SG10202001750SA - Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom - Google Patents
Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefromInfo
- Publication number
- SG10202001750SA SG10202001750SA SG10202001750SA SG10202001750SA SG10202001750SA SG 10202001750S A SG10202001750S A SG 10202001750SA SG 10202001750S A SG10202001750S A SG 10202001750SA SG 10202001750S A SG10202001750S A SG 10202001750SA SG 10202001750S A SG10202001750S A SG 10202001750SA
- Authority
- SG
- Singapore
- Prior art keywords
- spaced apart
- apart therefrom
- actuator structure
- mems loudspeaker
- diaphragm spaced
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
- H04R23/02—Transducers using more than one principle simultaneously
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R7/00—Diaphragms for electromechanical transducers; Cones
- H04R7/16—Mounting or tensioning of diaphragms or cones
- H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Multimedia (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Micromachines (AREA)
- Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014106753.3A DE102014106753B4 (en) | 2014-05-14 | 2014-05-14 | MEMS loudspeaker with actuator structure and diaphragm spaced therefrom |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10202001750SA true SG10202001750SA (en) | 2020-04-29 |
Family
ID=53177488
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201609518SA SG11201609518SA (en) | 2014-05-14 | 2015-05-13 | Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it |
| SG10202001750SA SG10202001750SA (en) | 2014-05-14 | 2015-05-13 | Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom |
| SG11201609519TA SG11201609519TA (en) | 2014-05-14 | 2015-05-13 | Mems sound transducer and sound transducer arrangement with a stopper mechanism |
| SG10201810071TA SG10201810071TA (en) | 2014-05-14 | 2015-05-13 | Mems acoustic transducer, and acoustic transducer assembly having a stopper mechanism |
| SG10201810091WA SG10201810091WA (en) | 2014-05-14 | 2015-05-13 | Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201609518SA SG11201609518SA (en) | 2014-05-14 | 2015-05-13 | Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201609519TA SG11201609519TA (en) | 2014-05-14 | 2015-05-13 | Mems sound transducer and sound transducer arrangement with a stopper mechanism |
| SG10201810071TA SG10201810071TA (en) | 2014-05-14 | 2015-05-13 | Mems acoustic transducer, and acoustic transducer assembly having a stopper mechanism |
| SG10201810091WA SG10201810091WA (en) | 2014-05-14 | 2015-05-13 | Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US10034097B2 (en) |
| EP (3) | EP3143777B1 (en) |
| KR (2) | KR102307144B1 (en) |
| CN (2) | CN106537938B (en) |
| AU (2) | AU2015261458B2 (en) |
| CA (2) | CA2948731A1 (en) |
| DE (1) | DE102014106753B4 (en) |
| HK (1) | HK1232365A1 (en) |
| MY (1) | MY177874A (en) |
| SG (5) | SG11201609518SA (en) |
| WO (2) | WO2015173334A1 (en) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102015114245A1 (en) | 2015-08-27 | 2017-03-02 | USound GmbH | MEMS sound transducer with closed control system |
| DE102015116640B4 (en) * | 2015-10-01 | 2024-09-05 | USound GmbH | MEMS circuit board module with integrated piezoelectric structure and transducer arrangement |
| JP6983006B2 (en) | 2017-08-23 | 2021-12-17 | 株式会社ジャパンディスプレイ | Display device |
| DE102017216907B4 (en) * | 2017-09-25 | 2021-03-25 | Robert Bosch Gmbh | Micromechanical sensor device and method for manufacturing the same |
| US11444556B1 (en) * | 2018-03-01 | 2022-09-13 | John M. Leslie | Piezoelectric electric energy generating device |
| IT201800004758A1 (en) * | 2018-04-20 | 2019-10-20 | PIEZOELECTRIC MEMS ACOUSTIC TRANSDUCER AND RELATED MANUFACTURING PROCEDURE | |
