SG11201609518SA - Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it - Google Patents

Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it

Info

Publication number
SG11201609518SA
SG11201609518SA SG11201609518SA SG11201609518SA SG11201609518SA SG 11201609518S A SG11201609518S A SG 11201609518SA SG 11201609518S A SG11201609518S A SG 11201609518SA SG 11201609518S A SG11201609518S A SG 11201609518SA SG 11201609518S A SG11201609518S A SG 11201609518SA
Authority
SG
Singapore
Prior art keywords
distance
actuator structure
mems loudspeaker
membrane spaced
membrane
Prior art date
Application number
SG11201609518SA
Inventor
Clerici Andrea Rusconi
Ferruccio Bottoni
Original Assignee
USound GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by USound GmbH filed Critical USound GmbH
Publication of SG11201609518SA publication Critical patent/SG11201609518SA/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/02—Transducers using more than one principle simultaneously
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Micromachines (AREA)
  • Audible-Bandwidth Dynamoelectric Transducers Other Than Pickups (AREA)
SG11201609518SA 2014-05-14 2015-05-13 Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it SG11201609518SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014106753.3A DE102014106753B4 (en) 2014-05-14 2014-05-14 MEMS loudspeaker with actuator structure and diaphragm spaced therefrom
PCT/EP2015/060659 WO2015173334A1 (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Publications (1)

Publication Number Publication Date
SG11201609518SA true SG11201609518SA (en) 2016-12-29

Family

ID=53177488

Family Applications (5)

Application Number Title Priority Date Filing Date
SG10201810091WA SG10201810091WA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
SG11201609519TA SG11201609519TA (en) 2014-05-14 2015-05-13 Mems sound transducer and sound transducer arrangement with a stopper mechanism
SG10202001750SA SG10202001750SA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
SG11201609518SA SG11201609518SA (en) 2014-05-14 2015-05-13 Mems loudspeaker with an actuator structure and a membrane spaced at a distance from it
SG10201810071TA SG10201810071TA (en) 2014-05-14 2015-05-13 Mems acoustic transducer, and acoustic transducer assembly having a stopper mechanism

Family Applications Before (3)

Application Number Title Priority Date Filing Date
SG10201810091WA SG10201810091WA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
SG11201609519TA SG11201609519TA (en) 2014-05-14 2015-05-13 Mems sound transducer and sound transducer arrangement with a stopper mechanism
SG10202001750SA SG10202001750SA (en) 2014-05-14 2015-05-13 Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG10201810071TA SG10201810071TA (en) 2014-05-14 2015-05-13 Mems acoustic transducer, and acoustic transducer assembly having a stopper mechanism

Country Status (11)

Country Link
US (2) US9980051B2 (en)
EP (3) EP3823304B1 (en)
KR (2) KR102307144B1 (en)
CN (2) CN106537938B (en)
AU (2) AU2015261458B2 (en)
CA (2) CA2948725A1 (en)
DE (1) DE102014106753B4 (en)
HK (1) HK1232365A1 (en)
MY (1) MY177874A (en)
SG (5) SG10201810091WA (en)
WO (2) WO2015173334A1 (en)

