GB1518153A - Multiple glow-discharge-type electron gun apparatus - Google Patents

Multiple glow-discharge-type electron gun apparatus

Info

Publication number
GB1518153A
GB1518153A GB2117675A GB2117675A GB1518153A GB 1518153 A GB1518153 A GB 1518153A GB 2117675 A GB2117675 A GB 2117675A GB 2117675 A GB2117675 A GB 2117675A GB 1518153 A GB1518153 A GB 1518153A
Authority
GB
United Kingdom
Prior art keywords
guns
type electron
gun
cathode
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2117675A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1518153A publication Critical patent/GB1518153A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)
GB2117675A 1974-05-27 1975-05-19 Multiple glow-discharge-type electron gun apparatus Expired GB1518153A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407058A NL7407058A (nl) 1974-05-27 1974-05-27 Inrichting voor het gelijktijdig bedrijven van een aantal gasontladingselektronenkanonnen.

Publications (1)

Publication Number Publication Date
GB1518153A true GB1518153A (en) 1978-07-19

Family

ID=19821435

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2117675A Expired GB1518153A (en) 1974-05-27 1975-05-19 Multiple glow-discharge-type electron gun apparatus

Country Status (8)

Country Link
JP (1) JPS514495A (fr)
AT (1) AT331370B (fr)
CA (1) CA1030588A (fr)
CH (1) CH585964A5 (fr)
FR (1) FR2273367B1 (fr)
GB (1) GB1518153A (fr)
NL (1) NL7407058A (fr)
SE (1) SE398023B (fr)

Also Published As

Publication number Publication date
ATA399175A (de) 1975-11-15
FR2273367B1 (fr) 1979-03-30
DE2521427B2 (de) 1976-10-21
JPS55853B2 (fr) 1980-01-10
JPS514495A (ja) 1976-01-14
NL7407058A (nl) 1975-12-01
DE2521427A1 (de) 1975-12-11
CA1030588A (fr) 1978-05-02
CH585964A5 (fr) 1977-03-15
SE398023B (sv) 1977-11-28
AT331370B (de) 1976-08-25
SE7505869L (sv) 1975-11-28
FR2273367A1 (fr) 1975-12-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee