JP2005194060A - Substrate transport device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate transport device free of attachment of foreign matter 5 to a glass substrate and capable of performing handing-over of each substrate being transported from the upstream to the downstream smoothly without damaging it. <P>SOLUTION: Endless running bodies 16 installed parallel on the two sides are interlocked so as to be turned in the predetermined direction, and between the endless running bodies 16, a number of placing member fixing shafts 17 whose longitudinal direction lies perpendicular to the rotating direction of the running bodies 16 are installed at an appropriate spacing, and a plurality of substrate placing members 18 are fixed to each fixing shaft 17. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a substrate transport apparatus for transporting a glass substrate or the like, and more specifically, to prevent the adhesion of foreign matters such as dust and dust to the glass substrate which is a liquid crystal panel, and to transport the glass substrate without damaging it. It is related with the board | substrate conveyance apparatus which can do.

  Conventionally, a liquid crystal panel is manufactured by bonding two glass plates and enclosing liquid crystal between them, cutting the bonded glass plates into a predetermined size to obtain a glass substrate, and as shown in FIG. After the glass substrate A (hereinafter simply referred to as the substrate) is sent to the cullet cleaning device 1 to remove the glass dust (cullet) adhering at the time of cutting, the glass substrate A is cleaned by scraping with a cutter blade or a polishing sheet in the cleaning unit 2 Then, the sheet is conveyed to the polarizing plate attaching device 3, and the polarizing plate is attached to both surfaces by the attaching table 4 and the polarizing plate attaching unit 5.

  There are two known methods for conveying the substrate A between the manufacturing processes and in the apparatus as described above, a roller conveyor method and a belt conveyor method.

  In the former roller conveyor system, as shown in FIGS. 7 and 8, a large number of rollers 6 provided at right angles to the conveying direction are rotatably arranged, the substrate A is supported by the rollers 6, and the rollers 6 are rotated. Thus, the substrate A is moved in one direction and conveyed (for example, see Patent Document 1).

  In the latter belt conveyor system, as shown in FIG. 9, an endless conveyor belt 9 is stretched between the driving roller 7 and the driven roller 8, and the conveyor belt 9 is rotated by driving the driving roller 8 with a motor. The substrate A is transferred.

  Usually, in order to prevent the conveyor belt 9 from drooping, a support plate 10 is installed below the upper running portion of the conveyor belt 9 stretched between the driving roller 7 and the driven roller 8.

JP2003-124181A (FIG. 1, paragraph 0010)

  By the way, in the former roller conveyor system, only the substrate A is moved on the rotating roller 6, so when the substrate A is separated from the roller 6, the tip end of the substrate A hangs down. Becomes conspicuous, and foreign matter such as dust and dust is generated in contact with the receiving side roller 6, which adheres to the substrate A and causes a defect.

  Here, if the arrangement interval of the rollers 6 arranged in parallel is set narrow, the above problem is reduced, but the number of the rollers 6 needs to be increased, leading to an increase in the cost of the conveying device.

  In the latter belt conveyor system, the conveyor belt 9, the driving roller 7, and the driven roller 8 are rubbed, and the conveyor belt 9 and the support plate 10 are rubbed. There is a problem that foreign matter adheres to the substrate A and a defect occurs.

  Further, since the conveyance belt 9 and the substrate A are in surface contact, foreign substances are likely to adhere to the substrate A, and when the conveyance distance is long, when a plurality of substrate conveyance devices are used in series, the conveyance device as shown in FIG. When the substrate A is transferred between them, the tip end portion of the substrate A collides with the transport belt 9 of the receiving side device, and the tip end portion of the substrate A is rubbed to cause defective products.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport apparatus that does not cause foreign matter to adhere to a substrate and can smoothly transfer a substrate from upstream to downstream during transport without damaging the substrate.

  In order to solve the above-described problems, the present invention is arranged between endless traveling bodies arranged in parallel on both sides so as to rotate in a predetermined direction, with a length direction perpendicular to the rotational direction of the endless traveling body. A plurality of mounting member fixing shafts are installed at appropriate intervals, and a plurality of substrate mounting members are fixed to the mounting member fixing shafts described above.