| KR102167474B1 (en) * | 2018-04-25 | 2020-10-19 | 주식회사 이엠텍 | Hybrid actuator |
| TWI707586B (en) * | 2018-08-14 | 2020-10-11 | 美律實業股份有限公司 | Mems speaker |
| TWI684367B (en) * | 2018-09-14 | 2020-02-01 | 美律實業股份有限公司 | Speaker and microelectromechanical actuator thereof |
| CN110856085B (en) * | 2018-11-30 | 2021-07-09 | 美律电子(深圳)有限公司 | Loudspeaker structure |
| TWI683460B (en) * | 2018-11-30 | 2020-01-21 | 美律實業股份有限公司 | Speaker structure |
| TWI716916B (en) * | 2019-06-26 | 2021-01-21 | 美律實業股份有限公司 | Speaker structure |
| IT201900001017A1 (en) * | 2019-01-23 | 2020-07-23 | St Microelectronics Srl | MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRIC ACTUATION AND RELATED MANUFACTURING PROCEDURE |
| CN110290449A (en) * | 2019-05-09 | 2019-09-27 | 安徽奥飞声学科技有限公司 | A kind of audio devices and electronic equipment |
| IT201900007317A1 (en) | 2019-05-27 | 2020-11-27 | St Microelectronics Srl | MICROELECTROMECHANICAL PIEZOELECTRIC ACOUSTIC TRANSDUCER WITH IMPROVED CHARACTERISTICS AND RELATED MANUFACTURING PROCESS |
| CN110213705B (en) * | 2019-05-30 | 2022-08-16 | 歌尔科技有限公司 | MEMS speaker |
| DE102019125815A1 (en) | 2019-09-25 | 2021-03-25 | USound GmbH | Sound transducer unit for generating and / or detecting sound waves in the audible wavelength range and / or in the ultrasonic range |
| KR102375721B1 (en) * | 2019-11-04 | 2022-03-17 | (주)에스제이인스트루먼트 | A Ultrasonic Transducer Assembly |
| WO2021134686A1 (en) * | 2019-12-31 | 2021-07-08 | 瑞声声学科技(深圳)有限公司 | Mems speaker |
| IT202000015073A1 (en) | 2020-06-23 | 2021-12-23 | St Microelectronics Srl | MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER |
| CN111918187B (en) * | 2020-07-08 | 2021-10-29 | 瑞声科技（南京）有限公司 | MEMS loudspeaker |
| CN111885467B (en) * | 2020-07-09 | 2021-09-21 | 诺思(天津)微系统有限责任公司 | MEMS piezoelectric speaker |
| US11595758B2 (en) | 2020-07-09 | 2023-02-28 | Apple Inc. | MEMS speaker |
| CN111918188B (en) * | 2020-07-10 | 2021-12-14 | 瑞声科技（南京）有限公司 | MEMS loudspeaker and manufacturing process thereof |
| FR3120176B1 (en) | 2021-02-23 | 2023-11-03 | Commissariat Energie Atomique | MEMS loudspeaker and process for microfabrication of such a loudspeaker |
| FR3122023B1 (en) | 2021-04-15 | 2023-12-29 | Commissariat Energie Atomique | Micrometric speaker |
| US20220332568A1 (en) * | 2021-04-19 | 2022-10-20 | Skyworks Solutions, Inc. | Dual membrane piezoelectric microelectromechanical system microphone |
| CN113179472A (en) * | 2021-04-28 | 2021-07-27 | 广州博良电子有限公司 | Sound production method and structure for amplifying amplitude by utilizing hydraulic transmission |
| FR3143172A1 (en) | 2022-12-12 | 2024-06-14 | Commissariat A L' Energie Atomique Et Aux Energies Alternatives | Acoustic device with variable resonance frequency |
| FR3143170A1 (en) | 2022-12-12 | 2024-06-14 | Commissariat A L' Energie Atomique Et Aux Energies Alternatives | Electromechanical device with variable resonance frequency and associated acoustic device |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS577298U (en) * | 1980-06-12 | 1982-01-14 | ||
| JPS59139799A (en) * | 1983-01-31 | 1984-08-10 | Sony Corp | Flat speaker |
| AU676639B2 (en) * | 1994-05-20 | 1997-03-13 | Shinsei Corporation | Sound generating device |
| GB0211508D0 (en) * | 2002-05-20 | 2002-06-26 | New Transducers Ltd | Transducer |
| CN1494354A (en) * | 2003-09-27 | 2004-05-05 | 百富非凡机电设备（北京）有限公司 | Improved vibration membrane base material construction unit of loudspeaker and its manufacturing method |
| WO2005064989A1 (en) | 2003-12-25 | 2005-07-14 | Murata Manufacturing Co., Ltd. | Piezoelectric electro-acoustic converter |
| JP5012512B2 (en) * | 2005-12-27 | 2012-08-29 | 日本電気株式会社 | Piezoelectric actuator and electronic device |
