SG10202004451PA - Film bulk acoustic resonator including recessed frame with scattering sides - Google Patents
Film bulk acoustic resonator including recessed frame with scattering sidesInfo
- Publication number
- SG10202004451PA SG10202004451PA SG10202004451PA SG10202004451PA SG10202004451PA SG 10202004451P A SG10202004451P A SG 10202004451PA SG 10202004451P A SG10202004451P A SG 10202004451PA SG 10202004451P A SG10202004451P A SG 10202004451PA SG 10202004451P A SG10202004451P A SG 10202004451PA
- Authority
- SG
- Singapore
- Prior art keywords
- bulk acoustic
- acoustic resonator
- film bulk
- resonator including
- recessed frame
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/0211—Means for compensation or elimination of undesirable effects of reflections
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/0004—Impedance-matching networks
- H03H9/0014—Impedance-matching networks using bulk acoustic wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/703—Networks using bulk acoustic wave devices
- H03H9/706—Duplexers
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/38—Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
- H04B1/40—Circuits
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962851844P | 2019-05-23 | 2019-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10202004451PA true SG10202004451PA (en) | 2020-12-30 |
Family
ID=73454799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10202004451PA SG10202004451PA (en) | 2019-05-23 | 2020-05-13 | Film bulk acoustic resonator including recessed frame with scattering sides |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11595018B2 (ja) |
| JP (1) | JP2020191637A (ja) |
| SG (1) | SG10202004451PA (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200030478A (ko) | 2018-09-12 | 2020-03-20 | 스카이워크스 글로벌 피티이. 엘티디. | 벌크 음향파 공진기를 위한 리세스 프레임 구조체 |
| US11601112B2 (en) | 2019-05-24 | 2023-03-07 | Skyworks Global Pte. Ltd. | Bulk acoustic wave/film bulk acoustic wave resonator and filter for wide bandwidth applications |
| US11601113B2 (en) | 2019-05-24 | 2023-03-07 | Skyworks Global Pte. Ltd. | Bulk acoustic wave/film bulk acoustic wave resonator and filter for wide bandwidth applications |
| US11165410B2 (en) * | 2019-10-01 | 2021-11-02 | Avago Technologies International Sales Pte. Limited | Bulk acoustic wave resonator |
| KR20210126966A (ko) * | 2020-04-13 | 2021-10-21 | 삼성전기주식회사 | 체적 음향 공진기 |
Family Cites Families (37)
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|---|---|---|---|---|
| JP2002374144A (ja) * | 2001-06-15 | 2002-12-26 | Ube Electronics Ltd | 薄膜圧電共振器 |
| EP1887688A4 (en) * | 2005-06-02 | 2009-08-05 | Murata Manufacturing Co | PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC THIN-FILTER FILTER |
| JP2007074647A (ja) | 2005-09-09 | 2007-03-22 | Toshiba Corp | 薄膜圧電共振器及びその製造方法 |
| JP2007208845A (ja) * | 2006-02-03 | 2007-08-16 | Matsushita Electric Ind Co Ltd | 圧電共振器 |
| EP2003775A4 (en) * | 2006-04-05 | 2011-04-27 | Murata Manufacturing Co | PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC FILTER |
| JP2007288645A (ja) * | 2006-04-19 | 2007-11-01 | Seiko Epson Corp | 圧電薄膜共振子およびその製造方法 |
| JP2008035358A (ja) | 2006-07-31 | 2008-02-14 | Hitachi Media Electoronics Co Ltd | 薄膜圧電バルク波共振器及びそれを用いた高周波フィルタ |
| WO2008126473A1 (ja) * | 2007-04-11 | 2008-10-23 | Murata Manufacturing Co., Ltd. | 圧電薄膜フィルタ |
| WO2011036979A1 (ja) | 2009-09-28 | 2011-03-31 | 太陽誘電株式会社 | 弾性波デバイス |
