CA1030588A - Device for the simultaneous operation of a number of gas discharge electron guns - Google Patents

Device for the simultaneous operation of a number of gas discharge electron guns

Info

Publication number
CA1030588A
CA1030588A CA227,384A CA227384A CA1030588A CA 1030588 A CA1030588 A CA 1030588A CA 227384 A CA227384 A CA 227384A CA 1030588 A CA1030588 A CA 1030588A
Authority
CA
Canada
Prior art keywords
gas discharge
simultaneous operation
electron guns
discharge electron
guns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA227,384A
Other languages
French (fr)
Inventor
Theodorus M. B. Schoemakers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA1030588A publication Critical patent/CA1030588A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
CA227,384A 1974-05-27 1975-05-20 Device for the simultaneous operation of a number of gas discharge electron guns Expired CA1030588A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407058A NL7407058A (en) 1974-05-27 1974-05-27 DEVICE FOR THE SIMULTANEOUS OPERATION OF A NUMBER OF GAS DISCHARGE ELECTRONIC GUNS.

Publications (1)

Publication Number Publication Date
CA1030588A true CA1030588A (en) 1978-05-02

Family

ID=19821435

Family Applications (1)

Application Number Title Priority Date Filing Date
CA227,384A Expired CA1030588A (en) 1974-05-27 1975-05-20 Device for the simultaneous operation of a number of gas discharge electron guns

Country Status (8)

Country Link
JP (1) JPS514495A (en)
AT (1) AT331370B (en)
CA (1) CA1030588A (en)
CH (1) CH585964A5 (en)
FR (1) FR2273367B1 (en)
GB (1) GB1518153A (en)
NL (1) NL7407058A (en)
SE (1) SE398023B (en)

Also Published As

Publication number Publication date
NL7407058A (en) 1975-12-01
ATA399175A (en) 1975-11-15
GB1518153A (en) 1978-07-19
DE2521427A1 (en) 1975-12-11
SE398023B (en) 1977-11-28
SE7505869L (en) 1975-11-28
DE2521427B2 (en) 1976-10-21
JPS55853B2 (en) 1980-01-10
CH585964A5 (en) 1977-03-15
FR2273367A1 (en) 1975-12-26
JPS514495A (en) 1976-01-14
AT331370B (en) 1976-08-25
FR2273367B1 (en) 1979-03-30

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