SG11201403697YA - Accelerator sensor structure and use thereof - Google Patents

Accelerator sensor structure and use thereof

Info

Publication number
SG11201403697YA
SG11201403697YA SG11201403697YA SG11201403697YA SG11201403697YA SG 11201403697Y A SG11201403697Y A SG 11201403697YA SG 11201403697Y A SG11201403697Y A SG 11201403697YA SG 11201403697Y A SG11201403697Y A SG 11201403697YA SG 11201403697Y A SG11201403697Y A SG 11201403697YA
Authority
SG
Singapore
Prior art keywords
sensor structure
accelerator sensor
accelerator
sensor
Prior art date
Application number
SG11201403697YA
Other languages
English (en)
Inventor
Ville-Pekka Rytkönen
Leif Roschier
Anssi Blomqvist
Original Assignee
Murata Electronics Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Electronics Oy filed Critical Murata Electronics Oy
Publication of SG11201403697YA publication Critical patent/SG11201403697YA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
SG11201403697YA 2012-01-12 2013-01-11 Accelerator sensor structure and use thereof SG11201403697YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20125034 2012-01-12
PCT/FI2013/050024 WO2013104827A1 (en) 2012-01-12 2013-01-11 Accelerator sensor structure and use thereof

Publications (1)

Publication Number Publication Date
SG11201403697YA true SG11201403697YA (en) 2014-07-30

Family

ID=48781082

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201403697YA SG11201403697YA (en) 2012-01-12 2013-01-11 Accelerator sensor structure and use thereof

Country Status (9)

Country Link
US (2) US9279825B2 (ko)
EP (2) EP3059595B1 (ko)
JP (2) JP6144704B2 (ko)
KR (2) KR102016898B1 (ko)
CN (2) CN107102170B (ko)
CA (1) CA2860544A1 (ko)
SG (1) SG11201403697YA (ko)
TW (2) TWI649565B (ko)
WO (1) WO2013104827A1 (ko)

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Also Published As

Publication number Publication date
EP3059595B1 (en) 2018-07-04
TW201818078A (zh) 2018-05-16
EP2802884B1 (en) 2016-06-08
KR102074659B1 (ko) 2020-02-07
US20160041194A1 (en) 2016-02-11
CN107102170A (zh) 2017-08-29
WO2013104827A1 (en) 2013-07-18
KR20190026052A (ko) 2019-03-12
CN104185792A (zh) 2014-12-03
EP3059595A1 (en) 2016-08-24
JP6144704B2 (ja) 2017-06-07
US9651574B2 (en) 2017-05-16
TWI649565B (zh) 2019-02-01
TW201332880A (zh) 2013-08-16
CN107102170B (zh) 2019-10-15
KR20140111030A (ko) 2014-09-17
JP2017194470A (ja) 2017-10-26
JP2015503758A (ja) 2015-02-02
CN104185792B (zh) 2017-03-29
EP2802884A4 (en) 2015-07-08
JP6328823B2 (ja) 2018-05-23
KR102016898B1 (ko) 2019-09-02
CA2860544A1 (en) 2013-07-18
EP2802884A1 (en) 2014-11-19
TWI616395B (zh) 2018-03-01
US9279825B2 (en) 2016-03-08
US20130192371A1 (en) 2013-08-01

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