SG11201608330YA - Imprint apparatus, imprint method, and method of manufacturing article - Google Patents

Imprint apparatus, imprint method, and method of manufacturing article

Info

Publication number
SG11201608330YA
SG11201608330YA SG11201608330YA SG11201608330YA SG11201608330YA SG 11201608330Y A SG11201608330Y A SG 11201608330YA SG 11201608330Y A SG11201608330Y A SG 11201608330YA SG 11201608330Y A SG11201608330Y A SG 11201608330YA SG 11201608330Y A SG11201608330Y A SG 11201608330YA
Authority
SG
Singapore
Prior art keywords
imprint
manufacturing article
imprint apparatus
article
manufacturing
Prior art date
Application number
SG11201608330YA
Other languages
English (en)
Inventor
Hiromitsu Yamaguchi
Yasuyuki Tamura
Yoshikazu Miyajima
Akio Saito
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG11201608330YA publication Critical patent/SG11201608330YA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/30Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/02Arrangements for controlling delivery; Arrangements for controlling the spray area for controlling time, or sequence, of delivery
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274Photolithographic processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0334Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
    • H01L21/0337Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2203/00Other substrates
    • B05D2203/30Other inorganic substrates, e.g. ceramics, silicon
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
SG11201608330YA 2014-05-02 2015-04-16 Imprint apparatus, imprint method, and method of manufacturing article SG11201608330YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014095502A JP6329425B2 (ja) 2014-05-02 2014-05-02 インプリント装置、インプリント方法、および物品の製造方法
PCT/JP2015/062315 WO2015166870A1 (en) 2014-05-02 2015-04-16 Imprint apparatus, imprint method, and method of manufacturing article

Publications (1)

Publication Number Publication Date
SG11201608330YA true SG11201608330YA (en) 2016-11-29

Family

ID=54358600

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201608330YA SG11201608330YA (en) 2014-05-02 2015-04-16 Imprint apparatus, imprint method, and method of manufacturing article

Country Status (7)

Country Link
US (1) US10406743B2 (zh)
JP (1) JP6329425B2 (zh)
KR (2) KR20180104777A (zh)
CN (1) CN106256014B (zh)
SG (1) SG11201608330YA (zh)
TW (1) TWI564935B (zh)
WO (1) WO2015166870A1 (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6329437B2 (ja) * 2014-06-10 2018-05-23 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6566843B2 (ja) * 2015-11-12 2019-08-28 キヤノン株式会社 パターン形成方法、インプリントシステムおよび物品製造方法
JP6666039B2 (ja) * 2016-03-07 2020-03-13 キヤノン株式会社 インプリント方法、インプリント装置、プログラム、および物品の製造方法
JP6726987B2 (ja) * 2016-03-17 2020-07-22 キヤノン株式会社 インプリント装置および物品製造方法
SG10201709153VA (en) * 2016-12-12 2018-07-30 Canon Kk Fluid droplet methodology and apparatus for imprint lithography
US10493672B2 (en) * 2017-06-26 2019-12-03 Canon Kabushiki Kaisha Imprint apparatus, method of manufacturing article, information processing apparatus, method of supporting map editing, and storage medium
US11131923B2 (en) * 2018-10-10 2021-09-28 Canon Kabushiki Kaisha System and method of assessing surface quality by optically analyzing dispensed drops
US10725375B2 (en) 2018-12-04 2020-07-28 Canon Kabushiki Kaisha Using non-linear fluid dispensers for forming thick films
JP7149870B2 (ja) * 2019-02-08 2022-10-07 キヤノン株式会社 インプリント装置および物品製造方法
JP7171468B2 (ja) * 2019-02-20 2022-11-15 キヤノン株式会社 情報処理装置、プログラム、リソグラフィ装置、物品の製造方法、物品の製造システム、及び出力方法
CN110143061B (zh) * 2019-07-02 2020-07-24 敏达环保科技(嘉兴)有限公司 一种铁皮专用压印装置
JP7271352B2 (ja) * 2019-07-17 2023-05-11 キオクシア株式会社 インプリント装置、インプリント方法、および半導体装置の製造方法
KR20210117386A (ko) * 2020-03-18 2021-09-29 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
JP7532234B2 (ja) * 2020-12-10 2024-08-13 キヤノン株式会社 平坦化装置、平坦化方法及び物品の製造方法
KR102509680B1 (ko) * 2020-12-31 2023-03-15 (주)유니젯 잉크방울 측정패드와 이를 구비한 잉크젯 프린터 장치 및 잉크방울 측정방법
EP4250006A1 (en) * 2022-03-23 2023-09-27 Koninklijke Philips N.V. Quality control method for imprint lithography

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US13011A (en) * 1855-06-05 Daniel mint horn
JP2004337701A (ja) 2003-05-14 2004-12-02 Seiko Epson Corp 液滴吐出方法、及び液滴吐出装置
JP2007326003A (ja) * 2006-06-06 2007-12-20 Sharp Corp 液滴吐出装置およびその制御方法
US8480933B2 (en) * 2008-10-22 2013-07-09 Molecular Imprints, Inc. Fluid dispense device calibration
JP2010240503A (ja) * 2009-04-01 2010-10-28 Seiko Epson Corp 液滴吐出量測定方法および有機エレクトロルミネッセンス装置の製造方法
JP5520612B2 (ja) * 2010-01-04 2014-06-11 東芝機械株式会社 ディスペンサを備えた転写装置、ディスペンサの吐出量検出方法、及びディスペンサの吐出量制御方法
JP2011159764A (ja) * 2010-01-29 2011-08-18 Toshiba Corp パターン形成方法、レジスト塗布分布算出装置及びレジスト塗布分布算出プログラム
JP5744422B2 (ja) 2010-06-17 2015-07-08 キヤノン株式会社 インプリント方法及びインプリント装置、サンプルショット抽出方法、並びにそれを用いた物品の製造方法
JP5489887B2 (ja) * 2010-06-30 2014-05-14 富士フイルム株式会社 液体塗布装置及び液体塗布方法並びにナノインプリントシステム
JP5337114B2 (ja) * 2010-07-30 2013-11-06 株式会社東芝 パタン形成方法
JP2012114157A (ja) * 2010-11-22 2012-06-14 Toshiba Corp ドロップレシピ作成方法およびデータベース作成方法
JP5727905B2 (ja) 2011-09-15 2015-06-03 富士フイルム株式会社 インクジェットヘッドの吐出量補正方法、吐出量補正装置、及びナノインプリントシステム
JP6180131B2 (ja) * 2012-03-19 2017-08-16 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP2014033069A (ja) * 2012-08-03 2014-02-20 Toshiba Corp パターン形成方法及びディスペンサー
JP5813603B2 (ja) 2012-09-04 2015-11-17 株式会社東芝 インプリント装置およびインプリント方法

Also Published As

Publication number Publication date
US10406743B2 (en) 2019-09-10
KR20160146956A (ko) 2016-12-21
CN106256014A (zh) 2016-12-21
KR101900585B1 (ko) 2018-09-19
JP6329425B2 (ja) 2018-05-23
TWI564935B (zh) 2017-01-01
TW201545205A (zh) 2015-12-01
KR20180104777A (ko) 2018-09-21
CN106256014B (zh) 2019-06-21
US20170015045A1 (en) 2017-01-19
WO2015166870A1 (en) 2015-11-05
JP2015213130A (ja) 2015-11-26

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