in Japanese Patent Application Laid-Open No. 2004-284772 has been proposed.

Here, when a substrate is transported between the substrate storage cassette and the processing apparatus in the conventional transport device, the substrate may be inclined during the transport. If the substrate reaches the processing apparatus or the substrate storage cassette with the substrate tilted, the substrate may not be smoothly transferred from the transfer device to the processing apparatus or the substrate storage cassette.

Disclosure of the invention

[0004] An object of the present invention is to convey a workpiece in a state where the workpiece is positioned without being inclined during conveyance.

[0005] According to the present invention, the first and second placement members placed across the square workpiece and the first placement member that moves the first placement member on the first linear track. Each of the moving means, the second moving means for moving the second mounting member on a second linear track parallel to the first linear track, and the first and second moving devices individually. The control means for controlling and the first moving means move together with the first mounting member on the first linear track and abut the edge of the workpiece to define the position of the edge. The first abutting portion and the second moving means move together with the second placement member on the second linear track, abut against the edge of the workpiece, and A second abutting portion for defining a position, and The control means includes: initial control for controlling the first and second moving means so that the first and second contact portions are positioned at initial positions separated from each other by a width of the workpiece; When the workpiece is placed on the first and second placement parts between the first and second contact parts in the initial position, the first and second contact parts Positioning control for controlling at least one of the first moving means and the second moving means so that the distance between them becomes the width of the workpiece, and after the positioning control, the first and second placement members And a conveyance control for controlling the first and second moving means so that the first and second abutting portions travel in the same direction at a constant speed. Is provided.

[0006] According to this workpiece transfer system, the first and second abutting portions abut against the opposite end edges of the workpiece, respectively, and the workpiece can be positioned and positioned. The workpiece can be transferred. Therefore, the workpiece can be conveyed in a positioned state without the workpiece being inclined during the conveyance.

[0007] According to the present invention, the first and second belt conveyors are provided so that the running directions of the belts are parallel to each other, and the rectangular workpiece is the first and second belts. A workpiece conveying system for placing and conveying the belt conveyor so as to straddle each belt, a control means for individually controlling the first and second belt conveyors, and the first and second belt conveyors. Each of the first and second belt conveyors, and a contact portion that abuts against an edge of the workpiece and defines a position of the edge. Initial control for driving the first and second belt conveyors so that the contact portions of the first and second belt conveyors are positioned at an initial position separated from each other by the width of the workpiece, and the contact portion at the initial position. The workpiece is placed on each belt between A positioning control for driving at least one of the first and second belt conveyors such that the distance between the contact portions is the width of the workpiece, and after each positioning control, each belt And a conveyance control for driving the first and second belt conveyors so that the first and second belt conveyors travel in the same direction at a constant speed.

[0008] According to this workpiece transfer system, the abutment portion abuts against both opposing edges of the workpiece, and the workpiece can be positioned and positioned. The workpiece can be conveyed in the state. Therefore, the workpiece can be conveyed while being positioned without being inclined during the conveyance.

Brief Description of Drawings

FIG. 1 is a plan view of a substrate transfer system A according to an embodiment of the present invention.

FIG. 2 is a front view of a substrate transfer system A.

[FIG. 3] FIG. 3-1 is an external view of the substrate storage cassette 100, and FIG. 3-2 is a diagram showing an internal configuration of the substrate storage cassette 100.

[FIG. 4] FIG. 4-1 is a partially cutaway view showing the configuration of the lifting unit 20 on the side facing the substrate storage cassette 100, and FIGS. 4-2 to 4-4 show the lifting unit 20 and the transfer unit 30. FIG. 6 is an operation explanatory view showing a substrate transport operation by the;

FIG. 5A and FIG. 5B are explanatory diagrams of the operation of the transfer unit 40.

[Fig. 6] Fig. 6-1 is a schematic side view of the belt conveyor 11, Fig. 6-2 is a schematic side view of the belt conveyor 12, and Fig. 6-3 is a contact portion 14a and a protrusion 15a of the belt 11c. Fig. 6-4 is a sectional view taken along line II in Fig. 1, and Fig. 6-5 is a sectional view taken along line II II in Fig. 1.

[Fig. 7] Fig. 7-1 is a block diagram showing an example in which the driven pulley l ib is pivotally supported by a bearing having a tension adjusting mechanism, and Fig. 7-2 is a cross-sectional view taken along line ΠΙ-ΠΙ in Fig. 7-1. FIG. 7-3 is a block diagram of the control unit 70 that controls the substrate transfer system A. FIG.

FIG. 8 is an operation explanatory diagram of the substrate transfer system A.

FIG. 9 is an operation explanatory diagram of the substrate transfer system A.

FIG. 10 is an operation explanatory diagram of the substrate transfer system A.

FIG. 11 is an operation explanatory diagram of the substrate transfer system A.

FIG. 12 is an operation explanatory diagram of the substrate transfer system A.

FIG. 13 is an operation explanatory diagram of the substrate transfer system A.

FIG. 14 is an operation explanatory diagram of the substrate transfer system A.

FIG. 15 is a diagram showing another embodiment of the present invention.

FIG. 16 is a diagram showing another embodiment of the present invention.

FIG. 17 is a plan view of a substrate transfer system B according to another embodiment of the present invention. FIG. 18 is a perspective view showing a configuration in the vicinity of moving units 2113 and 2123.

FIG. 19 is a plan view of a substrate transfer system C according to another embodiment of the present invention.

FIG. 20 is a perspective view showing a configuration in the vicinity of moving units 3113 and 3123.

FIG. 21 is a plan view of a substrate transfer system D according to another embodiment of the present invention.

FIG. 22 is a perspective view showing a configuration in the vicinity of moving units 4113 and 4123.

FIG. 23 is a plan view of a substrate transfer system E according to another embodiment of the present invention.

FIG. 24 is a perspective view showing a configuration in the vicinity of moving units 5113 and 5123.

FIG. 25 is a cross-sectional view (end view) taken along line IV—IV in FIG. 24.