| US8796904B2 (en) | 2011-10-31 | 2014-08-05 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer |
| WO2011099381A1 (ja) | 2010-02-09 | 2011-08-18 | 株式会社村田製作所 | 圧電デバイス、圧電デバイスの製造方法 |
| US9401692B2 (en) * | 2012-10-29 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having collar structure |
| JP2013038471A (ja) | 2011-08-03 | 2013-02-21 | Taiyo Yuden Co Ltd | 弾性波フィルタ |
| JP5817830B2 (ja) | 2011-09-01 | 2015-11-18 | 株式会社村田製作所 | 圧電バルク波装置及びその製造方法 |
| US8896395B2 (en) * | 2011-09-14 | 2014-11-25 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Accoustic resonator having multiple lateral features |
| JP5742954B2 (ja) * | 2011-10-03 | 2015-07-01 | 株式会社村田製作所 | 超音波発生装置 |
| KR101918031B1 (ko) * | 2013-01-22 | 2018-11-13 | 삼성전자주식회사 | 스퓨리어스 공진을 감소시키는 공진기 및 공진기 제작 방법 |
| US9281800B2 (en) | 2014-01-24 | 2016-03-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Resonator filter device having narrow pass-band |
| JP6400970B2 (ja) | 2014-07-25 | 2018-10-03 | 太陽誘電株式会社 | フィルタおよびデュプレクサ |
| US9571063B2 (en) | 2014-10-28 | 2017-02-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator device with structures having different apodized shapes |
| KR20160068298A (ko) | 2014-12-05 | 2016-06-15 | 삼성전기주식회사 | 벌크 탄성파 필터 |
| JP6441761B2 (ja) | 2015-07-29 | 2018-12-19 | 太陽誘電株式会社 | 圧電薄膜共振器及びフィルタ |
| US9893713B2 (en) | 2015-09-30 | 2018-02-13 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Wide bandwidth muliplexer based on LC and acoustic resonator circuits for performing carrier aggregation |
| JP6515042B2 (ja) | 2016-01-25 | 2019-05-15 | 太陽誘電株式会社 | 弾性波デバイス |
| US10720900B2 (en) | 2016-07-07 | 2020-07-21 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method |
| KR20180018149A (ko) * | 2016-08-12 | 2018-02-21 | 삼성전기주식회사 | 체적 음향 공진기 |
| US20180115302A1 (en) | 2016-10-26 | 2018-04-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Bulk acoustic wave resonators having doped piezoelectric material and a buffer layer |
| KR102369436B1 (ko) | 2017-04-19 | 2022-03-03 | 삼성전기주식회사 | 체적 음향 공진기 |
| DE102017117870B3 (de) * | 2017-08-07 | 2018-12-27 | RF360 Europe GmbH | BAW-Resonator mit reduzierten Störmoden und erhöhtem Gütefaktor |
| DE102017118804B3 (de) | 2017-08-17 | 2018-11-15 | RF360 Europe GmbH | Akustischer Resonator mit hohem Q |
| JP7017364B2 (ja) | 2017-10-18 | 2022-02-08 | 太陽誘電株式会社 | ラダー型フィルタ、圧電薄膜共振器およびその製造方法 |
| WO2019102952A1 (ja) | 2017-11-22 | 2019-05-31 | 株式会社村田製作所 | 圧電デバイス及び圧電デバイスの製造方法 |
| DE102018101442B4 (de) | 2018-01-23 | 2019-09-12 | RF360 Europe GmbH | BAW-Resonator mit erhöhtem Gütefaktor |
| KR20200030478A (ko) | 2018-09-12 | 2020-03-20 | 스카이워크스 글로벌 피티이. 엘티디. | 벌크 음향파 공진기를 위한 리세스 프레임 구조체 |
| KR20200131528A (ko) | 2019-05-14 | 2020-11-24 | 삼성전기주식회사 | 체적 음향 공진기를 포함하는 필터 |
| US11601112B2 (en) | 2019-05-24 | 2023-03-07 | Skyworks Global Pte. Ltd. | Bulk acoustic wave/film bulk acoustic wave resonator and filter for wide bandwidth applications |
| US11601113B2 (en) | 2019-05-24 | 2023-03-07 | Skyworks Global Pte. Ltd. | Bulk acoustic wave/film bulk acoustic wave resonator and filter for wide bandwidth applications |
-
2020
- 2020-05-13 SG SG10202004451PA patent/SG10202004451PA/en unknown
- 2020-05-19 US US16/877,674 patent/US11595018B2/en active Active
- 2020-05-21 JP JP2020088940A patent/JP2020191637A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20200373901A1 (en) | 2020-11-26 |
| US11595018B2 (en) | 2023-02-28 |
| JP2020191637A (ja) | 2020-11-26 |
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