SG166722A1 - Methods for producing epitaxially coated silicon wafers - Google Patents
Methods for producing epitaxially coated silicon wafersInfo
- Publication number
- SG166722A1 SG166722A1 SG201001943-8A SG2010019438A SG166722A1 SG 166722 A1 SG166722 A1 SG 166722A1 SG 2010019438 A SG2010019438 A SG 2010019438A SG 166722 A1 SG166722 A1 SG 166722A1
- Authority
- SG
- Singapore
- Prior art keywords
- during
- flow rate
- slm
- silicon wafer
- epitaxially coated
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
- C30B25/165—Controlling or regulating the flow of the reactive gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009022224A DE102009022224B4 (de) | 2009-05-20 | 2009-05-20 | Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
Publications (1)
Publication Number | Publication Date |
---|---|
SG166722A1 true SG166722A1 (en) | 2010-12-29 |
Family
ID=42993609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG201001943-8A SG166722A1 (en) | 2009-05-20 | 2010-03-22 | Methods for producing epitaxially coated silicon wafers |
Country Status (7)
Country | Link |
---|---|
US (1) | US8709156B2 (zh) |
JP (1) | JP4948628B2 (zh) |
KR (1) | KR101077324B1 (zh) |
CN (1) | CN101894743B (zh) |
DE (1) | DE102009022224B4 (zh) |
SG (1) | SG166722A1 (zh) |
TW (1) | TWI404125B (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9343379B2 (en) * | 2011-10-14 | 2016-05-17 | Sunedison Semiconductor Limited | Method to delineate crystal related defects |
KR101339580B1 (ko) * | 2012-01-27 | 2013-12-10 | 주식회사 엘지실트론 | 소이 웨이퍼의 에피층 제조방법 |
CN107658245A (zh) | 2013-01-16 | 2018-02-02 | 应用材料公司 | 石英上拱形结构及下拱形结构 |
KR102034901B1 (ko) * | 2013-07-22 | 2019-11-08 | 에스케이실트론 주식회사 | 공정 챔버의 세정 방법 |
KR101589599B1 (ko) * | 2014-12-22 | 2016-01-28 | 주식회사 엘지실트론 | 웨이퍼의 제조 방법 |
DE102015225663A1 (de) * | 2015-12-17 | 2017-06-22 | Siltronic Ag | Verfahren zum epitaktischen Beschichten von Halbleiterscheiben und Halbleiterscheibe |
CN107331610A (zh) * | 2016-04-28 | 2017-11-07 | 上海新昇半导体科技有限公司 | 提高硅晶片外延层表面平整度的方法 |
DE102017210450A1 (de) * | 2017-06-21 | 2018-12-27 | Siltronic Ag | Verfahren, Steuerungssystem und Anlage zum Bearbeiten einer Halbleiterscheibe sowie Halbleiterscheibe |
JP6717267B2 (ja) * | 2017-07-10 | 2020-07-01 | 株式会社Sumco | シリコンウェーハの製造方法 |
CN110189991A (zh) * | 2019-04-30 | 2019-08-30 | 上海新昇半导体科技有限公司 | 一种外延片的制造方法 |
CN112201568A (zh) * | 2020-10-28 | 2021-01-08 | 西安奕斯伟硅片技术有限公司 | 一种用于硅片的外延生长的方法和设备 |
CN115198352B (zh) * | 2022-08-24 | 2024-03-26 | 西安奕斯伟材料科技股份有限公司 | 一种外延生长方法及外延晶圆 |
CN115537918A (zh) * | 2022-10-10 | 2022-12-30 | 中环领先半导体材料有限公司 | 一种改善111衬底外延表面粗糙度的工艺方法 |
CN115928203A (zh) * | 2022-12-27 | 2023-04-07 | 西安奕斯伟材料科技有限公司 | 外延晶圆生产设备、外延晶圆生产方法和装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4874464A (en) * | 1988-03-14 | 1989-10-17 | Epsilon Limited Partnership | Process for epitaxial deposition of silicon |
US5108792A (en) | 1990-03-09 | 1992-04-28 | Applied Materials, Inc. | Double-dome reactor for semiconductor processing |
DE19938340C1 (de) | 1999-08-13 | 2001-02-15 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe |
DE10025871A1 (de) * | 2000-05-25 | 2001-12-06 | Wacker Siltronic Halbleitermat | Epitaxierte Halbleiterscheibe und Verfahren zu ihrer Herstellung |
JP4158607B2 (ja) | 2003-06-09 | 2008-10-01 | 株式会社Sumco | 半導体基板の製造方法 |
JP4508000B2 (ja) | 2005-06-22 | 2010-07-21 | 株式会社Sumco | エピタキシャル膜の製造方法 |
US7195934B2 (en) | 2005-07-11 | 2007-03-27 | Applied Materials, Inc. | Method and system for deposition tuning in an epitaxial film growth apparatus |