BEST MODE FOR CARRYING OUT THE INVENTION

[0010] <First embodiment>

FIG. 1 is a plan view of a substrate transport system A according to an embodiment of the present invention, and FIG. 2 is a front view of the substrate transport system A. In this embodiment, an example in which the present invention is applied to a system that transports a substrate such as a glass substrate will be described. However, the present invention can also be applied to transport of a workpiece other than a substrate. The substrate transport system A is arranged on the side of the belt conveyor unit 10 with two belt conveyor units 10 each having a first belt conveyor 11 and a second belt conveyor 12, and is configured to store substrate storage cassettes 100a and 100b. (Hereinafter collectively referred to as the “substrate storage cassette 100”), four lifting units 20 that move up and down, two fixed transfer units 30 arranged between the lifting units 20, and a transfer unit 30 And two lifting and lowering transfer units 40 disposed on the sides. In the figure, X and Y are the horizontal directions orthogonal to each other, and Z is the vertical direction.

[0011] The substrate transfer system A is provided on the side of the first belt conveyor 11 and the second belt conveyor 12 (

+ X direction) from the substrate storage cassette 100a, which stores multiple substrates, to the side of the first belt conveyor 11 and the second belt conveyor 12 (—Y direction) to process the substrate In this system, the substrate is transferred to the apparatus 110. In addition, a substrate storage cassette for storing a plurality of substrates is arranged on the side of the first belt conveyor 11 and the second belt conveyor 12 (+ X direction) from the processing device 110 after the processing by the processing device 110 is completed. This is a system to transport to 100b. 1 and 2 show that the substrate is not received in the substrate storage cassette 100. The case of payment is shown.

[0012] <Board storage cassette>

FIG. 3A is an external view of the substrate storage cassette 100. FIG. The substrate storage cassette 100 is a cassette capable of storing a plurality of rectangular substrates, and is a rectangular parallelepiped frame body composed of a plurality of members 101 extending in the vertical direction and a plurality of members 102 and 103 extending in the horizontal direction. Prepare. As shown in FIG. 3B, a wire 104 is stretched between the opposing members 101, and the substrate to be stored is stored on the wire 104 in a mounted state. In the present embodiment, the wires 104 are arranged at a predetermined pitch in the vertical direction, and a plurality of slots for storing each substrate are formed in the vertical direction. By using the wire 104, the interval between the substrates to be stored can be reduced, and the storage efficiency of the substrate storage cassette 100 can be increased.

[0013] <Elevating unit>

Referring to FIG. 1, one pair of lifting units 20 is provided for one substrate storage cassette 100, and one pair of lifting units 20 is separated from each other in the Y direction with the substrate storage cassette 100 interposed therebetween. Arranged to face each other. Hereinafter, the configuration of the lifting unit 20 will be described with reference to FIG. 2 and FIG. 4-1. FIG. 4A is a partially cutaway view showing the configuration of the lifting unit 20 on the side facing the substrate storage cassette 100.

Each lifting unit 20 includes a pair of support columns 21 that are spaced apart in the X direction, and a plurality of beams 22 that are installed between the support columns 21. A rail member 23 is provided on the side surface of the support column 21 on the substrate storage cassette 100 side. A slide member 24 is slidably attached to the rail member 23, and the slide member 24 is guided by the rail member 23 and moves up and down. A support member 25 (FIG. 4A is a partially broken view) is installed between the slide members 24, and a mounting plate 26 on which the substrate storage cassette 100 is mounted is fixed to the support member 25. The substrate storage cassette 100 is also placed on the placement plate 26 of the pair of lifting units 20 with both side forces in the Y direction.

A motor 27 with a speed reducer is supported on the upper beam 22 and its output shaft is connected to the upper end of a ball screw 29 extending in the Z direction. The upper and lower end portions of the ball screw 29 are rotatably supported by the upper and lower shaft support portions 28, and the ball screw 29 is rotated by the rotation of the motor 27. A ball nut 29a is screwed onto the ball screw 29, and the ball nut 29a is coupled to the support member 25 via a coupling member 29b. But the ball The ball nut 29a moves up and down along the ball screw 29 by forward and reverse rotation of the screw 29, and the ball nut 29a, the connecting member 29b, the support member 25, the slide member 24, the mounting plate 26, and the substrate storage cassette 100 are integrated. It goes up and down.

[0016] <Transfer unit 30>

1 and 2, the transfer unit 30 is a unit for transferring a substrate between the belt conveyor unit 10 and the substrate storage cassette 100. In this embodiment, a plurality of transfer units 30 (here, 5 ) Roller conveyor 31, a support member 32 that supports each roller conveyor 31, and a base member 33 on which the support member 32 is erected. In the case of this embodiment, each roller conveyor 31 includes a row of rollers. The roller conveyor 31 is configured such that the rotation axis of a roller rotated by a driving means (not shown) such as a motor is set in the Y direction, and the substrate placed on the roller is conveyed in the X direction. FIGS. 42 to 43 are operation explanatory views showing the substrate transfer operation by the elevating unit 20 and the transfer unit 30. FIG.

[0017] Each roller conveyor 31 and support member 32 are arranged below the substrate storage cassette 100 that is lifted and lowered by the lifting unit 20, and have a predetermined interval in the X direction so as not to interfere with the member 103 of the substrate storage cassette 100. Placed and placed. When transporting the substrate V, which is stored in the substrate storage cassette 100, to the belt conveyor unit 10, it is transported from the lowermost substrate, and the substrate storage cassette 100 is lowered by the lifting unit 20 as shown in Fig. 4-3. Stops at the position where the lowermost substrate is placed on each roller conveyor 31. By rotating the rollers of the roller conveyor 31, the substrate is conveyed to the belt conveyor unit 10.

When the next substrate is transported, as shown in FIG. 44, the lifting unit 20 lowers the substrate storage cassette 100 again by approximately one stage, and the lowermost substrate is placed on each roller conveyor 31. Stop at the position where it is placed. By rotating the rollers of the roller conveyor 31, the substrate is conveyed to the belt conveyor unit 10. Thereafter, similarly, the roller conveyor 31 sequentially enters the substrate storage cassette 100, and the substrates in the substrate storage cassette 100 are transported. When the substrate is transported from the belt conveyor unit 10 to the substrate storage cassette 100, the operation is generally reversed. The transfer of the substrate between the substrate storage cassette 100 and the belt conveyor unit 10 is performed at the height of the line L (referred to as transfer height) connecting the vertices of the rollers of the roller conveyors 31. [0019] <Transfer unit 40>

1 and 2, the transfer unit 40 is a unit for transferring a substrate between the belt unit 10 and the substrate storage cassette 100 together with the transfer unit 30. In addition, the transfer unit 40 disposed on the processing apparatus 110 side also transfers the substrate between the belt conveyor unit 10 and the processing apparatus 110. In this embodiment, each transfer unit 40 includes a plurality (three in this case) of roller conveyors 41, a support member 42a that supports each roller conveyor 41, and a base member 42b on which the support member 42a is erected. Prepare. In the case of this embodiment, each single conveyor 41 includes two rows of rollers. In the roller conveyor 41, the rotation axis of a roller that is driven to rotate by a driving means (not shown) such as a motor is set in the Y direction, and the substrate placed on the roller is conveyed in the X direction.

