FR3082526B1 - Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium - Google Patents

Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium Download PDF

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Publication number
FR3082526B1
FR3082526B1 FR1855319A FR1855319A FR3082526B1 FR 3082526 B1 FR3082526 B1 FR 3082526B1 FR 1855319 A FR1855319 A FR 1855319A FR 1855319 A FR1855319 A FR 1855319A FR 3082526 B1 FR3082526 B1 FR 3082526B1
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FR
France
Prior art keywords
carbon
coating
silicon
hydrogen
amorphic
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1855319A
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English (en)
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FR3082526A1 (fr
Inventor
Laurent Bombillon
Fabrice Prost
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hydromecanique et Frottement SAS
Original Assignee
HEF SAS
Hydromecanique et Frottement SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1855319A priority Critical patent/FR3082526B1/fr
Application filed by HEF SAS, Hydromecanique et Frottement SAS filed Critical HEF SAS
Priority to PCT/FR2019/051462 priority patent/WO2019243720A1/fr
Priority to MX2020014256A priority patent/MX2020014256A/es
Priority to EP19742446.8A priority patent/EP3824114A1/fr
Priority to JP2020560146A priority patent/JP2021533255A/ja
Priority to CA3101721A priority patent/CA3101721A1/fr
Priority to BR112020024244-6A priority patent/BR112020024244A2/pt
Priority to CN201980041073.6A priority patent/CN112400038B/zh
Priority to US17/252,615 priority patent/US20210254220A1/en
Priority to MA053161A priority patent/MA53161A/fr
Priority to KR1020217001357A priority patent/KR20210019553A/ko
Publication of FR3082526A1 publication Critical patent/FR3082526A1/fr
Application granted granted Critical
Publication of FR3082526B1 publication Critical patent/FR3082526B1/fr
Active legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
    • F16J9/26—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials

Abstract

La présente demande concerne une pièce comportant un substrat métallique, un revêtement de carbone amorphe non-hydrogéné, de type ta-C voire a-C, revêtant le substrat, et une sous-couche à base de chrome (Cr), de carbone (C) et de silicium (Si) disposée entre le substrat métallique et le revêtement de carbone amorphe et sur laquelle le revêtement de carbone amorphe est appliqué, caractérisée en ce que la sous-couche comporte, à son interface avec le revêtement de carbone amorphe, un rapport entre une teneur atomique en silicium et une teneur atomique en chrome (Si/Cr) compris entre 0,35 et 0,60, et un rapport entre une teneur atomique en carbone et la teneur atomique en silicium (C/Si) compris entre 2,5 et 3,5.
FR1855319A 2018-06-18 2018-06-18 Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium Active FR3082526B1 (fr)

Priority Applications (11)

Application Number Priority Date Filing Date Title
FR1855319A FR3082526B1 (fr) 2018-06-18 2018-06-18 Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium
US17/252,615 US20210254220A1 (en) 2018-06-18 2019-06-17 Part coated with a hydrogenated amorphous carbon coating on an undercoat comprising chromium, carbon and silicon
EP19742446.8A EP3824114A1 (fr) 2018-06-18 2019-06-17 Pièce revêtue par un revêtement de carbone amorphe hydrogéné sur une sous-couche comportant du chrome, du carbone et du silicium
JP2020560146A JP2021533255A (ja) 2018-06-18 2019-06-17 クロム、炭素およびケイ素を含むアンダーコートの上を水素化非晶質炭素コーティングで被覆した部品
CA3101721A CA3101721A1 (fr) 2018-06-18 2019-06-17 Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium
BR112020024244-6A BR112020024244A2 (pt) 2018-06-18 2019-06-17 peça revestida com um revestimento de carbono amorfo hidrogenado sobre uma subcamada contendo cromo, carbono e silício
PCT/FR2019/051462 WO2019243720A1 (fr) 2018-06-18 2019-06-17 Pièce revêtue par un revêtement de carbone amorphe hydrogéné sur une sous-couche comportant du chrome, du carbone et du silicium
MX2020014256A MX2020014256A (es) 2018-06-18 2019-06-17 Pieza revestida con un revestimiento de carbono amorfo hidrogenado sobre una capa inferior que comprende cromo, carbono y silicio.
MA053161A MA53161A (fr) 2018-06-18 2019-06-17 Pièce revêtue par un revêtement de carbone amorphe hydrogéné sur une sous-couche comportant du chrome, du carbone et du silicium
KR1020217001357A KR20210019553A (ko) 2018-06-18 2019-06-17 크로뮴, 탄소 및 규소를 포함하는 언더코트 상의 수소화 무정형 탄소 코팅으로 코팅된 부품
CN201980041073.6A CN112400038B (zh) 2018-06-18 2019-06-17 在包含铬、碳和硅的底涂层上涂覆有氢化非晶碳涂层的零件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1855319 2018-06-18
FR1855319A FR3082526B1 (fr) 2018-06-18 2018-06-18 Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium

