SE7505869L - DEVICE FOR THE CONTEMPORARY OPERATION OF A NUMBER OF GAS DISCHARGE ELECTRON GUNS. - Google Patents

DEVICE FOR THE CONTEMPORARY OPERATION OF A NUMBER OF GAS DISCHARGE ELECTRON GUNS.

Info

Publication number
SE7505869L
SE7505869L SE7505869A SE7505869A SE7505869L SE 7505869 L SE7505869 L SE 7505869L SE 7505869 A SE7505869 A SE 7505869A SE 7505869 A SE7505869 A SE 7505869A SE 7505869 L SE7505869 L SE 7505869L
Authority
SE
Sweden
Prior art keywords
guns
gun
cathode
gas discharge
electron beam
Prior art date
Application number
SE7505869A
Other languages
Unknown language ( )
Swedish (sv)
Other versions
SE398023B (en
Inventor
T M B Schoenmakers
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE7505869L publication Critical patent/SE7505869L/en
Publication of SE398023B publication Critical patent/SE398023B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1518153 Electron beam apparatus PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 19 May 1975 [27 May 1974] 21176/75 Heading H1D Electron beam apparatus comprises an envelope and two glow discharge type electron guns wherein electrons are emitted due to positive ion bombardment of the cathode; the guns having identical, spaced electrodes but the spaces have different volumes. The use of different guns permits large variations of current depending on D, to be obtained when the same potential is applied to each gun. Small current variations can be compensated for by adjusting the gas flow through valves 4 and hence the pressure about each gun. The cathode may be hollow or rotating. Several operations may be carried out simultaneously with this apparatus on several components.
SE7505869A 1974-05-27 1975-05-23 DEVICE FOR SIMULTANEOUS OPERATION OF A NUMBER OF GAS CHARGE ELECTRON GUNS SE398023B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7407058A NL7407058A (en) 1974-05-27 1974-05-27 DEVICE FOR THE SIMULTANEOUS OPERATION OF A NUMBER OF GAS DISCHARGE ELECTRONIC GUNS.

Publications (2)

Publication Number Publication Date
SE7505869L true SE7505869L (en) 1975-11-28
SE398023B SE398023B (en) 1977-11-28

Family

ID=19821435

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7505869A SE398023B (en) 1974-05-27 1975-05-23 DEVICE FOR SIMULTANEOUS OPERATION OF A NUMBER OF GAS CHARGE ELECTRON GUNS

Country Status (8)

Country Link
JP (1) JPS514495A (en)
AT (1) AT331370B (en)
CA (1) CA1030588A (en)
CH (1) CH585964A5 (en)
FR (1) FR2273367B1 (en)
GB (1) GB1518153A (en)
NL (1) NL7407058A (en)
SE (1) SE398023B (en)

Also Published As

Publication number Publication date
ATA399175A (en) 1975-11-15
FR2273367B1 (en) 1979-03-30
DE2521427B2 (en) 1976-10-21
JPS55853B2 (en) 1980-01-10
JPS514495A (en) 1976-01-14
NL7407058A (en) 1975-12-01
DE2521427A1 (en) 1975-12-11
CA1030588A (en) 1978-05-02
CH585964A5 (en) 1977-03-15
SE398023B (en) 1977-11-28
AT331370B (en) 1976-08-25
GB1518153A (en) 1978-07-19
FR2273367A1 (en) 1975-12-26

Similar Documents

Publication Publication Date Title
GB1420061A (en) Sputtering method and apparatus
GB1464490A (en) Beam-plasma type ion source
GB1220630A (en) Improvements in electron guns
SE7505869L (en) DEVICE FOR THE CONTEMPORARY OPERATION OF A NUMBER OF GAS DISCHARGE ELECTRON GUNS.
GB1502876A (en) Cathode ray tube
ES398203A1 (en) High voltage processing of cathode ray tubes
US2403745A (en) Apparatus and method for making tubes
GB1500095A (en) Ion source using a hollow cathode discharge arrangement and a particle accelerator comprising such a source
GB1516389A (en) Field emission gun
GB1480363A (en) Travelling-wave tube with an electron gun
GB1417297A (en) Electron deflector switches and oscillators
GB1225880A (en)
GB1053215A (en)
GB1330448A (en) Television camera tube
GB1517952A (en) Glow-discharge electron-gun apparatus
GB913963A (en) Improvements in or relating to symbol displaying electron discharge tubes
GB943485A (en) Apparatus and method for generating brillouin electron flow
GB1457105A (en) Electron guns
GB1294425A (en) Storage tube apparatus
GB723504A (en) Improvements in or relating to electron discharge devices
GB1008362A (en) Improvements in or relating to low pressure mercury vapour discharge tubes
GB1400668A (en) Gridded electron gun apparatus employing a concave cathode emitter
GB1259966A (en) Method of assembling electron gun structures for cathode ray tubes
GB1461415A (en) Electron guns
SU428534A1 (en) ELECTRON-SEMICONDUCTOR NON-SYMMETRIC TRIGGER

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 7505869-3

Effective date: 19911209

Format of ref document f/p: F