SE7505869L - Anordning for samtidig drift av ett antal gasurladdningselektronkanoner. - Google Patents
Anordning for samtidig drift av ett antal gasurladdningselektronkanoner.Info
- Publication number
- SE7505869L SE7505869L SE7505869A SE7505869A SE7505869L SE 7505869 L SE7505869 L SE 7505869L SE 7505869 A SE7505869 A SE 7505869A SE 7505869 A SE7505869 A SE 7505869A SE 7505869 L SE7505869 L SE 7505869L
- Authority
- SE
- Sweden
- Prior art keywords
- guns
- gun
- cathode
- gas discharge
- electron beam
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 238000010849 ion bombardment Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7407058A NL7407058A (nl) | 1974-05-27 | 1974-05-27 | Inrichting voor het gelijktijdig bedrijven van een aantal gasontladingselektronenkanonnen. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| SE7505869L true SE7505869L (sv) | 1975-11-28 |
| SE398023B SE398023B (sv) | 1977-11-28 |
Family
ID=19821435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE7505869A SE398023B (sv) | 1974-05-27 | 1975-05-23 | Anordning for samtidig drift av ett antal gasurladdningselektronkanoner |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS514495A (sv) |
| AT (1) | AT331370B (sv) |
| CA (1) | CA1030588A (sv) |
| CH (1) | CH585964A5 (sv) |
| FR (1) | FR2273367B1 (sv) |
| GB (1) | GB1518153A (sv) |
| NL (1) | NL7407058A (sv) |
| SE (1) | SE398023B (sv) |
-
1974
- 1974-05-27 NL NL7407058A patent/NL7407058A/xx not_active Application Discontinuation
-
1975
- 1975-05-19 GB GB2117675A patent/GB1518153A/en not_active Expired
- 1975-05-20 CA CA227,384A patent/CA1030588A/en not_active Expired
- 1975-05-23 SE SE7505869A patent/SE398023B/sv not_active IP Right Cessation
- 1975-05-23 CH CH662975A patent/CH585964A5/xx not_active IP Right Cessation
- 1975-05-24 JP JP6150275A patent/JPS514495A/ja active Granted
- 1975-05-26 AT AT399175A patent/AT331370B/de not_active IP Right Cessation
- 1975-05-27 FR FR7516428A patent/FR2273367B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2273367A1 (sv) | 1975-12-26 |
| AT331370B (de) | 1976-08-25 |
| JPS55853B2 (sv) | 1980-01-10 |
| NL7407058A (nl) | 1975-12-01 |
| CA1030588A (en) | 1978-05-02 |
| SE398023B (sv) | 1977-11-28 |
| DE2521427B2 (de) | 1976-10-21 |
| DE2521427A1 (de) | 1975-12-11 |
| JPS514495A (ja) | 1976-01-14 |
| CH585964A5 (sv) | 1977-03-15 |
| GB1518153A (en) | 1978-07-19 |
| FR2273367B1 (sv) | 1979-03-30 |
| ATA399175A (de) | 1975-11-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NUG | Patent has lapsed |
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