  A rail parallel to the traveling portion of the endless traveling body is disposed at a position close to the endless traveling body, and a guide roller that rolls on the rail is provided at the end of each mounting member fixing shaft. The endless traveling body and the rail can be covered with a cover, and a suction means can be provided on the cover.

  According to the present invention, the plurality of substrate mounting members are fixed to the mounting member fixing shafts installed between the endless traveling bodies, and the substrate and the substrate mounting member are moved together. The substrate and the substrate mounting member do not collide with each other, the substrate and the substrate mounting member do not rub, and the contact area between the substrate and the substrate mounting member is small. There is no problem.

  In addition, when providing a plurality of substrate transfer devices arranged in series, when the substrate is transferred between the transfer devices, the substrate mounting member of the receiving device receives the substrate so as to scoop up the tip of the substrate from the lower surface side. Even if the front end portion of the substrate hangs down, the substrate mounting member of the receiving apparatus can be smoothly received without colliding with the substrate, and no conveyance failure occurs.

  Further, if a rail parallel to the upper traveling portion of the endless traveling body is provided at a position close to the endless traveling body, and guide rollers that roll on the rail are attached to both ends of the mounting member fixing shaft, endless traveling is possible. The other support member for supporting the body becomes unnecessary, and the generation of foreign matters due to the sliding of the endless traveling body and the support member can be prevented.

  Furthermore, if rails are provided for the upper traveling portion and the lower traveling portion of the endless traveling body, the endless traveling body does not bend and the endless traveling body can smoothly travel.

  Also, if the cover covers the endless traveling body and the rail part, and the cover is provided with suction means, the foreign matter generated at the endless traveling body and the rail part can be sucked and discarded, and the foreign matter adheres to the board. Can be prevented.

  Support walls are erected on both sides of the upper surface of the rectangular ridge, and a drive shaft linked to the motor and a driven shaft on the other end are installed on one end between the support walls. The drive pulley and the driven pulley at both ends of the driven shaft are provided, and belt-like endless running bodies are respectively wound between the driving pulley and the driven pulley corresponding to the front and rear, and between the endless running bodies arranged in parallel on both sides. A plurality of mounting member fixing shafts arranged in a direction perpendicular to the rotational direction of the endless traveling body are supported at both ends of the mounting member fixing shaft by connecting members provided on the endless traveling body. Thus, each of the mounting member fixing shafts is provided with a plurality of core-circular substrate mounting members that are fitted and fixed coaxially.

  In addition, horizontal rails are fixed to the corresponding positions of the upper traveling portion and the lower traveling portion of the endless traveling body on the opposite surfaces of the support wall, and the rails are rolled on both ends of the mounting member fixing shaft protruding from the connecting member. A moving guide roller is attached so that the upper traveling portion and the lower traveling portion of the endless traveling body are not bent.

  Further, the cover is provided on the opposite surface side of the support wall so as to cover the endless traveling body and the rail portion, and the through portion of the mounting member fixing shaft in the cover extends along the rotation direction of the endless traveling body. It becomes a hole so that the mounting member fixing shaft can be rotated without any trouble.

  Embodiments of the present invention will be described below with reference to FIGS.

  As shown in the figure, the substrate transfer device 11 is assembled into a rectangular frame shape with the horizontal bar 13 and the front bar 14 and the rear bar 15 on both sides, and the bar 12 is provided between the front bar 14 and the rear bar 15 to form the frame body. It is composed.

  Endless traveling bodies 16 are arranged on the lateral rails 13, and a large number of mounting member fixing shafts 17 are installed between the endless traveling bodies 16 on both sides at regular intervals. A plurality of short core-circular substrate mounting members 18 that are externally fitted and fixed in a shape are provided.

  In addition, the shape of the substrate mounting member 18 is not limited to a core shape, and a shape that reduces the contact area of the mounting portion of the substrate A (for example, an ellipse, a triangle, or a sphere) can be preferably used.

