SG147287A1 - Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates - Google Patents

Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates

Info

Publication number
SG147287A1
SG147287A1 SG200401982-4A SG2004019824A SG147287A1 SG 147287 A1 SG147287 A1 SG 147287A1 SG 2004019824 A SG2004019824 A SG 2004019824A SG 147287 A1 SG147287 A1 SG 147287A1
Authority
SG
Singapore
Prior art keywords
thick film
channels
film dielectric
liquid metal
ceramic plates
Prior art date
Application number
SG200401982-4A
Other languages
English (en)
Inventor
Lewis R Dove
Paul Thomas Carson
John F Casey
Marvin Glenn Wong
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of SG147287A1 publication Critical patent/SG147287A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Surface Heating Bodies (AREA)
  • Manufacture Of Switches (AREA)
SG200401982-4A 2003-04-30 2004-04-07 Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates SG147287A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/426,449 US6777630B1 (en) 2003-04-30 2003-04-30 Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates

Publications (1)

Publication Number Publication Date
SG147287A1 true SG147287A1 (en) 2008-11-28

Family

ID=32850715

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200401982-4A SG147287A1 (en) 2003-04-30 2004-04-07 Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates

Country Status (4)

Country Link
US (1) US6777630B1 (de)
JP (1) JP2004335456A (de)
SG (1) SG147287A1 (de)
TW (1) TW200426871A (de)

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JP2004199887A (ja) * 2002-12-16 2004-07-15 Agilent Technol Inc 導電性流体を用いた電気接点開閉装置及びその製造方法
US6995329B2 (en) * 2004-03-11 2006-02-07 Agilent Technologies, Inc. Switch, with lid mounted on a thickfilm dielectric
WO2006064949A1 (ja) * 2004-12-17 2006-06-22 Brother Kogyo Kabushiki Kaisha キャピラリーエレクトロウェッティング現象を用いたバルブ及びアクチュエータ
US7190122B2 (en) * 2005-03-01 2007-03-13 Eastman Kodak Company OLED display with improved active matrix circuitry
US7358452B2 (en) * 2005-06-30 2008-04-15 Agilent Technlolgies, Inc. Architecture and method of fabrication for a liquid metal microswitch (LIMMS)
US7449649B2 (en) * 2006-05-23 2008-11-11 Lucent Technologies Inc. Liquid switch
US8653699B1 (en) * 2007-05-31 2014-02-18 Rf Micro Devices, Inc. Controlled closing of MEMS switches
US9159516B2 (en) 2011-01-11 2015-10-13 RF Mirco Devices, Inc. Actuation signal for microactuator bounce and ring suppression
US9012254B2 (en) 2012-02-15 2015-04-21 Kadoor Microelectronics Ltd Methods for forming a sealed liquid metal drop

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Also Published As

Publication number Publication date
US6777630B1 (en) 2004-08-17
JP2004335456A (ja) 2004-11-25
TW200426871A (en) 2004-12-01

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