SG93844A1 - Flip chip metallization - Google Patents

Flip chip metallization

Info

Publication number
SG93844A1
SG93844A1 SG9905098A SG1999005098A SG93844A1 SG 93844 A1 SG93844 A1 SG 93844A1 SG 9905098 A SG9905098 A SG 9905098A SG 1999005098 A SG1999005098 A SG 1999005098A SG 93844 A1 SG93844 A1 SG 93844A1
Authority
SG
Singapore
Prior art keywords
aluminum
ubm
nascent
flip chip
copper layer
Prior art date
Application number
SG9905098A
Other languages
English (en)
Inventor
Degani Yinon
Alan Gregus Jeffrey
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of SG93844A1 publication Critical patent/SG93844A1/en

Links

Classifications

    • HELECTRICITY
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    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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    • H01L2224/131Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
SG9905098A 1998-10-14 1999-10-12 Flip chip metallization SG93844A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/172,467 US6130141A (en) 1998-10-14 1998-10-14 Flip chip metallization

Publications (1)

Publication Number Publication Date
SG93844A1 true SG93844A1 (en) 2003-01-21

Family

ID=22627814

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9905098A SG93844A1 (en) 1998-10-14 1999-10-12 Flip chip metallization

Country Status (7)

Country Link
US (2) US6130141A (zh)
EP (1) EP0994507B1 (zh)
JP (1) JP3554685B2 (zh)
KR (1) KR100654823B1 (zh)
DE (1) DE69918631T2 (zh)
SG (1) SG93844A1 (zh)
TW (1) TW457602B (zh)

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US6930032B2 (en) * 2002-05-14 2005-08-16 Freescale Semiconductor, Inc. Under bump metallurgy structural design for high reliability bumped packages
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US7232754B2 (en) 2004-06-29 2007-06-19 Micron Technology, Inc. Microelectronic devices and methods for forming interconnects in microelectronic devices
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DE69918631D1 (de) 2004-08-19
TW457602B (en) 2001-10-01
DE69918631T2 (de) 2005-08-11
US6597069B1 (en) 2003-07-22
KR100654823B1 (ko) 2006-12-08
EP0994507A2 (en) 2000-04-19
EP0994507B1 (en) 2004-07-14
US6130141A (en) 2000-10-10
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EP0994507A3 (en) 2000-08-16
JP2000124265A (ja) 2000-04-28

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