  A support wall 19 is erected on the upper surface of the both side ridges 13, a drive shaft 20 and a driven shaft 21 are installed on one end side between the support walls 19, and the drive shaft 20 is driven on both ends of the drive shaft 20. A driven pulley 23 is provided at both ends of the pulley 22 and the driven shaft 21, and a belt-like endless traveling body 16 is wound between the driving pulley 22 and the driven pulley 23 corresponding to the front and rear, respectively. As described above, the motor 24 fixed to the fixed frame 12 is interlocked with the pulley 25 and the drive belt 26, and the activation of the motor 24 causes the endless traveling bodies 16 on both sides to rotate in a predetermined direction. .

  Connecting members 27 are provided on the outer peripheral surface of the endless traveling body 16 at regular intervals, and both ends of the mounting member fixing shaft 17 disposed between the endless traveling bodies 16 are supported by the connecting members 27 on both sides. By the rotation of the traveling body 16, the length direction moves at a right angle with respect to the rotation direction.

  A horizontal upper rail 28 and a lower rail 29 are fixed to corresponding positions of the upper traveling portion and the lower traveling portion of the endless traveling body 16 on the opposing surfaces of the both side support walls 19, and a mounting member protruding from the connecting member 27. Guide rollers 30 that roll on the rails 28 and 29 are attached to both ends of the fixed shaft 17 so as to be rotatable with bearings or the like with respect to the mounting member fixed shaft 17. The guide rollers 30 are connected to the upper rail 28 and the lower rail 29. By moving along the upper surface, the upper traveling portion and the lower traveling portion of the endless traveling body 16 are not bent.

  Further, a cover 31 that covers the endless traveling body 16 and the rails 28 and 29 is provided on the opposite surface side of the both side support walls 19 in the above-described both side ridges 13. As shown in FIG. 2, the penetrating portion becomes a long hole 32 along the rotation direction of the endless traveling body 16, so that the mounting member fixing shaft 17 can be moved without hindrance, and the lower portion of the cover 31. Is provided with a suction adapter 33 for sucking the inside of the cover 31 by a suction source.

Incidentally, as shown in FIG. 1, the substrate A to convey cents, there are several sizes from a large substrate A ₁ to small substrate A _2, so that it is possible to convey these substrates A stable good support to, The placement member fixing shaft 17, the small substrate A _2, and the large substrate A ₁ are arranged so that the placement intervals of the substrate placement members 18 provided on the placement member fixed shafts 17 support the small substrate A ₂ and the medium substrate. The mounting member fixing shafts 17 arranged to be supported are alternately arranged.

  The substrate mounting member 18 can be fixed at an appropriate position along the mounting portion fixing shaft 17 in accordance with the size of the substrate A.

  The substrate transfer device 11 of the present invention has the above-described configuration, and is used for each manufacturing process of the liquid crystal panel and the transfer of the glass substrate in the device. FIG. 5 and FIG. FIG. 5B shows a state in which the substrate A is transported using the connection, and each substrate transport device 11 is configured such that when the motor 24 is activated, the endless traveling bodies 16 on both sides are moved from the rear toward the front. The substrate A rotated at a constant speed in the clockwise direction and supplied onto the substrate transport device 11 is placed on a plurality of substrate mounting shafts 17 provided on the front and rear mounting member fixing shafts 17 between the upper traveling portions of the endless traveling body 16. The mounting member fixing shaft 17 supported horizontally by the member 18 and carrying the substrate A horizontally moves from the left to the right in FIG.

  A plurality of substrate mounting members 18 are provided in the axial direction of the mounting member fixing shaft 17 so that the contact portion between the substrate A and the substrate mounting member 18 can be extremely reduced. Since the placement member 18 does not rotate during movement, the substrate placement member 18 and the substrate A are not rubbed, and the generation of foreign matter can be eliminated.

  Further, the portions of the rails 28 and 29 on which the endless traveling body 16 and the guide roller 30 roll on both sides are covered with a cover 31, and the inside of the cover 31 is connected by an appropriate suction means (not shown) connected to the suction adapter 33. Even if foreign matter is generated in the endless traveling body 16, the guide roller 30 and the rails 28 and 29, since the suction is being performed, the foreign matter is sucked by the suction means through the suction adapter 33, thereby transporting the substrate A. Therefore, it is possible to effectively prevent foreign matter from adhering to the substrate A.

