SI2710168T1 - Izdelek s prevleko dlc in postopek za nanos prevleke dlc - Google Patents

Izdelek s prevleko dlc in postopek za nanos prevleke dlc Download PDF

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Publication number
SI2710168T1
SI2710168T1 SI201231196T SI201231196T SI2710168T1 SI 2710168 T1 SI2710168 T1 SI 2710168T1 SI 201231196 T SI201231196 T SI 201231196T SI 201231196 T SI201231196 T SI 201231196T SI 2710168 T1 SI2710168 T1 SI 2710168T1
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Slovenia
Prior art keywords
layer
dlc coating
compound
dlc
gradient
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SI201231196T
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English (en)
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Christophe Heau
Laurent Bombillon
Philippe Maurin-Perrier
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H.E.F.
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Publication of SI2710168T1 publication Critical patent/SI2710168T1/sl

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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
    • C23C14/0611Diamond
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/30Self-sustaining carbon mass or layer with impregnant or other layer

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Forging (AREA)
  • Chemically Coating (AREA)
  • Mounting, Exchange, And Manufacturing Of Dies (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Pens And Brushes (AREA)

Claims (8)

  1. Izdelek s prevleko DLC in postopek za nanos prevleke DLC Patentni zahtevki
    1. Kovinski del, ki ima gradientno plast spojine WC-C, z izjemo kovinske podplasti in z izjemo plasti ionske implantacije in površinske plasti DLC, označen s kohezijskim obnašanjem v preskusu praskanja.
  2. 2. Del po zahtevku 1, prekrit s prevleko DLC, naneseno na gradientno plast spojine WC-C, ki ga ima jedkan del, očiščen z mikrovalovi.
  3. 3. Postopek za nanos prevleke DLC na kovinski del, označen z naslednjimi koraki: - del se očisti z mikrovalovi, - del se izpostavi gradientni plasti spojine WC-C, - prevleka DLC se nanese na plast WC-C z mikrovalovno plazmo.
  4. 4. Postopek po zahtevku 3, označen s tem, da se ustvari argonska plazma za čiščenje pri tlaku v območju od 0,05 do 0,5 Pa.
  5. 5. Postopek po zahtevku 3, označen s tem, da je gradientna plast spojine WC-C proizvedena z magnetronskim PDV-jem.
  6. 6. Postopek po zahtevku 5, označen s tem, da se začne s prvo čisto plastjo WC, čemur sledi rampa ogljikovodičnega pretoka in na koncu plast WC-C.
  7. 7. Postopek po zahtevku 5 ali 6, označen s tem, da je debelina gradientne plasti spojine WC-C od 0,3 do 10 pm in prednostno 0,8 pm.
  8. 8. Postopek po zahtevku 3, označen s tem, da ima prevleka DLC debelino od 1 do 20 pm.
SI201231196T 2011-05-19 2012-05-16 Izdelek s prevleko dlc in postopek za nanos prevleke dlc SI2710168T1 (sl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1154388A FR2975404B1 (fr) 2011-05-19 2011-05-19 Piece avec revetement dlc et procede d'application du revetement dlc
PCT/FR2012/051109 WO2012156647A1 (fr) 2011-05-19 2012-05-16 Piece avec revetement dlc et procede d'application du revetement dlc
EP12728712.6A EP2710168B1 (fr) 2011-05-19 2012-05-16 Piece avec revetement dlc et procede d'application du revetement dlc

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Publication Number Publication Date
SI2710168T1 true SI2710168T1 (sl) 2018-04-30

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US (1) US9103016B2 (sl)
EP (1) EP2710168B1 (sl)
JP (1) JP5989766B2 (sl)
KR (1) KR101779844B1 (sl)
CN (1) CN103547707B (sl)
AU (1) AU2012257680B2 (sl)
BR (1) BR112013029492B1 (sl)
CA (1) CA2835803C (sl)
ES (1) ES2654290T3 (sl)
FR (1) FR2975404B1 (sl)
HU (1) HUE035981T2 (sl)
MA (1) MA35157B1 (sl)
MX (1) MX361485B (sl)
MY (1) MY166740A (sl)
PL (1) PL2710168T3 (sl)
RS (1) RS56836B1 (sl)
RU (1) RU2593561C2 (sl)
SG (1) SG194818A1 (sl)
SI (1) SI2710168T1 (sl)
TN (1) TN2013000475A1 (sl)
TW (1) TWI537402B (sl)
UA (1) UA114790C2 (sl)
WO (1) WO2012156647A1 (sl)
ZA (1) ZA201308376B (sl)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105051249B (zh) * 2013-03-22 2019-06-18 日锻汽门株式会社 Dlc被覆膜及被覆气门挺杆
FR3011305B1 (fr) * 2013-09-27 2016-02-05 Hydromecanique & Frottement Axe de piston
EP3039315B8 (en) 2013-08-30 2018-02-14 H.E.F. A piston pin and method of applying an anti-seize coating on the pin
FR3059757B1 (fr) 2016-12-07 2018-11-16 H.E.F. Piece de frottement, systeme mecanique comprenant une telle piece de frottement, et procede de mise en oeuvre
FR3061756B1 (fr) 2017-01-11 2019-05-10 H.E.F. Piston pour machine thermique, machine thermique comprenant un tel piston, et procedes
BR112020002358B1 (pt) * 2017-08-04 2023-12-26 Oerlikon Surface Solutions Ag, Pfäffikon Componentes de válvula revestidos com superfícies deslizantes resistentes à corrosão
FR3082526B1 (fr) * 2018-06-18 2020-09-18 Hydromecanique & Frottement Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium

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Also Published As

Publication number Publication date
US20140087190A1 (en) 2014-03-27
CA2835803A1 (fr) 2012-11-22
HUE035981T2 (hu) 2018-06-28
TWI537402B (zh) 2016-06-11
CN103547707B (zh) 2016-03-02
JP2014517150A (ja) 2014-07-17
EP2710168B1 (fr) 2017-12-20
ZA201308376B (en) 2016-04-28
RS56836B1 (sr) 2018-04-30
TW201309819A (zh) 2013-03-01
BR112013029492A2 (pt) 2017-01-24
EP2710168A1 (fr) 2014-03-26
MX361485B (es) 2018-12-05
KR20140028077A (ko) 2014-03-07
TN2013000475A1 (fr) 2015-03-30
FR2975404B1 (fr) 2014-01-24
AU2012257680A1 (en) 2013-12-12
CN103547707A (zh) 2014-01-29
FR2975404A1 (fr) 2012-11-23
MY166740A (en) 2018-07-19
MX2013013411A (es) 2013-12-10
UA114790C2 (uk) 2017-08-10
BR112013029492B1 (pt) 2021-03-02
MA35157B1 (fr) 2014-06-02
SG194818A1 (en) 2013-12-30
ES2654290T3 (es) 2018-02-13
CA2835803C (fr) 2019-02-19
US9103016B2 (en) 2015-08-11
JP5989766B2 (ja) 2016-09-07
WO2012156647A1 (fr) 2012-11-22
PL2710168T3 (pl) 2018-02-28
RU2593561C2 (ru) 2016-08-10
AU2012257680B2 (en) 2016-10-20
RU2013152884A (ru) 2015-06-10
KR101779844B1 (ko) 2017-09-19

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