[0020] Each roller conveyor 41 and support member 42a are arranged at a predetermined interval in the X direction so as not to interfere with a belt of a belt conveyor unit 10 to be described later, and the central roller conveyor 41 is a belt conveyor unit. Between 10 is arranged. The transfer unit 40 has an elevating function for elevating and lowering each conveyor 41. FIGS. 5-1 and 5-2 are explanatory diagrams of the operation of the transfer unit 40. FIG.

The transfer unit 40 includes a base member 43 that supports the base member 42b via an extendable support member 44. Each roller conveyor 41 can move up and down with respect to the base member 43 together with the support member 42a and the base member 42b. On the base member 43, there is a plate cam 45a, a pinion 45b fixed to the rotation shaft of the plate cam 45a, a rack 45c that meshes with the pinion 45b, and a guide member 45d that guides the movement of the rack 45c. And an air cylinder 45e for moving the rack 45c.

[0022] The rack 45c is disposed such that the longitudinal direction thereof faces the X direction, and the air cylinder 45e extends and contracts in the X direction. As the air cylinder 45e expands and contracts, the rack 45c is guided by the guide member 45d and moves in the X direction. As the rack 45c moves, the pion 45b rotates and the plate force 45a also rotates. The base member 43 is provided with a hole 43a for avoiding interference with the plate cam 45a. A roller 42c that contacts the peripheral surface of the plate cam 45a is provided on the lower surface of the base member 42b. The position on the peripheral surface of the plate cam 45a that the roller 42c contacts, the rotational axis of the plate cam 45a, and The roller conveyor 41 moves up and down due to fluctuations in the distance. Therefore, when transferring the substrate to / from the transfer unit 30, the transfer unit 40 connects the apexes of the rollers as shown in FIG. The roller conveyor 41 is at a position where the roller conveyor 41 has been raised (hereinafter referred to as the raised position) at a position passing through the line L indicating the height. On the other hand, when the substrate is transferred from the transfer unit 40 to the belt conveyor unit 10 as described later, the rotation of the plate cam 45a by extending the air cylinder 45e causes the rotation of each roller as shown in FIG. The roller conveyor 41 descends to a position where the line connecting the vertices passes through a line L ′ below the line L indicating the transfer height (this position is hereinafter referred to as a lowered position;). When returning from the embodiment of FIG. 5-2 to the embodiment of FIG. 5-1, the air cylinder 45e is contracted. In this embodiment, such an elevating mechanism is adopted, but it goes without saying that other elevating mechanisms can also be adopted.

[0024] belt conveyor unit>

The configuration of the belt conveyor unit 10 will be described with reference to FIGS. 1, 2, 6-1, and 6-2. FIG. 6-1 is a schematic side view of the belt conveyor 11, and FIG. 6-2 is a schematic side view of the belt conveyor 12. As described above, the belt conveyor unit 10 includes the first belt conveyor 11 and the second belt conveyor 12. In the present embodiment, the two belt conveyor units 10 are separated in the X direction. It is provided in parallel.

[0025] The first belt conveyor 11 includes a driving pulley 11a, a driven pulley l ib, and an endless belt 11c wound around the driving pulley 11a and the driven pulley l ib, for example, a belt 11c. This is a belt conveyor using a timing belt.

[0026] The driving pulley 11a and the driven pulley l ib are arranged apart from each other in the Y direction, and the traveling direction of the belt 11c is set in the Y direction. The drive pulley 1 la is connected to a drive shaft l ie supported on the bearing 1 Id. In the present embodiment, the first belt conveyors 11 of the two belt conveyor units 10 are driven synchronously. Therefore, each drive pulley 11a is connected to a common drive shaft 11e. The end of the drive shaft 11e is connected to the output shaft of the motor 13a with a speed reducer, and the two drive pulleys 1la rotate synchronously by the rotational drive of the motor 13a. The rotating shaft of the driven pulley l ib is supported by the bearing l lf and rotates freely. The rotational axis of the driven pulley l ib passes between the upper and lower belts 12c of the second belt conveyor 12.

[0027] The driven pulley 1 lb (and a driven pulley 12b described later) can also be supported by a bearing having a tension adjusting mechanism. Figure 7-1 shows that the driven boot is supported by a bearing with a tension adjustment mechanism. Fig. 7-2 is a cross-sectional view taken along line IV-III in Fig. 7-1. The driven pulley l ib is pivotally supported by the bearing 61 in a cantilever manner. The bearing 61 is supported by a guide member 62 extending in the Y direction so as to be movable in the Y direction. End plates 63a and 63b are fixed to both ends of the guide member 62, and a shaft body 64 is rotatably mounted around the axis between the end plates 63a and 63b.

The shaft body 64 penetrates the bearing portion 61, and also penetrates the moving plate 65 supported by the guide member 62 so as to be movable in the Y direction. A screw 64a is engraved on a part of the peripheral surface of the shaft body 64, and the moving plate 65 is provided with a screw hole (not shown) that engages with the screw. The shaft body 64 and the bearing portion 61 are loosely fitted. A coil spring 66 is installed between the moving plate 65 and the bearing portion 61, and urges the two so that they are always separated from each other. Thus, when the shaft body 64 is rotated, the moving plate 65 moves in the Y direction. The force that can further tension the belt 11c when the moving plate 65 is moved to the bearing 61 side. Since the coil spring 66 is loaded between the moving plate 65 and the bearing 61, excessive tension is suppressed. Is done.

[0029] Of the belt 11c, on the belt 11c traveling above, there are provided an abutting portion 14a that abuts the edge of the substrate and defines the position of the edge, and a plurality of protrusions 15a. . FIG. 6-3 is an enlarged view of a portion of the belt 11c where the contact portion 14a and the protrusion 15a are provided. In the case of this embodiment, the contact portion 14a has a substantially rectangular parallelepiped shape and protrudes on the belt 11c. The contact portion 14a defines the position of the edge on the −Y side of the substrate. The protrusions 15a are provided on the belt 11c where the substrate is placed. In the present embodiment, a plurality of the protrusions 15a are arranged in the Y direction. The protrusion 15a functions as a mounting member on which the substrate is mounted.