Publications (2)

Publication Number Publication Date
FR3082526A1 FR3082526A1 (fr) 2019-12-20
FR3082526B1 true FR3082526B1 (fr) 2020-09-18

Family

ID=65031269

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1855319A Active FR3082526B1 (fr) 2018-06-18 2018-06-18 Piece revetue par un revetement de carbone amorphe hydrogene sur une sous-couche comportant du chrome, du carbone et du silicium

Country Status (11)

Country Link
US (1) US20210254220A1 (fr)
EP (1) EP3824114A1 (fr)
JP (1) JP2021533255A (fr)
KR (1) KR20210019553A (fr)
CN (1) CN112400038B (fr)
BR (1) BR112020024244A2 (fr)
CA (1) CA3101721A1 (fr)
FR (1) FR3082526B1 (fr)
MA (1) MA53161A (fr)
MX (1) MX2020014256A (fr)
WO (1) WO2019243720A1 (fr)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10018143C5 (de) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC-Schichtsystem sowie Verfahren und Vorrichtung zur Herstellung eines derartigen Schichtsystems
JP3292199B2 (ja) * 2001-03-22 2002-06-17 住友電気工業株式会社 ゴム用金型、ゴム用金型の製造方法およびゴムの成形方法
JP5126867B2 (ja) * 2006-05-25 2013-01-23 独立行政法人産業技術総合研究所 炭素膜の製造方法
JP2008163430A (ja) * 2006-12-28 2008-07-17 Jtekt Corp 高耐食性部材およびその製造方法
US9034525B2 (en) * 2008-06-27 2015-05-19 Johnson Ip Holding, Llc Ionically-conductive amorphous lithium lanthanum zirconium oxide
FR2922358B1 (fr) 2007-10-16 2013-02-01 Hydromecanique & Frottement Procede de traitement de surface d'au moins une piece au moyen de sources elementaires de plasma par resonance cyclotronique electronique
US8261841B2 (en) * 2009-02-17 2012-09-11 Exxonmobil Research And Engineering Company Coated oil and gas well production devices
FR2975404B1 (fr) * 2011-05-19 2014-01-24 Hydromecanique & Frottement Piece avec revetement dlc et procede d'application du revetement dlc
BR102012003607A2 (pt) * 2012-02-16 2013-10-29 Mahle Metal Leve Sa Componente deslizante para uso em motores de combustão interna
FR2995493B1 (fr) 2012-09-11 2014-08-22 Hydromecanique & Frottement Dispositif pour generer un plasma presentant une etendue importante le long d'un axe par resonnance cyclotronique electronique rce a partir d'un milieu gazeux
FR3011305B1 (fr) 2013-09-27 2016-02-05 Hydromecanique & Frottement Axe de piston
JP5965378B2 (ja) * 2013-10-31 2016-08-03 株式会社リケン ピストンリング及びその製造方法
US9624975B2 (en) * 2014-03-21 2017-04-18 Kabushiki Kaisha Toyota Chuo Kenkyusho Sliding member and sliding machine
DE102014217040A1 (de) * 2014-08-27 2016-03-03 Bayerische Motoren Werke Aktiengesellschaft Beschichtung für Metallbauteile, Verfahren zum Beschichten eines Metallbauteils, Kolben für Verbrennungskraftmaschinen und Kfz
JP6533913B2 (ja) * 2014-10-28 2019-06-26 神港精機株式会社 プラズマ表面処理装置
CN106884149A (zh) * 2015-12-15 2017-06-23 中国科学院宁波材料技术与工程研究所 水环境耐磨涂层、其制备方法及应用
WO2017150571A1 (fr) * 2016-03-04 2017-09-08 株式会社リケン Élément coulissant et segment de piston

Also Published As

Publication number Publication date
US20210254220A1 (en) 2021-08-19
BR112020024244A2 (pt) 2021-02-23
EP3824114A1 (fr) 2021-05-26
JP2021533255A (ja) 2021-12-02
CN112400038B (zh) 2023-10-20
KR20210019553A (ko) 2021-02-22
FR3082526A1 (fr) 2019-12-20
MX2020014256A (es) 2021-03-25
MA53161A (fr) 2021-05-26
CN112400038A (zh) 2021-02-23
CA3101721A1 (fr) 2019-12-26
WO2019243720A1 (fr) 2019-12-26

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