| US20080019543A1 (en) * | 2006-07-19 | 2008-01-24 | Yamaha Corporation | Silicon microphone and manufacturing method therefor |
| JP2008030182A (en) * | 2006-08-01 | 2008-02-14 | National Institute Of Advanced Industrial & Technology | Constant amplitude mechanism and electric potential sensor with same |
| EP2165565A1 (en) * | 2007-06-29 | 2010-03-24 | Nxp B.V. | Membrane for an acoustic device and acoustic device |
| CN101203064B (en) * | 2007-12-24 | 2012-03-14 | 瑞声声学科技(常州)有限公司 | Composite diaphragm and its making method |
| BRPI0920481A2 (en) * | 2009-01-27 | 2015-12-22 | Hewlett Packard Development Co | acoustic transducer device, microphone and transducer |
| KR101561663B1 (en) | 2009-08-31 | 2015-10-21 | 삼성전자주식회사 | Piezoelectric micro speaker having piston diaphragm and method of manufacturing the same |
| KR101561661B1 (en) * | 2009-09-25 | 2015-10-21 | 삼성전자주식회사 | Piezoelectric micro speaker having weight attached to vibrating membrane and method of manufacturing the same |
| KR101573517B1 (en) * | 2009-10-12 | 2015-12-02 | 삼성전자주식회사 | Piezoelectric micro speaker |
| DE102012200957A1 (en) * | 2011-07-21 | 2013-01-24 | Robert Bosch Gmbh | Component with a micromechanical microphone structure |
| KR101273700B1 (en) | 2011-09-15 | 2013-06-12 | 삼성전기주식회사 | Micro Electro Mechanical Systems Component |
| US9402137B2 (en) | 2011-11-14 | 2016-07-26 | Infineon Technologies Ag | Sound transducer with interdigitated first and second sets of comb fingers |
| DE102011086722A1 (en) * | 2011-11-21 | 2013-05-23 | Robert Bosch Gmbh | Micromechanical functional device, in particular speaker device, and corresponding manufacturing method |
| JP5987572B2 (en) * | 2012-09-11 | 2016-09-07 | オムロン株式会社 | Acoustic transducer |
| JP5991475B2 (en) * | 2012-09-14 | 2016-09-14 | オムロン株式会社 | Acoustic transducer |
| CN104541521B (en) | 2013-08-06 | 2017-12-26 | 歌尔股份有限公司 | Shock resistance silicon substrate MEMS microphone, the system comprising the microphone and encapsulation |
-
2014
- 2014-05-14 DE DE102014106753.3A patent/DE102014106753B4/en active Active
-
2015
- 2015-05-13 US US15/311,129 patent/US10034097B2/en active Active
- 2015-05-13 SG SG11201609518SA patent/SG11201609518SA/en unknown
- 2015-05-13 CN CN201580037834.2A patent/CN106537938B/en active Active
- 2015-05-13 AU AU2015261458A patent/AU2015261458B2/en not_active Ceased
- 2015-05-13 WO PCT/EP2015/060659 patent/WO2015173334A1/en active Application Filing
- 2015-05-13 SG SG10202001750SA patent/SG10202001750SA/en unknown
- 2015-05-13 AU AU2015261459A patent/AU2015261459B2/en not_active Ceased
- 2015-05-13 KR KR1020167034940A patent/KR102307144B1/en active IP Right Grant
- 2015-05-13 EP EP15722531.9A patent/EP3143777B1/en active Active
- 2015-05-13 SG SG11201609519TA patent/SG11201609519TA/en unknown
- 2015-05-13 EP EP15723691.0A patent/EP3143778B1/en active Active
- 2015-05-13 WO PCT/EP2015/060658 patent/WO2015173333A1/en active Application Filing
- 2015-05-13 CA CA2948731A patent/CA2948731A1/en not_active Abandoned
- 2015-05-13 US US15/311,127 patent/US9980051B2/en active Active
- 2015-05-13 SG SG10201810071TA patent/SG10201810071TA/en unknown
- 2015-05-13 SG SG10201810091WA patent/SG10201810091WA/en unknown
- 2015-05-13 MY MYPI2016704164A patent/MY177874A/en unknown
- 2015-05-13 EP EP20217912.3A patent/EP3823304B1/en active Active
- 2015-05-13 CA CA2948725A patent/CA2948725A1/en not_active Abandoned
- 2015-05-13 CN CN201580037404.0A patent/CN106688245B/en active Active
- 2015-05-13 KR KR1020167034039A patent/KR20160149284A/en active IP Right Grant
-
2017
- 2017-06-09 HK HK17105731.4A patent/HK1232365A1/en unknown
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