[0030] The protrusion 15a has a curved upper surface, and makes the contact area with the substrate to be placed as small as possible. Further, it is desirable that the upper surface of the protrusion 15a is smooth. The line connecting the vertices of the protrusions 15a passes between the line L ′ and the line L described above, and the upper surface of the contact part 14a is lower than the line L (transfer height) described above! The position of the belt conveyor unit 10 in the height direction is positioned so as to be positioned.

[0031] The protrusion 15a and the abutting portion 14a move on a linear track in the Y direction as the belt 11c travels. That is, the first belt conveyor 11 functions as a moving unit that moves the protrusion 15a and the contact portion 14a on a straight track in the Y direction. The configuration of the second belt conveyor 12 is the same as the configuration of the first belt conveyor 11. That is, the second belt conveyor 12 includes a drive pulley 12a, a driven pulley 12b, and an endless belt 12c wound around the drive pulley 12a and the driven pulley 12b. The driving pulley 12a and the driven pulley 12b are spaced apart in the Y direction, and the traveling direction of the belt 12c is set in the Y direction. That is, the first belt conveyor 11 and the second belt conveyor 12 are arranged such that the traveling directions of the belts llc and 12c are parallel to each other. The first belt conveyor 11 and the second belt conveyor 12 are relatively displaced in the Y direction, and the positions of the driving pulley 11a and the driven pulley l ib of the first belt conveyor 11 are the same. The positions of the driving pulley 12a and the driven pulley 12b of the second belt conveyor 12 are reversed in the Y direction.

[0033] The drive pulley 12a is connected to a drive shaft 12e that is pivotally supported by a bearing 12d. As in the case of the first belt conveyor 11, the drive pulleys 12a of the two belt conveyor units 10 are connected to a common drive shaft 12e. The end of the drive shaft 12e is connected to the output shaft of the motor 13b with a speed reducer, and the two drive pulleys 12a rotate synchronously by the rotational drive of the motor 13b. With this configuration, it is only necessary to provide one drive source (motor 13a, 13b) for each of the plurality of first belt conveyors 11 and the plurality of second belt conveyors 12. The rotating shaft of the driven pulley 12b is supported by the bearing 12f and freely rotates. The rotating shaft of the driven pulley 12 b passes between the upper and lower belts 11 c of the first belt conveyor 11. Among the belts 12c, on the belt 12c that travels upward, like the first belt conveyor 11, a contact part 14b that contacts the edge of the substrate and defines the position of the edge, and a plurality of protrusions 15b, which are the same as the contact part 14a and the protrusion part 15a referred to in FIG. 6-3. The contact 14b defines the position of the + Y side edge of the substrate.

[0034] The protrusion 15b and the contact part 14b move on a linear track in the Y direction parallel to the linear track along which the protrusion 15a and the contact part 14a move as the belt 12c runs. That is, the second belt conveyor 12 functions as a moving means for moving the protrusion 15b and the contact portion 14b on a linear track in the Y direction.

[0035] <Nesuke Support Unit>

As shown in FIGS. 1 and 6-1 and 6-2, in this embodiment, the belt conveyor unit 1 The auxiliary unit 50 is disposed at a substantially middle position in the Y direction of 0. The auxiliary unit 50 includes a support portion 51 and an auxiliary shaft 52. Fig. 6-4 is a cross-sectional view taken along line Ι-Ι in Fig. 1, and Fig. 6-5 is a cross-sectional view taken along line II II in Fig. 1. The support portion 51 is a plate having a smooth surface, and is supported by the base 53 through leg portions 51a. The support portion 51 is disposed below a portion of the belts llc and 12c that travels upward, and supports the belts llc and 12c by placing the portions. The support 51 can be a shaft or the like instead of a smooth plate. The auxiliary shaft 52 is a shaft body that functions as a tension roller, and is supported by the base 53 via a bearing portion 52a. The auxiliary shaft 52 is disposed below a portion of the belt l lc, 12c that travels below, and pushes it upward to generate a constant tension on the belt l lc, 12c.

[0036] <Control unit>

FIG. 7-3 is a block diagram of the control unit 70 that controls the substrate transfer system A. FIG. The control unit 70 includes a CPU 71, a RAM 72, and a ROM 73. The ROM 73 stores a control program for the substrate transfer system A and the like. The RAM 72 and ROM 73 can also employ other storage means. An input interface (IZF) 74 is connected to the CPU 71, and various sensors are connected to the input IZF74. Examples of this sensor include sensors that detect the rotation angles or rotation amounts of the motors 13a, 13b, and 27 and the substrate conveyance amount by the roller conveyor. CPU71 obtains detection results of various sensors via input IZF74

[0037] An output IZF75 is connected to the CPU 71, and a motor and a control valve are connected to the output IZF75. The motor is, for example, each of the motors 13a, 13b, 27, the roller conveyor drive motor described above, and the like. The control valve is a valve that switches the supply and direction of air to the air cylinder 45e. For example, the CPU 71 outputs a control command to each of the actuators connected to the output IZF75 according to the detection results of various sensors connected to the input IZF74 to operate the substrate transfer system A. Needless to say, the first belt conveyor 11 and the second belt conveyor 12 are individually and independently controlled by the control unit 70. A communication I / F 78 is connected to the CPU 71, and data communication with the host computer 80 is performed. The host computer 80 performs various settings and operation commands for the substrate transfer system A. [0038] <Operation of substrate transfer system>

Next, an example of the operation of the substrate transfer system A under the control of the control unit 70 will be described with reference to FIGS. Here, a case will be described in which substrates are transferred one by one from the substrate storage cassette 100a to the processing apparatus 110, and processed substrates are transferred from the processing apparatus 110 to the substrate storage cassette 100b.

[0039] First, the first and second belt conveyors 11 and 12 are driven to run the belts llc and 12c, and the contact portions 14a of the first belt conveyor 11 and the second belt conveyor 12 are brought into contact with each other. The contact portion 14b is positioned at a position (initial position) that is separated from the width of the substrate (initial control). FIG. 8 shows a state in which the contact portions 14a and 14b are located at the initial position. In the figure, P1 indicates the position of the contact surface of the contact portion 14a on the substrate in the Y direction, and P2 indicates the position of the contact surface of the contact portion 14b on the substrate in the Y direction. P1 and P2 are separated by a distance dl, and the distance dl> the width in the Y direction of the substrate.

