WO2009063562A1 - Substrate transport device - Google Patents
Substrate transport device Download PDFInfo
- Publication number
- WO2009063562A1 WO2009063562A1 PCT/JP2007/072224 JP2007072224W WO2009063562A1 WO 2009063562 A1 WO2009063562 A1 WO 2009063562A1 JP 2007072224 W JP2007072224 W JP 2007072224W WO 2009063562 A1 WO2009063562 A1 WO 2009063562A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- abutting
- abutting member
- transport device
- substrate transport
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Abstract
A substrate transport device comprises a transport means which transports a substrate on a horizontal transport track, an abutting member which positions the substrate by abutting to the end edge of the substrate being transported, and a drive means which moves the abutting member between an abutting position where the abutting member is on the transport track and a standby position where the abutting member is not on the transport track. The drive means moves the abutting member from the abutting position to the standby position to be away from the end edge of the substrate in a horizontal direction.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/072224 WO2009063562A1 (en) | 2007-11-15 | 2007-11-15 | Substrate transport device |
TW097143891A TW200942475A (en) | 2007-11-15 | 2008-11-13 | Substrate transport device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/072224 WO2009063562A1 (en) | 2007-11-15 | 2007-11-15 | Substrate transport device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009063562A1 true WO2009063562A1 (en) | 2009-05-22 |
Family
ID=40638418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/072224 WO2009063562A1 (en) | 2007-11-15 | 2007-11-15 | Substrate transport device |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW200942475A (en) |
WO (1) | WO2009063562A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011175016A (en) * | 2010-02-23 | 2011-09-08 | Hitachi Plant Technologies Ltd | Liquid crystal substrate laminate system |
JP2013257594A (en) * | 2013-08-30 | 2013-12-26 | Hitachi Ltd | Liquid crystal substrate lamination system |
JP2014225711A (en) * | 2014-09-10 | 2014-12-04 | 芝浦メカトロニクス株式会社 | Substrate detection device and substrate processing apparatus |
EP3254997A1 (en) * | 2016-06-06 | 2017-12-13 | ALTRATEC Automation GmbH | Device for stopping a converted item on a conveyor |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6033593B2 (en) * | 2012-07-18 | 2016-11-30 | 東レエンジニアリング株式会社 | Substrate transfer device |
CN108137248B (en) * | 2015-10-27 | 2020-01-21 | 平田机工株式会社 | Transfer unit, transfer device, and transfer method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08108931A (en) * | 1994-10-12 | 1996-04-30 | Murata Mach Ltd | Stopper device |
JP2005286189A (en) * | 2004-03-30 | 2005-10-13 | Anritsu Corp | Positioning device for substrate transfer |
WO2006137249A1 (en) * | 2005-06-22 | 2006-12-28 | Hirata Corporation | Work transfer system |
-
2007
- 2007-11-15 WO PCT/JP2007/072224 patent/WO2009063562A1/en active Application Filing
-
2008
- 2008-11-13 TW TW097143891A patent/TW200942475A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08108931A (en) * | 1994-10-12 | 1996-04-30 | Murata Mach Ltd | Stopper device |
JP2005286189A (en) * | 2004-03-30 | 2005-10-13 | Anritsu Corp | Positioning device for substrate transfer |
WO2006137249A1 (en) * | 2005-06-22 | 2006-12-28 | Hirata Corporation | Work transfer system |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011175016A (en) * | 2010-02-23 | 2011-09-08 | Hitachi Plant Technologies Ltd | Liquid crystal substrate laminate system |
JP2013257594A (en) * | 2013-08-30 | 2013-12-26 | Hitachi Ltd | Liquid crystal substrate lamination system |
JP2014225711A (en) * | 2014-09-10 | 2014-12-04 | 芝浦メカトロニクス株式会社 | Substrate detection device and substrate processing apparatus |
EP3254997A1 (en) * | 2016-06-06 | 2017-12-13 | ALTRATEC Automation GmbH | Device for stopping a converted item on a conveyor |
Also Published As
Publication number | Publication date |
---|---|
TW200942475A (en) | 2009-10-16 |
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