AT331370B - Vorrichtung zum gleichzeitigen betreiben einer anzahl von gasentladungselektronenstrahlerzeugungssystemen - Google Patents
Vorrichtung zum gleichzeitigen betreiben einer anzahl von gasentladungselektronenstrahlerzeugungssystemenInfo
- Publication number
- AT331370B AT331370B AT399175A AT399175A AT331370B AT 331370 B AT331370 B AT 331370B AT 399175 A AT399175 A AT 399175A AT 399175 A AT399175 A AT 399175A AT 331370 B AT331370 B AT 331370B
- Authority
- AT
- Austria
- Prior art keywords
- operating
- electron beam
- gas discharge
- beam generating
- generating systems
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7407058A NL7407058A (nl) | 1974-05-27 | 1974-05-27 | Inrichting voor het gelijktijdig bedrijven van een aantal gasontladingselektronenkanonnen. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ATA399175A ATA399175A (de) | 1975-11-15 |
| AT331370B true AT331370B (de) | 1976-08-25 |
Family
ID=19821435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT399175A AT331370B (de) | 1974-05-27 | 1975-05-26 | Vorrichtung zum gleichzeitigen betreiben einer anzahl von gasentladungselektronenstrahlerzeugungssystemen |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS55853B2 (de) |
| AT (1) | AT331370B (de) |
| CA (1) | CA1030588A (de) |
| CH (1) | CH585964A5 (de) |
| FR (1) | FR2273367B1 (de) |
| GB (1) | GB1518153A (de) |
| NL (1) | NL7407058A (de) |
| SE (1) | SE398023B (de) |
-
1974
- 1974-05-27 NL NL7407058A patent/NL7407058A/xx not_active Application Discontinuation
-
1975
- 1975-05-19 GB GB2117675A patent/GB1518153A/en not_active Expired
- 1975-05-20 CA CA227,384A patent/CA1030588A/en not_active Expired
- 1975-05-23 CH CH662975A patent/CH585964A5/xx not_active IP Right Cessation
- 1975-05-23 SE SE7505869A patent/SE398023B/xx not_active IP Right Cessation
- 1975-05-24 JP JP6150275A patent/JPS55853B2/ja not_active Expired
- 1975-05-26 AT AT399175A patent/AT331370B/de not_active IP Right Cessation
- 1975-05-27 FR FR7516428A patent/FR2273367B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2521427B2 (de) | 1976-10-21 |
| SE398023B (sv) | 1977-11-28 |
| JPS55853B2 (de) | 1980-01-10 |
| ATA399175A (de) | 1975-11-15 |
| GB1518153A (en) | 1978-07-19 |
| FR2273367B1 (de) | 1979-03-30 |
| FR2273367A1 (de) | 1975-12-26 |
| CA1030588A (en) | 1978-05-02 |
| SE7505869L (sv) | 1975-11-28 |
| CH585964A5 (de) | 1977-03-15 |
| NL7407058A (nl) | 1975-12-01 |
| DE2521427A1 (de) | 1975-12-11 |
| JPS514495A (de) | 1976-01-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| IT1031989B (it) | Impianto di raffreddamento per turpina a gas | |
| IT1043584B (it) | Interruttore a raggio luminoso | |
| IT1042770B (it) | Generatore di ioni a dippia camera | |
| IT1074030B (it) | Disposizione di combistore per turbina a gas | |
| AT333320B (de) | Vorrichtung zum versproden von gegenstanden | |
| IT1021037B (it) | Generatore laser a gas | |
| FR2289285A1 (fr) | Chalumeau-coupeur a jet de plasma | |
| FR2275112A1 (fr) | Dispositif a faisceaux d'electrons relativistes | |
| AT331371B (de) | Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung | |
| AT331370B (de) | Vorrichtung zum gleichzeitigen betreiben einer anzahl von gasentladungselektronenstrahlerzeugungssystemen | |
| BR7502426A (pt) | Processo para a manufatura de tubeiras de dissociacao | |
| AT335579B (de) | Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung | |
| IT1049926B (it) | Apparecchiatura di controllo per un sistema di calcolo a programma memorizzato | |
| SE403199B (sv) | Cirkelgenererande anordning avsedd for en atergivningsanordning av rastertyp | |
| IT1038942B (it) | Pannello a gas perfezionato | |
| DK506975A (da) | Gaslaser | |
| IT1073653B (it) | Impianto di turbina a gas per l azionamento di un autoveicolo | |
| IT1039152B (it) | Maschera litografica a raggi x | |
| AT331372B (de) | Gasentladungselektronenstrahlerzeugungssystem | |
| IT1027649B (it) | Procedimento per la fabbricazione di pannelli a gas | |
| FR2274196A1 (fr) | Electrode a pistolet a plasma | |
| AT303825B (de) | Vorrichtung zum Erzeugen einer Anzahl sinusförmiger Schwingungen in einem Trägerfrequenz-Fernsprechsystem | |
| NL7402691A (nl) | Gasontladingslaser. | |
| IT1066944B (it) | Generatore laser a gas | |
| IT1034293B (it) | Trepano a percussione |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ELJ | Ceased due to non-payment of the annual fee | ||
| ELJ | Ceased due to non-payment of the annual fee |