Subsequently, the substrate storage cassette 100 a is lowered by the elevating unit 20 and stopped at a position where the lowermost substrate is placed on each roller conveyor 31 of the transfer unit 30. By rotating the roller of the roller conveyor 31, the substrate is moved in the X direction and moved to the belt compare unit 10 (Fig. 9). In the transfer unit 40 on the substrate storage cassette 100a side, the roller conveyor 41 is placed in the raised position in advance, and the rollers of the roller conveyor 41 are also driven to rotate. As a result, the substrate moves from the roller conveyor 31 to the roller conveyor 41, and the substrate moves onto the belt conveyor unit 10.

[0041] When the substrate moves onto the belt conveyor unit 10, the rotation of the rollers of the roller conveyors 31 and 41 on the substrate storage cassette 100a side is stopped, and the roller conveyor 41 is lowered to the lowered position. As a result, the substrate is placed on the belts l lc and 12 c of the belt conveyor unit 10. The board is moved to a position over the belts l lc and 12c of the two belt conveyor units 10 and is transported in this state. In the present embodiment, since the protrusions 15a and 15b are provided on the belts llc and 12c, the substrate is placed across the protrusions 15a and 15b.

[0042] Next, the first and second belt conveyors 11 and 12 are driven to cause the belts 11c and 12c to travel in opposite directions, and the contact portions 14a and 14b at the initial position are moved. The distance between is the width of the board (Positioning control) Thereby, the substrate is positioned. FIG. 10 is a diagram showing a state in which the substrate is positioned. The abutting portion 14a and the abutting portion 14b also move the initial position force, and the distance between P1 and P2 changes from dl to d2. Distance d2 The width of the board in the Y direction. By causing the belts l lc and 12c to run in opposite directions, the contact portion 14a contacts the edge of the substrate on the -Y side, and the contact portion 14b contacts the edge of the substrate on the + Y side. Further, the board slides on the protrusions 15a and 15b. The substrate is gently sandwiched between the contact portions 14a and 14b, and the positioning force S in the Y direction is applied.

[0043] Next, the first and second belt conveyors 11 and 12 are driven to move the belts l lc and 12c in the same direction (

Drive at a constant speed in the + Y direction (transport control). As a result, the substrate is transported in the + Y direction. FIG. 11 is a view showing a mode in which the substrate is conveyed. By causing the belts l lc and 12c to travel in the same direction (+ Y direction) at a constant speed, the substrate is conveyed while being positioned between the contact portions 14a and 14b. Belts l lc and 12c are subjected to a downward load due to the weight of the substrate, but are supported by the support part 51, and the belts l lc and 12c are prevented from pinching downward to stably transport the substrate. be able to.

Next, before and after the substrate transfer is started, the roller conveyor 41 of the transfer unit 40 on the processing apparatus 110 side is positioned at the lowered position. As shown in FIG. 12, when the substrate reaches the transfer unit 40 on the processing apparatus 110 side, the driving of the first and second belt conveyors 11 and 12 is stopped, and the conveyance of the substrate is stopped. Then, the roller conveyor 41 of the transfer unit 40 on the processing apparatus 110 side is raised to the raised position, and the substrate is transferred from the belt conveyor unit 10 to the roller conveyor 41. After the transfer, the rollers of the roller conveyor 41 are driven to rotate, the substrate is moved in the −X direction, and the substrate is transferred to the processing apparatus 110 (FIG. 13). This completes the transfer of one unit of substrate. In addition, when the substrate is transferred to the processing apparatus 110, the operation of transferring the next substrate from the substrate storage cassette 100a to the belt conveyor unit 10 can be started in parallel as shown in FIG. . In FIG. 13, the belt conveyors 11 and 12 are also driven to move the contact portions 14a and 14b back to the initial positions.

Next, a case where a processed substrate is transferred from the processing apparatus 110 to the substrate storage cassette 100b will be described. First, the roller conveyor 41 of the transfer unit 40 on the processing apparatus 110 side is positioned at the raised position. The lifting / lowering unit 20 lowers the substrate storage cassette 100b. Then, the stage for storing the substrates in the substrate storage cassette 100b is matched with the transfer height of the transfer unit 30. Subsequently, the rollers 30 and 40 of the transfer units 30 and 40 on the processing apparatus 110 side are rotationally driven to stand by in a state where the substrate can be conveyed in the + X direction. When the processed substrate is discharged from the processing apparatus 110, the transfer unit 40 → the transfer unit 30 and the substrate are transported and stored in the substrate storage cassette 100b as shown in FIG. While the processed substrate is transferred from the processing apparatus 110 to the substrate storage cassette 100b, the substrate is transferred from the substrate storage cassette 100a to the belt conveyor unit 10 and transferred to the processing apparatus 110 as shown in FIG. Can be prepared.

[0046] <Advantages of substrate transfer system>

According to the substrate transfer system A of the present embodiment, the contact portions 14a and 14b are in contact with the opposite end edges of the substrate, respectively, to position the substrate in the running direction (Y direction) of the belts llc and 12c. In addition, the substrate can be transported in a positioned state. Therefore, the substrate can be transported in a state where the substrate is positioned without being inclined during the transport.

[0047] During the positioning control described above, the substrate slides on the belts l lc and 12c. In the present embodiment, a plurality of protrusions 15a and 15b are provided at the portion where the substrate is placed. Since the board is placed on the protrusions 15a and 15b, the belts l lc and 12c are hardly in contact with the board, reducing friction between them and preventing the board from being damaged. it can.

[0048] Further, in the above-described embodiment, the transfer unit 30, 40 that transfers the substrate in the direction orthogonal to the traveling direction of the belts llc, 12c of the belt conveyor unit 10 is provided, so that the belt conveyor unit 10 A layout in which the substrate storage cassette 100 and the processing apparatus 110 are arranged on the side of the substrate along the longitudinal direction of the substrate can be adopted.

[0049] Furthermore, by allowing the roller conveyor 41 to move up and down, the abutting portions 14a and 14b do not interfere with the substrate when the substrate is transported while the roller conveyor 41 is positioned at the raised position. Therefore, while a certain substrate is being transported, another substrate from the substrate storage cassette 100 or the processing apparatus 110 can be placed on the belt conveyor unit 10 so that the substrate can be prepared for transfer and the transport efficiency can be improved. I'll do it.