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DE102015114245A1 (en) 2015-08-27 2017-03-02 USound GmbH MEMS sound transducer with closed control system
DE102015116640A1 (en) * 2015-10-01 2017-04-06 USound GmbH MEMS printed circuit board module with integrated piezoelectric structure and sound transducer arrangement
JP6983006B2 (en) 2017-08-23 2021-12-17 株式会社ジャパンディスプレイ Display device
DE102017216907B4 (en) * 2017-09-25 2021-03-25 Robert Bosch Gmbh Micromechanical sensor device and method for manufacturing the same
US11444556B1 (en) * 2018-03-01 2022-09-13 John M. Leslie Piezoelectric electric energy generating device
IT201800004758A1 (en) 2018-04-20 2019-10-20 PIEZOELECTRIC MEMS ACOUSTIC TRANSDUCER AND RELATED MANUFACTURING PROCEDURE
KR102167474B1 (en) 2018-04-25 2020-10-19 주식회사 이엠텍 Hybrid actuator
TWI707586B (en) * 2018-08-14 2020-10-11 美律實業股份有限公司 Mems speaker
TWI684367B (en) * 2018-09-14 2020-02-01 美律實業股份有限公司 Speaker and microelectromechanical actuator thereof
CN110856085B (en) * 2018-11-30 2021-07-09 美律电子(深圳)有限公司 Loudspeaker structure
TWI716916B (en) * 2019-06-26 2021-01-21 美律實業股份有限公司 Speaker structure
TWI683460B (en) * 2018-11-30 2020-01-21 美律實業股份有限公司 Speaker structure
IT201900001017A1 (en) * 2019-01-23 2020-07-23 St Microelectronics Srl MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRIC ACTUATION AND RELATED MANUFACTURING PROCEDURE
CN110290449A (en) * 2019-05-09 2019-09-27 安徽奥飞声学科技有限公司 A kind of audio devices and electronic equipment
IT201900007317A1 (en) 2019-05-27 2020-11-27 St Microelectronics Srl MICROELECTROMECHANICAL PIEZOELECTRIC ACOUSTIC TRANSDUCER WITH IMPROVED CHARACTERISTICS AND RELATED MANUFACTURING PROCESS
CN110213705B (en) * 2019-05-30 2022-08-16 歌尔科技有限公司 MEMS speaker
DE102019125815A1 (en) * 2019-09-25 2021-03-25 USound GmbH Sound transducer unit for generating and / or detecting sound waves in the audible wavelength range and / or in the ultrasonic range
KR102375721B1 (en) * 2019-11-04 2022-03-17 (주)에스제이인스트루먼트 A Ultrasonic Transducer Assembly
WO2021134686A1 (en) * 2019-12-31 2021-07-08 瑞声声学科技(深圳)有限公司 Mems speaker
IT202000015073A1 (en) 2020-06-23 2021-12-23 St Microelectronics Srl MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
CN111918187B (en) * 2020-07-08 2021-10-29 瑞声科技（南京）有限公司 MEMS loudspeaker
CN111885467B (en) * 2020-07-09 2021-09-21 诺思(天津)微系统有限责任公司 MEMS piezoelectric speaker
US11595758B2 (en) 2020-07-09 2023-02-28 Apple Inc. MEMS speaker
CN111918188B (en) * 2020-07-10 2021-12-14 瑞声科技（南京）有限公司 MEMS loudspeaker and manufacturing process thereof
FR3120176B1 (en) 2021-02-23 2023-11-03 Commissariat Energie Atomique MEMS loudspeaker and process for microfabrication of such a loudspeaker
FR3122023B1 (en) 2021-04-15 2023-12-29 Commissariat Energie Atomique Micrometric speaker
CN113179472A (en) * 2021-04-28 2021-07-27 广州博良电子有限公司 Sound production method and structure for amplifying amplitude by utilizing hydraulic transmission
FR3143172A1 (en) 2022-12-12 2024-06-14 Commissariat A L' Energie Atomique Et Aux Energies Alternatives Acoustic device with variable resonance frequency
FR3143170A1 (en) 2022-12-12 2024-06-14 Commissariat A L' Energie Atomique Et Aux Energies Alternatives Electromechanical device with variable resonance frequency and associated acoustic device

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Also Published As

Publication number Publication date
CN106537938B (en) 2020-03-27
MY177874A (en) 2020-09-24
EP3143778B1 (en) 2021-06-16
CN106688245A (en) 2017-05-17
CA2948731A1 (en) 2015-11-19
KR20170007413A (en) 2017-01-18
EP3143777A1 (en) 2017-03-22
SG11201609519TA (en) 2016-12-29
DE102014106753B4 (en) 2022-08-11
EP3143778A1 (en) 2017-03-22
KR102307144B1 (en) 2021-09-30
HK1232365A1 (en) 2018-01-05
AU2015261458B2 (en) 2019-05-16
US9980051B2 (en) 2018-05-22
AU2015261458A1 (en) 2016-12-15
EP3143777B1 (en) 2021-01-06
WO2015173334A1 (en) 2015-11-19
CN106688245B (en) 2020-06-16
EP3823304A1 (en) 2021-05-19
US20170094418A1 (en) 2017-03-30
AU2015261459B2 (en) 2019-03-14
DE102014106753A1 (en) 2015-11-19
CN106537938A (en) 2017-03-22
SG10202001750SA (en) 2020-04-29
EP3823304B1 (en) 2024-04-03
US10034097B2 (en) 2018-07-24
SG10201810071TA (en) 2018-12-28
US20170085994A1 (en) 2017-03-23
AU2015261459A1 (en) 2016-12-15
SG10201810091WA (en) 2018-12-28
CA2948725A1 (en) 2015-11-19
WO2015173333A1 (en) 2015-11-19
KR20160149284A (en) 2016-12-27

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