  FIG. 6 shows a delivery state of the substrate A between the front and rear substrate transport apparatuses 11, and the substrate A transported by the rear substrate transport apparatus 11 is placed on the front substrate transport apparatus 11 as shown in FIG. When being sent out, the substrate mounting member 18 that has reached the foremost part moves downward, so that the tip of the substrate A that has been unsupported by the substrate mounting member 18 is shown by a two-dot chain line in FIG. The front end portion hangs downward and enters the front substrate transfer device 11.

  As shown in FIG. 6B, the substrate mounting member 18 that has returned to the rear end side of the front substrate transport apparatus 11 moves while rotating upward from below, so that the substrate mounting member 18 is on the lower surface side. Even if the front end of the substrate A is received so as to be scooped up, the collision between the substrate A and the substrate mounting member 18 does not occur and the front end of the substrate A hangs down, as shown in FIG. The substrate A can be smoothly received regardless of the drooping, and the substrate A is further transferred forward by the front substrate transfer device 11.

  The constituent members of the substrate transfer apparatus of the present invention are not limited to those of the above-described embodiments, and can be implemented with appropriate design changes within the scope of the object of the present invention.

  However, if the endless traveling body 16 is a chain, vibration may occur during driving. Therefore, it is preferable that the endless traveling body 16 has an endless belt shape as in the embodiment.

Partially cutaway plan view showing the overall structure of the substrate transfer device 1 is a side view in which a part of the arrow AA in FIG. 1 is cut away. Fig. 2 is an enlarged vertical side view of the main part of Fig. 2. A longitudinal front view enlarging the main part of the arrow BB in FIG. (A) is a plan view showing an example in which a plurality of substrate transfer devices are connected and used, and (b) is a longitudinal front view of the same. The board | substrate delivery method in a several board | substrate conveyance apparatus is shown, (a) is a longitudinal front view which shows the state just before the board | substrate conveyed by a back | latter board | substrate conveyance apparatus is sent out on a front | former board | substrate conveyance apparatus, (b). Is a longitudinal front view showing a state in which the substrate is sent out on the front substrate transport apparatus, and (c) is a longitudinal front view showing a state in which the front end portion of the substrate is received by the front substrate transport apparatus. Explanatory drawing showing the overall structure of a conventional transport device Explanatory drawing which expanded the principal part of the roller conveyor system which shows the conventional conveying apparatus. Explanatory drawing of a belt conveyor system showing a conventional transport device (A) is explanatory drawing just before sending out which shows the conveyance mistake at the time of the board | substrate conveyance of the conventional belt conveyor system, (b) is explanatory drawing which shows the state which the front-end | tip of the board | substrate collided with the belt of the front substrate conveyance apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Caret washing | cleaning apparatus 2 Cleaning unit 3 Polarizing plate sticking apparatus 4 Sticking table 5 Polarizing plate sticking unit 6 Roller 7 Drive roller 8 Followed roller 9 Conveying belt 10 Support plate 11 Substrate conveying device 12 Rear end 16 Endless traveling body 17 Placement member fixed shaft 18 Substrate placement member 19 Support wall 20 Drive shaft 21 Drive shaft 22 Drive pulley 23 Drive pulley 24 Motor 25 Pulley 26 Drive belt 27 Connecting member 28 Upper rail 29 Lower rail 30 Guide Roller 31 Cover 32 Long hole 33 Suction adapter 34 Drive unit A Board A ₁ Large board A ₂ Small board

Claims (3)

Between the endless traveling bodies arranged in parallel on both sides so as to rotate in a predetermined direction, a plurality of mounting member fixing shafts whose length direction is perpendicular to the rotational direction of the endless traveling body are appropriately spaced. And a substrate transfer apparatus in which a plurality of substrate mounting members are fixed to each mounting member fixing shaft. The rail which is parallel to the traveling portion of the endless traveling body is disposed at a position close to the endless traveling body, and a guide roller which rolls on the rail is provided at the end of each mounting member fixing shaft. The board | substrate conveyance apparatus of description. 3. The substrate transfer apparatus according to claim 1, wherein the endless traveling body and the rail are covered with a cover, and suction means is provided on the cover.

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