[0050] <Second Embodiment>

In the above embodiment, the first and second belt conveyors 11 and 12 are used for positioning control. The belts llc and 12c were driven to run in opposite directions so that the distance between the contact part 14a and the contact part 14b at the initial position was the width of the substrate. In other words, by moving both the contact portion 14a and the contact portion 14b in the opposite directions, the substrate can be positioned if one of the forces for positioning the substrate moves so as to approach the other.

[0051] Accordingly, the substrate can be positioned by driving at least one of the first and second belt conveyors 11 and 12 and controlling one of the contact portions 14a or 14b to approach the other. Further, in the positioning control, the contact portions 14a and 14b may be moved in the same direction at different speeds. For example, the force that moves the abutment portion 14a and the abutment portion 14b in the substrate transport direction (Y direction) as well as the moving speed of the abutment portion 14a is the same as the movement speed during transport control. The speed is slower than the movement speed during transfer control, and the movement speed of the contact part 14b is gradually increased to the movement speed during transfer control. As a result, the distance between the contact portion 14a and the contact portion 14b is reduced due to the difference in moving speed between the contact portion 14a and the contact portion 14b. In this method, the substrate can be positioned while the substrate is being transported.

[0052] In the above embodiment, a single substrate is placed and transported across the four belts llc and 12c. By adjusting the width of the belt in accordance with the size of the substrate, One substrate may be transported by two belts l lc and 12 c. That is, if there is at least one belt conveyor unit 10, each control of the above embodiment can be performed.

[0053] Conversely, a configuration using four or more belts may be employed. FIG. 15 is a diagram showing an example in which four belt conveyor units 10 are used. By driving the belt conveyor units 10 independently and in synchronization, two boards can be transported in parallel. Further, by synchronously driving all four belt conveyor units 10, as shown in FIG. 16, it is possible to transport a substrate having a different size (larger) than the substrate of FIG. That is, there is an advantage that substrates of different sizes can be transported by the same system by appropriately setting the distance between the contact portions 14a and 14b in the initial control and the positioning control.

In the above-described embodiment, force using the belt conveyors 11 and 12 as the moving means for moving the protrusions 15a and 15b and the contact portions 14a and 14b can be used. Hereinafter, with reference to FIG. 17 to FIG. 25, examples of adopting other types of moving means will be described. To do. In these drawings, the same reference numerals are given to the same components as those of the substrate transfer system A described above, and the description thereof is omitted. Although not specifically described, the control contents, device layout, and the like in the first and second embodiments can be applied to the configuration example of the third embodiment.

[0055] <Application example 1 of ball screw mechanism>

FIG. 17 is a plan view of a substrate transfer system B according to another embodiment of the present invention. The substrate transport system B employs a drive unit 210 having a ball screw mechanism instead of the belt conveyor unit 10.

Each of the two drive units 210 includes a first ball screw mechanism 211, a second ball screw mechanism 212, and the like. The first ball screw mechanism 211 includes a linear screw shaft 2111 and a guide member 2112 extending in the Y direction, and a moving unit 2113 that is guided by the guide member 2112 and moves along the screw shaft 2111. The screw shaft 2111 is rotatably supported by a bearing 211 la near the both ends thereof.

The second ball screw mechanism 212 is disposed away from the first ball screw mechanism 211 in the X direction, and has the same configuration as the first ball screw mechanism 211. That is, the second ball screw mechanism 212 includes a linear screw shaft 2121 and a guide member 2122 extending in the Y direction, and a moving unit 2123 that is guided by the guide member 2122 and moves along the screw shaft 2121. . The screw shaft 2121 is rotatably supported by bearings 2121a in the vicinity of both ends thereof.

A bevel gear 221 is attached to one end of each screw shaft 2111, 2121. The force gear 221 is meshed with a bevel gear 222 that is rotationally driven by the motors 223a and 223b, and the forward rotations and reverse rotations of the motors 223a and 223b cause reverse rotation of the respective talent shafts 2111 and 2121. Of the two drive units 210, each ball screw mechanism 211 is synchronously controlled by a motor 223a, and each ball screw mechanism 212 is synchronously controlled by a motor 223b. Needless to say, the ball screw mechanism 211 and the ball screw mechanism 212 are individually controlled independently.

FIG. 18 is a perspective view showing a configuration in the vicinity of the moving units 2113 and 2123. The moving unit 2123 includes a support plate 2123a provided with the above-described protrusion 15b and contact portion 14b on the upper surface, A pair of support blocks 2123b fixed to the lower surfaces of both ends of the support plate 2123a. The support block 2123b has a ball nut that is screwed onto the screw shaft 2121, and the screw shaft 21 21 passes therethrough. Further, a groove that fits the guide member 2122 is formed on the lower surface of the support block 2123b.

[0060] However, when the screw shaft 2121 rotates, the moving unit 2123 moves in the + Y direction or the Y direction depending on the rotation direction of the screw shaft 2121, and the protruding portion 15b and the contact portion 14b move on the straight track along the Y direction. It can be moved with.

[0061] The moving unit 2113 has the same configuration as that of the moving unit 2123, and the support plate 2113a having the protrusion 15a and the contact portion 14a described above provided on the upper surface, and a pair fixed to the lower surfaces of both ends of the support plate 2113a. Support block 2113b. The support block 2113b has a ball nut that is screwed onto the screw shaft 2111, and the screw shaft 2111 passes therethrough. Further, a groove that fits the guide member 2122 is formed on the lower surface of the support block 2123b.

[0062] When the screw shaft 2111 rotates, the moving unit 2113 moves in the + Y direction or the Y direction depending on the rotation direction of the screw shaft 2111, and the protrusion 15a and the contact portion 14a are connected to the protrusion 15b and the contact. It can be moved on a straight orbit along the Y direction, parallel to the straight orbit along which the part 14b moves.

[0063] In the substrate transport system B having such a configuration, the same substrate transport control as that of the substrate transport system A is possible.

[0064] <Application example 2 of ball screw mechanism>

FIG. 19 is a plan view of a substrate transfer system C according to another embodiment of the present invention. The board transfer system C employs a drive unit 310 having a ball screw mechanism instead of the belt conveyor unit 10. The drive unit 310 employs a Bonnole screw mechanism of a different form from the drive unit 210.

Each of the two drive units 310 includes a first ball screw mechanism 311, a second ball screw mechanism 312, and the like. The first ball screw mechanism 311 includes a linear screw shaft 3111 and a guide member 3112 extending in the Y direction, and a moving unit 3113 that is guided by the guide member 3112 and moves along the screw shaft 3111. The screw shaft 3111 is fixed by bearings 3111a in the vicinity of both ends thereof. In other words, in this example, the screw shaft 3111 is turned. Do not roll.

