FR2273367B1 - - Google Patents

Info

Publication number
FR2273367B1
FR2273367B1 FR7516428A FR7516428A FR2273367B1 FR 2273367 B1 FR2273367 B1 FR 2273367B1 FR 7516428 A FR7516428 A FR 7516428A FR 7516428 A FR7516428 A FR 7516428A FR 2273367 B1 FR2273367 B1 FR 2273367B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7516428A
Other versions
FR2273367A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2273367A1 publication Critical patent/FR2273367A1/fr
Application granted granted Critical
Publication of FR2273367B1 publication Critical patent/FR2273367B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
FR7516428A 1974-05-27 1975-05-27 Expired FR2273367B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407058A NL7407058A (nl) 1974-05-27 1974-05-27 Inrichting voor het gelijktijdig bedrijven van een aantal gasontladingselektronenkanonnen.

Publications (2)

Publication Number Publication Date
FR2273367A1 FR2273367A1 (fr) 1975-12-26
FR2273367B1 true FR2273367B1 (fr) 1979-03-30

Family

ID=19821435

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7516428A Expired FR2273367B1 (fr) 1974-05-27 1975-05-27

Country Status (8)

Country Link
JP (1) JPS514495A (fr)
AT (1) AT331370B (fr)
CA (1) CA1030588A (fr)
CH (1) CH585964A5 (fr)
FR (1) FR2273367B1 (fr)
GB (1) GB1518153A (fr)
NL (1) NL7407058A (fr)
SE (1) SE398023B (fr)

Also Published As

Publication number Publication date
ATA399175A (de) 1975-11-15
DE2521427B2 (de) 1976-10-21
JPS55853B2 (fr) 1980-01-10
JPS514495A (ja) 1976-01-14
NL7407058A (nl) 1975-12-01
DE2521427A1 (de) 1975-12-11
CA1030588A (fr) 1978-05-02
CH585964A5 (fr) 1977-03-15
SE398023B (sv) 1977-11-28
AT331370B (de) 1976-08-25
SE7505869L (sv) 1975-11-28
GB1518153A (en) 1978-07-19
FR2273367A1 (fr) 1975-12-26

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Legal Events

Date Code Title Description
ST Notification of lapse