SG11201807221YA - Fabry-perot interference filter and production method for fabry-perot interference filter - Google Patents
Fabry-perot interference filter and production method for fabry-perot interference filterInfo
- Publication number
- SG11201807221YA SG11201807221YA SG11201807221YA SG11201807221YA SG11201807221YA SG 11201807221Y A SG11201807221Y A SG 11201807221YA SG 11201807221Y A SG11201807221Y A SG 11201807221YA SG 11201807221Y A SG11201807221Y A SG 11201807221YA SG 11201807221Y A SG11201807221Y A SG 11201807221YA
- Authority
- SG
- Singapore
- Prior art keywords
- fabry
- interference filter
- perot interference
- laminate
- outer edge
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000002093 peripheral effect Effects 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00523—Etching material
- B81C1/00539—Wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00634—Processes for shaping materials not provided for in groups B81C1/00444 - B81C1/00626
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016106269 | 2016-05-27 | ||
PCT/JP2017/017172 WO2017203949A1 (ja) | 2016-05-27 | 2017-05-01 | ファブリペロー干渉フィルタ、及びファブリペロー干渉フィルタの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201807221YA true SG11201807221YA (en) | 2018-09-27 |
Family
ID=60411250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201807221YA SG11201807221YA (en) | 2016-05-27 | 2017-05-01 | Fabry-perot interference filter and production method for fabry-perot interference filter |
Country Status (10)
Country | Link |
---|---|
US (3) | US10900834B2 (zh) |
EP (2) | EP3467565B1 (zh) |
JP (3) | JP6341959B2 (zh) |
KR (1) | KR102349371B1 (zh) |
CN (2) | CN109313334B (zh) |
CA (1) | CA3024961A1 (zh) |
PH (1) | PH12018502443A1 (zh) |
SG (1) | SG11201807221YA (zh) |
TW (2) | TWI733816B (zh) |
WO (1) | WO2017203949A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI717519B (zh) | 2016-05-27 | 2021-02-01 | 日商濱松赫德尼古斯股份有限公司 | 法布立-培若干涉濾光器之製造方法 |
JP6899314B2 (ja) * | 2017-11-17 | 2021-07-07 | 浜松ホトニクス株式会社 | 吸着方法 |
FI130816B1 (en) * | 2018-10-03 | 2024-04-04 | Hamamatsu Photonics Kk | FABRY-PEROT INTERFERENCE FILTER |
JP7202160B2 (ja) * | 2018-12-05 | 2023-01-11 | 浜松ホトニクス株式会社 | 光学フィルタ装置、及び光学フィルタ装置の制御方法 |
JP7091489B2 (ja) * | 2020-02-26 | 2022-06-27 | キヤノンファインテックニスカ株式会社 | ワンウェイクラッチ、このワンウェイクラッチを用いた駆動伝達ユニット、及び、この駆動伝達ユニットを用いたインクジェット記録装置 |
DE102020203573A1 (de) | 2020-03-19 | 2021-09-23 | Robert Bosch Gesellschaft mit beschränkter Haftung | Halbleitersubstrat und Verfahren zum Bilden eines Luft- und/oder Gastransferzugangs durch ein Halbleitersubstrat |
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CN109477959B (zh) * | 2016-08-24 | 2021-09-10 | 浜松光子学株式会社 | 法布里-珀罗干涉滤光器 |
EP3505987B1 (en) * | 2016-08-24 | 2023-10-11 | Hamamatsu Photonics K.K. | Fabry-perot interference filter |
-
2016
- 2016-08-24 JP JP2016163928A patent/JP6341959B2/ja active Active
-
2017
- 2017-05-01 CN CN201780032566.4A patent/CN109313334B/zh active Active
- 2017-05-01 WO PCT/JP2017/017172 patent/WO2017203949A1/ja active Application Filing
- 2017-05-01 US US16/303,209 patent/US10900834B2/en active Active
- 2017-05-01 JP JP2018519165A patent/JP6983767B2/ja active Active
- 2017-05-01 EP EP17802544.1A patent/EP3467565B1/en active Active
- 2017-05-01 KR KR1020187024826A patent/KR102349371B1/ko active IP Right Grant
- 2017-05-01 SG SG11201807221YA patent/SG11201807221YA/en unknown
- 2017-05-01 US US16/065,856 patent/US10908022B2/en active Active
- 2017-05-01 CN CN201780032540.XA patent/CN109196404B/zh active Active
- 2017-05-01 CA CA3024961A patent/CA3024961A1/en not_active Abandoned
- 2017-05-01 EP EP17802546.6A patent/EP3467566A4/en active Pending
- 2017-05-26 TW TW106117484A patent/TWI733816B/zh active
- 2017-05-26 TW TW106117483A patent/TWI735581B/zh active
-
2018
- 2018-05-15 JP JP2018093874A patent/JP6368447B1/ja active Active
- 2018-11-20 PH PH12018502443A patent/PH12018502443A1/en unknown
-
2020
- 2020-12-18 US US17/126,297 patent/US20210131870A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN109196404B (zh) | 2022-05-03 |
WO2017203949A1 (ja) | 2017-11-30 |
JP6341959B2 (ja) | 2018-06-13 |
US20190204150A1 (en) | 2019-07-04 |
CN109313334A (zh) | 2019-02-05 |
EP3467565B1 (en) | 2024-02-14 |
JPWO2017203949A1 (ja) | 2019-03-22 |
JP2018128703A (ja) | 2018-08-16 |
CN109196404A (zh) | 2019-01-11 |
TW201805686A (zh) | 2018-02-16 |
KR20190012139A (ko) | 2019-02-08 |
TWI733816B (zh) | 2021-07-21 |
JP6368447B1 (ja) | 2018-08-01 |
JP6983767B2 (ja) | 2021-12-17 |
PH12018502443A1 (en) | 2019-09-09 |
TWI735581B (zh) | 2021-08-11 |
CA3024961A1 (en) | 2017-11-30 |
EP3467565A4 (en) | 2020-03-11 |
US10900834B2 (en) | 2021-01-26 |
US20180373021A1 (en) | 2018-12-27 |
TW201800728A (zh) | 2018-01-01 |
KR102349371B1 (ko) | 2022-01-11 |
US10908022B2 (en) | 2021-02-02 |
US20210131870A1 (en) | 2021-05-06 |
CN109313334B (zh) | 2021-08-17 |
JP2017215559A (ja) | 2017-12-07 |
EP3467566A1 (en) | 2019-04-10 |
EP3467566A4 (en) | 2019-12-25 |
EP3467565A1 (en) | 2019-04-10 |
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