The second ball screw mechanism 312 is disposed away from the first ball screw mechanism 311 in the X direction, and has the same configuration as the first ball screw mechanism 311. That is, the second ball screw mechanism 312 includes a linear screw shaft 3121 and a guide member 3122 extending in the Y direction, and a moving unit 3123 that is guided by the guide member 3122 and moves along the screw shaft 3121. . The screw shaft 3121 is fixed by bearings 3121a in the vicinity of both ends thereof.

FIG. 20 is a perspective view showing a configuration in the vicinity of the moving units 3113 and 3123. The moving unit 3123 includes a support plate 3123a provided with the above-described protrusion 15b and contact portion 14b on the upper surface, and a pair of support blocks 3123b fixed to the lower surfaces of both ends of the support plate 3123a.

[0068] The support block 3123b includes a motor 31231, a sliding rod 31232, and a force. The motor 31231 has a cylindrical output shaft 31231a, and has a ball nut screwed into the screw shaft 3121 therein, and the screw shaft 3121 passes therethrough. Further, the sliding portion 31 232 is fixed to the lower surface of the motor 31231, and a groove that fits the guide member 3122 is formed.

[0069] Accordingly, the motors 31231 of the pair of support blocks 3123b are synchronously controlled with each other. When the output shaft 31231a rotates, the moving unit 3123 moves in the + Y direction or the −Y direction depending on the rotation direction of the output shaft 31231a, and moves the protrusion 15b and the contact portion 14b on a linear track along the Y direction. Can do.

[0070] The moving unit 3113 has the same configuration as that of the moving unit 3123, and a pair of support plates 3113a provided with the protrusions 15a and the abutting portions 14a described above on the upper surface and a pair of lower surfaces fixed to both ends of the support plate 3113a. Support block 3113b.

[0071] The support block 3113b is composed of a motor 31131, a sliding rod 31132, and a force. The motor 31131 has an output shaft 31131a formed in a cylindrical shape, and has a ball nut screwed into the screw shaft 3111 therein, and the screw shaft 3111 passes therethrough. Further, the sliding portion 31 132 is fixed to the lower surface of the motor 31131, and a groove that fits the guide member 3112 is formed.

[0072] Thus, the motors 31131 of the pair of support blocks 3113b are synchronously controlled with each other. . When the output shaft 31131a rotates, the moving unit 3113 moves in the + Y direction or the Y direction depending on the rotation direction of the output shaft 31131a, and the protrusion 15b and the contact portion 14b move along the protrusion 15a and the contact portion 14a. It can be moved on a straight orbit along the Y direction, parallel to the straight orbit.

In the substrate transport system C having such a configuration, the same substrate transport control as that of the substrate transport system A is possible.

[0074] <Rack and pinion mechanism application example>

FIG. 21 is a plan view of a substrate transfer system D according to another embodiment of the present invention. The substrate transfer system D employs a drive unit 410 having a rack-pinion mechanism instead of the belt conveyor unit 10.

Each of the two drive units 410 is also configured with a first rack-pion mechanism 411, a second rack-pion mechanism 412 and a force. The first rack and pion mechanism 411 includes a linear rack 4111 and a guide member 4112 extending in the Y direction, and a moving unit 4113 that is guided by the guide member 4112 and moves along the rack 4111.

[0076] The second rack and one-pion mechanism 412 is disposed away from the first rack and one-pion mechanism 411 in the X direction. The configuration is the same as 411. That is, the second rack-and-pion mechanism 412 includes a linear rack 4121 and a guide member 4122 extending in the Y direction, and a moving unit 4123 that is guided by the guide member 4122 and moves along the rack 4121. Prepare.

FIG. 22 is a perspective view showing a configuration in the vicinity of the moving units 4113 and 4123. The moving unit 4123 includes a support plate 4123a provided with the above-described protrusion 15b and contact portion 14b on the upper surface, and a pair of support blocks 4123b fixed to the lower surfaces of both ends of the support plate 4123a. The support block 4123b includes a motor, and a pinion 4123b ′ is attached to the output shaft (extending in the −X direction). Further, a groove that fits the guide member 4122 is formed on the lower surface of the support block 4123b.

Accordingly, the motors of the pair of support blocks 4123b are controlled synchronously with each other. When the pione 4123b is rotated by driving these motors, the moving unit 4123 is moved in the + Y direction or the Y direction depending on the rotation direction of the pione 4123b ′, and the protrusion 15b and the abutment are brought into contact. The part 14b can be moved on a straight track along the Y direction.

[0079] The moving unit 4113 has the same configuration as that of the moving unit 4123, and the support plate 4113a having the protrusion 15a and the contact portion 14a described above provided on the upper surface, and a pair fixed to the lower surfaces of both ends of the support plate 4113a. Support block 4113b. The support block 4113b includes a motor, and a pion (not shown) is attached to the output shaft (extending in the + X direction). Further, a groove that fits the guide member 4112 is formed on the lower surface of the support block 4113b.

[0080] Therefore, the motors of the pair of support blocks 4113b are synchronously controlled with each other. When a pinion (not shown) is rotated by driving these motors, the moving arm 4113 moves in the + Y direction or the Y direction depending on the rotation direction of the pinion, and moves the protrusion 15a and the contact portion 14a. The protrusion 15b and the contact portion 14b can be moved on a straight track along the Y direction parallel to the moving straight track.

In the substrate transport system D having such a configuration, the same substrate transport control as that of the substrate transport system A can be performed.

[0082] <Application example of linear motor>

FIG. 23 is a plan view of a substrate transfer system E according to another embodiment of the present invention. The board transport system E employs a drive unit 510 equipped with a linear motor in place of the belt conveyor unit 10.

Each of the two drive units 510 includes a first linear motor 511, a second linear motor 512, and the like. The first linear motor 511 includes a linear stator unit 5111 extending in the Y direction, and a moving unit 5113 that moves along the stator unit 5111.

The second linear motor 512 is disposed away from the first linear motor 511 in the X direction, and has the same configuration as the first linear motor 511. That is, the second linear motor 512 includes a linear stator unit 5121 extending in the Y direction and a moving unit 5123 that moves along the stator unit 5121.

