PL3194961T3 - Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału - Google Patents

Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału

Info

Publication number
PL3194961T3
PL3194961T3 PL15842191T PL15842191T PL3194961T3 PL 3194961 T3 PL3194961 T3 PL 3194961T3 PL 15842191 T PL15842191 T PL 15842191T PL 15842191 T PL15842191 T PL 15842191T PL 3194961 T3 PL3194961 T3 PL 3194961T3
Authority
PL
Poland
Prior art keywords
thin film
bulk acoustic
acoustic resonator
film bulk
signal enhancement
Prior art date
Application number
PL15842191T
Other languages
English (en)
Inventor
Michael Salvati
Ian Robert Harmon
Original Assignee
Qorvo Us, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo Us, Inc. filed Critical Qorvo Us, Inc.
Publication of PL3194961T3 publication Critical patent/PL3194961T3/pl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details

Landscapes

  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Cell Biology (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Microbiology (AREA)
  • Biotechnology (AREA)
  • Acoustics & Sound (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
PL15842191T 2014-09-15 2015-09-10 Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału PL3194961T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462050589P 2014-09-15 2014-09-15
PCT/US2015/049387 WO2016044055A1 (en) 2014-09-15 2015-09-10 Thin film bulk acoustic resonator with signal enhancement
EP15842191.7A EP3194961B1 (en) 2014-09-15 2015-09-10 Thin film bulk acoustic resonator with signal enhancement

Publications (1)

Publication Number Publication Date
PL3194961T3 true PL3194961T3 (pl) 2021-08-02

Family

ID=55533700

Family Applications (1)

Application Number Title Priority Date Filing Date
PL15842191T PL3194961T3 (pl) 2014-09-15 2015-09-10 Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału

Country Status (7)

Country Link
EP (1) EP3194961B1 (pl)
JP (1) JP6694434B2 (pl)
CN (1) CN107250794B (pl)
DK (1) DK3194961T3 (pl)
ES (1) ES2863602T3 (pl)
PL (1) PL3194961T3 (pl)
WO (1) WO2016044055A1 (pl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10234425B2 (en) 2013-03-15 2019-03-19 Qorvo Us, Inc. Thin film bulk acoustic resonator with signal enhancement
US20170153253A9 (en) 2013-05-23 2017-06-01 Qorvo Us, Inc. Two part assembly
ES2864666T3 (es) 2013-05-23 2021-10-14 Qorvo Us Inc Sensor piezoeléctrico
WO2020010293A1 (en) 2018-07-06 2020-01-09 Qorvo Us, Inc. Bulk acoustic wave resonator with increased dynamic range
JP2021091758A (ja) * 2019-12-06 2021-06-17 国立大学法人九州大学 両親媒性物質を含むセンサの洗浄液

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999284A (en) * 1988-04-06 1991-03-12 E. I. Du Pont De Nemours And Company Enzymatically amplified piezoelectric specific binding assay
US5932953A (en) * 1997-06-30 1999-08-03 Iowa State University Research Foundation, Inc. Method and system for detecting material using piezoelectric resonators
US7468608B2 (en) 2002-07-19 2008-12-23 Siemens Aktiengesellschaft Device and method for detecting a substance of a liquid
CN100495008C (zh) 2003-06-18 2009-06-03 中山市泰威技术开发有限公司 压电体声波传感器无源式阵列及其生物芯片
US20050148065A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Biosensor utilizing a resonator having a functionalized surface
US20090282902A1 (en) * 2006-08-17 2009-11-19 Peter Warthoe Bio surface acoustic wave (saw) resonator amplification for detection of a target analyte
KR20090070886A (ko) * 2007-12-27 2009-07-01 삼성전자주식회사 압전 센서를 이용한 바이오 센서에서 신호의 주파수변화량을 증폭하는 방법
FR2943787B1 (fr) * 2009-03-26 2012-10-12 Commissariat Energie Atomique Micro-dispositif de detection in situ de particules d'interet dans un milieu fluide, et procede de mise en oeuvre
DK2630479T3 (da) 2010-10-20 2020-07-20 Qorvo Us Inc Anordning og fremgangsmåde til måling af bindingskinetik og koncentration med en resonanssensor
TW201411810A (zh) * 2012-07-16 2014-03-16 Silanna Group Pty Ltd 薄膜型塊體聲波共振器之ｃｍｏｓ製作
PL2972295T3 (pl) * 2013-03-15 2019-07-31 Qorvo Us, Inc. Cienkowarstwowy rezonator z akustyczną falą objętościową ze wzmocnieniem sygnału
EP3194962B1 (en) * 2014-09-15 2019-04-03 Qorvo Us, Inc. Mass detection through redox coupling

Also Published As

Publication number Publication date
EP3194961A1 (en) 2017-07-26
CN107250794B (zh) 2020-09-15
JP2017527831A (ja) 2017-09-21
EP3194961A4 (en) 2018-03-28
WO2016044055A1 (en) 2016-03-24
WO2016044055A8 (en) 2016-05-26
ES2863602T3 (es) 2021-10-11
JP6694434B2 (ja) 2020-05-13
EP3194961B1 (en) 2021-01-06
CN107250794A (zh) 2017-10-13
DK3194961T3 (da) 2021-03-29

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