SG10201810091WA - Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom - Google Patents

Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Info

Publication number
SG10201810091WA
SG10201810091WA SG10201810091WA SG10201810091WA SG10201810091WA SG 10201810091W A SG10201810091W A SG 10201810091WA SG 10201810091W A SG10201810091W A SG 10201810091WA SG 10201810091W A SG10201810091W A SG 10201810091WA SG 10201810091W A SG10201810091W A SG 10201810091WA
Authority
SG
Singapore
Prior art keywords
actuator
diaphragm
mems loudspeaker
spaced apart
actuator structure
Prior art date
Application number
SG10201810091WA
Other languages
English (en)
Inventor
Clerici Beltrami Andrea Rusconi
Ferruccio Bottoni
Original Assignee
USound GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by USound GmbH filed Critical USound GmbH
Publication of SG10201810091WA publication Critical patent/SG10201810091WA/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/02—Transducers using more than one principle simultaneously
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Micromachines (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
SG10201810091WA 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom SG10201810091WA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014106753.3A DE102014106753B4 (de) 2014-05-14 2014-05-14 MEMS-Lautsprecher mit Aktuatorstruktur und davon beabstandeter Membran

Publications (1)

Publication Number Publication Date
SG10201810091WA true SG10201810091WA (en) 2018-12-28

Family

ID=53177488

Family Applications (5)

Application Number Title Priority Date Filing Date
SG10201810071TA SG10201810071TA (en) 2014-05-14 2015-05-13 Mems acoustic transducer, and acoustic transducer assembly having a stopper mechanism
SG11201609518SA SG11201609518SA (en) 2014-05-14 2015-05-13 Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it
SG11201609519TA SG11201609519TA (en) 2014-05-14 2015-05-13 Mems sound transducer and sound transducer arrangement with a stopper mechanism
SG10202001750SA SG10202001750SA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
SG10201810091WA SG10201810091WA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Family Applications Before (4)

Application Number Title Priority Date Filing Date
SG10201810071TA SG10201810071TA (en) 2014-05-14 2015-05-13 Mems acoustic transducer, and acoustic transducer assembly having a stopper mechanism
SG11201609518SA SG11201609518SA (en) 2014-05-14 2015-05-13 Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it
SG11201609519TA SG11201609519TA (en) 2014-05-14 2015-05-13 Mems sound transducer and sound transducer arrangement with a stopper mechanism
SG10202001750SA SG10202001750SA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Country Status (11)

Country Link
US (2) US9980051B2 (de)
EP (3) EP3143777B1 (de)
KR (2) KR20160149284A (de)
CN (2) CN106688245B (de)
AU (2) AU2015261458B2 (de)
CA (2) CA2948731A1 (de)
DE (1) DE102014106753B4 (de)
HK (1) HK1232365A1 (de)
MY (1) MY177874A (de)
SG (5) SG10201810071TA (de)
WO (2) WO2015173334A1 (de)

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WO2021134686A1 (zh) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 一种mems扬声器

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TWI707586B (zh) * 2018-08-14 2020-10-11 美律實業股份有限公司 微機電揚聲器
TWI684367B (zh) * 2018-09-14 2020-02-01 美律實業股份有限公司 揚聲器以及其微機電致動器
TWI716916B (zh) * 2019-06-26 2021-01-21 美律實業股份有限公司 揚聲器結構
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CN110290449A (zh) * 2019-05-09 2019-09-27 安徽奥飞声学科技有限公司 一种音频装置及电子设备
IT201900007317A1 (it) 2019-05-27 2020-11-27 St Microelectronics Srl Trasduttore acustico microelettromeccanico piezoelettrico avente caratteristiche migliorate e relativo procedimento di fabbricazione
CN110213705B (zh) * 2019-05-30 2022-08-16 歌尔科技有限公司 Mems扬声器
DE102019125815A1 (de) * 2019-09-25 2021-03-25 USound GmbH Schallwandlereinheit zum Erzeugen und/oder Erfassen von Schallwellen im hörbaren Wellenlängenbereich und/oder im Ultraschallbereich
KR102375721B1 (ko) * 2019-11-04 2022-03-17 (주)에스제이인스트루먼트 초음파 트랜스듀서 조립체
IT202000015073A1 (it) 2020-06-23 2021-12-23 St Microelectronics Srl Trasduttore microelettromeccanico a membrana con smorzatore attivo
CN111918187B (zh) * 2020-07-08 2021-10-29 瑞声科技（南京）有限公司 Mems扬声器
CN111885467B (zh) * 2020-07-09 2021-09-21 诺思(天津)微系统有限责任公司 Mems压电扬声器
US11595758B2 (en) 2020-07-09 2023-02-28 Apple Inc. MEMS speaker
CN111918188B (zh) * 2020-07-10 2021-12-14 瑞声科技（南京）有限公司 一种mems扬声器及其制造工艺
FR3120176B1 (fr) 2021-02-23 2023-11-03 Commissariat Energie Atomique Haut-parleur MEMS et procédé de microfabrication d’un tel haut-parleur
FR3122023B1 (fr) 2021-04-15 2023-12-29 Commissariat Energie Atomique Haut-parleur micrométrique
US20220332568A1 (en) * 2021-04-19 2022-10-20 Skyworks Solutions, Inc. Dual membrane piezoelectric microelectromechanical system microphone
CN113179472A (zh) * 2021-04-28 2021-07-27 广州博良电子有限公司 一种利用液压传动放大振幅的发声方法和结构
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FR3143172A1 (fr) 2022-12-12 2024-06-14 Commissariat A L' Energie Atomique Et Aux Energies Alternatives Dispositif acoustique à fréquence de résonance variable

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Also Published As

Publication number Publication date
AU2015261458B2 (en) 2019-05-16
US10034097B2 (en) 2018-07-24
CA2948731A1 (en) 2015-11-19
KR20160149284A (ko) 2016-12-27
EP3143777A1 (de) 2017-03-22
WO2015173333A1 (de) 2015-11-19
US9980051B2 (en) 2018-05-22
DE102014106753A1 (de) 2015-11-19
DE102014106753B4 (de) 2022-08-11
KR102307144B1 (ko) 2021-09-30
EP3143777B1 (de) 2021-01-06
SG10202001750SA (en) 2020-04-29
HK1232365A1 (zh) 2018-01-05
CA2948725A1 (en) 2015-11-19
US20170085994A1 (en) 2017-03-23
AU2015261459A1 (en) 2016-12-15
CN106688245B (zh) 2020-06-16
US20170094418A1 (en) 2017-03-30
EP3823304B1 (de) 2024-04-03
MY177874A (en) 2020-09-24
SG11201609518SA (en) 2016-12-29
EP3143778B1 (de) 2021-06-16
EP3823304A1 (de) 2021-05-19
AU2015261459B2 (en) 2019-03-14
KR20170007413A (ko) 2017-01-18
WO2015173334A1 (de) 2015-11-19
SG10201810071TA (en) 2018-12-28
CN106537938B (zh) 2020-03-27
AU2015261458A1 (en) 2016-12-15
CN106537938A (zh) 2017-03-22
CN106688245A (zh) 2017-05-17
EP3143778A1 (de) 2017-03-22
SG11201609519TA (en) 2016-12-29

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