DE102005045339B4 (de) * | 2005-09-22 | 2009-04-02 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
DE102005045338B4 (de) * | 2005-09-22 | 2009-04-02 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
DE102005045337B4 (de) * | 2005-09-22 | 2008-08-21 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
US7651948B2 (en) | 2006-06-30 | 2010-01-26 | Applied Materials, Inc. | Pre-cleaning of substrates in epitaxy chambers |
US9064960B2 (en) * | 2007-01-31 | 2015-06-23 | Applied Materials, Inc. | Selective epitaxy process control |
DE102009004557B4 (de) * | 2009-01-14 | 2018-03-08 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
DE102009010556B4 (de) * | 2009-02-25 | 2013-11-07 | Siltronic Ag | Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
DE102009011622B4 (de) * | 2009-03-04 | 2018-10-25 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung einer epitaxierten Siliciumscheibe |
-
2009
- 2009-05-20 DE DE102009022224A patent/DE102009022224B4/de active Active
-
2010
- 2010-03-22 SG SG201001943-8A patent/SG166722A1/en unknown
- 2010-04-20 KR KR1020100036495A patent/KR101077324B1/ko active IP Right Grant
- 2010-04-23 US US12/765,899 patent/US8709156B2/en active Active
- 2010-05-05 TW TW099114351A patent/TWI404125B/zh active
- 2010-05-20 CN CN2010101832971A patent/CN101894743B/zh active Active
- 2010-05-20 JP JP2010115978A patent/JP4948628B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR20100125175A (ko) | 2010-11-30 |
US20100294197A1 (en) | 2010-11-25 |
KR101077324B1 (ko) | 2011-10-26 |
TWI404125B (zh) | 2013-08-01 |
CN101894743B (zh) | 2012-09-26 |
CN101894743A (zh) | 2010-11-24 |
DE102009022224B4 (de) | 2012-09-13 |
DE102009022224A1 (de) | 2010-11-25 |
US8709156B2 (en) | 2014-04-29 |
TW201110197A (en) | 2011-03-16 |
JP2010272868A (ja) | 2010-12-02 |
JP4948628B2 (ja) | 2012-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG166722A1 (en) | Methods for producing epitaxially coated silicon wafers | |
SG163607A1 (en) | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | |
EP3547349B1 (en) | Method for reducing silicon carbide epitaxial basal plane dislocation density | |
SG163471A1 (en) | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | |
JP6545842B2 (ja) | 半径方向の拡張により歪が低減されたヘテロ構造を準備するプロセスおよび装置 | |
SG143123A1 (en) | Epitaxially coated semiconductor wafer and device and method for producing an epitaxially coated semiconductor wafer | |
CN106757324B (zh) | 一种硅外延片的制造方法 | |
JP5882233B2 (ja) | 堆積プロセスのための方法および装置 | |
SG163574A1 (en) | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | |
US20070062438A1 (en) | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | |
KR101971597B1 (ko) | 웨이퍼 및 박막 제조 방법 | |
TW200802547A (en) | Selective deposition | |
KR20190102210A (ko) | 기저면 전위가 탄화규소 에피택셜층에 미치는 영향을 줄이는 방법 | |
SG157279A1 (en) | Method for producing an epitaxially coated semiconductor wafer | |
US20090269490A1 (en) | Coating apparatus and coating method | |
CN104867818B (zh) | 一种减少碳化硅外延材料缺陷的方法 | |
JP2015160750A (ja) | 炭化珪素エピタキシャルウエハの製造方法 | |
SG142208A1 (en) | Process for producing p»-doped and epitaxially coated semiconductor wafers from silicon | |
KR101782610B1 (ko) | 탄화규소 에피 박막 성장 방법 | |
JP2010040607A (ja) | エピタキシャル成長用サセプタおよびエピタキシャルウェーハの製造方法 | |
JP5264384B2 (ja) | 気相成長装置及び気相成長方法 | |
JP2004327716A (ja) | エピタキシャル成長方法 | |
KR102119755B1 (ko) | 에피택셜 웨이퍼 및 그 제조 방법 | |
KR102128495B1 (ko) | 에피택셜 웨이퍼 | |
KR20160077588A (ko) | 탄화규소 에피 박막 성장 방법 |