A guide member 513 is disposed between the first linear motor 511 and the second linear motor 512. The guide member 513 guides the movement of the moving units 5113 and 5123. FIG. 24 is a perspective view showing a configuration in the vicinity of the moving units 5113 and 5123. FIG. 25 is a sectional view (end view) taken along line IV-IV in FIG. The moving unit 5123 includes a support plate 5123a having the above-described protrusion 15b and contact portion 14b provided on the upper surface, and a yoke 5123b fixed to the lower surface of the support plate 5123a. The yoke 5123b has a U-shaped cross section, and a plurality of permanent magnets 5123b ′ are arranged on the inner surfaces of the left and right side walls in the longitudinal direction (Y direction) of the yoke 5123b. In addition, a sliding portion 5123b "that fits into a groove formed on the side surface of the guide member 513 is provided on the outer surface of one of the left and right side walls of the yoke 5123b.

[0087] The stator unit 5121 has an inverted T-shaped cross section, and the portion extending upward is located at a position to be inserted into the yoke 5123b, and the portion extending upward is An armature coil 5121a is incorporated. A plurality of armature coils 5121a are arranged in the longitudinal direction (Y direction) of the stator unit 5121.

[0088] When the excitation of the plurality of armature coils 5121a of the stator unit 5121 is sequentially switched by applying force, the moving unit 5123 moves in the + Y direction or the -Y direction according to the switching mode, and the protrusion It is possible to move 15b and the contact part 14b on a straight track along the Y direction.

The moving unit 5113 has the same configuration as that of the moving unit 5123, and includes a support plate 5113a provided with the above-described protrusion 15a and contact portion 14a on the upper surface, and a yoke 5113b fixed to the lower surface of the support plate 5113a. . The yoke 5113b has a U-shaped cross section, and a plurality of permanent magnets 5113b ′ are arranged on the inner surfaces of the left and right side walls in the longitudinal direction (Y direction) of the yoke 5113b. In addition, a sliding portion 5113b "that fits into a groove formed on the side surface of the guide member 513 is provided on the outer surface of one of the left and right side walls of the yoke 5113b.

[0090] The stator unit 5111 has an inverted T-shaped cross section, and the portion extending upward is located at a position to be inserted into the yoke 5113b, and the portion extending upward is Armature coil 511 la is built in! A plurality of armature coils 511 la are arranged in the longitudinal direction (Y direction) of the stator unit 5 111.

[0091] By applying force, the excitation of the plurality of armature coils 5111a of the stator unit 5111 is sequentially switched. Accordingly, the moving unit 5113 moves in the + Y direction or the heel direction according to the switching mode, and the projection 15a and the contact portion 14a are parallel to the linear track on which the projection 15b and the contact portion 14b move. It can be moved on a straight track along the Y direction.

In such a substrate transport system E, the same substrate transport control as that of the substrate transport system A is possible.

Claims

The scope of the claims

[1] first and second mounting members on which a square workpiece is mounted;

A first moving means for moving the first mounting member on a first linear track; and a second moving member for moving the second mounting member on a second linear track parallel to the first linear track. A second moving means,

Control means for individually controlling the first and second moving means;

The first moving means moves along with the first mounting member on the first linear track and contacts the edge of the workpiece to define the position of the edge. The contact portion and the second moving means move along the second linear track along with the second mounting member, and come into contact with the edge of the workpiece to define the position of the edge. 2 contact portions, and

The control means includes

An initial control for controlling the first and second moving means so that the first and second contact portions are positioned at an initial position separated from each other by a width of the workpiece;

The first and second contact portions when the work is placed on the first and second placement members between the first and second contact portions at the initial position. Positioning control for controlling at least one of the first and second moving means so that the distance between the two becomes the width of the workpiece;

After the positioning control, the first and second moving means are controlled so that the first and second mounting members and the first and second contact portions travel at the same speed in the same direction. Transport control,

A workpiece transfer system characterized by executing

2. The workpiece transfer system according to claim 1, wherein the first and second moving means include a belt conveyor.

3. The workpiece transfer system according to claim 1, wherein the first and second moving means include a ball screw mechanism.

[4] The request characterized in that the first and second moving means include a rack-pion mechanism. The workpiece transfer system according to claim 1.

5. The work transfer system according to claim 1, wherein the first and second moving means include linear motors.

[6] The first and second belt comparators are arranged so that the running directions of the belts are parallel to each other, and a rectangular workpiece is placed on each belt of the first and second belt conveyors. It is a work transfer system for placing and transferring so as to straddle,

Control means for individually controlling the first and second belt conveyors;

A contact portion provided on each of the belts of the first and second belt conveyors, and abutting portions that abut the edge of the workpiece and define the position of the edge;

The control means includes

Initial control for driving the first and second belt conveyors so that the contact portions of the first and second belt conveyors are located at an initial position separated from the width of the workpiece;

When the work is placed on each belt between the contact portions at the initial position, the distance between the contact portions becomes the width of the work. Positioning control for driving at least one of the belt conveyors;

After the positioning control, transport control for driving the first and second belt conveyors so that each belt travels at the same speed in the same direction;

A workpiece transfer system characterized by executing

[7] The workpiece transfer system according to [6], wherein a plurality of protrusions are provided on the respective belts of the first and second belt conveyors at portions where the workpiece is placed. .

8. The workpiece transfer system according to claim 6, wherein a support portion that supports the belt is provided under each belt of the first and second belt conveyors.

[9] A plurality of the first and second belt conveyors are provided so that the running directions of the belts are parallel to each other,

A drive shaft for connecting the drive pulleys of the plurality of first belt conveyors and a drive shaft for connecting the drive pulleys of the plurality of second belt conveyors are provided. The workpiece transfer system according to claim 6.

[10] The workpiece is a substrate.

The workpiece transfer system includes:

Arranged on the side of the first and second belt conveyors to store a plurality of substrates, and disposed on the side of the first and second belt conveyors to process the substrate. And a first transfer means for transferring the substrate from the substrate storage cassette onto each belt of the first and second belt conveyors. ,

Second transfer means for transferring the substrate from above each belt of the first and second belt conveyors to the processing apparatus;

The workpiece transfer system according to claim 6, further comprising:

[11] A plurality of the first and second belt conveyors are provided so that the running directions of the belts are parallel to each other,

The first and second transfer means are respectively

The work conveyance system according to claim 10, further comprising a roller conveyor that is disposed so as to be movable up and down between the belt conveyors and that conveys the substrate in a direction perpendicular to a traveling direction of the belt.